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11. 发明授权

US6128122A Micromachined mirror with stretchable restoring force member 有权
标题翻译：具有可拉伸恢复力构件的微加工镜
公开(公告)号：US6128122A
公开(公告)日：2000-10-03
申请号：US398259
申请日：1999-09-17
申请人： Joseph D. Drake , John H. Jerman , John D. Grade
发明人： Joseph D. Drake , John H. Jerman , John D. Grade
IPC分类号： G02B6/35 , G02B7/182 , G02B26/08 , G11B7/085 , G11B7/12 , G11B7/135 , G11B11/105 , H02N1/00
CPC分类号： G02B26/0833 , G02B26/0816 , G02B26/0841 , G02B26/085 , G02B7/1821 , G11B11/1058 , G11B7/08564 , G11B7/122 , G11B7/1362 , G11B7/1372 , G11B7/1384 , H02N1/006 , H02N1/008 , G02B6/3518 , G02B6/357 , G02B6/3584 , G11B11/10532 , G11B11/10543 , G11B11/10563 , G11B7/08576
摘要： A mirror assembly of micron dimensions for use in deflecting beam of light. The mirror assembly includes a planar base and a planar mirror spaced apart from the planar base and disposed generally parallel to the planar base. The planar mirror has first and second end portions and a longitudinal axis extending between the first and second end portions. First and second torsional members extend along the longitudinal axis and are connected to the respective first and second end portions for permitting the mirror to rock between first and second positions about the longitudinal axis relative to the planar base. The first and second torsional members are secured to the planar base. At least a portion of the mirror is made from a conductive material. First and second spaced-apart electrodes are carried by the planar base for driving the mirror between the first and second positions. A tether member extends transversely of the longitudinal axis and is secured to the first torsional member and to the planar base. The tether member regulates the rocking of the mirror.
摘要翻译：用于偏转光束的微米尺寸的镜子组件。镜组件包括平面底座和与平面基座间隔开并平行于平面基座设置的平面镜。平面镜具有第一和第二端部以及在第一和第二端部之间延伸的纵向轴线。第一和第二扭转构件沿着纵向轴线延伸并且连接到相应的第一和第二端部，以允许反射镜相对于平面基部围绕纵向轴线在第一和第二位置之间摇摆。第一和第二扭转构件固定到平面基座。反射镜的至少一部分由导电材料制成。第一和第二间隔开的电极由平面基座承载，用于在第一和第二位置之间驱动反射镜。系绳构件横向于纵向轴线延伸并且固定到第一扭转构件和平面基座。系绳构件调节镜子的摇摆。

12. 发明授权

US06664707B2 Miniature device with translatable member 失效
公开(公告)号：US06664707B2
公开(公告)日：2003-12-16
申请号：US10100253
申请日：2002-03-14
申请人： John H. Jerman , John D. Grade
发明人： John H. Jerman , John D. Grade
IPC分类号： H02N200
CPC分类号： H02N1/008 , B81B3/0051 , B81B2201/033 , B81B2201/037 , B81B2201/047 , B81B2203/051 , G11B7/0925
摘要： A miniature device comprising a substrate and primary and secondary movable members overlying the substrate. First and second suspension members couple the secondary movable member to the substrate. Third and fourth suspension members couple the primary movable member to the secondary movable member. A lever assembly is provided and has a pivot and a lever coupled to and pivotable about the pivot. The lever has a first extremity coupled to the primary movable member and an opposite second extremity. The secondary movable member is coupled to the lever between the first extremity and the pivot.

13. 发明授权

US06594057B1 Micromachined device with stretchable restoring force member 失效
标题翻译：具有伸缩恢复力构件的微加工装置
公开(公告)号：US06594057B1
公开(公告)日：2003-07-15
申请号：US09587675
申请日：2000-06-05
申请人： Joseph D. Drake , John H. Jerman , John D. Grade
发明人： Joseph D. Drake , John H. Jerman , John D. Grade
IPC分类号： G02B2608
CPC分类号： G02B26/0833 , G02B6/3518 , G02B6/357 , G02B6/3584 , G02B7/1821 , G02B26/0816 , G02B26/0841 , G02B26/085 , G11B7/08564 , G11B7/08576 , G11B7/122 , G11B7/1362 , G11B7/1372 , G11B7/1384 , G11B11/10532 , G11B11/10543 , G11B11/10563 , G11B11/1058 , H02N1/006 , H02N1/008
摘要： A micromachined device of micron dimensions comprising a base and a movable member spaced apart from the base. The movable member has first and second end portions and an axis extending between the first and second end portions. First and second torsional members extend along the axis and are connected to the respective first and second end portions for permitting the movable member to rock between first and second positions about the axis relative to the base. The first and second torsional members are secured to the base. At least a portion of the movable member is of a conductive material. First and second spaced-apart electrodes are carried by the base for driving the movable member between the first and second positions. A tether member extends transversely of the axis and is secured to the first torsional member and to the base whereby the tether member regulates the rocking of the movable member.
摘要翻译：一种微米尺寸的微加工装置，包括基座和与基座间隔开的可动构件。可动构件具有第一和第二端部以及在第一和第二端部之间延伸的轴线。第一和第二扭转构件沿着轴线延伸并且连接到相应的第一和第二端部部分，以允许可动构件相对于基座围绕轴线在第一和第二位置之间摇摆。第一和第二扭转构件固定到基座。可移动部件的至少一部分是导电材料。第一和第二间隔开的电极由基座承载，用于在第一和第二位置之间驱动可动件。系绳构件横向于轴线延伸并且被固定到第一扭转构件和基部，由此系绳构件调节可移动构件的摆动。

