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11. 发明授权

US08420981B2 Apparatus for thermal processing with micro-environment 失效
标题翻译：微环境热处理设备
公开(公告)号：US08420981B2
公开(公告)日：2013-04-16
申请号：US12590852
申请日：2009-11-13
申请人： Daniel Goodman , Arthur Keigler , David G. Guarnaccia , Matthew R. Jeffers
发明人： Daniel Goodman , Arthur Keigler , David G. Guarnaccia , Matthew R. Jeffers
IPC分类号： H01L21/477 , F27D11/00
CPC分类号： H01L21/6719 , H01L21/67109
摘要： A substrate thermal processing system. The system has at least one substrate holding module having a housing configured for holding an isolated environment therein. A substrate heater is located in the housing and has a substrate heating surface. A substrate cooler is located in the housing and having a substrate cooling surface. A gas feed opening into the housing and feeding inert or reducing gas into the housing when the substrate is heated by the heating surface. A gas restrictor is within the housing restricting the fed gas between the substrate heating surface and a surrounding atmospheric region substantially surrounding the substrate heating surface in the housing and forming an aperture through which the fed gas communicates with the atmospheric region.
摘要翻译：基板热处理系统。该系统具有至少一个基板保持模块，该模块具有用于在其中保持隔离环境的壳体。衬底加热器位于壳体中并且具有衬底加热表面。衬底冷却器位于壳体中并且具有衬底冷却表面。当基板被加热表面加热时，气体进入开口并进入惰性气体或还原气体进入壳体。气体限制器在壳体内部，限制基板加热表面和基本上围绕壳体中的基板加热表面的周围大气区域之间的进料气体，并形成进料气体与大气区域连通的孔。

12. 发明申请

US20130011222A1 SUBSTRATE LOADER AND UNLOADER 有权
标题翻译：基座装载机和卸载器
公开(公告)号：US20130011222A1
公开(公告)日：2013-01-10
申请号：US13279432
申请日：2011-10-24
申请人： Daniel Goodman , Arthur Keigler , Freeman Fisher
发明人： Daniel Goodman , Arthur Keigler , Freeman Fisher
IPC分类号： B65G49/00
CPC分类号： H01L21/67092 , H01L21/6838 , H01L21/68764 , H01L21/68785
摘要： A substrate loader adapted to load and unload a substrate to and from a moveable holder having a seal. The substrate loader has a base and a holder support frame coupled to the base, the holder support frame adapted to repeatably position the moveable holder relative to a predetermined datum. The substrate transport is coupled to the base and having a substrate chuck and adapted to move and transport the substrate relative to the holder. The substrate transport is deterministically positioned relative to the predetermined datum and is adapted to move the substrate from a first position, with the substrate captured by the moveable holder, to a second position with the substrate disengaged from the holder and the seal, the substrate transport movement of the substrate from the first to the second position effecting disengagement from the holder and the seal substantially without contacting the substrate.
摘要翻译：一种衬底装载机，其适于将基板装载到具有密封件的可移动保持器上和从其移出。衬底装载机具有底座和联接到基座的保持器支撑框架，保持器支撑框架适于相对于预定的基准重复地定位可移动保持器。衬底输送器耦合到基座并且具有衬底卡盘并且适于相对于保持器移动和运输衬底。衬底传送相对于预定的原点确定地定位，并且适于将衬底从第一位置移动，其中衬底由可移动保持器捕获到第二位置，其中衬底与保持器和密封件脱离，衬底传送基板从第一位置到第二位置的运动实质上不与基板接触，从而保持器和密封件脱离接触。

13. 发明申请

US20070150819A1 Graphical User Interface 审中-公开
标题翻译：图形用户界面
公开(公告)号：US20070150819A1
公开(公告)日：2007-06-28
申请号：US11301182
申请日：2005-12-09
申请人： Daniel Goodman , Michael Toler , Leonid Mindlin , Philip Sullivan
发明人： Daniel Goodman , Michael Toler , Leonid Mindlin , Philip Sullivan
IPC分类号： G06F17/00
CPC分类号： G06F16/95
摘要： A system for monitoring a sensor includes a GUI (Graphical User Interface) such as a WebPage embedded in the sensor. The GUI is configured to display information relating to the sensor from a user computer connectable to the sensor via an Ethernet connection and having an internet web browser for accessing the WebPage of the sensor. A computer-readable medium is embedded within the sensor and has stored therein computer-usable instructions for a processor. These instructions, when executed by the processor, cause the processor to generate the GUI.
摘要翻译：用于监测传感器的系统包括GUI（图形用户界面），诸如嵌入在传感器中的WebPage。 GUI被配置为通过以太网连接从可连接到传感器的用户计算机显示与传感器有关的信息，并且具有用于访问传感器的WebPage的因特网web浏览器。计算机可读介质被嵌入在传感器内并且存储有用于处理器的计算机可用指令。当处理器执行时，这些指令使处理器生成GUI。

