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11. 发明申请

US20110032047A1 PULSE MODULATED RF POWER CONTROL METHOD AND PULSE MODULATED RF POWER SUPPLY DEVICE 有权
标题翻译：脉冲调制RF功率控制方法和脉冲调制射频供电装置
公开(公告)号：US20110032047A1
公开(公告)日：2011-02-10
申请号：US12781431
申请日：2010-05-17
申请人： Itsuo Yuzurihara , Yoshihisa Hata
发明人： Itsuo Yuzurihara , Yoshihisa Hata
IPC分类号： H03K7/10
CPC分类号： H01J37/32183 , H01J37/32082 , H02M7/48 , H02M2001/007 , H03F3/191 , H03F3/217 , H03K7/08 , H03K7/10
摘要： The pulse modulated RF power control method includes an output amplitude control step for controlling amplitude of a pulse output, and a duty control step for controlling a duty ratio of the pulse output. The output amplitude control step performs a constant amplitude control to control an amplitude value of the pulse output so that the amplitude value becomes equal to a set amplitude value. The constant amplitude control according to the output amplitude control, for instance, gives a feedback of the amplitude value of the pulse output outputted by the power control, obtains a difference value between the feedback value and the set amplitude value, and controls the amplitude value of the pulse output so that the difference value becomes zero.
摘要翻译：脉冲调制RF功率控制方法包括用于控制脉冲输出的幅度的输出幅度控制步骤和用于控制脉冲输出的占空比的占空比控制步骤。输出幅度控制步骤执行恒定幅度控制以控制脉冲输出的幅度值，使得振幅值变得等于设定的振幅值。例如，根据输出幅度控制的恒定幅度控制给出由功率控制输出的脉冲输出的振幅值的反馈，获得反馈值和设定振幅值之间的差值，并且控制振幅值的脉冲输出，使得差值变为零。

12. 发明授权

US06777881B2 Power supply apparatus for generating plasma 有权
标题翻译：用于产生等离子体的电源装置
公开(公告)号：US06777881B2
公开(公告)日：2004-08-17
申请号：US10292580
申请日：2002-11-13
申请人： Itsuo Yuzurihara , Masahiro Kikuchi , Toyoaki Suenaga , Yoichi Ishikawa
发明人： Itsuo Yuzurihara , Masahiro Kikuchi , Toyoaki Suenaga , Yoichi Ishikawa
IPC分类号： H01J724
CPC分类号： H01J37/32174 , H01J37/32082 , H02M7/5387 , H05H1/46
摘要： A power supply apparatus for generating a plasma for supplying a high-frequency power to a plasma generating device which is a load. The power supply apparatus comprises: a DC power supply; a power conversion circuit which comprises an amplifier circuit of D-class comprising a plurality of switching elements, and which converts a DC power output of the DC power supply to a high-frequency power to output; and a load impedance conversion circuit which converts a load impedance to a predetermined delayed load, wherein the power supply apparatus is adapted to supply the high-frequency power output from the power conversion circuit to a plasma generating device through the load impedance conversion circuit.
摘要翻译：一种用于产生用于向作为负载的等离子体产生装置提供高频电力的等离子体的电源装置。电源装置包括：直流电源; 电源转换电路，包括具有多个开关元件的D级的放大电路，并将所述直流电源的直流电力输出转换为高频电力输出; 以及将负载阻抗转换为预定的延迟负载的负载阻抗转换电路，其中，所述电源装置适于通过所述负载阻抗变换电路将从所述电力转换电路输出的高频电力提供给等离子体发生装置。

13. 发明授权

US4621312A Switching regulator 失效
标题翻译：开关稳压器
公开(公告)号：US4621312A
公开(公告)日：1986-11-04
申请号：US629387
申请日：1984-07-10
申请人： Itsuo Yuzurihara , Masami Arai
发明人： Itsuo Yuzurihara , Masami Arai
IPC分类号： H02M3/335 , H02M3/337
CPC分类号： H02M3/3376 , Y10T307/707
摘要： A switching regulator including a control circuit including a deviation detector for detecting a deviation between the detection value of the controlled variable and the reference value, a phase difference signal generator for generating a phase difference signal having a pulse width corresponding to the deviation, a reference signal shaper for shaping two reference signals of the same waveform having a phase difference corresponding to the pulse width of the phase difference signal, and a control signal generator for ON/OFF control of switching elements corresponding to the reference signals for controlling a switching circuit having transistors connected as the switching elements in a bridge formation, the switching elements are all driven with an equal ON/OFF ratio, the phase difference between the ON instructions to the two sets of the switching elements is controlled to control the output so that the control of the switching regulator is accomplished not by the pulse width for driving the switching elements but by the overlapping width of ON times of the two switching elements.
摘要翻译：一种开关调节器，包括：控制电路，包括用于检测受控变量的检测值与参考值之间的偏差的偏差检测器;相位差信号发生器，用于产生具有与偏差相对应的脉冲宽度的相位差信号; 信号整形器，用于对具有与相位差信号的脉冲宽度相对应的相位差的相同波形的两个参考信号进行整形;以及控制信号发生器，用于对应于参考信号的开/关控制，用于控制具有作为开关元件连接的晶体管，开关元件全部以相等的开/关比驱动，控制两组开关元件的导通指令之间的相位差，以控制输出，使得控制的开关调节器不是通过脉冲的脉冲宽度完成的驱动开关元件，但是通过两个开关元件的ON时间的重叠宽度。

