会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 15. 发明授权
    • Polysilicon capacitor having large capacitance and low resistance
    • 具有大电容和低电阻的多晶硅电容器
    • US06858889B2
    • 2005-02-22
    • US09878117
    • 2001-06-08
    • James W. AdkissonJohn A. BracchittaJed H. RankinAnthony K. Stamper
    • James W. AdkissonJohn A. BracchittaJed H. RankinAnthony K. Stamper
    • H01L21/02H01L21/314H01L21/334H01L21/8242H01L29/78H01L33/00
    • H01L28/75H01L21/3144H01L28/91
    • A process for forming capacitors in a semiconductor device. In one embodiment, a first insulating layer is deposited on the semiconductor device; a trench is formed in the insulating layer; a first low resistance metal layer is formed covering the interior surface of the trench; a first polysilicon layer is formed over the first low resistance metal layer; a first dielectric layer is formed over the first polysilicon layer; a second polysilicon layer is formed over the first dielectric layer; a second low resistance metal layer is formed over the second polysilicon layer; a third polysilicon layer is formed over the second low resistance metal layer; a second dielectric layer is formed over the third polysilicon layer; a fourth polysilicon layer is formed over the second dielectric layer; a third low resistance metal layer is formed over the fourth polysilicon layer until the trench is filled; the semiconductor device is planarized until the first, second and third low resistance metal layers are exposed above the trench; finally, capacitor leads are formed to the first, second, and third low resistance metal layers.
    • 一种用于在半导体器件中形成电容器的工艺。 在一个实施例中,第一绝缘层沉积在半导体器件上; 在绝缘层中形成沟槽; 形成覆盖沟槽内表面的第一低电阻金属层; 在第一低电阻金属层上形成第一多晶硅层; 第一介电层形成在第一多晶硅层上; 在第一介电层上形成第二多晶硅层; 在第二多晶硅层上形成第二低电阻金属层; 在第二低电阻金属层上形成第三多晶硅层; 在所述第三多晶硅层上形成第二电介质层; 在第二介电层上形成第四多晶硅层; 第四低电阻金属层形成在第四多晶硅层上,直到沟槽被填充; 半导体器件被平坦化,直到第一,第二和第三低电阻金属层暴露在沟槽上方; 最后,对第一,第二和第三低电阻金属层形成电容器引线。
    • 17. 发明授权
    • Polysilicon capacitor having large capacitance and low resistance and process for forming the capacitor
    • 具有大电容和低电阻的多晶硅电容器和用于形成电容器的工艺
    • US06261895B1
    • 2001-07-17
    • US09225043
    • 1999-01-04
    • James W. AdkissonJohn A. BracchittaJed H. RankinAnthony K. Stamper
    • James W. AdkissonJohn A. BracchittaJed H. RankinAnthony K. Stamper
    • H01L218242
    • H01L28/75H01L21/3144H01L28/91
    • A process for forming capacitors in a semiconductor device. In one embodiment, a first insulating layer is deposited on the semiconductor device; a trench is formed in the insulating layer; a first low resistance metal layer is formed covering the interior surface of the trench; a first polysilicon layer is formed over the first low resistance metal layer; a first dielectric layer is formed over the first polysilicon layer; a second polysilicon layer is formed over the first dielectric layer; a second low resistance metal layer is formed over the second polysilicon layer; a third polysilicon layer is formed over the second low resistance metal layer; a second dielectric layer is formed over the third polysilicon layer; a fourth polysilicon layer is formed over the second dielectric layer; a third low resistance metal layer is formed over the fourth polysilicon layer until the trench is filled; the semiconductor device is planarized until the first, second and third low resistance metal layers are exposed above the trench; finally, capacitor leads are formed to the first, second, and third low resistance metal layers.