14. 发明申请

US20070139122A1 Radio Frequency Power Delivery System 有权
标题翻译：射频供电系统
公开(公告)号：US20070139122A1
公开(公告)日：2007-06-21
申请号：US11554979
申请日：2006-10-31
申请人： Siddharth Nagarkatti , Michael Kishinevsky , Ali Shajii , Timothy Kalvaitis , William McKinney , Daniel Goodman , William Holber , John Smith
发明人： Siddharth Nagarkatti , Michael Kishinevsky , Ali Shajii , Timothy Kalvaitis , William McKinney , Daniel Goodman , William Holber , John Smith
IPC分类号： H03F3/191
CPC分类号： H03F1/56 , H03F3/191 , H03F3/20
摘要： A system and method are provided for delivering power to a dynamic load. The system includes a power supply providing DC power having a substantially constant power open loop response, a power amplifier for converting the DC power to RF power, a sensor for measuring voltage, current and phase angle between voltage and current vectors associated with the RF power, an electrically controllable impedance matching system to modify the impedance of the power amplifier to at least a substantially matched impedance of a dynamic load, and a controller for controlling the electrically controllable impedance matching system. The system further includes a sensor calibration measuring module for determining power delivered by the power amplifier, an electronic matching system calibration module for determining power delivered to a dynamic load, and a power dissipation module for calculating power dissipated in the electrically controllable impedance matching system.
摘要翻译：提供了一种将功率传递给动态负载的系统和方法。该系统包括提供具有基本上恒定的功率开环响应的DC电力的电源，用于将DC功率转换为RF功率的功率放大器，用于测量与RF功率相关联的电压和电流矢量之间的电压，电流和相位角的传感器，电可控阻抗匹配系统，用于将功率放大器的阻抗修改为动态负载的至少基本匹配的阻抗;以及用于控制电可控阻抗匹配系统的控制器。该系统还包括用于确定由功率放大器输出的功率的传感器校准测量模块，用于确定输送到动态负载的功率的电子匹配系统校准模块，以及用于计算在电气可控阻抗匹配系统中消耗的功率的功率耗散模块。

15. 发明申请

US20110240481A1 SEED LAYER DEPOSITION IN MICROSCALE FEATURES 有权
标题翻译：微粒特征中的种子层沉积
公开(公告)号：US20110240481A1
公开(公告)日：2011-10-06
申请号：US12755198
申请日：2010-04-06
申请人： Arthur Keigler , Johannes Chiu , Zhenqiu Liu , Daniel Goodman
发明人： Arthur Keigler , Johannes Chiu , Zhenqiu Liu , Daniel Goodman
IPC分类号： C25D5/02 , C25D17/00
CPC分类号： C25D7/123 , C25D17/001 , H01L21/2885 , H01L21/76873 , H01L21/76898 , H01L2221/1089
摘要： A method and system for coating the interior surfaces of microscale hole features fabricated into the substantially planar surface of a work piece. The method comprises providing a work piece with a barrier metal coating that is substantially continuous and uniform both along the planar surface of the work piece and the inner surfaces of the microscale hole features wherein said barrier metal coating is applied by a substantially surface reaction limited process. The workpiece is provided with a coating, on the planar surface of the work piece, of a thick metal layer anchored to the barrier metal coat and disposed to provide substantially uniform electrical conduction capability to the microscale features located throughout and across the workpiece. An electrical contact path is provided to the electrically conductive coating at the perimeter of the work piece. The workpiece is immersed in a chemical bath, causing said chemical bath to fully contact the interior surfaces of the microscale hole features, said chemical bath containing metal ions suitable for electrodeposition. An electric potential is applied at the perimeter of the work piece to cause electrodeposition of metal ions onto all surfaces of the work piece including the interior surfaces of the microscale hole features to a predetermined finish coating in one step.
摘要翻译：一种用于涂覆微孔孔特征的内表面的方法和系统，其制造成工件的基本平坦的表面。该方法包括提供具有阻挡金属涂层的工件，所述阻挡金属涂层沿着工件的平坦表面和微孔特征的内表面基本上连续且均匀，其中所述阻挡金属涂层通过基本上表面反应限制的工艺。工件在工件的平坦表面上设置有锚固到阻挡金属涂层的厚金属层并且设置成为位于整个和跨过工件的微尺度特征提供基本均匀的导电能力的涂层。在工件周边处的导电涂层上提供电接触路径。将工件浸入化学浴中，使所述化学浴与微孔特征的内表面完全接触，所述化学浴含有适合于电沉积的金属离子。在工件的周边施加电势，使金属离子在工件的所有表面上电沉积，包括微孔孔特征的内表面到一个步骤中的预定的涂层。

