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1. 发明申请

US20060289333A1 Wafer container with door actuated wafer restraint 有权
公开(公告)号：US20060289333A1
公开(公告)日：2006-12-28
申请号：US11514796
申请日：2006-09-01
申请人： John Burns , Matthew Fuller , Jeffery King , Martin Forbes , Mark Smith
发明人： John Burns , Matthew Fuller , Jeffery King , Martin Forbes , Mark Smith
IPC分类号： B65D85/00
CPC分类号： H01L21/67353 , B65D51/26 , B65D2251/04 , H01L21/67369 , H01L21/67373 , H01L21/67383
摘要： A container for holding a wafer includes an enclosure portion having a top, a bottom, a pair of opposing sides, a back and an opposing open front defined by a door frame. A door is sealingly engagable in the door frame to close the open front. The container further includes wafer restraint means in the enclosure including fixed wafer restraint means and operable wafer restraint means. The operable wafer restraint means is selectively positionable by engaging and disengaging the door from the door frame, and is positioned so to enable insertion or removal of a wafer from the container when the door is disengaged from the door frame and positioned so as to cooperate with the fixed wafer restraint means to restrain the wafer in the container when the door is engaged in the door frame.

2. 发明申请

US20080017547A1 Front opening substrate container with bottom plate 有权
标题翻译：带底板的前开口基板容器
公开(公告)号：US20080017547A1
公开(公告)日：2008-01-24
申请号：US11786035
申请日：2007-04-10
申请人： John Burns , Matthew Fuller , Jeffery King , Martin Forbes , Mark Smith
发明人： John Burns , Matthew Fuller , Jeffery King , Martin Forbes , Mark Smith
IPC分类号： B65D85/30
CPC分类号： H01L21/67369 , H01L21/67379 , H01L21/67393 , Y10S206/832
摘要： A substrate container and a bottom plate are connected with a mechanism for adjusting the distance between the container and bottom plate, by, e.g., a threaded connection between two members of the connector mechanism. Also provided are a duck-billed valve for venting the container and a dampener for minimizing damage due to shocks.
摘要翻译：衬底容器和底板通过例如连接器机构的两个构件之间的螺纹连接的方式与用于调节容器和底板之间的距离的机构连接。还提供了用于排放容器的鸭嘴阀和用于使由冲击引起的损坏最小化的阻尼器。

3. 发明申请

US20070224864A1 CMP retaining ring 审中-公开
标题翻译： CMP保持环
公开(公告)号：US20070224864A1
公开(公告)日：2007-09-27
申请号：US11440461
申请日：2006-05-24
申请人： John Burns , Matthew Fuller , Martin Forbes , Jeffery King , Mark Smith
发明人： John Burns , Matthew Fuller , Martin Forbes , Jeffery King , Mark Smith
IPC分类号： H01R3/00
CPC分类号： B24B37/32 , Y10T29/49826
摘要： An improved chemical mechanical polishing retaining ring. A representative embodiment comprises a base portion made from a wear-resistant plastic material, and an upper portion, or backbone portion, made from a stiffer and more wear resistant material. One of the base or backbone portion is preferably overmolded onto the other. The base portion can be generally defined by a flat pad-contacting surface, an outer surface, and an inner surface. The base portion can additionally include channels extending from the outer surface to the inner surface to facilitate transfer of slurry to and from the substrate to be polished during the process. One or both of the base portion or backbone portion further includes a plurality of circular ribs that serve to create additional bonding surface with the overmolded material. The retaining ring may additionally includes a plurality of bosses with threaded insert holes by which the retaining ring is attached to a chemical mechanical polishing system.
摘要翻译：改进的化学机械抛光保持环。代表性的实施例包括由耐磨塑料材料制成的基部，以及由更硬和更耐磨的材料制成的上部或主体部分。基部或骨架部分中的一个优选地包覆成型在另一个上。基部一般可以由平垫接触表面，外表面和内表面限定。基部可以另外包括从外表面延伸到内表面的通道，以便于在该过程期间将浆料转移到待抛光的基底上和从基底转移。基部或骨架部分中的一个或两个还包括多个圆形肋，其用于与包覆成型的材料产生附加的粘合表面。保持环可以另外包括具有螺纹插入孔的多个凸台，保持环通过该凸起附接到化学机械抛光系统。

