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11. 发明授权

US07713667B2 System and method for generating pattern data used to control a pattern generator 有权
标题翻译：用于生成用于控制图案生成器的图案数据的系统和方法
公开(公告)号：US07713667B2
公开(公告)日：2010-05-11
申请号：US10998991
申请日：2004-11-30
申请人： Azat M. Latypov , Arno Jan Bleeker , Jang Fung Chen , Kars Zeger Troost
发明人： Azat M. Latypov , Arno Jan Bleeker , Jang Fung Chen , Kars Zeger Troost
IPC分类号： G03F9/00
CPC分类号： G03F7/70441 , G03F7/70291 , G03F7/70508
摘要： A method and system are used to modify pattern data obtained in relation to a pattern on a static patterning device. It is suggested that, in an example when a maskless lithography tool is used, continuous OPC-enhanced features used for maskless lithography rasterization should include a variation in local amplitude and phase transmittance that matches modulation capabilities of a patterning device being used. The modified pattern data is used by a dynamic patterning device to pattern impinging light, which is then projected onto an object. The system and method comprise using a pattern data generating device, a modification device, a dynamic pattern generator, and a projection system. The pattern data generating device generates pattern data corresponding to a pattern on a static patterning device. The modification device receives the pattern data and modifies the pattern data using characteristics of a type of the dynamic pattern generator being used. The dynamic pattern generator receives the modified patterned data and uses the modified pattern data to pattern the beam of radiation. The projection system projects the patterned beam onto the object.
摘要翻译：使用方法和系统来修改相对于静态图案形成装置上的图案获得的图案数据。建议在使用无掩模光刻工具的示例中，用于无掩模光刻光栅化的连续OPC增强特征应包括与正在使用的图案形成装置的调制能力相匹配的局部振幅和相位透射率的变化。修改的图案数据由动态图案形成装置用于对入射光进行图案化，然后将其投影到物体上。该系统和方法包括使用图案数据生成装置，修改装置，动态图案生成器和投影系统。图案数据生成装置生成与静态图案形成装置上的图案对应的图案数据。修改设备接收图案数据，并使用所使用的动态图案生成器的类型的特性来修改图案数据。动态图案生成器接收经修改的图案数据并使用经修改的图案数据来对辐射束进行图案化。投影系统将图案化的光束投射到物体上。

12. 发明授权

US07542013B2 System and method for imaging enhancement via calculation of a customized optimal pupil field and illumination mode 有权
标题翻译：通过计算定制的最佳瞳孔场和照明模式来进行成像增强的系统和方法
公开(公告)号：US07542013B2
公开(公告)日：2009-06-02
申请号：US11046236
申请日：2005-01-31
申请人： Azat M. Latypov , Wenceslao A. Cebuhar , Jason D. Hintersteiner
发明人： Azat M. Latypov , Wenceslao A. Cebuhar , Jason D. Hintersteiner
IPC分类号： G02F1/1335 , G02B26/00
CPC分类号： G03F7/70116
摘要： A system and method for patterning a beam of radiation based on a pupil field distribution. In an embodiment, the distribution of the field in an area of the pupil plane affecting an image and an illumination mode are selected so as to render an image with desired characteristics. Additionally and/or alternatively, an illumination mode is selected so as to render an image with desired characteristics. The distribution of the field in an area of the pupil plane affecting an image is then realized using the spatial light modulator The system and method include using an illumination system, a pattern generator, and a projector. The illumination system supplies a beam of radiation. The pattern generator patterns the beam of radiation based on a data set corresponding to a field distribution in a pupil plane. The projector projects the patterned beam onto a target portion of an object.
摘要翻译：一种基于瞳孔场分布图案化辐射束的系统和方法。在一个实施例中，选择影响图像和照明模式的光瞳平面区域中的场的分布，以使得具有期望特性的图像。另外和/或可选地，选择照明模式以便渲染具有期望特性的图像。然后使用空间光调制器实现影像影像的瞳平面区域的场分布。该系统和方法包括使用照明系统，图案发生器和投影仪。照明系统提供一束辐射。图案发生器基于与瞳孔平面中的场分布相对应的数据集来对辐射束进行图案化。投影仪将图案化的光束投射到物体的目标部分上。

