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11. 发明专利

JPS62249436A SEMICONDUCTOR DEVICE 失效
公开(公告)号：JPS62249436A
公开(公告)日：1987-10-30
申请号：JP9210786
申请日：1986-04-23
申请人： HITACHI LTD
发明人： KOIZUMI MASAHIRO , ONUKI HITOSHI , KAWABUCHI YASUSHI , CHIKAZAKI MITSUO
IPC分类号： H01L21/60
摘要： PURPOSE:To improve junction strength between a copper ball and an electrode and improve reliability of a semiconductor device in which copper wires are employed. CONSTITUTION:Electrodes 3 of a semiconductor device are connected to leads 4 with copper bonding wires 1 and lead out. The electrode films are made of aluminum or aluminum alloy which has hardness 0.6-1.2 times of the hardness of the copper balls 6. With this constitution, as the electrode film is hard, when the ball 6 is bonded on the electrode 3, the film does not come outside the ball 6 and the ball 6 and the electrode 3 can be rubbed against each other sufficiently. Therefore, by removing the oxide films on the ball 6 and the electrode 3, large new surfaces can be obtained and high junction strength can be obtained.

12. 发明专利

JPS62176094A FORMATION OF ELECTRODES OF ELECTRONIC PARTS 失效
公开(公告)号：JPS62176094A
公开(公告)日：1987-08-01
申请号：JP1606486
申请日：1986-01-28
申请人： HITACHI LTD
发明人： TAGUCHI KAZUO , FUYAMA MORIAKI , CHIKAZAKI MITSUO , KIZAWA KENICHI , TAMURA KATSU , HASHIMOTO KENICHI , SATO AKIRA , NAKAYAMA TAKAHIRO , ABE YOSHIO
IPC分类号： H05B33/26 , G02F1/133 , G02F1/1343 , G09F9/30 , H05B33/12

13. 发明专利

JPS61238958A METHOD AND APPARATUS FOR FORMING COMPOSITE THIN FILM 失效
公开(公告)号：JPS61238958A
公开(公告)日：1986-10-24
申请号：JP7975885
申请日：1985-04-15
申请人： HITACHI LTD
发明人： NIHEI MASAYASU , SUWA MASATERU , CHIKAZAKI MITSUO
IPC分类号： C23C14/34 , C23C14/32 , C23C14/35 , C23C14/54 , H01J37/34
摘要： PURPOSE:To easily obtain a thin film having an optional compsn. with good accuracy by controlling the kinetic energy of respective ionization particles in the stage of ionizing and accelerating composite sputter vapor and forming the film by a switching sputtering method. CONSTITUTION:A DC pulse power source 1 which can change optionally a peak voltage and pulse width supply pulse electric power to targets 4, 5 consisting of different components. Semiconductor switching elements 6, 7 switch alternately DC pulses so that the vapors generated from the targets are ionized by an ionizing device consisting of a heating power source 13, a filament 16 and a thermoelectron accelerating power source 19. A DC pule power source 17 for sticking the ion particles at the optionally varied peak value or pulse width of the accelerating voltage in synchronization with the switching of the targets is provided. A differential evacuating device 20 for regulating the atm. pressure of a sputtering chamber and ion accelerating chamber and a control device 18, etc., thereof are further provided.

14. 发明专利

JPS6111314B2 JPS6111314B2 - 失效
公开(公告)号：JPS6111314B2
公开(公告)日：1986-04-02
申请号：JP10825681
申请日：1981-07-13
申请人： Hitachi Ltd
发明人： OKAYAMA AKIRA , CHIKAZAKI MITSUO , OOTAKA KYOSHI , KIKUCHI ATSUSHI
IPC分类号： C23C8/28 , C23C8/68 , C23C10/48 , C23C12/00
CPC分类号： C23C10/48 , C23C12/00

