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11. 发明公开

KR20180054748A 유량 측정 가능한 가스 공급 장치, 유량계, 및 유량 측정 방법 审中-公开
公开(公告)号：KR20180054748A
公开(公告)日：2018-05-24
申请号：KR20187010770
申请日：2017-01-12
申请人： FUJIKIN KK
发明人： SAWADA YOHEI , IKEDA NOBUKAZU , NISHINO KOUJI , NAGASE MASAAKI
IPC分类号： G01F17/00 , G01F25/00
CPC分类号： G01F17/00 , G01F25/00
摘要： 유량측정가능한가스공급장치는, 유통하는가스유량을제어하는유량제어기와, 상기유량제어기의하류에설치된제1차단밸브와, 제1차단밸브의하류측에연통하는상기제1유로에설치된제2차단밸브와, 상기제1유로로부터분기되는제2유로와, 상기제2유로에설치된제3차단밸브와, 상기제1, 제2, 및제3차단밸브에의해둘러싸여지는유로내의압력을검출하는압력검출기와, 상기제1, 제2, 및제3차단밸브에의해둘러싸여지는유로내의온도를검출하는온도검출기와, 상기제3차단밸브의하류에접속되어기지체적을갖는체적측정용탱크와, 상기제1, 제2, 및제3차단밸브에의해둘러싸여지는유로체적을상기제3차단밸브의개방상태와폐쇄상태에보일의법칙을적용함으로써구함과아울러, 상기유로체적과상기압력검출기및 상기온도검출기의검출값을사용해서상기유량제어기의유량을연산하는연산제어장치를구비한다.

12. 发明公开

EP3222995A4 OPTICAL GAS CONCENTRATION MEASUREMENT METHOD, AND METHOD FOR MONITORING GAS CONCENTRATION BY SUCH METHOD 有权
公开(公告)号：EP3222995A4
公开(公告)日：2018-06-06
申请号：EP15860939
申请日：2015-11-20
申请人： FUJIKIN KK , UNIV TOHOKU
发明人： NAGASE MASAAKI , NISHINO KOUJI , IKEDA NOBUKAZU , YAMAJI MICHIO , SUGAWA SHIGETOSHI , KURODA RIHITO
IPC分类号： G01N21/31 , C23C16/18 , C23C16/52 , G01N33/00 , H01L21/205
CPC分类号： G01N21/27 , C23C16/18 , C23C16/52 , G01N21/314 , G01N21/3151 , G01N21/33 , G01N33/0027 , G01N2021/3155 , G01N2021/3159 , G01N2021/3181 , G01N2201/0627 , G01N2201/0696 , G01N2201/12 , H01L21/205
摘要： To provide a concentration measurement method with which the concentrations of predetermined chemical components can be measured non-destructively, accurately, and rapidly by a simple means, up to the concentrations in trace amount ranges, as well as a concentration measurement method with which the concentrations of chemical components in a measurement target can be accurately and rapidly measured in real time up to the concentrations in nano-order trace amount ranges, and which is endowed with a versatility that can be realized in a variety of embodiments and modes. [Solution] In the present invention, a measurement target is irradiated, in a time sharing manner, with light of a first wavelength and light of a second wavelength that have different optical absorption rates with respect to the measurement target. The light of each wavelength, arriving optically via the measurement target as a result of irradiation with the light of each wavelength, is received at a shared light-receiving sensor. A differential signal is formed, the differential signal being of a signal pertaining to the light of the first wavelength and a signal pertaining to the light of the second wavelength, the signals outputted from the light-receiving sensor upon receipt of the light. The concentration of a chemical component in the measurement target is derived on the basis of the differential signal.

