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11. 发明专利

JP2008276168A Liquid crystal display device with evaluation pattern disposed thereon, and method for manufacturing the same 有权
标题翻译：具有评估图案的液晶显示装置及其制造方法
公开(公告)号：JP2008276168A
公开(公告)日：2008-11-13
申请号：JP2007271261
申请日：2007-10-18
申请人： Hitachi Displays Ltd , 株式会社日立ディスプレイズ
发明人： ISHIKAWA SEIJI , MATSUURA HIROYASU , HAMAMURA YUICHI , WACHI TADAMICHI
IPC分类号： G03F9/00 , G02F1/13
摘要： PROBLEM TO BE SOLVED: To solve such problems that direct exposure equipment having multiple heads generally conducts overlapping exposure at an exposure area boundary between heads, however, if the heads are misaligned, a flaw will occur in a pattern shape at an area that is subject to overlapping exposure.
SOLUTION: TEGs (test element groups) are disposed for evaluating line width and resistance at an overlapping exposure area between the exposure heads and at a returning exposure area formed when direct exposure equipment having a multi-head configuration exposes a substrate. By catching changes in measured values, misalignment in the multiple exposure heads can be detected.
COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题为了解决这样的问题，即具有多个头部的直接曝光设备通常在头部之间的曝光区域边界处进行重叠曝光，但是如果头部未对准，则在区域的图案形状中将出现缺陷这是接触重叠的。解决方案：设置TEG（测试元件组）以评估曝光头之间的重叠曝光区域和在具有多头构造的直接曝光设备暴露基板时形成的返回曝光区域的线宽和电阻。通过捕获测量值的变化，可以检测多个曝光头中的未对准。版权所有（C）2009，JPO＆INPIT

12. 发明专利

JP2007095324A Method of manufacturing organic el display panel, and organic el display panel manufactured by this method 审中-公开
标题翻译：制造有机EL显示面板的方法以及通过该方法制造的有机EL显示面板
公开(公告)号：JP2007095324A
公开(公告)日：2007-04-12
申请号：JP2005279225
申请日：2005-09-27
申请人： Hitachi Displays Ltd , 株式会社日立ディスプレイズ
发明人： MATSUZAKI EIJI , TAKASU KEIJI , MATSUURA HIROYASU
IPC分类号： H05B33/10 , C23C14/12 , C23C14/24 , C23C14/50 , H01L51/50
CPC分类号： H01L51/0011 , C23C14/042 , C23C14/12 , H01L51/56
摘要： PROBLEM TO BE SOLVED: To provide a method of manufacturing an organic EL (Electroluminescent) display panel in which a desired organic film or the like can be obtained in high accuracy without damaging a substrate or the organic film, and to provide the organic EL display panel manufactured by this method. SOLUTION: A depositing mask 21 is provided with an opening 103 corresponding to a panel pattern area of a display panel. This opening 103 is positioned on a bottom face inside a recess face behind a contact face of the depositing mask 21 with the base plate 101, and the opening 103 of the depositing mask 101 is separated from the base plate 101 with a predetermined gap space 23, and depositing particles from a depositing source 105 are deposited on the base plate 101 through the opening 103. COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：提供一种制造有机EL（电致发光）显示面板的方法，其中可以高精度地获得期望的有机膜等而不损坏衬底或有机膜，并且提供有机EL显示面板。解决方案：沉积掩模21设置有对应于显示面板的面板图案区域的开口103。该开口103位于沉积掩模21的与基板101的接触面后面的凹面内的底面上，并且沉积掩模101的开口103与基板101以预定间隙空间23分离，并且从沉积源105沉积颗粒通过开口103沉积在基板101上。版权所有（C）2007，JPO＆INPIT