15. 发明专利

JPS613868B2 JPS613868B2 - 失效
公开(公告)号：JPS613868B2
公开(公告)日：1986-02-05
申请号：JP13669977
申请日：1977-11-16
申请人： Hitachi Ltd
发明人： CHIKAZAKI MITSUO
IPC分类号： C22F1/10

16. 发明专利

JPS60194063A Corrosion- and thermal impact-resistant coating film and its formation 失效
标题翻译：耐腐蚀和耐高温涂层膜及其形成
公开(公告)号：JPS60194063A
公开(公告)日：1985-10-02
申请号：JP4843884
申请日：1984-03-14
申请人： Hitachi Ltd
发明人： CHIKAZAKI MITSUO , OOTAKA KIYOSHI
IPC分类号： C23C4/06 , C23C10/52 , C23C10/56 , C23C14/14 , C23C26/00 , C23F17/00
CPC分类号： C23C10/52 , C23C26/00
摘要： PURPOSE:To form a coating film having excellent resistance to corrosion and thermal impact by coating an Ni or Co alloy on an Si or Co superalloy member, coating further Al thereon and subjecting the member to a heating treatment to diffuse the components of both coating films into each other. CONSTITUTION:An alloy consisting of 15-40wt% Cr, 0.005-5% B and the balance Ni or Co is coated on an Ni or Co superalloy member by an overlay coating method using physical vapor deposition, plasma spraying, etc. Al contg. a halogenation activator, etc. is coated on the 1st coating film by a diffusion penetration method. The 1st coating film and the 2nd coating film are then diffused into each other by heating the member in a non-oxidizing atmosphere, etc. The coating having excellent resistance to corrosion and thermal impact is formed on the member by the above-mentioned method. The corrosion resistance is further improved if a rare earth element such as Y, Sc or the like is added at about 0.1-1% to the 1st film.
摘要翻译：目的：通过在Si或Co超合金部件上涂覆Ni或Co合金，形成具有优异耐腐蚀性和耐热冲击性的涂膜，并在其上进一步涂覆Al，对该部件进行加热处理，使两涂层的成分扩散进入对方构成：通过使用物理气相沉积，等离子体喷涂等的覆盖涂覆方法将由15-40wt％Cr，0.005-5％B和余量Ni或Co组成的合金涂覆在Ni或Co超合金构件上。卤化活化剂等通过扩散渗透法涂覆在第一涂膜上。然后通过在非氧化性气氛等中加热构件将第一涂膜和第二涂膜相互扩散。通过上述方法在构件上形成具有优异的耐腐蚀性和热冲击性的涂层。如果将Y，Sc等稀土元素添加到第1膜的约0.1〜1％，则耐腐蚀性进一步提高。

17. 发明专利

JPS6045731A METHOD OF MONITORING CORROSION OF HIGH-TEMPERATURE MEMBER OF GAS TURBINE 失效
公开(公告)号：JPS6045731A
公开(公告)日：1985-03-12
申请号：JP15250383
申请日：1983-08-23
申请人： HITACHI LTD
发明人： OOSHIMA RIYOUICHIROU , CHIKAZAKI MITSUO , GUNJI TSUTOMU
IPC分类号： F02C7/30 , F01D21/00
摘要： PURPOSE:To monitor the corrosion of a member of a gas turbine without stopping the operation of the turbine, by providing a test piece in the combustion gas passage of the gas turbine to presume the corrosion of the gas turbine member from that of the test piece. CONSTITUTION:A small test piece insertion opening is provided in a casing 7 between the second-stage nozzle 3 and second-stage blade 4 of a gas turbine. A test piece 9 is placed in a combustion gas passage A through the insertion opening. The test piece 9 is taken out at appropriate times to presume the corrosion of the gas turbine member from that of the test piece. The corrosion of the gas turbine member can thus be monitored without stopping the operation of the gas turbine.