13. 发明公开

EP0969342A4 FLUID SUPPLY APPARATUS 有权
标题翻译： FLUIDZUFUHRVORRICHTUNG
公开(公告)号：EP0969342A4
公开(公告)日：2004-05-19
申请号：EP99900168
申请日：1999-01-11
申请人： FUJIKIN KK , TOKYO ELECTRON LTD , OHMI TADAHIRO
发明人： OHMI TADAHIRO , KAGAZUME TETU , SUGIYAMA KAZUHIKO , DOHI RYOUSUKE , MINAMI YUKIO , NISHINO KOUJI , KAWATA KOUJI , IKEDA NOBUKAZU , YAMAJI MICHIO
IPC分类号： F16K31/06 , C01B5/00 , G05D7/06 , G05D11/13 , G05D21/00
CPC分类号： G05D7/0635 , Y10T137/7759 , Y10T137/7761
摘要： A fluid supply apparatus comprising a pressure flow controller for controlling the rate of flow of fluid, a fluid selector valve for opening/closing the fluid passage on the secondary side, and a fluid supply controller for controlling the operation of them, wherein the pressure flow controller is provided with an orifice (5), a control valve (1) provided on the upstream side of the orifice (5), a pressure sensor (3) provided between the control valve (1) and the orifice (5), and an operation controller (6) for outputting to a driver (2) of the control valve (1) a control signal (Qy) representing the difference between a rate-of-flow signal (Qc=KP1) generated by calculation based on the pressure (P1) measured by the pressure sensor (3) and a rate-of-flow command signal (Qs), and the pressure (P1) on the upstream side of the orifice (5) is adjusted by opening/closing the control valve (1) so as to regulate the rate of flow on the downstream side of the orifice (5).
摘要翻译： 1。一种流体供给装置，其特征在于，具有：控制流体的流量的压力流量控制器;开闭二次侧的流体通路的流体切换阀;以及控制它们的动作的流体供给控制器，（5），设置在节流孔（5）的上游侧的控制阀（1），设置在控制阀（1）和节流孔（5）之间的压力传感器（3），以及（6），用于向控制阀（1）的驱动器（2）输出表示通过基于压力的计算产生的流量信号（Qc = KP1）之间的差值的控制信号（Qy）（3）测量的压力（P1）和流量指令信号（Qs），并且通过打开/关闭控制阀（5）来调节节流孔（5）上游侧的压力（P1） 1）以调节孔口（5）下游侧的流量。

14. 发明公开

EP1126260A4 PRESSURE DETECTOR MOUNTING STRUCTURE 审中-公开
标题翻译：固定压力传感器的阶
公开(公告)号：EP1126260A4
公开(公告)日：2003-07-09
申请号：EP00949991
申请日：2000-08-03
申请人： FUJIKIN KK , TOKYO ELECTRON LTD , OHMI TADAHIRO
发明人： OHMI TADAHIRO , HIROSE TAKASHI , IDETA EIJI , IKEDA NOBUKAZU , DOHI RYOUSUKE , NISHINO KOUJI , YOSHIKAWA KAZUHIRO , KAGATSUME SATOSHI , HIROSE JUN , FUKASAWA KAZUO , KOIZUMI HIROSHI , NAGAOKA HIDEKI
IPC分类号： G01L9/04 , G01L9/00 , G01L19/00 , G01L19/04 , G01L19/06 , G01L19/14 , G01L7/08
CPC分类号： G01L19/0023 , G01L19/0645 , G01L19/145 , G01L19/147
摘要： A pressure detector mounting structure capable of preventing a diaphragm from being deformed by a stress acting on a diaphragm type pressure detector and output characteristics and temperature characteristics from being varied when the pressure detector is incorporated in a fixture provided in a piping or equipment, wherein the pressure detector formed by fixedly combining a diaphragm base having a diaphragm with a sensor base incorporating a sensor element operating according to the displacement of the diaphragm is inserted into an inserting hole through a gasket and pressed air-tight fixedly from the upper side using a pressing member, the pressing member and the gasket are brought into contact with the upper and lower surfaces of a main body of the diaphragm base, respectively, and a shallow groove is formed in ring-shape in the lower surface of the main body on the inner side of a part in contact with the gasket so as to off set a deformation produced by a pressing force from the pressing member through the shallow groove.

15. 发明公开

EP0751301A3 Fluid control apparatus 失效
标题翻译：流体管理设备
公开(公告)号：EP0751301A3
公开(公告)日：1998-07-15
申请号：EP96110514
申请日：1996-06-28
申请人： OHMI TADAHIRO , FUJIKIN KK
发明人： OHMI TADAHIRO , HIRAO KEIJI , YAMAJI MICHIO , ITOI SHIGERU , SHINOHARA TSUTOMU , IKEDA NOBUKAZU , KOJIMA TETSUYA
IPC分类号： G05D7/06 , F15B13/00 , F15B13/08 , G05D16/20
CPC分类号： F15B13/0832 , F15B13/0817 , F15B13/0871 , Y10T137/5109 , Y10T137/5283 , Y10T137/87885
摘要： A fluid control apparatus (1) comprises a mass flow controller (2), two on-off valves (3,4) disposed at the inlet side of the controller and three on-off valves (5,6,7) disposed at the outlet side of the controller. At the inlet side, a main fluid on-off valve (4) is positioned on a purge fluid on-off valve (3), and at the outlet side, a vent on-off valve (6) is positioned on a vacuum suction on-off valve (5), with a main passage on-off valve (7) further positioned on the vent on-off valve (6).