13. 发明授权

US07158238B2 System and method for calibrating a spatial light modulator array using shearing interferometry 有权
标题翻译：使用剪切干涉法校准空间光调制器阵列的系统和方法
公开(公告)号：US07158238B2
公开(公告)日：2007-01-02
申请号：US11150344
申请日：2005-06-13
申请人： Azat M. Latypov , Sherman K. Poultney
发明人： Azat M. Latypov , Sherman K. Poultney
IPC分类号： G01B9/02 , G01J1/20
CPC分类号： G03F7/70591 , G01J9/0215 , G02B26/0833 , G03F7/70291
摘要： A system for calibrating a spatial light modulator array includes an illumination system and a spatial light modulator array that reflects or transmits light from the illumination system. A projection optical system images the spatial light modulator array onto an image plane. A shearing interferometer creates an interference pattern in the image plane. A controller controls modulation of elements of the spatial light modulator array. The shearing interferometer includes a diffraction grating, a prism, a folding mirror or any other arrangement for generating shear. The shearing interferometer can be a stretching shearing interferometer, a lateral shearing interferometer, or a rotational shearing interferometer. The shearing interferometer may include a diffraction grating with a pitch corresponding to a shear of the light by an integer number of elements. The projection optics resolves each element of the spatial light modulator array in the image plane. The controller can modulate alternate columns of elements of the spatial light modulator array.
摘要翻译：用于校准空间光调制器阵列的系统包括照明系统和反射或透射来自照明系统的光的空间光调制器阵列。投影光学系统将空间光调制器阵列成像到平面上。剪切干涉仪在图像平面中产生干涉图案。控制器控制空间光调制器阵列的元件的调制。剪切干涉仪包括衍射光栅，棱镜，折叠镜或用于产生剪切的任何其它布置。剪切干涉仪可以是拉伸剪切干涉仪，横向剪切干涉仪或旋转剪切干涉仪。剪切干涉仪可以包括衍射光栅，其具有对应于整个数量的光的剪切的间距。投影光学器件可以分辨图像平面中空间光调制器阵列的每个元素。控制器可以调制空间光调制器阵列的元件的交替列。

14. 发明授权

US07889411B2 System and method for calculating aerial image of a spatial light modulator 有权
标题翻译：用于计算空间光调制器的空间图像的系统和方法
公开(公告)号：US07889411B2
公开(公告)日：2011-02-15
申请号：US12125844
申请日：2008-05-22
申请人： Azat M. Latypov
发明人： Azat M. Latypov
IPC分类号： G02B26/00
CPC分类号： G03F7/70441 , G03F7/70283 , G03F7/70291 , G03F7/705 , G03F7/70508 , G03F7/70666
摘要： A method of calculating an aerial image of a spatial light modulator array includes calculating pair-wise interference between pixels of the spatial light modulator array; calculating effective graytones corresponding to modulation states of the pixels; and calculating the aerial image based on the pair-wise interference and the effective graytones. The graytones depend only on the modulation states of the pixels. The pair-wise interference depends only on position variables. The position variables are position in an image plane and position in a plane of a source of electromagnetic radiation. The pair-wise interference can be represented by a matrix of functions. The pair-wise interference can be represented by a four dimensional matrix. The effective graytones are approximated using sinc functions, or using polynomial functions.
摘要翻译：计算空间光调制器阵列的空间像的方法包括计算空间光调制器阵列的像素之间的成对干涉; 计算与像素的调制状态对应的有效灰度; 并基于成对干扰和有效灰度计算航空图像。灰度只取决于像素的调制状态。成对干扰仅取决于位置变量。位置变量是图像平面中的位置和电磁辐射源的平面中的位置。成对干扰可以由功能矩阵表示。成对干扰可以由四维矩阵表示。使用sinc函数或使用多项式函数近似有效的灰度。

