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    • 16. 发明申请
    • POWER SEMICONDUCTOR DEVICE
    • 功率半导体器件
    • US20150187869A1
    • 2015-07-02
    • US14272009
    • 2014-05-07
    • SAMSUNG ELECTRO-MECHANICS CO., LTD.
    • Jae Hoon PARKKyu Hyun MoJae Kyu SungKee Ju UmIn Hyuk Song
    • H01L29/06H01L29/10H01L29/739
    • H01L29/063H01L29/0634H01L29/0878H01L29/1095H01L29/7397H01L29/74H01L29/7802H01L29/7813
    • A power semiconductor device may include: a first conductivity-type first semiconductor region; a resurf region disposed in the first semiconductor region and including first conductivity-type second semiconductor regions and second conductivity-type third semiconductor regions alternately disposed in a width direction; a first conductivity-type first cover region disposed in the first semiconductor region, disposed to be contiguous with an upper surface of the resurf region, and having an impurity concentration higher than that of the first semiconductor region; a second conductivity-type fourth semiconductor region disposed above the first semiconductor region; a first conductivity-type fifth semiconductor region disposed on an inner side of an upper portion of the fourth semiconductor region; and a trench gate disposed to penetrate from the fifth semiconductor region to a portion of an upper portion of the first semiconductor region and including a gate insulating layer and a conductive material.
    • 功率半导体器件可以包括:第一导电类型的第一半导体区域; 设置在所述第一半导体区域中并且包括在宽度方向上交替布置的第一导电类型的第二半导体区域和第二导电类型的第三半导体区域的再生区域; 设置在所述第一半导体区域中的第一导电类型的第一覆盖区域,被设置为与所述复原区域的上表面邻接,并且具有高于所述第一半导体区域的杂质浓度的杂质浓度; 设置在所述第一半导体区域上方的第二导电型第四半导体区域; 设置在第四半导体区域的上部的内侧的第一导电型第五半导体区域; 以及沟槽栅极,设置成从第五半导体区域穿透到第一半导体区域的上部的一部分,并且包括栅极绝缘层和导电材料。
    • 20. 发明申请
    • POWER SEMICONDUCTOR DEVICE
    • 功率半导体器件
    • US20140159105A1
    • 2014-06-12
    • US13831780
    • 2013-03-15
    • SAMSUNG ELECTRO-MECHANICS CO., LTD.
    • Kee Ju UmIn Hyuk SongChang Su JangJae Hoon ParkDong Soo Seo
    • H01L29/739
    • H01L29/7397H01L29/1095H01L29/41741
    • Disclosed herein is a power semiconductor device, including: a drift layer formed on the first surface of the semiconductor substrate, a well layer of a first conductive type, formed on the drift layer, a trench formed to reach the drift layer through the well layer, a first electrode formed in the trench, a second conductive type of second electrode region formed on the well layer, including a first region contacting the trench in a perpendicular direction and a second region spaced apart from the trench in a parallel direction and being perpendicular to the first region, a first conductive type of second electrode region formed to contact a side surface of the second conductive type of second electrode region, and a second electrode formed on the well layer and electrically connected to the second conductive type of second electrode region and the first conductive type of second electrode region.
    • 本文公开了一种功率半导体器件,包括:形成在半导体衬底的第一表面上的漂移层,形成在漂移层上的第一导电类型的阱层,形成为通过阱层到达漂移层的沟槽 ,形成在沟槽中的第一电极,形成在阱层上的第二导电类型的第二电极区域,包括在垂直方向上接触沟槽的第一区域和在平行方向上与沟槽间隔开的第二区域,并且垂直 形成为与第二导电类型的第二电极区域的侧表面接触的第一导电类型的第二电极区域和形成在阱层上并与第二导电类型的第二电极区域电连接的第二电极 和第一导电类型的第二电极区域。