    • 一种用于在半导体器件中形成电容器的工艺。 在一个实施例中,第一绝缘层沉积在半导体器件上; 在绝缘层中形成沟槽; 形成覆盖沟槽内表面的第一低电阻金属层; 在第一低电阻金属层上形成第一多晶硅层; 第一介电层形成在第一多晶硅层上; 在第一介电层上形成第二多晶硅层; 在第二多晶硅层上形成第二低电阻金属层; 在第二低电阻金属层上形成第三多晶硅层; 在所述第三多晶硅层上形成第二电介质层; 在第二介电层上形成第四多晶硅层; 第四低电阻金属层形成在第四多晶硅层上,直到沟槽被填充; 半导体器件被平坦化,直到第一,第二和第三低电阻金属层暴露在沟槽上方; 最后,对第一,第二和第三低电阻金属层形成电容器引线。
    • 18. 发明授权
    • Recessed gate for an image sensor
    • 嵌入式门用于图像传感器
    • US07217968B2
    • 2007-05-15
    • US10905097
    • 2004-12-15
    • James W. AdkissonJohn Ellis-MonaghanMark D. JaffeJerome B. Lasky
    • James W. AdkissonJohn Ellis-MonaghanMark D. JaffeJerome B. Lasky
    • H01L31/062
    • H01L27/14603H01L27/14601H01L27/14689H01L29/66621
    • A novel image sensor cell structure and method of manufacture. The imaging sensor comprises a substrate, a gate comprising a dielectric layer and gate conductor formed on the dielectric layer, a collection well layer of a first conductivity type formed below a surface of the substrate adjacent a first side of the gate conductor, a pinning layer of a second conductivity type formed atop the collection well at the substrate surface, and a diffusion region of a first conductivity type formed adjacent a second side of the gate conductor, the gate conductor forming a channel region between the collection well layer and the diffusion region. Part of the gate conductor bottom is recessed below the surface of the substrate. Preferably, a portion of the gate conductor is recessed at or below a bottom surface of the pinning layer to a depth such that the collection well intersects the channel region.
    • 一种新颖的图像传感器单元结构及其制造方法。 成像传感器包括基板,包括电介质层和形成在电介质层上的栅极导体的栅极,形成在与栅极导体的第一侧相邻的基板的表面下面的第一导电类型的收集阱层,钉扎层 在基板表面上形成在集合阱顶部的第二导电类型的第一导电类型的扩散区和在栅极导体的第二侧附近形成的第一导电类型的扩散区,栅极导体在集电阱层和扩散区之间形成沟道区 。 栅极导体底部的一部分凹陷在基板的表面下方。 优选地,栅极导体的一部分在钉扎层的底表面处或下方凹陷到使得收集阱与沟道区相交的深度。
    • 19. 发明授权
    • Recessed gate for a CMOS image sensor
    • CMOS图像传感器的嵌入式门
    • US07572701B2
    • 2009-08-11
    • US11735223
    • 2007-04-13
    • James W. AdkissonJohn Ellis-MonaghanMark D. JaffeJerome B. Lasky
    • James W. AdkissonJohn Ellis-MonaghanMark D. JaffeJerome B. Lasky
    • H01L21/02H01L31/113
    • H01L27/14603H01L27/14601H01L27/14689H01L29/66621
    • A novel CMOS image sensor cell structure and method of manufacture. The imaging sensor comprises a substrate having an upper surface, a gate comprising a dielectric layer formed on the substrate and a gate conductor formed on the gate dielectric layer, a collection well layer of a first conductivity type formed below a surface of the substrate adjacent a first side of the gate conductor, a pinning layer of a second conductivity type formed atop the collection well at the substrate surface, and a diffusion region of a first conductivity type formed adjacent a second side of the gate conductor, the gate conductor forming a channel region between the collection well layer and the diffusion region. A portion of the bottom of the gate conductor is recessed below the surface of the substrate. Preferably, a portion of the gate conductor is recessed at or below a bottom surface of the pinning layer to a depth such that the collection well intersects the channel region thereby eliminating any potential barrier interference caused by the pinning layer.
    • 一种新颖的CMOS图像传感器单元结构及其制造方法。 成像传感器包括具有上表面的基板,包括形成在基板上的电介质层的栅极和形成在栅极电介质层上的栅极导体,形成在基板表面附近的第一导电类型的集合阱层 栅极导体的第一侧,形成在基板表面上的集电阱顶部的第二导电类型的钉扎层,以及邻近栅极导体的第二侧形成的第一导电类型的扩散区域,栅极导体形成沟道 收集阱层和扩散区域之间的区域。 栅极导体的底部的一部分在衬底的表面下方凹进。 优选地,栅极导体的一部分在钉扎层的底表面处或下方凹陷到深度,使得收集阱与沟道区相交,从而消除由钉扎层引起的任何潜在的屏障干扰。