14. 发明授权

US06469415B2 Balanced microdevice and rotary electrostatic microactuator use therewith 有权
标题翻译：平衡微型装置和旋转式静电微型致动器
公开(公告)号：US06469415B2
公开(公告)日：2002-10-22
申请号：US09727794
申请日：2000-11-29
申请人： John H. Jerman , John D. Grade
发明人： John H. Jerman , John D. Grade
IPC分类号： H02N100
CPC分类号： H02N1/008
摘要： A balanced microdevice that includes a substrate and at least one comb drive assembly having first and second comb drive members. The first comb drive member is mounted on the substrate and the second comb drive member overlies the substrate. At least one spring member is provided that has a first end portion coupled to the substrate and a second end portion coupled to the second comb drive member. The first comb drive member has a plurality of spaced-apart first comb drive fingers and the second comb drive member has a plurality of spaced-apart second comb drive fingers. The second comb drive member is movable between a first position in which the first and second comb drive fingers are not substantially fully interdigitated and a second position in which the first and second comb drive fingers are substantially fully interdigitated. A counterbalance is carried by the substrate and coupled to the second comb drive member for inhibiting undesirable movement of the second comb drive member in response to externally applied accelerations to the microdevice.
摘要翻译：一种平衡微型装置，其包括基板和至少一个具有第一和第二梳状驱动构件的梳状驱动组件。第一梳状驱动构件安装在基底上，第二梳状驱动构件覆盖在基底上。提供至少一个弹簧构件，其具有联接到基底的第一端部和联接到第二梳状驱动构件的第二端部。第一梳状驱动构件具有多个间隔开的第一梳状驱动指状物，并且第二梳状驱动构件具有多个间隔开的第二梳状驱动指状物。第二梳状驱动构件可在其中第一和第二梳状驱动指状件基本上不完全相互交叉的第一位置和第一和第二梳状驱动指状件基本上完全相互交叉的第二位置之间移动。平衡物由衬底承载并且耦合到第二梳状驱动构件，用于防止第二梳状驱动构件响应于外部施加到微型装置的加速度的不期望的运动。

15. 发明授权

US06759734B2 Miniature device with increased insulative spacing and method for making same 有权
标题翻译：具有增加的绝缘间距的微型器件及其制造方法
公开(公告)号：US06759734B2
公开(公告)日：2004-07-06
申请号：US10100371
申请日：2002-03-14
申请人： John H. Jerman , John D. Grade
发明人： John H. Jerman , John D. Grade
IPC分类号： H01L2302
CPC分类号： B81B3/0086 , B81B2203/0118 , B81B2203/0315 , B81C2201/0178
摘要： The present invention provides a miniature device that comprises a grounded layer, an insulative layer overlying the grounded layer and a conductive layer overlying the insulative layer wherein the insulative spacing between the conductive and grounded layers is increased so as to inhibit electrical shorting between the conductive layer and grounded layers. A method of making miniature devices is also provided.
摘要翻译：本发明提供一种微型器件，其包括接地层，覆盖接地层的绝缘层和覆盖绝缘层的导电层，其中导电层和接地层之间的绝缘间距增加，以便抑制导电层之间的电短路和接地层。还提供了制造微型装置的方法。