13. 发明专利

JP2009244831A Maskless exposure method 有权
标题翻译： MASKLESS曝光方法
公开(公告)号：JP2009244831A
公开(公告)日：2009-10-22
申请号：JP2008203766
申请日：2008-08-07
申请人： Hitachi Displays Ltd , 株式会社日立ディスプレイズ
发明人： MATSUURA HIROYASU , ISHIKAWA SEIJI , WACHI TADAMICHI , ISHIGAKI TOSHIMASA
IPC分类号： G03F9/00 , H01L21/027
CPC分类号： G03F7/70791 , G03F7/70433
摘要： PROBLEM TO BE SOLVED: To provide a maskless exposure method, capable of accurately monitoring drawing by an exposing device without disturbing a flow of production, extracting calibration data from data thereof, and feeding back it to the exposing device. SOLUTION: A maskless exposure method includes: scanning, by the projection optical system, the substrate in a first direction; shifting a scanning region in a second direction; scanning the substrate in the first direction so that an overlapping part is formed. A plurality of marks different from the circuit pattern are exposed in a vicinity of the overlapping part. The plurality of marks are a set of marks at least including two marks disposed on one side of the overlapping part and two marks disposed on another side of the overlapping part. Deviations between the pair of the scanning regions, an inclination of exposing light, and a yawing angle of a stage are analyzed by measuring deviations of distances among the plurality of marks. Calibration data are obtained from a result of the analyzing. COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：提供一种无掩模曝光方法，能够通过曝光装置精确地监视绘制而不干扰生产流程，从其数据中提取校准数据，并将其反馈给曝光装置。解决方案：无掩模曝光方法包括：通过投影光学系统沿第一方向扫描基板; 沿第二方向移动扫描区域; 在第一方向扫描基板，从而形成重叠部分。与电路图案不同的多个标记在重叠部分附近露出。多个标记是至少包括设置在重叠部分的一侧上的两个标记和设置在重叠部分的另一侧上的两个标记的一组标记。通过测量多个标记之间的距离的偏差来分析一对扫描区域之间的偏差，曝光的倾斜度和舞台的偏航角度。校准数据是从分析结果中获得的。版权所有（C）2010，JPO＆INPIT

14. 发明专利

JP2009019243A Vapor deposition method and apparatus 有权
标题翻译：蒸气沉积方法和装置
公开(公告)号：JP2009019243A
公开(公告)日：2009-01-29
申请号：JP2007183242
申请日：2007-07-12
申请人： Hitachi Displays Ltd , 株式会社日立ディスプレイズ
发明人： MATSUURA HIROYASU
IPC分类号： C23C14/04 , C23C14/50 , C23C14/54 , H01L51/50 , H05B33/10
CPC分类号： C23C14/042 , C23C14/541 , C23C14/56 , H01L51/001 , H01L51/56
摘要： PROBLEM TO BE SOLVED: To provide a vacuum deposition method and a vapor deposition apparatus which cause little deposition misalignment even at continuous production, yield a good film thickness distribution within a pixel and cause little waste of materials. SOLUTION: The vacuum deposition method comprises a step of fixing an evaporation source unit 100 inside a vacuum chamber 1; and, while moving a substrate 4 across vapor 3 from an evaporation source, depositing the vapor 3 from the evaporation source onto prescribed points of the substrate 4. The vacuum deposition apparatus has a deposition mask 5 placed on the substrate 4 at the side of the evaporation source unit 100, a means for moving a mask frame 7 by a plurality of rollers 13 inside a vacuum chamber 1 and a cooling plate 11 installed in the path of the mask frame 7, provided that the cooling plate 11 has a cooling means installed close to but out of contact with a surface of the mask frame 7 on the side of the evaporation source unit 100. The cooling plate 11 has apertures 60 formed locally near the evaporation source unit 100. The vapor 3 generated by the evaporation source 2 is sprayed onto the deposition mask 5 and the substrate 4 through an aperture 70 of a cooling plate 14 of the evaporation source unit 100. COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：为了提供即使在连续生产时也几乎没有沉积不对准的真空沉积方法和蒸镀装置，在像素内产生良好的膜厚分布并且几乎不会浪费材料。解决方案：真空沉积方法包括将蒸发源单元100固定在真空室1内的步骤; 并且，在从蒸镀源蒸镀3的状态下移动基板4的同时，将来自蒸发源的蒸气3从基板4的规定点投入。真空蒸镀装置在基板4的侧面蒸发源单元100，用于通过安装在面罩框架7的路径中的真空室1内的多个辊13和安装在面罩框架7的路径中的冷却板11移动面罩框架7的装置，只要冷却板11具有安装的冷却装置靠近蒸发源单元100一侧而与掩模框7的表面接近但不接触。冷却板11具有在蒸发源单元100附近局部形成的孔60.由蒸发源2产生的蒸气3是通过蒸发源单元100的冷却板14的孔70喷涂到沉积掩模5和基板4上。（C）2009，JPO＆INPIT

