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11. 发明授权

US06312316B1 Chemical mechanical polishing apparatus and method 失效
公开(公告)号：US06312316B1
公开(公告)日：2001-11-06
申请号：US09306822
申请日：1999-05-07
申请人： Kazuo Takahashi , Matsuomi Nishimura , Kyoichi Miyazaki , Shinzo Uchiyama
发明人： Kazuo Takahashi , Matsuomi Nishimura , Kyoichi Miyazaki , Shinzo Uchiyama
IPC分类号： B24B722
CPC分类号： B24B37/26 , B24B27/0076 , B24B37/20 , B24B41/047
摘要： A chemical mechanical polishing apparatus and method can polish a surface of an object very precisely at a high speed irrespective of the presence of a local defect on the surface to be polished. By using a multiplex ring-shaped polishing pad, an effective surface to be polished is increased, and very precise and uniform polishing can be performed at a high speed. By using a plurality of polishing pads, having different diameters smaller than the diameter of the surface to be polished, provided with an interval on the same revolution radius on a revolution table, or by using a plurality of polishing pads, having the same diameter smaller than the diameter of the surface to be polished, provided at positions having different revolution radii on a revolution table, very precise and uniform polishing can be performed.

12. 发明授权

US5969820A Surface position detecting system and exposure apparatus using the same 失效
标题翻译：表面位置检测系统及使用其的曝光装置
公开(公告)号：US5969820A
公开(公告)日：1999-10-19
申请号：US873748
申请日：1997-06-12
申请人： Minoru Yoshii , Masanobu Hasegawa , Kyoichi Miyazaki
发明人： Minoru Yoshii , Masanobu Hasegawa , Kyoichi Miyazaki
IPC分类号： G03F9/00 , G01B11/00
CPC分类号： G03F9/7026
摘要： A surface position detecting system for detecting a position of a surface of an object disposed opposed to an exposure system, with respect to a direction of an optical system of the exposure system, includes an irradiation device for projecting light to the surface of the object, obliquely with respect to the optical axis of the exposure system, a detecting device for detecting light from the surface of the object irradiated with light from the irradiation device, the detecting device detecting a position of the surface of the object with respect to the optical axis direction of the exposure system, and a light quantity adjusting device provided in at least least one of the irradiation device and the detecting device, for controlling the quantity of light passage.
摘要翻译：用于检测与曝光系统相对设置的物体的表面相对于曝光系统的光学系统的方向的位置的表面位置检测系统包括：用于将光投射到物体的表面的照射装置，相对于曝光系统的光轴倾斜的检测装置，用于检测来自被照射装置的光的物体的表面的光的检测装置，检测装置检测物体相对于光轴的表面的位置曝光系统的方向，以及设置在照射装置和检测装置的至少一个中的光量调节装置，用于控制光通过量。

13. 发明授权

US5742386A Apparatus for detecting foreign matter on a substrate, and an exposure apparatus including the same 失效
标题翻译：用于检测基板上的异物的装置，以及包括该异物的曝光装置
公开(公告)号：US5742386A
公开(公告)日：1998-04-21
申请号：US799879
申请日：1997-02-13
申请人： Noriyuki Nose , Minoru Yoshii , Kyoichi Miyazaki , Toshihiko Tsuji , Seiji Takeuchi
发明人： Noriyuki Nose , Minoru Yoshii , Kyoichi Miyazaki , Toshihiko Tsuji , Seiji Takeuchi
IPC分类号： G01N21/88 , G01N21/47 , G01N21/94 , G01N21/956 , G03F7/20 , H01L21/027 , G01N21/00
CPC分类号： G01N21/4738 , G01N21/94 , G01N21/956
摘要： An apparatus for detecting foreign matter on a substrate includes an optical system for projecting a light beam onto a pellicle and a pattern surface, a first detector for detecting scattered light from foreign matter on the pattern surface, a second detector for detecting information relating to the reflectivity or the transmittance of the pellicle by detecting a light beam reflected by the pellicle, and a correction unit for correcting an output signal from the first detector using an output signal from the second detector.
摘要翻译：用于检测基板上的异物的装置包括：用于将光束投射到防护薄膜组件和图案表面上的光学系统;用于检测来自图案表面上异物的散射光的第一检测器，用于检测与图案表面有关的信息的第二检测器; 通过检测由防护薄膜组件反射的光束来检测防护薄膜组件的反射率或透射率;以及校正单元，用于使用来自第二检测器的输出信号来校正来自第一检测器的输出信号。