16. 发明申请

US20100231296A1 Radio Frequency Power Delivery System 有权
标题翻译：射频供电系统
公开(公告)号：US20100231296A1
公开(公告)日：2010-09-16
申请号：US12786763
申请日：2010-05-25
申请人： Siddharth P. Nagarkatti , Michael Kishinevsky , Ali Shajii , Timothy E. Kalvaitis , William S. McKinney, JR. , Daniel Goodman , William M. Holber , John A. Smith
发明人： Siddharth P. Nagarkatti , Michael Kishinevsky , Ali Shajii , Timothy E. Kalvaitis , William S. McKinney, JR. , Daniel Goodman , William M. Holber , John A. Smith
IPC分类号： H03F1/08
CPC分类号： H03F1/56 , H03F3/191 , H03F3/20
摘要： A system and method are provided for delivering power to a dynamic load. The system includes a power supply providing DC power having a substantially constant power open loop response, a power amplifier for converting the DC power to RF power, a sensor for measuring voltage, current and phase angle between voltage and current vectors associated with the RF power, an electrically controllable impedance matching system to modify the impedance of the power amplifier to at least a substantially matched impedance of a dynamic load, and a controller for controlling the electrically controllable impedance matching system. The system further includes a sensor calibration measuring module for determining power delivered by the power amplifier, an electronic matching system calibration module for determining power delivered to a dynamic load, and a power dissipation module for calculating power dissipated in the electrically controllable impedance matching system.
摘要翻译：提供了一种将功率传递给动态负载的系统和方法。该系统包括提供具有基本上恒定的功率开环响应的DC电力的电源，用于将DC功率转换为RF功率的功率放大器，用于测量与RF功率相关联的电压和电流矢量之间的电压，电流和相位角的传感器，电可控阻抗匹配系统，用于将功率放大器的阻抗修改为动态负载的至少基本匹配的阻抗;以及用于控制电可控阻抗匹配系统的控制器。该系统还包括用于确定由功率放大器输出的功率的传感器校准测量模块，用于确定输送到动态负载的功率的电子匹配系统校准模块，以及用于计算在电气可控阻抗匹配系统中消耗的功率的功率耗散模块。

17. 发明申请

US20060089115A1 DUAL BAND SUPERHETERODYNE RECEIVER 有权
标题翻译：双带超级接收机
公开(公告)号：US20060089115A1
公开(公告)日：2006-04-27
申请号：US10817416
申请日：2004-04-02
申请人： Daniel Goodman
发明人： Daniel Goodman
IPC分类号： H04B1/18 , H04B15/00 , H04B1/26 , H04B1/28
CPC分类号： H04B1/28 , H04B1/005 , H04B1/406
摘要： A MMIC based superheterodyne receiver for converting at RF energy in an upper and a lower frequency band includes at least one attenuator for the RF energy input, a mixer for mixing the lower band input with a LO1 signal, another mixer for mixing the upper band input with the LO1 signal signal, a switch to direct the LO1 signal to the first mixer or to the second mixer, and a third mixer for mixing a LO2 signal with the first stage mixer output to produce a signal at the output frequency. Passband filters at the outputs of the mixers can reject interfering mixer-generated frequencies. Input frequency range can span 0.1 to 18 GHz with a 160 MHz or 1 GHz output. A modular receiver can have two or more converter modules for each LO module. The receiver can receive antenna input directly, without pre-mixing filtering or attenuating.
摘要翻译：用于在上和下频带中以RF能量转换的基于MMIC的超外差接收器包括用于RF能量输入的至少一个衰减器，用于将低频带输入与LO1信号混合的混频器，用于混合上频带输入利用LO1信号信号，将LO1信号引导到第一混频器或第二混频器的开关，以及用于将LO2信号与第一级混频器输出混频以产生输出频率的信号的第三混频器。混频器输出端的通带滤波器可以抑制干扰混频器产生的频率。输入频率范围可以跨越0.1至18 GHz，具有160 MHz或1 GHz输出。模块化接收器可以为每个LO模块提供两个或更多个转换器模块。接收机可以直接接收天线输入，无需预混合滤波或衰减。

