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    • 14. 发明申请
    • Wafer container and door with cam latching mechanism
    • 晶圆容器和门与凸轮锁定机构
    • US20050127688A1
    • 2005-06-16
    • US10988993
    • 2004-11-15
    • John BurnsMatthew FullerJeffery KingMartin ForbesMark Smith
    • John BurnsMatthew FullerJeffery KingMartin ForbesMark Smith
    • E05C3/04H01L20060101H01L21/673
    • H01L21/67353H01L21/67373Y10T292/1049
    • A container for holding a single wafer includes a door with a latching mechanism having a cam with a pair of opposing wings extending laterally therefrom. The cam is selectively rotatably shiftable between a first favored position wherein the wings are completely within the door enclosure to enable the door to be engaged and disengaged from the door frame, and a second favored position wherein the wings extend laterally outward from the door enclosure so as to engage in the latch recesses in the door frame when the door is engaged in the door frame. The cam wings may include a ramped portion thereon for drawing the door into closer engagement in the door frame when the cam is rotated from the first favored position to the second favored position. Also, the latching mechanism may further include a spring disposed to provide a biasing force for urging the latching mechanism toward each of the first and second favored positions, and soft-stop dampening springs for decelerating the cam in a controlled fashion at the first and second favored positions and for absorbing vibrations resulting from the collision of the cam with a fixed stop on the door chassis.
    • 用于保持单个晶片的容器包括具有闩锁机构的门,所述闩锁机构具有凸轮,所述凸轮具有从其横向延伸的一对相对的翼。 凸轮可选择性地可旋转地在第一有利位置之间移动,其中翼完全在门外壳内,以使门能够与门框接合和脱离,以及第二优选位置,其中翼从门外壳横向向外延伸, 当门接合在门框中时,接合门框中的闩锁凹部。 凸轮翼可以包括其上的斜坡部分,用于当凸轮从第一有利位置旋转到第二优选位置时,将门拉近门框中更紧密的接合。 此外,闩锁机构还可以包括设置成提供用于将闩锁机构朝向第一和第二受惠位置中的每一个推动的偏置力的弹簧,以及用于在第一和第二位置以受控的方式减速凸轮的软停止润滑弹簧 有利的位置和吸收由于凸轮与门底盘上的固定挡块碰撞而产生的振动。