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    • 12. 发明授权
    • Methods for fabricating FinFET structures having different channel lengths
    • 制造具有不同沟道长度的FinFET结构的方法
    • US07829466B2
    • 2010-11-09
    • US12365300
    • 2009-02-04
    • Frank S. JohnsonRichard T. Schultz
    • Frank S. JohnsonRichard T. Schultz
    • H01L21/311
    • H01L21/823431H01L29/66795H01L29/66818
    • Methods for fabricating FinFET structures having gate structures of different gate widths are provided. The methods include the formation of sidewall spacers of different thicknesses to define gate structures of the FinFET structures with different gate widths. The width of a sidewall spacer is defined by the height of the structure about which the sidewall spacer is formed, the thickness of the sidewall spacer material layer from which the spacer is formed, and the etch parameters used to etch the sidewall spacer material layer. By forming structures of varying height, forming the sidewall spacer material layer of varying thickness, or a combination of these, sidewall spacers of varying width can be fabricated and subsequently used as an etch mask so that gate structures of varying widths can be formed simultaneously.
    • 提供了制造具有不同栅极宽度的栅极结构的FinFET结构的方法。 这些方法包括形成不同厚度的侧壁间隔物,以限定具有不同栅极宽度的FinFET结构的栅极结构。 侧壁间隔物的宽度由形成侧壁间隔物的结构的高度,形成间隔物的侧壁间隔材料层的厚度和用于蚀刻侧壁间隔物材料层的蚀刻参数限定。 通过形成不同高度的结构,形成不同厚度的侧壁间隔物材料层或这些的组合,可以制造不同宽度的侧壁间隔物,并随后用作蚀刻掩模,从而可以同时形成不同宽度的栅极结构。
    • 13. 发明申请
    • METHODS FOR FABRICATING FINFET STRUCTURES HAVING DIFFERENT CHANNEL LENGTHS
    • 用于制作具有不同通道长度的FINFET结构的方法
    • US20100197096A1
    • 2010-08-05
    • US12365300
    • 2009-02-04
    • Frank S. JOHNSONRichard T. Schultz
    • Frank S. JOHNSONRichard T. Schultz
    • H01L21/336
    • H01L21/823431H01L29/66795H01L29/66818
    • Methods for fabricating FinFET structures having gate structures of different gate widths are provided. The methods include the formation of sidewall spacers of different thicknesses to define gate structures of the FinFET structures with different gate widths. The width of a sidewall spacer is defined by the height of the structure about which the sidewall spacer is formed, the thickness of the sidewall spacer material layer from which the spacer is formed, and the etch parameters used to etch the sidewall spacer material layer. By forming structures of varying height, forming the sidewall spacer material layer of varying thickness, or a combination of these, sidewall spacers of varying width can be fabricated and subsequently used as an etch mask so that gate structures of varying widths can be formed simultaneously.
    • 提供了制造具有不同栅极宽度的栅极结构的FinFET结构的方法。 这些方法包括形成不同厚度的侧壁间隔物,以限定具有不同栅极宽度的FinFET结构的栅极结构。 侧壁间隔物的宽度由形成侧壁间隔物的结构的高度,形成间隔物的侧壁间隔材料层的厚度和用于蚀刻侧壁间隔物材料层的蚀刻参数限定。 通过形成不同高度的结构,形成不同厚度的侧壁间隔物材料层或这些的组合,可以制造不同宽度的侧壁间隔物,并随后用作蚀刻掩模,从而可以同时形成不同宽度的栅极结构。
    • 14. 发明授权
    • Method of automatically generating schematic and waveform diagrams for relevant logic cells of a circuit using input signal predictors and transition times
    • 使用输入信号预测器和转换时间自动生成电路相关逻辑单元的原理图和波形图的方法
    • US06625770B1
    • 2003-09-23
    • US09597433
    • 2000-06-20
    • Richard T. Schultz
    • Richard T. Schultz
    • G01R3128
    • G01R31/318357G01R31/31835G06F11/261G06F17/5022
    • Relevant logic cells and waveforms of a circuit are automatically identified, traced and displayed by using conventional simulation, schematic viewing and waveform viewing tools. The input and output waveforms to and from each logic cell and a transition and a transition time point of each waveform are derived. The output waveform and a selected transition time point identify a predictive input waveform and its transition time, which cause the output signal transition at the selected transition time point. The predictive input signal is the output signal of a preceding, predictive logic cell, thereby identifying the preceding predictive logic cell. Repetitions of this procedure are performed with each new identified predictive logic cell to automatically derive a series or cone of logic cells which cause the desired output signal at a selected output signal transition time.