18. 发明专利

JPS5811778A BORON-ALUMINUM COMPOSITE COATING METHOD 失效
公开(公告)号：JPS5811778A
公开(公告)日：1983-01-22
申请号：JP10825681
申请日：1981-07-13
申请人： HITACHI LTD
发明人： OKAYAMA AKIRA , CHIKAZAKI MITSUO , OOTAKA KIYOSHI , KIKUCHI ATSUSHI
IPC分类号： C23C8/28 , C23C8/68 , C23C10/48 , C23C12/00
摘要： PURPOSE:To form a coating layer which is excellent in its heat and shock resistance and satisfactory in its corrosion resistance, by pack-treating a metallic good consisting of an Ni radical super-alloy, by use of a packing agent for Al diffusing and coating treatment containing B, thereafter, executing its heating treatment. CONSTITUTION:A gas turbine blade manufactured by an Ni radical super-alloy is embedded in a packing agent consisting of 0.8-1.2wt% B, 17-23% Al, 1-2% NH4Cl, and Al2O3 as remains, is packtreated at a temperature of

19. 发明专利

JPS57134550A DIFFUSION-COATING METHOD FOR ALLOY 失效
公开(公告)号：JPS57134550A
公开(公告)日：1982-08-19
申请号：JP1812581
申请日：1981-02-12
申请人： HITACHI LTD
发明人： OKAYAMA AKIRA , CHIKAZAKI MITSUO , OOTAKA KIYOSHI
IPC分类号： C23C10/48 , C23C12/00 , C23C12/02
摘要： PURPOSE:To form an Al diffusion-coated layer with superior thermal impact resistance and corrosion resistance on the surface of an Ni or Co alloy by forming an Al diffusion-coated layer contg. a very small amount of B and by converting it into monoaluminide. CONSTITUTION:In order to form Al diffusion-coated layers with superior mechanical strength, corrosion resistance and oxidation resistance on the surfaces of parts of a gas turbine or the like made of Ni or Co alloyk the parts are buuied in a packing material consisting of Al powder, B powder, powder of an inert refractory such as Al2O3, a halogenated activator such as NH4Cl, NH4F or NaCl, and they are heated to >=850 deg.C to form diffused layers of an intermetallic compound such as Ni2Al3 or Co2Al3 on the surfaces of the parts. At this time, the wt. ratio of B/Al in the packing material is adjusted to 0.01-0.45. The parts are then reheated to >=1.000 deg.C to convert the intermetallic compound nto NiAl or CoAl. Thus, coated layers with superior thermal impact resistance and corrosion resistance are formed.

20. 发明专利

JPS56166369A MEMBER HAVING AL COATED LAYER 失效
公开(公告)号：JPS56166369A
公开(公告)日：1981-12-21
申请号：JP6891280
申请日：1980-05-26
申请人： HITACHI LTD
发明人： OKAYAMA AKIRA , CHIKAZAKI MITSUO , OOTAKA KIYOSHI , KIZAWA KENICHI , TENNO HIROSHI
IPC分类号： C23C10/58
摘要： PURPOSE:To obtain a member having an Al coated layer with superior corrosion resistance at high temp. by dispersing a grained refractory metal having a high m.p. in a monoaluminide-Al coated layer formed on the surface of a heat resistant Ni alloy by composite coating and specifying the concn. of the grains. CONSTITUTION:A coated layer of a refractory metal having >=1,600 deg.C m.p. and Al is formed on the surface of a heat resistant alloy based on one or more among Fe, Ni and Co, and it is heated to form a monoaluminide diffused and penetrated layer. The refractory metal includes Cr, Ti, Pt, etc., and the concn. of >=1 kinds of the metals on the outermost surface of the diffused and penetrated layer is specified to 13.5-22wt%. The refractory metal is dispersed and precipitated in the monoaluminide-Al coated layer necessarily in the form of grains. When the concn. is below the lower limit, no effect is produced. On the contrary, at a concn. exceeding the upper limit the outermost surface of the Al coated layer is made porous, so the corrosion resistance at high temp. and the mechanical properties are deteriorated remarkably.

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