14. 发明申请

US20100187998A1 ABNORMAL DISCHARGE SUPPRESSING DEVICE FOR VACUUM APPARATUS 有权
标题翻译：用于真空装置的异常放电抑制装置
公开(公告)号：US20100187998A1
公开(公告)日：2010-07-29
申请号：US12670265
申请日：2008-07-14
申请人： Itsuo Yuzurihara , Atsushi Takayanagi
发明人： Itsuo Yuzurihara , Atsushi Takayanagi
IPC分类号： H05B31/02
CPC分类号： H05H1/46 , H01J37/32009 , H01J37/32935 , H01J37/3299 , H01J2237/0206
摘要： The present invention is directed to an apparatus for suppressing abnormal electrical discharge used for vacuum equipment which supplies power from a high-frequency power source to a plasma reaction chamber and executes a film formation process, provided with a power controller for controlling the high-frequency power source based on a deviation between a power command value and a power feedback value, and a cutoff controller for cutting off the power supply from the high-frequency power source to the plasma reaction chamber, based on a detection of the abnormal electrical discharge within the plasma reaction chamber. The cutoff controller exercises a first handling cutoff control and a second handling cutoff control, each having a different cutoff time. The first handling cutoff allows ions to remain in the plasma reaction chamber, and exercises the cutoff control over the high-frequency power source within a time duration which allows an arcing element to disappear. On the other hand, the second handling cutoff control exercises cutoff control over the high-frequency power source within a time range which allows abnormal arc ions to disappear. Accordingly, it is possible to supply power to plasma stably.
摘要翻译：本发明涉及一种用于抑制从高频电源向等离子体反应室供电的真空设备的异常放电的装置，并且执行成膜处理，该装置设置有用于控制高频电源的高频基于功率指令值和功率反馈值之间的偏差的电源，以及基于检测到高频电源对等离子体反应室的电源的切断控制器，等离子体反应室。截止控制器执行第一处理截止控制和第二处理截止控制，每个具有不同的截止时间。第一处理截止允许离子保留在等离子体反应室中，并且在允许电弧元件消失的持续时间内对高频电源进行切断控制。另一方面，第二处理截止控制在允许异常电弧离子消失的时间范围内对高频电源进行切断控制。因此，可以稳定地向等离子体供给电力。

15. 发明授权

US08730700B2 Current source inverter and method for controlling current source inverter 有权
标题翻译：电流源逆变器及控制电流源逆变器的方法
公开(公告)号：US08730700B2
公开(公告)日：2014-05-20
申请号：US14000077
申请日：2012-02-23
申请人： Itsuo Yuzurihara , Toshiyuki Adachi , Shinichi Kodama
发明人： Itsuo Yuzurihara , Toshiyuki Adachi , Shinichi Kodama
IPC分类号： H02M7/217 , H02M7/5387 , H02H7/122 , H02M3/335
CPC分类号： H02M3/33569 , H02M7/48 , H02M2007/4815 , Y02B70/1441
摘要： In controlling switching elements of a current source inverter, a switching loss in the switching element is prevented according to a normal switching operation for a commutation operation, without requiring any particular control.In the commutation operation of the current source inverter, a timing for driving the switching elements is controlled in such a manner that an overlap period is generated, during when both a switching element at the commutation source and a switching element at the commutation target are set to be the ON state, a resonant circuit is controlled based on the control of the switching elements having this overlap period, and resonant current of the resonant circuit reduces the switching loss upon commutation operation of the switching elements. By controlling the generation of the resonant current of the resonant circuit by using the control of the switching elements having the overlap period, the resonant current generated by this control renders current and voltage of the switching element at the commutation source to zero when commutation is performed, thereby reducing the switching loss in the commutation operation.
摘要翻译：在控制电流源逆变器的开关元件中，根据用于换向操作的正常切换操作来防止开关元件中的开关损耗，而不需要任何特定的控制。在电流源逆变器的换向操作中，驱动开关元件的定时以这样的方式被控制，即当在换向源处的开关元件和换向目标的开关元件都被设置时，产生重叠周期作为导通状态，基于具有该重叠周期的开关元件的控制来控制谐振电路，并且谐振电路的谐振电流降低了开关元件的换向操作时的开关损耗。通过使用具有重叠周期的开关元件的控制来控制谐振电路的谐振电流的产生，由该控制产生的谐振电流使得换向时的开关元件的电流和电压在进行换向时为零，从而减小换向操作中的开关损耗。