    • 通过使用传统的仿真,原理图和波形查看工具自动识别,跟踪和显示电路的相关逻辑单元和波形。 导出到每个逻辑单元的输入和输出波形以及每个波形的转换和转换时间点。 输出波形和所选择的转换时间点识别预测输入波形及其转换时间,这导致所选转换时间点的输出信号转换。 预测输入信号是前一预测逻辑单元的输出信号,由此识别先前的预测逻辑单元。 对每个新识别的预测逻辑单元执行该过程的重复,以自动导出在所选择的输出信号转换时间引起所需输出信号的逻辑单元的串或锥。
    • 15. 发明授权
    • Load sensing, slew rate shaping, output signal pad cell driver circuit and method
    • 负载感测,压摆率整形,输出信号垫单元驱动电路和方法
    • US06388486B1
    • 2002-05-14
    • US09596568
    • 2000-06-19
    • Richard T. Schultz
    • Richard T. Schultz
    • H03K512
    • H03K17/167H03K5/135H03K17/164
    • The slew rate of a digital logic output signal delivered from an output pad of an integrated circuit is controlled relative to a load connected to the output pad. At least two pluralities of trigger signals at sequentially spaced time intervals are generated, and the time intervals between the first and second trigger signals or the temporal occurrence of the first and second trigger signals in relation to the load connected to the output pad is selected to change the slew rate of the output signal. The timing of the plurality of trigger signals is established in relation to an input signal to which the driver circuit responds and in relation to the change in the output signal with time as influenced by the load connected to the output pad.
    • 从集成电路的输出焊盘传送的数字逻辑输出信号的转换速率相对于连接到输出焊盘的负载进行控制。 以顺序间隔的时间间隔产生至少两个多个触发信号,并且选择第一和第二触发信号之间的时间间隔或相对于连接到输出焊盘的负载的第一和第二触发信号的时间出现被选择为 改变输出信号的转换速率。 多个触发信号的定时相对于驱动器电路响应的输入信号和与连接到输出焊盘的负载的影响时相对于输出信号随时间的变化而建立。
    • 16. 发明授权
    • Radially-increasing core power bus grid architecture
    • 径向增加的核心电力总线电网架构
    • US6111310A
    • 2000-08-29
    • US163683
    • 1998-09-30
    • Richard T. Schultz
    • Richard T. Schultz
    • H01L23/528H01L23/52H01L23/34H01L23/48
    • H01L23/5286H01L2924/0002
    • A power bus grid architecture for an integrated circuit including a plurality of main bars assembled along the perimeter of the grid and a plurality of bus bars assembled within the perimeter of the grid. The bus bars are each composed of a plurality of segments with each segment having a substantially constant width. Each segment on certain bus bars has a different width from the next adjacent segment. The width of a particular segment is determined by the distance of the segment from the nearest main power bar. Because the current flow through the segments nearest to the main power bar tends to be greater than the current flow through the segments further from the main power bar, the segments nearest to the main power bar can be made much wider than the segments furthest from the main power bar without significant deleterious effects to the circuit from voltage drops or electromigration.
    • 一种用于集成电路的电力总线电网架构,包括沿着电网的周边组装的多个主棒,以及组装在电网的周边内的多个母线。 汇流条各自由多个段构成,每个段具有基本恒定的宽度。 某些母线上的每个片段与下一个相邻片段的宽度不同。 特定片段的宽度由片段与最近的主电源条的距离确定。 因为流过最靠近主功率条的段的电流往往大于远离主电源条的电流,所以最靠近主电源条的电流可以比最远离主电源条最远的部分宽得多 主电源电压从电压降或电迁移不会对电路产生显着的有害影响。
    • 19. 发明授权
    • Methods for fabricating FinFET structures having different channel lengths
    • 制造具有不同沟道长度的FinFET结构的方法
    • US07960287B2
    • 2011-06-14
    • US12891365
    • 2010-09-27
    • Frank Scott JohnsonRichard T. Schultz
    • Frank Scott JohnsonRichard T. Schultz
    • H01L21/311
    • H01L21/823431H01L29/66795H01L29/66818
    • Methods for fabricating FinFET structures having gate structures of different gate widths are provided. The methods include the formation of sidewall spacers of different thicknesses to define gate structures of the FinFET structures with different gate widths. The width of a sidewall spacer is defined by the height of the structure about which the sidewall spacer is formed, the thickness of the sidewall spacer material layer from which the spacer is formed, and the etch parameters used to etch the sidewall spacer material layer. By forming structures of varying height, forming the sidewall spacer material layer of varying thickness, or a combination of these, sidewall spacers of varying width can be fabricated and subsequently used as an etch mask so that gate structures of varying widths can be formed simultaneously.
    • 提供了制造具有不同栅极宽度的栅极结构的FinFET结构的方法。 这些方法包括形成不同厚度的侧壁间隔物,以限定具有不同栅极宽度的FinFET结构的栅极结构。 侧壁间隔物的宽度由形成侧壁间隔物的结构的高度,形成间隔物的侧壁间隔材料层的厚度和用于蚀刻侧壁间隔物材料层的蚀刻参数限定。 通过形成不同高度的结构,形成不同厚度的侧壁间隔物材料层或这些的组合,可以制造不同宽度的侧壁间隔物,并随后用作蚀刻掩模,从而可以同时形成不同宽度的栅极结构。