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    • 11. 发明授权
    • Method of forming a photoresist layer
    • 形成光致抗蚀剂层的方法
    • US09028915B2
    • 2015-05-12
    • US13602465
    • 2012-09-04
    • Chun-Wei ChangChih-Chien WangWang-Pen MoHung-Chang Hsieh
    • Chun-Wei ChangChih-Chien WangWang-Pen MoHung-Chang Hsieh
    • B05D3/12H01L21/67G03F7/16
    • H01L21/02282B05D1/005G03F7/091G03F7/162H01L21/0271H01L21/0276H01L21/6715
    • A method for forming a photoresist layer on a semiconductor device is disclosed. An exemplary includes providing a wafer. The method further includes spinning the wafer during a first cycle at a first speed, while a pre-wet material is dispensed over the wafer and spinning the wafer during the first cycle at a second speed, while the pre-wet material continues to be dispensed over the wafer. The method further includes spinning the wafer during a second cycle at the first speed, while the pre-wet material continues to be dispensed over the wafer and spinning the wafer during the second cycle at the second speed, while the pre-wet material continues to be dispensed over the wafer. The method further includes spinning the wafer at a third speed, while a photoresist material is dispensed over the wafer including the pre-wet material.
    • 公开了一种在半导体器件上形成光致抗蚀剂层的方法。 示例性的包括提供晶片。 该方法还包括在第一次循环期间以第一速度旋转晶片,同时将预湿材料分配在晶片上并以第二速度在第一周期期间旋转晶片,同时预湿材料继续被分配 在晶圆上。 该方法还包括在第一速度的第二循环期间旋转晶片,同时预湿材料继续分配在晶片上,并且在第二次循环期间以第二速度旋转晶片,同时预湿材料继续 分配在晶片上。 该方法还包括以三速旋转晶片,同时将光致抗蚀剂材料分配在包括预湿材料的晶片上。
    • 13. 发明申请
    • HINGE MECHANISM AND FOLDABLE ELECTRONIC DEVICE
    • 铰链机械和可折叠电子设备
    • US20130139355A1
    • 2013-06-06
    • US13587926
    • 2012-08-17
    • Jui-Yuan LeeHui-Lian ChangMing-Wang LinChih-Chiang WangHsin-Hsiang ShaoChun-Wei Chang
    • Jui-Yuan LeeHui-Lian ChangMing-Wang LinChih-Chiang WangHsin-Hsiang ShaoChun-Wei Chang
    • E05D7/00E05D3/06
    • H04M1/022G06F1/1681Y10T16/541
    • A hinge mechanism suitable for a foldable electronic device has a first body, a second body and a hinging-body. The hinge mechanism includes a first cradle, a second cradle, a pair of pivoting-shafts, a pair of position-limiting elements, a set of gears and a positioning element. The positioning-element is fixed to the hinging-body and structurally independent from the position-limiting elements, pivoted to the pivoting-shafts so as to be detachably assembled with the position-limiting elements. The first body rotates relatively to the hinging-body through the first cradle rotates the pivoting-shaft fixed to the first cradle relatively to the positioning element so as to rotate the set of gears, make the second cradle rotate the pivoting-shaft fixed to the second cradle relatively to the positioning-element and bring the second body for rotation relatively to the hinging-body. Additionally, a foldable electronic device is also provided.
    • 适用于可折叠电子装置的铰链机构具有第一主体,第二主体和铰链主体。 铰链机构包括第一支架,第二支架,一对转动轴,一对位置限制元件,一组齿轮和定位元件。 定位元件固定在铰接体上,结构上独立于位置限制元件,枢转到枢转轴,以便与位置限制元件可拆卸地组装。 第一主体通过第一托架相对于铰接体旋转,相对于定位元件旋转固定到第一支架的枢转轴,以使该组齿轮旋转,使得第二托架将枢转轴旋转固定到 相对于定位元件的第二支架,并使第二主体相对于铰接体旋转。 此外,还提供了可折叠的电子设备。
    • 19. 发明授权
    • Imaging and measuring apparatus for surface and internal interface of object
    • 物体表面和内部界面的成像和测量装置
    • US08379220B2
    • 2013-02-19
    • US12778363
    • 2010-05-12
    • I-Jen HsuChun-Wei Chang
    • I-Jen HsuChun-Wei Chang
    • G01B11/02
    • G01B11/2441
    • The present invention provides an imaging and measuring apparatus for the surface and the internal interface of an object, which comprises a broadband wave source, a wave-splitting structure, a wave-delaying device, a reflecting component, and a sensor. The broadband wave source transmits a broadband incident wave. The wave-splitting structure splits the broadband incident wave into a first incident beam, a second incident beam, and a third incident beam. The first incident beam is illuminated on an object under test, which reflects a measuring beam. The wave-delaying device receives the second incident beam and reflects a reference beam. The reflecting component receives the third incident beam and reflects a calibration beam. The sensor receives a first interference signal of the measuring beam and the reference beam, and a second interference signal of the reference beam and the calibration beam. By means of the broadband incident wave, the morphologies of the surface and the internal interface of the object can be imaged and measured in a non-destructive way. In addition, by means of the calibration beam, the accuracy of imaging and measuring the surface and the internal interface of the object can be improved.
    • 本发明提供一种用于物体的表面和内部界面的成像和测量装置,其包括宽带波源,波分解结构,波延迟装置,反射部件和传感器。 宽带波源传输宽带入射波。 波分解结构将宽带入射波分为第一入射光束,第二入射光束和第三入射光束。 第一个入射光束被照射在被测物体上,反射一个测量光束。 波延迟装置接收第二入射光束并反射参考光束。 反射部件接收第三入射光并反射校准光束。 传感器接收测量光束和参考光束的第一干涉信号,以及参考光束和校准光束的第二干涉信号。 通过宽带入射波,可以以非破坏性的方式对物体的表面和内部界面的形态进行成像和测量。 此外,通过校准光束,可以提高成像和测量物体的表面和内部界面的精度。