16. 发明授权

US08704607B2 Pulse modulated RF power control method and pulse modulated RF power supply device 有权
标题翻译：脉冲调制RF功率控制方法和脉冲调制射频供电装置
公开(公告)号：US08704607B2
公开(公告)日：2014-04-22
申请号：US12781431
申请日：2010-05-17
申请人： Itsuo Yuzurihara , Yoshihisa Hata
发明人： Itsuo Yuzurihara , Yoshihisa Hata
IPC分类号： H03C1/00
CPC分类号： H01J37/32183 , H01J37/32082 , H02M7/48 , H02M2001/007 , H03F3/191 , H03F3/217 , H03K7/08 , H03K7/10
摘要： The pulse modulated RF power control method includes an output amplitude control step for controlling amplitude of a pulse output, and a duty control step for controlling a duty ratio of the pulse output. The output amplitude control step performs a constant amplitude control to control an amplitude value of the pulse output so that the amplitude value becomes equal to a set amplitude value. The constant amplitude control according to the output amplitude control, for instance, gives a feedback of the amplitude value of the pulse output outputted by the power control, obtains a difference value between the feedback value and the set amplitude value, and controls the amplitude value of the pulse output so that the difference value becomes zero.
摘要翻译：脉冲调制RF功率控制方法包括用于控制脉冲输出的幅度的输出幅度控制步骤和用于控制脉冲输出的占空比的占空比控制步骤。输出幅度控制步骤执行恒定幅度控制以控制脉冲输出的幅度值，使得振幅值变得等于设定的振幅值。例如，根据输出幅度控制的恒定幅度控制给出由功率控制输出的脉冲输出的振幅值的反馈，获得反馈值和设定振幅值之间的差值，并且控制振幅值的脉冲输出，使得差值变为零。

17. 发明授权

US08385096B2 Unbalanced voltage compensation method, unbalanced voltage compensator, three-phase converter control method, and controller of three-phase converter 有权
标题翻译：不平衡电压补偿方法，不平衡电压补偿器，三相变换器控制方式和三相变流器控制器
公开(公告)号：US08385096B2
公开(公告)日：2013-02-26
申请号：US12958523
申请日：2010-12-02
申请人： Itsuo Yuzurihara , Atsushi Takayanagi , Yoshihisa Hata
发明人： Itsuo Yuzurihara , Atsushi Takayanagi , Yoshihisa Hata
IPC分类号： H02M7/217
CPC分类号： H02M7/219 , H02M2001/0022
摘要： In compensating for unbalanced voltages of three-phase AC, instantaneous values of wye-phase voltages 120° out of phase with each other are obtained from line voltages using a centroid vector operation, symmetrical component voltages of three-phase balanced system are obtained from the instantaneous values of wye-phase voltages, a compensation signal to compensate unbalanced voltages of three-phase AC is generated from zero-phase-sequence voltage of symmetrical component voltages is generated, wye-phase voltages 120° out of phase, the unbalanced voltages of which are compensated, are obtained from the compensation signal and the symmetrical component voltages, a control signal of a PWM conversion is generated based on the compensated wye-phase voltage compensated, and the unbalanced voltages of three-phase AC are compensated. The amount of time to compensate the three-phase unbalanced voltages required for detecting an unbalance of voltages and generating a control signal can be shortened.
摘要翻译：在补偿三相交流的不平衡电压时，使用质心向量运算从线电压获得相位相差120°的相位电压的瞬时值，三相平衡系统的对称分量电压从产生相位电压的瞬时值，补偿信号补偿三相交流电压的不平衡电压，产生零相电压的对称分量电压，相位相位电压为120°相位，不平衡电压由补偿信号和对称分量电压获得补偿后的PWM转换的控制信号，并根据经补偿的相位补偿的相位电压产生PWM转换的控制信号，并补偿三相AC的不平衡电压。可以缩短补偿检测电压不平衡和产生控制信号所需的三相不平衡电压的时间量。

