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11. 发明专利

JPS5877230A PATTERN FORMATION 失效
公开(公告)号：JPS5877230A
公开(公告)日：1983-05-10
申请号：JP17566181
申请日：1981-11-04
申请人： HITACHI LTD
发明人： WADA YASUO , MOCHIJI KOUZOU , KIMURA TAKESHI , UTAKA MASATOSHI , OOHAYASHI HIDEHITO
IPC分类号： H01L21/027 , G03F7/20 , H01L21/30
摘要： PURPOSE:To obtain a very fine pattern with high accuracy by a method wherein hydrogen ion beams are selectively implanted in the required parts of a positive- type photoresist film including a diazocompound as sensitive groups and then ultraviolet rays are aimed at the whole face including the required parts of the positive-type photoresist film and next, only the parts irradiated by the ultraviolet rays are developed and eliminated. CONSTITUTION:A positive-type photoresist film 2 including a diazo compound as sensitive groups is applied on an Si wafer 1 with a thickness of about 1mum and prebaking is done at 90 deg.C for about 20min. Next, after irradiating H ions 3 at the required parts 4 of the film 2, the whole face including the required parts is exposed by using ultraviolet rays 5. In this way, sensitive groups at the parts 4 irradiated by the H irons are destructed and the film 2 is changed to the state not exposed by the ultraviolet rays and only the places except the parts 4 are maintained under the condition permitting exposure and development by the ultraviolet rays. After that, the places except the parts 4 are developed and removed and a desired pattern by the parts 4 is left on a substrate 1.

12. 发明专利

JPS537164A SOLID OSCILLATOR 失效
公开(公告)号：JPS537164A
公开(公告)日：1978-01-23
申请号：JP8090976
申请日：1976-07-09
申请人： HITACHI LTD
发明人： MIZUISHI KENICHI , SATOU HITOSHI , UTAKA MASATOSHI
IPC分类号： H03B9/12 , H03B9/14
摘要： PURPOSE:The fine regulation of a oscillating frequency is mad epossible only by inserting a screw into a wavefuide, thereby simplifying the stabilization of frequencies.

13. 发明专利

JPS5267571A CRYSTALLIZATION METHOD FOR SEMICONDUCTOR 失效
公开(公告)号：JPS5267571A
公开(公告)日：1977-06-04
申请号：JP14300475
申请日：1975-12-03
申请人： HITACHI LTD
发明人： UTAKA MASATOSHI , ASANO TETSUO , DOI KOUNEN
IPC分类号： C30B19/00 , C30B29/40 , H01L21/208
摘要： PURPOSE:To provide a liquid phase growing method to grow a high purity crystal preventing the solusion from the contamination by the vessel for the growth.

14. 发明专利

JPS5219090A SEMICONDUCTOR DEVICE 失效
公开(公告)号：JPS5219090A
公开(公告)日：1977-01-14
申请号：JP9504275
申请日：1975-08-06
申请人： HITACHI LTD
发明人： NOZAWA HARUO , YAMAMOTO HIROSHI , UTAKA MASATOSHI
IPC分类号： H01L43/06 , H01L27/22
摘要： PURPOSE:In order to reduce the fluctuation of off-set voltage through minimizing the strain in the process of pellet fixing , in Si semiconductor device in which both hall element and drive-control circuit are formed on the identical Si Base Plate.

15. 发明专利

JPS51148200A A CHARGE BEAM APPARATUS 失效
公开(公告)号：JPS51148200A
公开(公告)日：1976-12-20
申请号：JP7150175
申请日：1975-06-13
申请人： HITACHI LTD
发明人： MATSUOKA TSUNEYA , UTAKA MASATOSHI
IPC分类号： G21K1/093 , H05H7/10
摘要： PURPOSE:A beam path is formed of a high resistance substnace at the position in which a charge beam is deflected, and the high speed deflection is enabled.

16. 发明专利

JPS51110258A 失效
公开(公告)号：JPS51110258A
公开(公告)日：1976-09-29
申请号：JP3444975
申请日：1975-03-24
申请人： HITACHI LTD
发明人： OKABE TAKAHIRO , OKAZAKI SHINJI , SUZUKI MICHIO , UTAKA MASATOSHI
IPC分类号： H01L29/73 , H01L21/20 , H01L21/205 , H01L21/331

17. 发明专利

JPS5187960A 失效
公开(公告)号：JPS5187960A
公开(公告)日：1976-07-31
申请号：JP1254775
申请日：1975-01-31
申请人： HITACHI LTD
发明人： ASANO TETSUO , DOI KONEN , MYAZAKI MASARU , UTAKA MASATOSHI
IPC分类号： H01L47/02 , C30B19/00 , H01L21/208

18. 发明专利

JPS5167065A Handotaisoshikumitateyofureemu 失效
公开(公告)号：JPS5167065A
公开(公告)日：1976-06-10
申请号：JP14049674
申请日：1974-12-09
申请人： Hitachi Ltd
发明人： SANO AKIZUMI , UTAKA MASATOSHI , YAMAMOTO HIROSHI
IPC分类号： H01L23/50 , H01L23/48

19. 发明专利

JPS5135677A 失效
公开(公告)号：JPS5135677A
公开(公告)日：1976-03-26
申请号：JP10781074
申请日：1974-09-20
申请人： HITACHI LTD
发明人： DOI KONEN , UTAKA MASATOSHI
IPC分类号： C30B19/00 , H01L21/208 , H01L21/36

20. 发明专利

JPS5111373A 失效
公开(公告)号：JPS5111373A
公开(公告)日：1976-01-29
申请号：JP8216474
申请日：1974-07-19
申请人： HITACHI LTD
发明人： YAMAMOTO HIROSHI , UTAKA MASATOSHI , ICHINOSE YUKIO , SANO AKIZUMI , NOZAWA HARUO
IPC分类号： H01L23/50 , H01L21/60 , H01L23/14 , H01L23/48

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