16. 发明公开

EP1707858A4 VACUUM HEAT INSULATION VALVE 审中-公开
标题翻译： VAKUUMWÄRMEISOLIERVENTIL
公开(公告)号：EP1707858A4
公开(公告)日：2008-10-08
申请号：EP05703504
申请日：2005-01-13
申请人： FUJIKIN KK , OHMI TADAHIRO
发明人： OHMI TADAHIRO , MINAMI YUKIO , TUBOTA KENJI , SHINOHARA TSUTOMU , YAMAJI MICHIO , IKEDA NOBUKAZU , MORIMOTO AKIHIRO , KAWADA KOJI , NARIAI TOSHIRO
IPC分类号： F16K51/00 , F16L59/06 , F16K27/00 , F16K51/02
CPC分类号： F16K51/02 , Y10T137/6606 , Y10T137/7043 , Y10T137/7062
摘要： A vacuum heat insulation valve that can be used in high-temperature conditions in a gas supply system and gas discharge system and that can be drastically reduced in size and made compact because of excellent heat insulating performance of the valve. A vacuum heat insulation valve constructed from a valve that has a valve body and an actuator and from a vacuum insulation box that receives the valve. The vacuum heat insulation box (S) is constructed from a rectangular lower vacuum jacket (S5) that has on its side face a tubular vacuum insulation piping receiving section (J) and whose upper face is opened, and from a rectangular upper vacuum jacket (S4) that is air-tightly fitted to the lower vacuum jacket (S5) from the above and whose lower face is opened.
摘要翻译：一种真空绝热阀，可用于供气系统和排气系统的高温条件下，由于阀门具有优异的绝热性能，可大幅度减小尺寸并制成紧凑的结构。由阀门构成的真空隔热阀，该阀门具有阀体和致动器，以及来自容纳阀门的真空绝热箱。真空隔热箱（S）由矩形的下部真空夹套（S5）构成，其侧面具有管状真空隔热管接收部分（J）并且其上表面开口，并且从矩形上部真空夹套 S4）从上方气密地装配到下部真空夹套（S5）并且其下表面打开。

17. 发明公开

EP1672457A4 DEVICE FOR CONTROLLING CHAMBER INNER PRESSURE AND INNER PRESSURE CONTROLLED-TYPE CHAMBER 审中-公开
标题翻译：一种用于控制腔内部压力和室内压控制型
公开(公告)号：EP1672457A4
公开(公告)日：2008-02-13
申请号：EP04817112
申请日：2004-09-14
申请人： FUJIKIN KK , OHMI TADAHIRO
发明人： OHMI TADAHIRO , TERAMOTO AKINOBU , UNO TOMIO , DOHI RYOUSUKE , NISHINO KOUJI , NAKAMURA OSAMU , MATSUMOTO ATSUSHI , NAGASE MASAAKI , IKEDA NOBUKAZU
IPC分类号： G05D7/06 , G05D16/20
CPC分类号： G05D16/208 , Y10T137/7761 , Y10T137/8741 , Y10T137/87507
摘要： Flow rate control accuracy is prevented from being reduced in a low flow rate region to enable highly accurate flow rate control over the entire flow rate control region. By this, a chamber inner pressure is highly accurately controlled over a wide range by regulating the flow rate of a gas fed to a chamber. A gas feeding device for feeding a gas to a chamber, where the device is constituted of parallelly connected pressure-type flow rate control devices and a control device for controlling the flow rate control devices and feeds a desired gas, while controlling the flow rate, to a chamber deaerated by a vacuum pump. The gas feeding device is constructed such that one of the pressure-type flow control devices controls a gas flow rate range of up to 10% maximum of the maximum flow rate fed to the chamber and the remaining flow control devices control the remaining range. Further, a pressure detector is installed on a chamber and a detected value from the detector is inputted in the control device. Control signals to the pressure-type flow rate control devices are regulated to control the amount of the gas fed to the chamber, controlling a chamber inner pressure.

