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    • 11. 发明授权
    • Test probe for semiconductor devices, method of manufacturing of the same, and member for removing foreign matter
    • 用于半导体器件的测试探针,其制造方法和用于除去异物的部件
    • US06888344B2
    • 2005-05-03
    • US10285625
    • 2002-11-01
    • Shigeki MaekawaMegumi TakemotoKazunobu MikiMutsumi KanoTakahiro NagataYoshihiro Kashiba
    • Shigeki MaekawaMegumi TakemotoKazunobu MikiMutsumi KanoTakahiro NagataYoshihiro Kashiba
    • G01R1/067G01R3/00G01R1/04
    • G01R1/06738G01R1/06755G01R3/00
    • A test probe for semiconductor devices, the test probe having a tip portion which is pressed against a test pad of a semiconductor device to establish electrical contact between the tip portion and the pad for testing the operation of the semiconductor device, wherein the probe is formed to have a tip shape with an angle of not less than 15 degrees formed at the surface of the pad between a tangential line with respect to a tip face of the probe and the pad surface when the probe is pressed against the pad, the tip shape of the probe having a spherical surface meeting the relationship of: θ=cos−1(1−t/R)≧15° where the radius of curvature of the spherical surface is R, the thickness of the pad is t, and the angle formed at the pad surface between the tangential line with respect to the probe tip face and the pad surface when the probe is pressed against the pad is θ, the probe have a flat portion at an end of the tip portion. Accordingly, a contact surface can be established between the probe trip and the pad with a sufficient degree of electrical continuity, and when the the probe level is adjusted in the probing, a time required for positioning the probe prior to the start of measurement is cut down and variation in measurement are reduced.
    • 一种用于半导体器件的测试探针,所述测试探针具有被压靠在半导体器件的测试焊盘上的尖端部分,以建立所述尖端部分和所述焊盘之间的电接触,以测试所述半导体器件的操作,其中形成所述探针 在探针被压靠在衬垫上时,具有相对于探针的尖端面的切线与衬垫表面之间形成有不小于15度的角度的尖端形状, 具有满足以下关系的球面的探针:<?in-line-formula description =“In-line Formulas”end =“lead”?> theta = cos(1-t) / R)> = 15°<?in-line-formula description =“在线公式”end =“tail”?>其中球面的曲率半径为R,垫的厚度为t, 当探针被按压时,形成在相对于探针尖端面的切线与焊盘表面之间的焊盘表面处的角度 衬垫是θ,探针在尖端部分的端部具有平坦部分。 因此,可以在探针跳闸和焊盘之间建立足够的电连续性的接触表面,并且当在探测中调整探针电平时,切割在测量开始之前定位探针所需的时间被切断 降低了测量的变化。
    • 13. 发明申请
    • Socket for testing a semiconductor device and a connecting sheet used for the same
    • 用于测试半导体器件的插座和用于其的连接片
    • US20050145842A1
    • 2005-07-07
    • US11057468
    • 2005-02-15
    • Shigeki MaekawaYoshihiro Kashiba
    • Shigeki MaekawaYoshihiro Kashiba
    • G01R31/26G01R1/04G01R31/02H01L23/58
    • G01R1/0483
    • Probes 1 for testing and outer connecting terminals 14a are electrically connected to a-test socket for semiconductor devices. In use of a connecting sheet, fabricated by an elastically deformative insulating member and electrodes 202, flexibility is given, and good electrical contacts are obtainable. Further, because the connecting sheet 2 is exchangeable, contacting capability is recovered by exchange when solder debris is adhered and deposited to increase contact resistances. Accordingly, even though there is scattering of the heights of the outer connecting terminals, good electrical contact with the probes is obtainable, and even though the solder debris of the outer connecting terminals is adhered and deposited as a result of repeated usage, tests can be continuously conducted, wherein the test socket for semiconductor devices has good maintenance capability.
    • 用于测试的探针1和外部连接端子14a电连接到用于半导体器件的测试插座。 在使用通过弹性变形绝缘构件和电极202制造的连接片材的情况下,给出柔性,并且可以获得良好的电接触。 此外,由于连接片2是可交换的,所以当焊料残渣被附着和沉积以增加接触电阻时,通过交换来回收接触能力。 因此,即使存在外部连接端子的高度的散射,也可以获得与探针的良好的电接触,并且即使由于重复使用而使外部连接端子的焊料残渣粘附和沉积,也可以是 连续进行,其中半导体器件测试插座具有良好的维护能力。
    • 15. 发明授权
    • Socket for testing a semiconductor device and a connecting sheet used for the same
    • 用于测试半导体器件的插座和用于其的连接片
    • US06989681B2
    • 2006-01-24
    • US10659281
    • 2003-09-11
    • Shigeki MaekawaYoshihiro Kashiba
    • Shigeki MaekawaYoshihiro Kashiba
    • G01R31/02
    • G01R1/0483
    • Probes 1 for testing and outer connecting terminals 14a are electrically connected to a test socket for semiconductor devices. In use of a connecting sheet, fabricated by an elastically deformative insulating member and electrodes 202, flexibility is given, and good electrical contacts are obtainable. Further, because the connecting sheet 2 is exchangeable, contacting capability is recovered by exchange when solder debris is adhered and deposited to increase contact resistances. Accordingly, even though there is scattering of the heights of the outer connecting terminals, good electrical contact with the probes is obtainable, and even though the solder debris of the outer connecting terminals is adhered and deposited as a result of repeated usage, tests can be continuously conducted, wherein the test socket for semiconductor devices has good maintenance capability.
    • 用于测试的探针1和外部连接端子14a被电连接到用于半导体器件的测试插座。 在使用通过弹性变形绝缘构件和电极202制造的连接片材的情况下,给出柔性,并且可以获得良好的电接触。 此外,由于连接片2是可交换的,所以当焊料残渣被附着和沉积以增加接触电阻时,通过交换来回收接触能力。 因此,即使存在外部连接端子的高度的散射,也可以获得与探针的良好的电接触,并且即使由于重复使用而使外部连接端子的焊料残渣粘附和沉积,也可以是 连续进行,其中半导体器件测试插座具有良好的维护能力。