15. 发明授权

US07688423B2 Methods and systems to compensate for a stitching disturbance of a printed pattern in a maskless lithography system not utilizing overlap of the exposure zones 有权
标题翻译：用于补偿不使用曝光区重叠的无掩模光刻系统中印刷图案的缝合干扰的方法和系统
公开(公告)号：US07688423B2
公开(公告)日：2010-03-30
申请号：US12178522
申请日：2008-07-23
申请人： Arno Bleeker , Wenceslao A. Cebuhar , Azat M. Latypov
发明人： Arno Bleeker , Wenceslao A. Cebuhar , Azat M. Latypov
IPC分类号： G03B27/42 , G03B27/68
CPC分类号： G03F7/70291 , G03F7/70475
摘要： A method and system are provided for forming a pattern within an area of a photosensitive surface. An exemplary method includes performing a first exposure of the photosensitive surface in accordance with predetermined image data, wherein the first exposure occurs during a first pass and produces a first image within the area. The image data is adjusted to compensate for identified image deficiencies image deficiencies, the image deficiencies being within a region of the first image. A second exposure, of the photosensitive surface, is performed in accordance with the adjusted image data during a second pass.
摘要翻译：提供了一种用于在感光表面的区域内形成图案的方法和系统。一种示例性方法包括根据预定图像数据执行感光表面的第一曝光，其中第一曝光在第一次通过期间发生并在该区域内产生第一图像。调整图像数据以补偿识别的图像缺陷图像缺陷，图像缺陷在第一图像的区域内。在第二次通过期间，根据调整后的图像数据执行感光表面的第二次曝光。

16. 发明授权

US07580559B2 System and method for calibrating a spatial light modulator 失效
标题翻译：用于校准空间光调制器的系统和方法
公开(公告)号：US07580559B2
公开(公告)日：2009-08-25
申请号：US10765948
申请日：2004-01-29
申请人： Azat M. Latypov , Sherman K. Poultney
发明人： Azat M. Latypov , Sherman K. Poultney
IPC分类号： G06K9/00 , G06K9/20 , G03C5/00 , G02B26/00
CPC分类号： G03F7/70291 , G02B27/58
摘要： A method and system as used to calibrate a reflective SLM. The system can include the SLM having an array of pixels and a projection optical system resolving individual pixels and having an apodized pupil. During a calibration operation, the pixels of the SLM receive varying voltage values to move them through various angles. Light reflecting from the pixels during these movements forms individual images for each pixel at each angle. The light passes through the apodized pupil and is received on one or more sections of a detector. The apodization pattern is selected so that individual pixels remain well resolved with strong sensitivity to the pixel mirror tilt. The light intensity received for each pixel at each angle is correlated to the voltage value received at the pixel to tilt the pixel to that angle producing a result signal used by a control device to calibrate the SLM.
摘要翻译：用于校准反光SLM的方法和系统。该系统可以包括具有像素阵列的SLM和分辨各个像素并具有变迹光瞳的投影光学系统。在校准操作期间，SLM的像素接收变化的电压值以将它们移动通过各种角度。在这些移动期间从像素反射的光在每个角度形成每个像素的单独图像。光穿过变迹的瞳孔并被接收在检测器的一个或多个部分上。选择变迹图案，使得各个像素以对像素镜倾斜的强敏感性保持良好地分辨。在每个角度处为每个像素接收的光强度与在像素处接收的电压值相关，以将像素倾斜到该角度，产生由控制装置用于校准SLM的结果信号。

17. 发明申请

US20080219562A1 System and Method for Calculating Aerial Image of a Spatial Light Modulator 有权
标题翻译：用于计算空间光调制器的空中图像的系统和方法
公开(公告)号：US20080219562A1
公开(公告)日：2008-09-11
申请号：US12125844
申请日：2008-05-22
申请人： Azat M. Latypov
发明人： Azat M. Latypov
IPC分类号： G06K9/76
CPC分类号： G03F7/70441 , G03F7/70283 , G03F7/70291 , G03F7/705 , G03F7/70508 , G03F7/70666
摘要： A method of calculating an aerial image of a spatial light modulator array includes calculating pair-wise interference between pixels of the spatial light modulator array; calculating effective graytones corresponding to modulation states of the pixels; and calculating the aerial image based on the pair-wise interference and the effective graytones. The graytones depend only on the modulation states of the pixels. The pair-wise interference depends only on position variables. The position variables are position in an image plane and position in a plane of a source of electromagnetic radiation. The pair-wise interference can be represented by a matrix of functions. The pair-wise interference can be represented by a four dimensional matrix. The effective graytones are approximated using sinc functions, or using polynomial functions.
摘要翻译：计算空间光调制器阵列的空间像的方法包括计算空间光调制器阵列的像素之间的成对干涉; 计算与像素的调制状态对应的有效灰度; 并基于成对干扰和有效灰度计算航空图像。灰度只取决于像素的调制状态。成对干扰仅取决于位置变量。位置变量是图像平面中的位置和电磁辐射源的平面中的位置。成对干扰可以由功能矩阵表示。成对干扰可以由四维矩阵表示。使用sinc函数或使用多项式函数近似有效的灰度。

