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    • 13. 发明授权
    • Apparatus and method for assembling semiconductor device and semiconductor device thus fabricated
    • 如此制造的用于组装半导体器件和半导体器件的装置和方法
    • US06331891B1
    • 2001-12-18
    • US09285675
    • 1999-04-05
    • Yutaka NakamuraTetsuo KoezukaHitoshi KomoriyaTakao Hirahara
    • Yutaka NakamuraTetsuo KoezukaHitoshi KomoriyaTakao Hirahara
    • G01B1100
    • H01L21/681
    • An apparatus for assembling a semiconductor device including a stage having a substrate support surface for supporting a substrate, and a support member for carrying a semiconductor element to a position on or near the substrate supported by the stage. A microscope unit having a coaxial illuminating unit is arranged inclined to the substrate support surface of the stage, and a counter illuminating unit is arranged inclined on the opposite side from the microscope unit with respect to a normal to the substrate support surface of the stage. A camera is arranged at an image forming position of the microscope unit 1 and an image processing unit is connected to the camera. The substrate has a positioning mark, and the camera acquires an image of the positioning mark and an image of a reflection of the positioning mark reflected by the side surface of the semiconductor element.
    • 一种用于组装半导体器件的装置,包括具有用于支撑衬底的衬底支撑表面的台,以及用于将半导体元件承载到由所述台支撑的衬底上或附近的位置的支撑构件。 具有同轴照明单元的显微镜单元被布置成与台架的基板支撑表面倾斜,并且相对于显微镜单元相对于平台的基板支撑表面的法线倾斜布置的反向照明单元。 相机配置在显微镜单元1的图像形成位置,图像处理单元连接到相机。 基板具有定位标记,并且相机获取定位标记的图像和由半导体元件的侧表面反射的定位标记的反射的图像。
    • 14. 发明授权
    • Micro actuator having clamping parts
    • 具有夹紧部件的微型致动器
    • US06450702B1
    • 2002-09-17
    • US09716331
    • 2000-11-21
    • Hitoshi KomoriyaYutaka NakamuraTakao Hirahara
    • Hitoshi KomoriyaYutaka NakamuraTakao Hirahara
    • G02B636
    • H02N1/008G02B6/4202
    • There is provided a micro actuator displacing a micro portion by use of an electrostatic force, the micro actuator comprising a first stationary part; a displacement part spaced apart from the first stationary part by a predetermined distance in a confronting manner, the displacememt part being displaceable relative to the first stationary part; a second stationary part; the lock parts being displaceable relative to the second stationary part; wherein the displacement part is displaced by application of a voltage between the first stationary part and the displacement part, the lock parts being displaced by application of a voltage between the second stationary part and the lock parts, and wherein the lock parts clamp the displacement part with no voltage applied, the lock parts releasing the displacement part with a voltage applied.
    • 提供了通过使用静电力来移动微小部分的微型致动器,微致动器包括第一静止部分; 位移部件,以相对的方式与第一固定部分间隔预定距离,位移部分可相对于第一固定部分移动; 第二静止部分; 锁定部件可相对于第二固定部件移动; 其中所述位移部分通过在所述第一静止部分和所述位移部分之间施加电压而移位,所述锁定部分通过在所述第二固定部分和所述锁定部件之间施加电压而移位,并且其中所述锁定部分夹持所述位移部分 在没有施加电压的情况下,锁定部件施加电压而释放位移部分。
    • 18. 发明授权
    • Movable apparatus driving system
    • 移动式设备驱动系统
    • US4791588A
    • 1988-12-13
    • US78008
    • 1987-07-24
    • Nobuhiko OndaKazuo AsakawaTadashi AkitaHitoshi KomoriyaToru Kamada
    • Nobuhiko OndaKazuo AsakawaTadashi AkitaHitoshi KomoriyaToru Kamada
    • G05B19/42B25J9/18G05B19/423G05B13/00
    • G05B19/423G05B2219/36429G05B2219/40087G05B2219/42092
    • A movable apparatus drive system comprises a driving device for the movable apparatus, a first output device for detecting environmental information around the movable apparatus and for outputting a corresponding signal in response to the environmental information data, a second output device for outputting a command signal to drive the driving device so as to move the movable apparatus to a target position, based on target position data of the movable apparatus to be moved and current position data of the movable apparatus; and a supply device for supplying a composite signal constituted by the environmental information data and the command signal.Moreover, a robot control system comprises a control device for controlling the motion of a robot in response to a command signal to the robot; a spring mechanism provided at a working point of the robot for detecting a deflection (displacement ) caused by an external force applied to the robot; and a feedback means for feeding back a deflection feedback value obtained by multiplying detected output of the spring meachnisum by a predetermined gain. The control device controls the motion of the robot in response to the addition of a position command generated from the control means and the deflection feedback value.
    • 可移动装置驱动系统包括可移动装置的驱动装置,用于检测可移动装置周围的环境信息并响应于环境信息数据输出相应信号的第一输出装置,用于输出命令信号的第二输出装置 驱动驱动装置,以便基于要移动的可移动装置的目标位置数据和可移动装置的当前位置数据将可移动装置移动到目标位置; 以及用于提供由环境信息数据和命令信号构成的复合信号的供给装置。 此外,机器人控制系统包括:控制装置,用于响应于对机器人的命令信号来控制机器人的运动; 设置在机器人的工作点处的弹簧机构,用于检测由施加到机器人的外力引起的偏转(位移); 以及反馈装置,用于反馈通过将检测到的弹簧锤的输出乘以预定增益而获得的偏转反馈值。 控制装置响应于从控制装置产生的位置指令和偏转反馈值的相加而控制机器人的运动。