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    • 16. 发明申请
    • Soi component comprising margins for separation
    • Soi组件包括用于分离的边距
    • US20060154448A1
    • 2006-07-13
    • US10527183
    • 2003-05-06
    • Oliver StollFranz LaermerGilbert MoerschGottfried FlikKlaus Kuettner
    • Oliver StollFranz LaermerGilbert MoerschGottfried FlikKlaus Kuettner
    • H01L21/78
    • G01M17/0072Y10T29/49007Y10T29/49117Y10T29/49121Y10T29/4913Y10T29/49156
    • A method for producing a component is provided, in particular a deformation sensor, having a sensor element which includes at least one region that is sensitive with respect to expansion or compression, as well as electrical structures which are in connection therewith. To this end, a sacrificial layer is produced on or within a substrate and an activatable layer on top of the sacrificial layer, the sensitive region and at least a portion of the electrical structures being positioned on top or within an activatable layer, and a circumferential trench is produced around the region of the sensor element to be produced and having the sensitive region and the portion of the electrical structures, the trench being interrupted by at least one connecting point, which connects the region of the sensor element to the portion of the activatable layer lying outside the circumferential trench. This is followed by a removal of the sacrificial layer underneath the region of the sensor element, a fixation of the region of the sensor element with the aid of a holding device, rupturing of the connecting points and a transfer of the sensor element, fixated by the holding device, and connecting a carrier to the component as well as joining with a carrier to the component.
    • 提供了一种用于制造部件的方法,特别是变形传感器,其具有传感器元件,该传感器元件包括至少一个相对于膨胀或压缩敏感的区域以及与之相关的电气结构。 为此,牺牲层在基材上或内部产生,并且在牺牲层顶部上的可活化层,敏感区域和电结构的至少一部分位于顶部或可激活层内,并且周向 沟槽在待生产的传感器元件的区域周围产生并且具有敏感区域和电气结构的部分,沟槽被至少一个连接点中断,该至少一个连接点将传感器元件的区域连接到 位于圆周沟槽外侧的可激活层。 之后是去除传感器元件区域下方的牺牲层,借助于保持装置固定传感器元件的区域,使连接点断裂和传感器元件的传送,固定在传感器元件的固定位置 保持装置,并且将载体连接到部件,以及将载体连接到部件上。
    • 19. 发明授权
    • SOI component comprising margins for separation
    • SOI部件包括用于分离的边缘
    • US07398588B2
    • 2008-07-15
    • US10527183
    • 2003-05-06
    • Oliver StollFranz LaermerGilbert MoerschGottfried FlikKlaus Kuettner
    • Oliver StollFranz LaermerGilbert MoerschGottfried FlikKlaus Kuettner
    • H01R43/00H05K3/30H05K3/02G01R3/00
    • G01M17/0072Y10T29/49007Y10T29/49117Y10T29/49121Y10T29/4913Y10T29/49156
    • A method for producing a component is provided, in particular a deformation sensor, having a sensor element which includes at least one region that is sensitive with respect to expansion or compression, as well as electrical structures which are in connection therewith. To this end, a sacrificial layer is produced on or within a substrate and an activatable layer on top of the sacrificial layer, the sensitive region and at least a portion of the electrical structures being positioned on top or within an activatable layer, and a circumferential trench is produced around the region of the sensor element to be produced and having the sensitive region and the portion of the electrical structures, the trench being interrupted by at least one connecting point, which connects the region of the sensor element to the portion of the activatable layer lying outside the circumferential trench. This is followed by a removal of the sacrificial layer underneath the region of the sensor element, a fixation of the region of the sensor element with the aid of a holding device, rupturing of the connecting points and a transfer of the sensor element, fixated by the holding device, and connecting a carrier to the component as well as joining with a carrier to the component.
    • 提供了一种用于制造部件的方法,特别是变形传感器,其具有传感器元件,该传感器元件包括至少一个相对于膨胀或压缩敏感的区域以及与之相关的电气结构。 为此,牺牲层在基材上或内部产生,并且在牺牲层顶部上的可活化层,敏感区域和电结构的至少一部分位于顶部或可激活层内,并且周向 沟槽在待生产的传感器元件的区域周围产生并且具有敏感区域和电气结构的部分,沟槽被至少一个连接点中断,该至少一个连接点将传感器元件的区域连接到 位于圆周沟槽外侧的可激活层。 之后是去除传感器元件区域下方的牺牲层,借助于保持装置固定传感器元件的区域,使连接点断裂和传感器元件的传送,固定在传感器元件的固定位置 保持装置,并且将载体连接到部件,以及将载体连接到部件上。