4. 发明申请

US20070170089A1 Kinematic coupling with textured contact surfaces 有权
标题翻译：具有纹理接触表面的运动耦合
公开(公告)号：US20070170089A1
公开(公告)日：2007-07-26
申请号：US11339462
申请日：2006-01-25
申请人： John Burns , Martin Forbes , Matthew Fuller , Jeffery King , Mark Smith
发明人： John Burns , Martin Forbes , Matthew Fuller , Jeffery King , Mark Smith
IPC分类号： B65D85/00
CPC分类号： H01L21/67379 , Y10S414/14
摘要： A substrate kinematic coupling or guide plate for a substrate carrier having textured or patterned surfaces at the points of contact to reduce frictional forces generated between automated processing equipment and the kinematic coupling. The textured surface reduces the contact area between the processing equipment and the contact portion of the kinematic coupling, thereby reducing the resultant frictional force. By reducing the frictional force, the substrate carrier more readily settles on the mounting pins of the processing equipment, thus avoiding intolerable height and angular deviations during automated access to the substrates. Textures include, but are not limited to, a knurl pattern, ridges running laterally along the contact portions, and ridges running longitudinally along the contact portions. The textures may be formed by a blow molding, injection molding or in an overmolding process, or by a machining or imprinting process.
摘要翻译：用于衬底载体的衬底运动耦合或引导板，其在接触点处具有纹理化或图案化表面，以减少在自动处理设备和运动耦合之间产生的摩擦力。纹理表面减小了处理设备与运动联接器的接触部分之间的接触面积，从而减少了所产生的摩擦力。通过减小摩擦力，基板载体更容易落在加工设备的安装销上，从而在自动进入基板期间避免不可容忍的高度和角度偏差。纹理包括但不限于滚花图案，沿着接触部横向延伸的脊和沿着接触部分纵向延伸的脊。纹理可以通过吹塑，注模或包覆成型工艺，或通过机械加工或压印加工形成。

5. 发明申请

US20060292749A1 Photochromic substrate container 审中-公开
标题翻译：光致变色底物容器
公开(公告)号：US20060292749A1
公开(公告)日：2006-12-28
申请号：US11484887
申请日：2006-07-11
申请人： John Burns , Matthew Fuller , Jeffery King , Martin Forbes , Mark Smith
发明人： John Burns , Matthew Fuller , Jeffery King , Martin Forbes , Mark Smith
IPC分类号： H01L21/00 , H01L23/02
CPC分类号： H01L21/67288 , B65D79/02 , G03F1/66 , H01L21/67366
摘要： A semiconductor wafer, substrate, or reticle storage or shipping device that includes a photochromic indicator of exposure to undesired electromagnetic radiation. The present invention includes the incorporation of a photochromic material into the plastic used to fabricate at least a portion of a semiconductor wafer, disk, or reticle shipping or storage containers. The container may include photochromic material in the form of a transparent window or a larger portion of the container. the photochromic material may change color or darkness in response to exposure to a selected range of wavelengths of light.
摘要翻译：包括暴露于不期望的电磁辐射的光致变色指示剂的半导体晶片，衬底或掩模版存储或运输装置。本发明包括将光致变色材料结合到用于制造半导体晶片，盘或掩模版运输或存储容器的至少一部分的塑料中。容器可以包括透明窗口形式的光致变色材料或容器的较大部分。响应于暴露于所选择的光波长范围，光致变色材料可以改变颜色或黑暗。

6. 发明申请

US20050115866A1 Front opening substrate container with bottom plate 有权
标题翻译：带底板的前开口基板容器
公开(公告)号：US20050115866A1
公开(公告)日：2005-06-02
申请号：US10982400
申请日：2004-11-05
申请人： John Burns , Matthew Fuller , Jeffery King , Martin Forbes , Mark Smith
发明人： John Burns , Matthew Fuller , Jeffery King , Martin Forbes , Mark Smith
IPC分类号： B65D20060101 , B65D85/30 , H01L21/673
CPC分类号： H01L21/67369 , H01L21/67379 , H01L21/67393 , Y10S206/832
摘要： A substrate container and a bottom plate are connected with a mechanism for adjusting the distance between the container and bottom plate, by, e.g., a threaded connection between two members of the connector mechanism. Also provided are a duck-billed valve for venting the container and a dampener for minimizing damage due to shocks.
摘要翻译：衬底容器和底板通过例如连接器机构的两个构件之间的螺纹连接的方式与用于调节容器和底板之间的距离的机构连接。还提供了用于排放容器的鸭嘴阀和用于使由冲击引起的损坏最小化的阻尼器。