14. 发明授权

US08867145B2 Zoom lens system, interchangeable lens apparatus, and camera system 有权
标题翻译：变焦镜头系统，可互换镜头设备和相机系统
公开(公告)号：US08867145B2
公开(公告)日：2014-10-21
申请号：US13393826
申请日：2011-02-01
申请人： Shunichiro Yoshinaga , Isamu Izuhara , Nobuyuki Adachi , Kyoichi Miyazaki
发明人： Shunichiro Yoshinaga , Isamu Izuhara , Nobuyuki Adachi , Kyoichi Miyazaki
IPC分类号： G02B15/14 , G02B27/64 , G03B17/14 , G02B13/18 , G02B15/173
CPC分类号： G02B15/173 , G02B13/18 , G02B15/14 , G02B27/646 , G03B17/14
摘要： A compact and lightweight zoom lens system having excellent imaging performance, which is favorably applicable to an interchangeable-lens type digital camera system, is provided. The zoom lens system of the present invention includes, in order from an object side to an image side, a first lens unit having positive optical power and composed of not more than two lens elements, a second lens unit having negative optical power, a third lens unit having negative optical power, and a fourth lens unit having positive optical power. In zooming from a wide-angle limit to a telephoto limit, the fourth lens unit moves along an optical axis. Further, the following conditions are satisfied: 1.50
摘要翻译：提供了一种具有优异的成像性能的紧凑且轻便的变焦透镜系统，其有利地适用于可互换镜头型数字照相机系统。本发明的变焦透镜系统从物体侧到像侧依次包括具有正光学功率并且由不多于两个透镜元件组成的第一透镜单元，具有负光焦度的第二透镜单元，第三透镜单元具有负光焦度的透镜单元和具有正光焦度的第四透镜单元。在从广角限制变焦到远摄极限时，第四透镜单元沿着光轴移动。此外，满足以下条件：1.50

15. 发明授权

US08537249B2 Zoom lens system, interchangeable lens apparatus and camera system 有权
标题翻译：变焦镜头系统，可互换镜头设备和相机系统
公开(公告)号：US08537249B2
公开(公告)日：2013-09-17
申请号：US13215256
申请日：2011-08-23
申请人： Takuya Imaoka , Kyoichi Miyazaki
发明人： Takuya Imaoka , Kyoichi Miyazaki
IPC分类号： H04N5/262 , H04N5/228 , G02B27/64 , G02B15/14
CPC分类号： G02B15/161 , H04N5/2254
摘要： A zoom lens system of lens units, the system including, in object-side-to-image-side order: a first lens unit having positive optical power; a second lens unit; an aperture diaphragm; one or more additional lens units, with a first of the additional lens units being a first focusing-lens unit having negative optical power and moving along the optical axis in the zoom lens system focusing; an image blur compensating lens unit, adjacent the first focusing-lens unit and movable in a direction perpendicular to the optical axis in order to optically compensate image blur; with the lens system satisfying: 0.1
摘要翻译：一种透镜单元的变焦透镜系统，该系统包括：物体侧到图像侧的顺序：具有正光焦度的第一透镜单元; 第二透镜单元; 孔径光阑; 一个或多个附加透镜单元，其中第一个附加透镜单元是具有负光焦度并在变焦透镜系统聚焦中沿光轴移动的第一聚焦透镜单元; 图像模糊补偿透镜单元，与第一聚焦透镜单元相邻并且可以在垂直于光轴的方向上移动，以便光学地补偿图像模糊; 透镜系统满足：0.1 <（T1 + T2）/ H <2.0（T1是第一透镜单元的轴向厚度，T2是第二透镜单元的轴向厚度，H是图像的高度，变焦透镜系统形成在变焦透镜系统的图像侧端部上的图像表面上）。

