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    • 12. 发明授权
    • Method of forming thin film structure with tensile and compressed polysilicon layers
    • 用拉伸和压缩多晶硅层形成薄膜结构的方法
    • US07569413B2
    • 2009-08-04
    • US11703444
    • 2007-02-07
    • Takashi KasaiShuichi Wakabayashi
    • Takashi KasaiShuichi Wakabayashi
    • H01L21/00H01L21/425
    • B81B3/0072B81C2201/0167C23C16/24C23C16/56
    • A method for forming a thin film structure, which has small tensile stress due to controlled mechanical stress, and is made to be conductive, is provided. A lower film including polysilicon thin film is formed on a substrate such as Si substrate, then an impurity such as P is doped into the lower film and thermally diffused, thereby the lower film is made conductive. Then, an upper film is deposited on the lower film, the upper film including a polysilicon thin film that is simply deposited and not made to be conductive. The upper film has a tensile stress in an approximately the same level as compressive stress of the lower film, and a thin film structure as a whole, the structure including the lower film and the upper film, is adjusted to have small tensile stress.
    • 提供一种形成薄膜结构的方法,该薄膜结构由于受到机械应力的控制而具有较小的拉伸应力并且被制成导电性。 在诸如Si衬底的衬底上形成包括多晶硅薄膜的下部膜,然后将诸如P的杂质掺杂到下部膜中并进行热扩散,从而使下部膜导电。 然后,上膜被沉积在下膜上,上膜包括简单沉积并不导电的多晶硅薄膜。 上部膜具有与下部膜的压缩应力大致相同的拉伸应力,整体上由薄膜结构体构成,包括下部膜和上部膜的结构被调整为具有较小的拉伸应力。
    • 16. 发明授权
    • Image forming apparatus
    • 图像形成装置
    • US08643926B2
    • 2014-02-04
    • US13105199
    • 2011-05-11
    • Shuichi Wakabayashi
    • Shuichi Wakabayashi
    • G02B26/08
    • G02B26/101G02B26/105
    • There is provided an image forming apparatus that is configured so as to continuously display a plurality of images in a drawing area by scanning light for the drawing area formed on a display surface. The image forming apparatus includes a light emitting unit that emits the light, an optical scanning unit that two-dimensionally scans the light emitted from the light emitting unit for the drawing area, and a driving control unit that controls driving of the optical scanning unit such that the number of the images displayed in the drawing area in a unit of time is changed by changing a range in which the light is scanned on the drawing area at the time of displaying the images based on a shape and a size of each of the images, which are displayed in the drawing area, on the drawing area.
    • 提供一种图像形成装置,其被配置为通过扫描形成在显示表面上的绘图区域的光来连续地在绘图区域中显示多个图像。 图像形成装置包括发光部的发光部,对从绘图区域发光部发出的光进行二维扫描的光扫描部,以及控制光扫描部的驱动的驱动控制部, 通过在显示图像时基于每个图像的形状和大小来改变在绘图区域上扫描光的范围来改变在时间单位中在绘图区域中显示的图像的数量 绘图区域中显示的图像。