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    • 15. 发明申请
    • METHOD FOR MANUFACTURING SILICON MATTER FOR PLASMA PROCESSING APPARATUS
    • 用于制造等离子体加工装置的硅材料的方法
    • WO2008102938A1
    • 2008-08-28
    • PCT/KR2007/003735
    • 2007-08-02
    • HANA SILICONTEC INC.LEE, Gon SubPARK, Jea Gun
    • LEE, Gon SubPARK, Jea Gun
    • B28D5/02B28D5/00
    • B28D5/02B28D1/041B28D5/00
    • The present invention relates to a method for manufacturing silicon articles for a plasma processing apparatus. The present invention provides a method for manufacturing silicon articles, comprising: preparing a silicon ingot; forming a hollow silicon cylinder and a silicon core cylinder having a diameter less than that of the silicon ingot by coring the silicon ingot; forming a silicon annular plate having a central opening by cutting the hollow silicon cylinder and forming a silicon electrode plate by cutting the silicon core cylinder; and forming a silicon ring by processing the silicon annular plate and forming a silicon electrode by processing the silicon electrode plate. According to the present invention, a hollow silicon cylinder and a silicon core cylinder are manufactured by coring a cylindrical silicon ingot before the silicon ingot is sliced. They are used to manufacture silicon articles, such as a silicon ring and a silicon electrode, so that the production cost for the silicon articles can be reduced.
    • 本发明涉及一种用于制造等离子体处理装置的硅制品的方法。 本发明提供一种制造硅制品的方法,包括:制备硅锭; 通过使所述硅锭取芯,形成直径小于所述硅锭直径的中空硅圆柱体和硅芯圆筒; 通过切割中空硅圆柱形成具有中心开口的硅环形板,并通过切割硅芯圆筒形成硅电极板; 以及通过处理硅环形板并通过加工硅电极板形成硅电极来形成硅环。 根据本发明,通过在硅锭切片之前使圆柱形硅锭取芯来制造中空硅圆筒和硅芯圆筒。 它们用于制造诸如硅环和硅电极的硅制品,从而可以降低硅制品的生产成本。