16. 发明授权

US08279529B2 Zoom lens system, interchangeable lens apparatus and camera system 有权
标题翻译：变焦镜头系统，可互换镜头设备和相机系统
公开(公告)号：US08279529B2
公开(公告)日：2012-10-02
申请号：US12416588
申请日：2009-04-01
申请人： Kyoichi Miyazaki , Katsu Yamada , Takuya Imaoka , Masaki Sampei
发明人： Kyoichi Miyazaki , Katsu Yamada , Takuya Imaoka , Masaki Sampei
IPC分类号： G02B15/14
CPC分类号： G03B17/14 , G02B3/0087 , G02B13/18 , G02B15/177 , G02B27/0037
摘要： A zoom lens system is provided that includes a compactly constructed focusing lens unit and that has a suppressed change in the image magnification at the time of movement of a focusing lens unit and further that can compensate an image blur caused by vibration applied to the entire system. The zoom lens system according to the present invention comprises a plurality of lens units and an aperture diaphragm arranged in the lens unit. The plurality of lens units include: a negative lens unit that is arranged on an object side relative to the aperture diaphragm and provided with negative optical power having an absolute value greatest in the entire system and that moves in a direction along an optical axis at the time of zooming; a focusing lens unit that is arranged in an optical path between the negative lens unit and the aperture diaphragm and that moves in a direction along the optical axis at the time of focusing such that an interval relative to the negative lens unit should vary; and an image blur compensation lens unit that is arranged on the image side relative to the focusing lens unit and that moves in a direction perpendicular to the optical axis when the image blur caused by vibration in the zoom lens system should be compensated.
摘要翻译：提供一种变焦透镜系统，其包括紧凑构造的聚焦透镜单元，并且抑制了聚焦透镜单元移动时的图像放大率的变化，并且还可以补偿由施加到整个系统的振动引起的图像模糊。根据本发明的变焦透镜系统包括布置在透镜单元中的多个透镜单元和孔径光阑。多个透镜单元包括：负透镜单元，其相对于孔径光阑布置在物体侧，并且在整个系统中具有绝对值最大的负光焦度，并且在沿着光轴的方向上移动缩放时间; 聚焦透镜单元，布置在负透镜单元和孔径光阑之间的光路中，并且在聚焦时沿着光轴的方向移动，使得相对于负透镜单元的间隔应变化; 以及图像模糊补偿透镜单元，其被配置在相对于聚焦透镜单元的像侧，并且当应当补偿由变焦透镜系统中的振动引起的图像模糊时，在垂直于光轴的方向上移动。

17. 发明授权

US08189074B2 Zoom lens system, interchangeable lens apparatus and camera system 有权
标题翻译：变焦镜头系统，可互换镜头设备和相机系统
公开(公告)号：US08189074B2
公开(公告)日：2012-05-29
申请号：US12416452
申请日：2009-04-01
申请人： Kyoichi Miyazaki , Katsu Yamada , Takuya Imaoka , Masaki Sampei , Yoshio Matsumura
发明人： Kyoichi Miyazaki , Katsu Yamada , Takuya Imaoka , Masaki Sampei , Yoshio Matsumura
IPC分类号： G02B15/12
CPC分类号： G02B15/177
摘要： A zoom lens system is provided that includes a compactly constructed focusing lens unit and that has a suppressed change in the image magnification at the time of movement of a focusing lens unit. The zoom lens system according to the present invention comprises a plurality of lens units and an aperture diaphragm arranged in the lens unit. The plurality of lens units include: a negative lens unit that is arranged on an object side relative to the aperture diaphragm and provided with negative optical power having an absolute value greatest in the entire system and that moves in a direction along an optical axis at the time of zooming; and a focusing lens unit that is arranged in an optical path between the negative lens unit and the aperture diaphragm and that moves in a direction along the optical axis at the time of focusing such that an interval relative to the negative lens unit should vary.
摘要翻译：提供一种变焦透镜系统，其包括紧凑构造的聚焦透镜单元，并且在聚焦透镜单元移动时具有抑制的图像放大率的变化。根据本发明的变焦透镜系统包括布置在透镜单元中的多个透镜单元和孔径光阑。多个透镜单元包括：负透镜单元，其相对于孔径光阑布置在物体侧，并且在整个系统中具有绝对值最大的负光焦度，并且在沿着光轴的方向上移动缩放时间; 以及聚焦透镜单元，其布置在负透镜单元和孔径光阑之间的光路中，并且在聚焦时沿着光轴的方向移动，使得相对于负透镜单元的间隔应当变化。

18. 发明授权

US08098442B2 Zoom lens system, imaging device and camera 有权
标题翻译：变焦镜头系统，成像设备和相机
公开(公告)号：US08098442B2
公开(公告)日：2012-01-17
申请号：US12581543
申请日：2009-10-19
申请人： Tomoko Iiyama , Kyoichi Miyazaki , Kazuhiko Ishimaru
发明人： Tomoko Iiyama , Kyoichi Miyazaki , Kazuhiko Ishimaru
IPC分类号： G02B15/14
CPC分类号： G02B15/177
摘要： An object of the present invention is to provide: a zoom lens system that has a high resolution, high capability of compensating curvature of field, a high zoom ratio of, for example, 3 or greater, a reduced weight, and a reduced overall optical length at the time of non-use; and an imaging device and a camera that employ this zoom lens system so as to have a reduced thickness and excellent portability as well as high performance. The zoom lens system forms an optical image of an object with variable magnification and, in order from the object side to the image side, comprises: a first lens unit having negative optical power; a second lens unit that has positive optical power and that contains a bi-convex lens element composed of a resin material and serving as the most image side lens element; and a third lens unit having positive optical power. Then, the lens units move respectively along the optical axis in such a manner that intervals between the individual lens units should vary so that the variable magnification is achieved. Further, the condition |(R2mi1+R2mi2)/(R2mi1−R2mi2)|
摘要翻译：本发明的一个目的是提供：一种变焦透镜系统，其具有高分辨率，高补偿场景能力，例如3或更大的高变焦比，重量减轻，以及减小的整体光学不使用时的长度; 以及使用该变焦透镜系统以便具有减小的厚度和优异的便携性以及高性能的成像装置和照相机。变焦透镜系统形成具有可变倍率的物体的光学图像，并且从物体侧到像侧依次包括：具有负光焦度的第一透镜单元; 具有正光焦度并且包含由树脂材料构成并用作最多像侧透镜元件的双凸透镜元件的第二透镜单元; 以及具有正光焦度的第三透镜单元。然后，透镜单元分别沿着光轴移动，使得各个透镜单元之间的间隔应变化，使得实现可变放大倍率。此外，条件|（R2mi1 + R2mi2）/（R2mi1-R2mi2）| <1.0（R2mi1是第二透镜单元的最大像侧透镜元件的物体侧的曲率半径，而R2mi2是曲率半径在第二透镜单元的最大像侧透镜元件的像侧上）。成像装置和相机采用该变焦透镜系统。