16. 发明授权

US06657360B2 Micromechanical device 失效
标题翻译：微机械装置
公开(公告)号：US06657360B2
公开(公告)日：2003-12-02
申请号：US09911548
申请日：2001-07-24
申请人： John H. Jerman , John D. Grade
发明人： John H. Jerman , John D. Grade
IPC分类号： H02N100
CPC分类号： G02B6/3512 , G02B6/3548 , G02B6/3556 , G02B6/357 , G02B6/3584 , G11B7/08564 , G11B11/10563 , H02N1/008
摘要： A rotary electrostatic microactuator that includes a substantially planar substrate and a rotatable member overlying the substrate for rotation about an axis of rotation extending perpendicular to the planar substrate. First and second spaced-apart springs and a plurality of comb drive assemblies are included. Each of the comb drive assemblies has a first comb drive member mounted on the substrate and a second comb drive member. Each of the first and second comb drive members are provided with arcuate comb drive fingers. Each of the first and second springs has a first end portion secured to the substrate and a second end portion secured to at least one of the second comb drive members for suspending the second comb drive members and the rotatable member over the substrate. The second comb drive members are movable in a direction of travel about the axis of rotation between a first position in which the comb drive fingers of the first and second comb drive members are not substantially fully interdigitated and a second position in which the comb drive fingers of the first and second comb drive members are substantially fully interdigitated.
摘要翻译：一种旋转静电微致动器，其包括基本上平面的基板和覆盖所述基板的可旋转构件，用于围绕垂直于所述平面基板延伸的旋转轴线旋转。包括第一和第二间隔开的弹簧和多个梳子驱动组件。每个梳状驱动组件具有安装在基底上的第一梳状驱动构件和第二梳状驱动构件。第一和第二梳状驱动构件中的每一个设置有弓形梳状驱动指状物。第一和第二弹簧中的每一个具有固定到基板的第一端部和固定到至少一个第二梳状驱动构件的第二端部，用于将第二梳状驱动构件和可旋转构件悬挂在基板上。第二梳状驱动构件可以在第一位置和第二梳状驱动构件的梳状驱动构件基本上完全相互交叉的第一位置和第二位置之间沿着旋转轴线行进的方向移动，在第二位置，梳状驱动指的第一和第二梳状驱动构件基本上完全相互交错。

17. 发明授权

US06625101B1 Apparatus for finely adjusting optical components 有权
标题翻译：用于精细调节光学部件的装置
公开(公告)号：US06625101B1
公开(公告)日：2003-09-23
申请号：US09343611
申请日：1999-06-30
申请人： John H. Jerman , John D. Grade , Albert L. Tervalon
发明人： John H. Jerman , John D. Grade , Albert L. Tervalon
IPC分类号： G11B700
CPC分类号： G11B7/122 , G11B7/22 , G11B11/1058
摘要： An apparatus for finely adjusting an optical component is described. The apparatus may include an optic component, a substrate, and an adjuster. The adjuster may include a platform coupled to the optic component, and a linkage of notched springs coupled to both the platform and the substrate. The linkage of notched springs provides for motion of the platform relative to the substrate along primarily one axis. The apparatus may be used in a data storage system to adjust the position of the optic component in order to focus light propagated through the optic component.
摘要翻译：描述了用于精细调节光学部件的装置。该装置可以包括光学部件，基板和调节器。调节器可以包括耦合到光学部件的平台以及耦合到平台和基板两者的凹口弹簧的连接。缺口弹簧的连接提供平台相对于衬底沿主要一个轴线的运动。该装置可以用在数据存储系统中以调节光学部件的位置，以便聚焦通过光学部件传播的光。

18. 发明授权

US06473553B1 Apparatus for holding and engaging micro-machined objects and method for making same 有权
标题翻译：用于保持和接合微加工物体的装置及其制造方法
公开(公告)号：US06473553B1
公开(公告)日：2002-10-29
申请号：US09505341
申请日：2000-02-16
申请人： John H. Jerman , John D. Grade
发明人： John H. Jerman , John D. Grade
IPC分类号： G02B600
CPC分类号： G11B7/122 , G02B6/3656 , G02B6/3692 , G02B6/3893 , G02B6/42 , G02B6/4219 , G11B7/22 , G11B11/1058
摘要： An apparatus is provided for holding micron-sized objects, such as optical components, along with a method for making such an apparatus. The apparatus includes a mounting block having openings, such as cavities and recesses, for holding the micron-sized objects therein. The mounting block further includes one or more resilient members having a base mounted on the mounting block. The resilient members further include an engaging surface configured to engage a micro-machined object within a cavity or recess of the mounting block. When the object is engaged, the resilient member applies pressure to the object to secure it against a surface of the mounting block or against another resilient member. The object is held within the opening of the mounting block and can be moved within the opening to allow proper placement and subsequent adjustment of the object.
摘要翻译：提供了用于保持诸如光学部件的微米尺寸物体的装置以及用于制造这种装置的方法。该装置包括具有用于将微米尺寸的物体保持在其中的开口的诸如空腔和凹槽的安装块。安装块还包括具有安装在安装块上的基座的一个或多个弹性构件。弹性构件还包括接合表面，其被构造成与安装块的空腔或凹部内的微加工物体接合。当物体接合时，弹性构件对物体施加压力以将其固定在安装块的表面上或者抵靠另一弹性构件。物体被保持在安装块的开口内并且可以在开口内移动以允许物体的适当放置和随后的调节。