7. 发明申请

US20050109667A1 Wafer container with door actuated wafer restraint 有权
标题翻译：具有门驱动晶片约束的晶片容器
公开(公告)号：US20050109667A1
公开(公告)日：2005-05-26
申请号：US10989232
申请日：2004-11-15
申请人： John Burns , Matthew Fuller , Jeffery King , Martin Forbes , Mark Smith
发明人： John Burns , Matthew Fuller , Jeffery King , Martin Forbes , Mark Smith
IPC分类号： B65D51/26 , H01L21/673 , B65D85/30
CPC分类号： H01L21/67353 , B65D51/26 , B65D2251/04 , H01L21/67369 , H01L21/67373 , H01L21/67383
摘要： A container for holding a wafer includes an enclosure portion having a top, a bottom, a pair of opposing sides, a back and an opposing open front defined by a door frame. A door is sealingly engagable in the door frame to close the open front. The container further includes wafer restraint means in the enclosure including fixed wafer restraint means and operable wafer restraint means. The operable wafer restraint means is selectively positionable by engaging and disengaging the door from the door frame, and is positioned so to enable insertion or removal of a wafer from the container when the door is disengaged from the door frame and positioned so as to cooperate with the fixed wafer restraint means to restrain the wafer in the container when the door is engaged in the door frame.
摘要翻译：用于保持晶片的容器包括具有顶部，底部，一对相对侧的外壳部分，由门框限定的后部和相对的开放前部。门在门框内密封接合，以封闭开放的前部。容器还包括在外壳中的晶片限制装置，其包括固定的晶片限制装置和可操作的晶片约束装置。可操作的晶片约束装置通过使门与门框架接合和分离而被选择性地定位，并且被定位成当门从门框架脱离时被定位成使得能够从容器插入或移除晶片，以便与所述固定晶片限制装置用于当门接合在门框中时将晶片限制在容器中。

8. 发明申请

US20050109668A1 Substrate carrier 有权
标题翻译：基板载体
公开(公告)号：US20050109668A1
公开(公告)日：2005-05-26
申请号：US10971714
申请日：2004-10-22
申请人： John Burns , Matthew Fuller , Jeffery King , Martin Forbes , Mark Smith , Michael Zabka
发明人： John Burns , Matthew Fuller , Jeffery King , Martin Forbes , Mark Smith , Michael Zabka
IPC分类号： B65D85/00 , H01L20060101
CPC分类号： H01L21/67379 , H01L21/67383 , Y10S206/832 , Y10T16/469 , Y10T16/4707
摘要： A carrier for transporting silicon semiconductor wafers during semiconductor wafer processing operations including an enclosure, a door and a flange structured to interface with a machine so that the carrier can be lifted by the machine. A lift saddle connects the flange to the container so that the load on the flange is transferred to a part of the enclosure other than the top of the enclosure to prevent distortion of the enclosure to maintaining seal integrity between the enclosure and the door.
摘要翻译：一种用于在半导体晶片处理操作期间传输硅半导体晶片的载体，包括壳体，门和与机器接合的凸缘和凸缘，使得载体能够被机器提升。提升鞍座将法兰连接到容器，使得法兰上的负载被转移到外壳的除了外壳的顶部之外的一部分，以防止外壳变形，以保持外壳和门之间的密封完整性。

9. 发明申请

US20050139511A1 Photochromic substrate container 失效
标题翻译：光致变色底物容器
公开(公告)号：US20050139511A1
公开(公告)日：2005-06-30
申请号：US10971556
申请日：2004-10-22
申请人： John Burns , Matthew Fuller , Jeffery King , Martin Forbes , Mark Smith
发明人： John Burns , Matthew Fuller , Jeffery King , Martin Forbes , Mark Smith
IPC分类号： B65D79/02 , H01L21/673 , B65D85/30
CPC分类号： H01L21/67288 , B65D79/02 , G03F1/66 , H01L21/67366
摘要： A semiconductor wafer, substrate, or reticle storage or shipping device that includes a photochromic indicator of exposure to undesired electromagnetic radiation. The present invention includes the incorporation of a photochromic material into the plastic used to fabricate at least a portion of a semiconductor wafer, disk, or reticle shipping or storage containers. The container may include photochromic material in the form of a transparent window or a larger portion of the container. The photochromic material may change color or darkness in response to exposure to a selected range of wavelengths of light.
摘要翻译：包括暴露于不期望的电磁辐射的光致变色指示剂的半导体晶片，衬底或掩模版存储或运输装置。本发明包括将光致变色材料结合到用于制造半导体晶片，盘或掩模版运输或存储容器的至少一部分的塑料中。容器可以包括透明窗口形式的光致变色材料或容器的较大部分。响应于暴露于所选择的光波长范围，光致变色材料可以改变颜色或黑暗。

10. 发明申请

US20050115591A1 Wafer carrier door 有权
标题翻译：晶圆架门
公开(公告)号：US20050115591A1
公开(公告)日：2005-06-02
申请号：US10983107
申请日：2004-11-05
申请人： John Burns , Matthew Fuller , Jeffery King , Martin Forbes , Mark Smith
发明人： John Burns , Matthew Fuller , Jeffery King , Martin Forbes , Mark Smith
IPC分类号： B08B3/00 , B08B9/00 , H01L20060101
CPC分类号： H01L21/67373 , H01L21/67386
摘要： A wafer carrier door having an inner door portion and an outer door portion. The inner door portion has a substantially continuous inner surface. The outer door portion extends over at least a portion of the inner door portion. The outer door portion has a plurality of apertures formed therein. The outer door portion is attached to the inner door portion.
摘要翻译：具有内门部分和外门部分的晶片承载门。内门部分具有基本连续的内表面。外门部分在内门部分的至少一部分上延伸。外门部分具有形成在其中的多个孔。外门部分附接到内门部分。

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