19. 发明授权

US07804578B2 Exposure apparatus and device manufacturing method 失效
标题翻译：曝光装置和装置制造方法
公开(公告)号：US07804578B2
公开(公告)日：2010-09-28
申请号：US11558148
申请日：2006-11-09
申请人： Kyoichi Miyazaki
发明人： Kyoichi Miyazaki
IPC分类号： G03B27/42
CPC分类号： G03F7/70958 , G03F7/70891
摘要： An exposure apparatus that exposes a substrate to a pattern of an original. An illumination optical system illuminates the original. A projection optical system projects the pattern that is illuminated by the illumination optical system onto the substrate. A vacuum chamber houses at least one of the illumination optical system and the projection optical system. A heat absorber, arranged in the vacuum chamber, absorbs heat in the vacuum chamber. A heat conductor includes a metal member and connects the heat absorber and a wall of the vacuum chamber. The metal member is softer than the heat absorber and the wall, and fills a space between the heat absorber and the wall, and a cooler, arranged outside the vacuum chamber, cools the wall.
摘要翻译：一种曝光装置，其将基板暴露于原稿的图案。照明光学系统照亮原稿。投影光学系统将由照明光学系统照明的图案投射到基板上。真空室容纳照明光学系统和投影光学系统中的至少一个。设置在真空室中的吸热体吸收真空室中的热量。热导体包括金属构件并且连接吸热器和真空室的壁。金属构件比吸热体和壁更软，并且填充吸热体和壁之间的空间，并且布置在真空室外部的冷却器冷却壁。

20. 发明申请

US20100091172A1 ZOOM LENS SYSTEM, INTERCHANGEABLE LENS APPARATUS AND CAMERA SYSTEM 有权
标题翻译：变焦镜头系统，可互换镜头设备和摄像机系统
公开(公告)号：US20100091172A1
公开(公告)日：2010-04-15
申请号：US12416452
申请日：2009-04-01
申请人： Kyoichi Miyazaki , Katsu Yamada , Takuya Imaoka , Masaki Sampei , Yoshio Matsumura
发明人： Kyoichi Miyazaki , Katsu Yamada , Takuya Imaoka , Masaki Sampei , Yoshio Matsumura
IPC分类号： H04N5/232 , G02B15/20
CPC分类号： G02B15/177
摘要： A zoom lens system is provided that includes a compactly constructed focusing lens unit and that has a suppressed change in the image magnification at the time of movement of a focusing lens unit. The zoom lens system according to the present invention comprises a plurality of lens units and an aperture diaphragm arranged in the lens unit. The plurality of lens units include: a negative lens unit that is arranged on an object side relative to the aperture diaphragm and provided with negative optical power having an absolute value greatest in the entire system and that moves in a direction along an optical axis at the time of zooming; and a focusing lens unit that is arranged in an optical path between the negative lens unit and the aperture diaphragm and that moves in a direction along the optical axis at the time of focusing such that an interval relative to the negative lens unit should vary.
摘要翻译：提供一种变焦透镜系统，其包括紧凑构造的聚焦透镜单元，并且在聚焦透镜单元移动时具有抑制的图像放大率的变化。根据本发明的变焦透镜系统包括布置在透镜单元中的多个透镜单元和孔径光阑。多个透镜单元包括：负透镜单元，其相对于孔径光阑布置在物体侧，并且在整个系统中具有绝对值最大的负光焦度，并且在沿着光轴的方向上移动缩放时间; 以及聚焦透镜单元，其布置在负透镜单元和孔径光阑之间的光路中，并且在聚焦时沿着光轴的方向移动，使得相对于负透镜单元的间隔应当变化。

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