会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 18. 发明专利
    • Ion source unit
    • 离子源单位
    • JPS58225537A
    • 1983-12-27
    • JP10833882
    • 1982-06-25
    • Hitachi Ltd
    • TAMURA HIFUMIOKANO HIROSHIISHITANI TOORUSHIMASE AKIRA
    • H01J37/08B01J19/08H01J3/04H01J27/26H01J49/16
    • H01J27/26
    • PURPOSE: To sharply decrease the loss of an ion source material due to vaporization as well as to reduce the external pollution attributable to vaporized particles, by improving the thermal efficiency with a tip end heated directly with an electron beam, while holding the ion source material at the lower end part inside a crucible.
      CONSTITUTION: A filament 6 is heated by a heating power source 9, then high voltage is impressed between an emitter tip 3 and an ion drawing electrode 5 from an accelerating power source 8. In this case, the position of the tip 3 is minutely adjusted in vertical directions, causing the impressed field value to be minutely adjusted simultaneously. As a result, an electron beam 10 discharged out of the filament 6 is radiated to the end part of the tip 3 which is thereby heated. When the end part of the tip 3 is heated like this, an ion source material 2 is as well heated and fused by heat conduction, meaning that the ion source material 2 is fed to the tip end in succession. On the other hand, as the end of the tip 3 is being heated, the ion source material 2 is ionized and which is drawn out as an ion beam 11.
      COPYRIGHT: (C)1983,JPO&Japio
    • 目的:通过提高直接用电子束加热的顶端来提高热效率,同时保持离子源材料,从而大大降低由于汽化引起的离子源材料的损失,并且减少归因于汽化颗粒的外部污染 在坩埚内的下端部分。 构成:灯丝6由加热电源9加热,然后从加速电源8向发射极尖端3和离子吸引电极5之间施加高电压。在这种情况下,尖端3的位置被微调 在垂直方向上,使得印象的场值被同时微调。 结果,从灯丝6排出的电子束10被辐射到由此被加热的尖端3的端部。 当尖端3的端部被这样加热时,离子源材料2被加热并通过热传导而熔化,这意味着离子源材料2被连续地馈送到尖端。 另一方面,当尖端3的端部被加热时,离子源材料2被离子化并且作为离子束11被抽出。