18. 发明授权

US09147588B2 Substrate processing pallet with cooling 有权
标题翻译：基板加工托盘带冷却
公开(公告)号：US09147588B2
公开(公告)日：2015-09-29
申请号：US11716538
申请日：2007-03-09
申请人： Daniel Goodman , Arthur Keigler , Stephen Golovato , David Felsenthal
发明人： Daniel Goodman , Arthur Keigler , Stephen Golovato , David Felsenthal
IPC分类号： H01L21/00 , B05C11/00 , H01L21/67 , H01L21/677 , H01L21/683
CPC分类号： H01L21/67103 , H01L21/67109 , H01L21/67703 , H01L21/6831
摘要： A substrate processing pallet can cool a substrate. A substrate processing pallet can include a base member; an interface pad attachable to the base member, the interface pad having substantially the same coefficient of thermal expansion as the base member and adapted to facilitate cooling of the substrate; and a surface of the base member having features for aligning a substrate on the interface pad. A substrate processing pallet can also include a base member; an interface pad attachable to the base member; an electrostatic chuck for gripping the substrate during processing; an energy storage system for storing energy to sustain the electrostatic chuck at sufficient charge to sustain grip the substrate during processing; and a conduit for transporting gas to a backside of the substrate to facilitate cooling of the substrate.
摘要翻译：基板处理托盘可以冷却基板。基板处理托盘可以包括基部构件; 接口垫，其可附接到所述基底构件，所述界面垫具有与所述基底构件基本上相同的热膨胀系数并且适于促进所述衬底的冷却; 并且所述基底构件的表面具有用于使所述界面垫上的衬底对准的特征。基板处理托盘还可以包括基部构件; 可附接到基座构件的接口垫; 用于在加工期间夹持基板的静电卡盘; 能量存储系统，用于存储能量以在足够的电荷下维持静电卡盘，以在加工期间保持夹持基板; 以及用于将气体输送到衬底的背面以便于冷却衬底的导管。

19. 发明授权

US08613474B2 Substrate loader and unloader having a Bernoulli support 有权
标题翻译：具有伯努利支持的基板装载机和卸载机
公开(公告)号：US08613474B2
公开(公告)日：2013-12-24
申请号：US13279405
申请日：2011-10-24
申请人： Daniel Goodman , Arthur Keigler , Freeman Fisher , David G. Guarnaccia
发明人： Daniel Goodman , Arthur Keigler , Freeman Fisher , David G. Guarnaccia
IPC分类号： A47J45/00
CPC分类号： H01L21/67092 , H01L21/6838 , H01L21/68764 , H01L21/68785
摘要： A substrate chuck includes a frame forming a support adapted to support an adhering surface thereon, and a Bernoulli chuck surface coupled to the frame and adapted to support the substrate. The Bernoulli chuck surface is axially moveable relative to the support between first and second positions. In the first position, the substrate is coupled to the adhering surface, and the substrate is separated from the adhering surface with movement of the Bernoulli chuck from the first position to the second position, without contact between the substrate and the Bernoulli chuck surface.
摘要翻译：衬底卡盘包括形成支撑其上的粘合表面的支撑件的框架，以及联接到框架并适于支撑衬底的伯努利卡盘表面。伯努利卡盘表面相对于第一和第二位置之间的支撑件可轴向移动。在第一位置，衬底被耦合到粘附表面，并且当伯努利卡盘从第一位置移动到第二位置时，衬底与粘附表面分离，而不与衬底和伯努利卡盘表面接触。

20. 发明申请

US20130009415A1 SUBSTRATE LOADER AND UNLOADER HAVING AN AIR BEARING SUPPORT 有权
标题翻译：底座装载机和卸载机具有空气轴承支持
公开(公告)号：US20130009415A1
公开(公告)日：2013-01-10
申请号：US13279414
申请日：2011-10-24
申请人： Daniel Goodman , Arthur Keigler , Freeman Fisher
发明人： Daniel Goodman , Arthur Keigler , Freeman Fisher
IPC分类号： B25J15/06
CPC分类号： H01L21/67092 , H01L21/6838 , H01L21/68764 , H01L21/68785
摘要： A substrate separation chuck adapted to separate a substrate from an adhering surface. The substrate separation chuck has a support adapted to support the adhering surface. An air bearing surface is adapted to support the substrate, the air bearing surface axially moveable relative to the support. The air bearing surface has a first position adjacent the substrate with the substrate coupled to the adhering surface. The air bearing surface is moveable from the first position to a second position separating the substrate from the adhering surface without contact between the substrate and the air bearing surface.
摘要翻译：衬底分离卡盘，其适于将衬底与粘附表面分离。衬底分离卡盘具有适于支撑粘附表面的支撑件。空气轴承表面适于支撑基底，空气轴承表面相对于支撑件可轴向移动。空气轴承表面具有与衬底相邻的第一位置，衬底与粘附表面相连。空气轴承表面可以从第一位置移动到第二位置，从而将基板与粘合表面分离，而不会在基板和空气轴承表面之间接触。

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