19. 发明授权

US06384510B1 Electrostatic microactuator with offset and/or inclined comb drive fingers 有权
标题翻译：具有偏移和/或倾斜梳齿驱动手指的静电微致动器
公开(公告)号：US06384510B1
公开(公告)日：2002-05-07
申请号：US09547698
申请日：2000-04-12
申请人： John D. Grade , John H. Jerman
发明人： John D. Grade , John H. Jerman
IPC分类号： H02N100
CPC分类号： G02B6/357 , G02B6/3514 , G02B6/3548 , G02B6/3584 , G11B7/08564 , G11B11/10563 , H02N1/008
摘要： An electrostatic microactuator comprising a substrate and at least one comb drive assembly having a first comb member mounted on the substrate and a second comb member overlying the substrate. The first comb member has a plurality of first comb fingers. The second comb member has a plurality of second comb fingers. The second comb member is movable between a first position in which each second comb finger is not substantially fully interdigitated with an adjacent pair of first comb fingers and a second position in which each such second comb finger is substantially fully interdigitated with such adjacent pair of first comb fingers. Each of the second comb fingers is offset relative to the midpoint between the adjacent pair of first comb fingers when in the first position and is substantially centered on such midpoint when in the second position.
摘要翻译：一种静电微致动器，其包括基底和至少一个梳状驱动组件，其具有安装在所述基底上的第一梳状部件和覆盖所述基底的第二梳状部件。第一梳构件具有多个第一梳指。第二梳构件具有多个第二梳指。第二梳状构件可在第一位置和第二位置之间移动，在第一位置，每个第二梳状指状体与相邻的一对第一梳状指状件基本上完全相互交错，并且第二位置，其中每个这样的第二梳状指状件与这种相邻的第一梳状指状体基本上完全相互交叉梳手指当处于第一位置时，第二梳齿中的每一个相对于相邻的一对第一梳齿之间的中点偏移，并且当处于第二位置时基本上位于该中点上。

20. 发明授权

US6134207A Optical data storage system having optical microswitch 有权
标题翻译：具有光学微动开关的光学数据存储系统
公开(公告)号：US6134207A
公开(公告)日：2000-10-17
申请号：US135236
申请日：1998-08-17
申请人： John H. Jerman , John D. Grade , Joseph D. Drake , Kurt E. Petersen
发明人： John H. Jerman , John D. Grade , Joseph D. Drake , Kurt E. Petersen
IPC分类号： G02B6/35 , G02B6/42 , G02B26/08 , G11B7/0037 , G11B7/085 , G11B7/12 , G11B7/135 , G11B11/105 , H02N1/00 , G11B7/00
CPC分类号： H02N1/008 , G02B26/0833 , G02B26/0841 , G02B26/085 , G02B26/0866 , G02B6/4216 , G11B11/10543 , G11B7/122 , G11B7/1362 , G11B7/1384 , G02B6/3514 , G02B6/357 , G02B6/3584 , G11B11/10554 , G11B11/10563 , G11B11/1058 , G11B7/0037 , G11B7/08564
摘要： An optical microswitch for use with a laser beam that extends along a path comprising a body having an inlet port adapted to receive the laser beam and a plurality of outlet ports. A plurality of mirrors coupled to a plurality of micromotors carried by the body. The micromotors selectively move the mirrors from a first position out of the path of the laser beam to a second position into the path of the laser beam to direct the laser beam to one of the outlet ports. Each of the micromotors has at least one electrostatically-driven comb drive assembly therein for moving the respective mirror to one of the first and second positions. A controller is electrically coupled to the micromotors for providing control signals to the micromotors.
摘要翻译：一种用于激光束的光学微动开关，其沿着包括具有适于接收激光束的入口端口和多个出口端口的主体的路径延伸。耦合到由身体携带的多个微型马达的多个反射镜。微型电动机选择性地将反射镜从第一位置移出激光束的路径到达激光束的路径的第二位置，以将激光束引导到出口端口之一。每个微型马达都具有至少一个静电驱动梳驱动组件，用于将相应的反射镜移动到第一和第二位置之一。控制器电耦合到微型马达，用于向微型马达提供控制信号。

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