18. 发明授权

US07102733B2 System and method to compensate for static and dynamic misalignments and deformations in a maskless lithography tool 有权
标题翻译：用于补偿无掩模光刻工具中的静态和动态不对准和变形的系统和方法
公开(公告)号：US07102733B2
公开(公告)日：2006-09-05
申请号：US10917380
申请日：2004-08-13
申请人： Azat M. Latypov , Christopher J. Mason , Sherman K. Poultney , Arno J. Bleeker
发明人： Azat M. Latypov , Christopher J. Mason , Sherman K. Poultney , Arno J. Bleeker
IPC分类号： G03B27/54 , G03B27/42
CPC分类号： G03F7/70508 , G03F7/70291 , G03F7/70433 , G03F7/70616
摘要： The present invention provides systems and methods for maskless lithographic printing that compensate for static and/or dynamic misalignments and deformations. In an embodiment, a misalignment of a pattern formed by a spatial light modulator is measuring during printing. Rasterizer input data is generated based on the measured misalignment and passed the rasterizer. The rasterizer generates pattern data, based on the rasterizer input data, that is adjusted to compensate for the measured misalignment. The pattern data generated by the rasterizer is passed to the spatial light modulator and used to form a second pattern, which includes compensation for the measured misalignment. In an embodiment, deformations caused, for example, by a warping a surface of the spatial light modulator are measured and used by the rasterizer to generate pattern data that compensates for the deformations.
摘要翻译：本发明提供了用于无光平版印刷的系统和方法，其补偿静态和/或动态的不对准和变形。在一个实施例中，在打印期间测量由空间光调制器形成的图案的未对准。光栅化器输入数据基于测量的未对准生成，并通过光栅化器。光栅化器基于光栅化器输入数据生成图案数据，其被调整以补偿测量的未对准。由光栅化器产生的图案数据被传递到空间光调制器并用于形成第二图案，其包括对所测量的未对准的补偿。在一个实施例中，例如通过使空间光调制器的表面翘曲引起的变形被光栅化器测量和使用，以产生补偿变形的图案数据。

19. 发明授权

US06963434B1 System and method for calculating aerial image of a spatial light modulator 有权
标题翻译：用于计算空间光调制器的空间图像的系统和方法
公开(公告)号：US06963434B1
公开(公告)日：2005-11-08
申请号：US10835403
申请日：2004-04-30
申请人： Azat M. Latypov
发明人： Azat M. Latypov
IPC分类号： H01L21/027 , G02B26/00 , G02F1/00 , G03B27/42 , G03F1/00 , G03F7/20 , G03F9/00 , G09G5/02 , H04N11/20
CPC分类号： G03F7/70441 , G03F7/70283 , G03F7/70291 , G03F7/705 , G03F7/70508 , G03F7/70666
摘要： A method of calculating an aerial image of a spatial light modulator array includes calculating a pixel interference matrix that represents pair wise interference between pixels of the spatial light modulator array; calculating effective graytones corresponding to modulation states of the pixels; and calculating the aerial image based on the pixel interference matrix and the effective graytones. The graytones depend only on the modulation states of the pixels. The pixel interference matrix depends only on position variables. The position variables are position in an image plane and position in a plane of a source of electromagnetic radiation. The pixel interference matrix can be a matrix of functions. The pixel interference matrix can be a four dimensional matrix. The effective graytones are approximated using sinc functions, or using polynomial functions.
摘要翻译：计算空间光调制器阵列的空间图像的方法包括：计算表示空间光调制器阵列的像素之间的成对干涉的像素干涉矩阵; 计算与像素的调制状态对应的有效灰度; 并基于像素干涉矩阵和有效灰度来计算空间图像。灰度只取决于像素的调制状态。像素干涉矩阵仅取决于位置变量。位置变量是图像平面中的位置和电磁辐射源的平面中的位置。像素干涉矩阵可以是函数矩阵。像素干涉矩阵可以是四维矩阵。使用sinc函数或使用多项式函数近似有效的灰度。

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