15. 发明专利

JP2008170497A Liquid crystal display device and its manufacturing method 审中-公开
标题翻译：液晶显示器件及其制造方法
公开(公告)号：JP2008170497A
公开(公告)日：2008-07-24
申请号：JP2007000963
申请日：2007-01-09
申请人： Hitachi Displays Ltd , 株式会社日立ディスプレイズ
发明人： SANO YASUSHI , SEKIGUCHI SHINJI , TAKASU KEIJI , HARA KOJI , MATSUURA HIROYASU
IPC分类号： G02F1/13363 , G02B5/30 , G02F1/1335 , G02F1/1343
CPC分类号： G02F1/133632 , G02F1/134363 , G02F2001/133565 , G02F2413/09
摘要： PROBLEM TO BE SOLVED: To provide a transflective IPS (In Plane Switching) mode liquid crystal display device of high precision having a retardation plate incorporated in a reflective display section. SOLUTION: A liquid crystal monomer with an acrylate group attached thereto, which includes a polymerization initiator and has one out of a triplet quencher or a radical quencher, or both of them, added thereto, is used as a material for forming a retardation layer 38 to be formed on a principal surface of a first substrate 31. COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：要解决的问题：提供具有并入反射显示部分中的相位差板的高精度的半透反射IPS（平面切换）模式液晶显示装置。
解决方案：添加其中附有丙烯酸酯基团的液晶单体，其包含聚合引发剂，并且具有三重态猝灭剂或自由基猝灭剂中的一种，或两者均加入其中，作为形成延迟层38形成在第一基板31的主表面上。版权所有（C）2008，JPO＆INPIT

16. 发明专利

JP2007186787A Vapor deposition pot, thin-film forming apparatus provided therewith and method for producing display device 审中-公开
标题翻译：蒸气沉积罐，提供的薄膜成型装置及其制造方法
公开(公告)号：JP2007186787A
公开(公告)日：2007-07-26
申请号：JP2006331317
申请日：2006-12-08
申请人： Hitachi Displays Ltd , 株式会社日立ディスプレイズ
发明人： MATSUURA HIROYASU , TAKASU KEIJI
IPC分类号： C23C14/24 , H01L51/50 , H05B33/10
摘要： PROBLEM TO BE SOLVED: To provide a pot structure where stable vapor deposition can be continued by a simple constitution, and maintenance after the completion of the vapor deposition can be easily performed, and to provide a vapor deposition method. SOLUTION: The vapor deposition pot is equipped with: an evaporation chamber formed of the part to be packed with a material and an orifice plate for controlling the vapor pressure of the material by evaporation; and a pressure-controlling chamber formed in a space between the orifice plate and a discharge plate of discharging the evaporated material to the outside of the vapor deposition pot. The second opening part is formed at the upper edge in a projection projecting to the outside of the pressure-controlling chamber above the discharge plate; heaters are confronted at the side faces of the projection part, and a thermal insulation mechanism can be provided at the upper part of the heaters and also at a position lower than the second opening part. Further, the vapor deposition pot is provided with heaters for the evaporation chamber and heaters for the pressure-controlling chamber in which temperature can be set mutually independently so as to hold the temperature of the pressure-controlling chamber to the one higher than that of the evaporation chamber. COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：为了提供通过简单的结构可以继续进行稳定气相沉积的锅结构，并且可以容易地进行气相沉积完成后的维护，并提供气相沉积方法。气相沉积罐配备有：由待填充的部件形成的蒸发室和用于通过蒸发控制材料的蒸气压的孔板; 以及形成在孔板和排出板之间的空间中的压力控制室，其将蒸发的材料排出到蒸镀罐的外部。第二开口部形成在突出于放电板上方的压力控制室外侧的突起的上边缘处; 加热器在突出部分的侧面处面对，并且可以在加热器的上部以及比第二开口部分低的位置设置绝热机构。此外，气相沉积罐设置有用于蒸发室的加热器和用于压力控制室的加热器，其中可以相互独立地设置温度，以便将压力控制室的温度保持在高于蒸发室。版权所有（C）2007，JPO＆INPIT

17. 发明专利

JP2004139767A Display device 有权
公开(公告)号：JP2004139767A
公开(公告)日：2004-05-13
申请号：JP2002301359
申请日：2002-10-16
申请人： Hitachi Displays Ltd , Hitachi Ltd , 株式会社日立ディスプレイズ , 株式会社日立製作所
发明人： TAKEMOTO KAZUNARI , MATSUZAKI EIJI , MORI YUJI , USHIFUSA NOBUYUKI , MATSUURA HIROYASU
IPC分类号： H01L51/50 , G09G3/30 , G09G5/30 , H01L27/32 , H01L51/52 , H05B33/04 , H05B33/26 , H05B33/14
CPC分类号： H05B33/26 , H01L27/3244 , H01L51/5221 , H01L51/5259
摘要： PROBLEM TO BE SOLVED: To avoid in a simple structure the degradation of characteristics by ultraviolet irradiation of a display region and a drive circuit region in a display device fitted with the drive circuit region inside a sealing region where a first substrate and a second substrate are bonded together. SOLUTION: The drive circuit region DR is also shielded with a cathode film CD constituting an OLED element of a display region AR on the first substrate SUB1. Ultraviolet rays radiated for hardening a sealant SL from the second substrate SUB2 side are shielded by the cathode film CD, and the degradation of characteristics due to the ultraviolet rays of the drive circuit region DR is prevented together with the display region AR. COPYRIGHT: (C)2004,JPO

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