18. 发明公开

EP1719981A4 FLUID SENSOR OF ANTICORROSIVE METAL AND FLUID SUPPLY DEVICE USING SAME 审中-公开
标题翻译：耐腐蚀金属和流体供给装置的流体传感器，其
公开(公告)号：EP1719981A4
公开(公告)日：2007-11-07
申请号：EP05703505
申请日：2005-01-13
申请人： FUJIKIN KK
发明人： HIRATA KAORU , IKEDA NOBUKAZU , NISHINO KOUJI , DOHI RYOUSUKE
IPC分类号： G01F1/00 , G01F1/68 , G01F1/684 , G01F1/692 , G01F1/696 , G01F15/04 , G01L9/00 , G01L19/00 , G05D7/06
CPC分类号： G01L19/0023 , G01F1/6842 , G01F1/6845 , Y10T137/7761
摘要： A fluid sensor of an anticorrosive metal comprises a thermal mass flow sensor having an enhanced anticorrosiveness. The measurement accuracy is stable against pressure variation, the response is improved, the senor is free of particles, variation of product quality is prevented, and pressure measurement is possible. A fluid supply device using this fluid sensor is also disclosed. Specifically, the fluid sensor comprises an anticorrosive metal substrate (2), a mass flow sensor section (1) composed of a thin film forming a temperature sensor (3a) and a heater (3b) provided on the back side opposite to the front side of a fluid-contact body of the anticorrosive metal substrate (2), and a pressure sensor section (4) composed of a thin film forming a strain sensor element (4a) provided on the back side opposite to the front side of the fluid-contact body of the anticorrosive metal substrate (2). This fluid sensor is for measuring the mass flow and pressure of a fluid.

19. 发明公开

EP1643218A4 DIFFERENTIAL PRESSURE TYPE FLOWMETER AND DIFFERENTIAL PRESSURE TYPE FLOWMETER CONTROLLER 审中-公开
标题翻译：差压式和流量计控制差压式流量计
公开(公告)号：EP1643218A4
公开(公告)日：2007-05-09
申请号：EP04746098
申请日：2004-06-18
申请人： FUJIKIN KK , OHMI TADAHIRO
发明人： OHMI TADAHIRO , SUGIYAMA KAZUHIKO , UNO TOMIO , IKEDA NOBUKAZU , NISHINO KOUJI , NAKAMURA OSAMU , DOHI RYOUSUKE , MATSUMOTO ATSUSHI
IPC分类号： G01F1/42 , G01F1/00 , G01F1/50 , G01F1/88 , G01F7/00 , G05D7/06
CPC分类号： G01F1/50 , G01F1/42 , G05D7/0635
摘要： A differential pressure type flow meter in which production cost is lowered by simplifying the structure and high-accuracy measurement of flow rate can be carried out in real time under inline state with an error E not higher than (1%SP) over a wide flow rate range of 100%-1%. The differential pressure type flow meter comprises an orifice, a detector of pressure P1 on the upstream side of the orifice, a detector of pressure P2 on the downstream side of the orifice, a detector of fluid temperature T on the upstream side of the orifice, and a control operation circuit for operating the flow rate Q of fluid passing through the orifice using detected pressures P1 and P2 and detected temperature T from respective detectors, wherein the flow rate Q of fluid is operated according to the following expression; Q=C1.P1/√T.((P2/P1) -(P2/P1) ) (where, C1 is a proportional constant, m and n are constants).

20. 发明公开

EP1596107A4 DIAPHRAGM VALVE FOR VACUUM EVACUATION SYSTEM 有权
标题翻译：蝶阀抽真空系统
公开(公告)号：EP1596107A4
公开(公告)日：2006-05-17
申请号：EP04709325
申请日：2004-02-09
申请人： FUJIKIN KK , OHMI TADAHIRO
发明人： OHMI TADAHIRO , IKEDA NOBUKAZU , YAMAJI MICHIO , KITANO MASAFUMI , MORIMOTO AKIHIRO
IPC分类号： F04B45/04 , F16K7/16 , F16K51/02 , F16K7/12 , F16K27/00
CPC分类号： F16K7/16 , F16K51/02
摘要： A diaphragm valve for a vacuum evacuation system applicable to a semiconductor manufacturing system. Corrosion of members due to deposition/adhesion of products produced by thermolysis of gas, clogging due to products, and seat leakage are prevented. This diaphragm valve leads to reduction in the scale of the vacuum evacuation system facility, reduction in cost, and reduction in diameter of piping of the vacuum evacuation system for the purpose of decrease in vacuum evacuation time. Specifically, the diaphragm valve (1) comprises a body (2) having an inlet passage (6), an outlet passage (7), and a valve seat (8) provided between the passages, a diaphragm (3) which is provided to the body (2) and can be separated from the valve seat (8) and brought into contact with the same, and drive means (4) provided to the body (2) and adapted to separate the diaphragm (3) from the valve seat (8) and to bring the diaphragm (3) into contact with the same. The portion (25) of the body (2) and the portion (25) of the diaphragm (3) both coming into contact with a fluid are coated with a synthetic resin coating (5) of predetermined thickness.

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