18. 发明授权

US5343377A Method of controlling switching regulator 失效
标题翻译：控制开关调节器的方法
公开(公告)号：US5343377A
公开(公告)日：1994-08-30
申请号：US969140
申请日：1992-10-30
申请人： Juichi Tanaka , Itsuo Yuzurihara , Takashi Watanabe
发明人： Juichi Tanaka , Itsuo Yuzurihara , Takashi Watanabe
IPC分类号： H02M3/28 , H02M3/337 , H02M7/5387
CPC分类号： H02M3/337 , H02M2001/0032 , Y02B70/1433 , Y02B70/16
摘要： A method of controlling a current resonant parallel type switching regulator comprises providing a current circulating circuit for preventing a circuit loss increasing phenomenon from occurring due to an increase in a resonant current caused by an increase in a resonant voltage when an output load current is reduced, forming a closed circuit which connects the opposite terminals of a resonant circuit for inverting the polarity of the charge on the resonant circuit once, and then starting the operation of the regulator. The resonant current is reduced so that an excessive power is not supplied at a low load. Stresses on the switching elements and circuit losses are minimized.
摘要翻译：一种控制电流谐振并联型开关调节器的方法，包括提供一个电流循环电路，用于防止由于当输出负载电流减小时由谐振电压的增加引起的谐振电流的增加而发生电路损耗增加现象，形成闭合电路，连接用于使谐振电路上的电荷的极性反转一次的谐振电路的相对端子，然后开始调节器的操作。谐振电流减小，使得在低负载下不提供过大的功率。对开关元件和电路损耗的影响最小化。

19. 发明申请

US20140009969A1 CURRENT SOURCE INVERTER AND METHOD FOR CONTROLLING CURRENT SOURCE INVERTER 有权
标题翻译：电流源逆变器和控制电流源逆变器的方法
公开(公告)号：US20140009969A1
公开(公告)日：2014-01-09
申请号：US14000077
申请日：2012-02-23
申请人： Itsuo Yuzurihara , Toshiyuki Adachi , Shinichi Kodama
发明人： Itsuo Yuzurihara , Toshiyuki Adachi , Shinichi Kodama
IPC分类号： H02M3/335
CPC分类号： H02M3/33569 , H02M7/48 , H02M2007/4815 , Y02B70/1441
摘要： In controlling switching elements of a current source inverter, a switching loss in the switching element is prevented according to a normal switching operation for a commutation operation, without requiring any particular control.In the commutation operation of the current source inverter, a timing for driving the switching elements is controlled in such a manner that an overlap period is generated, during when both a switching element at the commutation source and a switching element at the commutation target are set to be the ON state, a resonant circuit is controlled based on the control of the switching elements having this overlap period, and resonant current of the resonant circuit reduces the switching loss upon commutation operation of the switching elements. By controlling the generation of the resonant current of the resonant circuit by using the control of the switching elements having the overlap period, the resonant current generated by this control renders current and voltage of the switching element at the commutation source to zero when commutation is performed, thereby reducing the switching loss in the commutation operation.
摘要翻译：在控制电流源逆变器的开关元件中，根据用于换向操作的正常切换操作来防止开关元件中的开关损耗，而不需要任何特定的控制。在电流源逆变器的换向操作中，驱动开关元件的定时以这样的方式被控制，即当在换向源处的开关元件和换向目标的开关元件都被设置时，产生重叠周期作为导通状态，基于具有该重叠周期的开关元件的控制来控制谐振电路，并且谐振电路的谐振电流降低了开关元件的换向操作时的开关损耗。通过使用具有重叠周期的开关元件的控制来控制谐振电路的谐振电流的产生，由该控制产生的谐振电流使得换向时的开关元件的电流和电压在进行换向时为零，从而减小换向操作中的开关损耗。

20. 发明授权

US08169162B2 Abnormal discharge suppressing device for vacuum apparatus 有权
标题翻译：真空装置异常放电抑制装置
公开(公告)号：US08169162B2
公开(公告)日：2012-05-01
申请号：US12670265
申请日：2008-07-14
申请人： Itsuo Yuzurihara , Atsushi Takayanagi
发明人： Itsuo Yuzurihara , Atsushi Takayanagi
IPC分类号： H05B37/02
CPC分类号： H05H1/46 , H01J37/32009 , H01J37/32935 , H01J37/3299 , H01J2237/0206
摘要： The present invention is directed to an apparatus for suppressing abnormal electrical discharge used for vacuum equipment which supplies power from a high-frequency power source to a plasma reaction chamber and executes a film formation process, provided with a power controller for controlling the high-frequency power source based on a deviation between a power command value and a power feedback value, and a cutoff controller for cutting off the power supply from the high-frequency power source to the plasma reaction chamber, based on a detection of the abnormal electrical discharge within the plasma reaction chamber. The cutoff controller exercises a first handling cutoff control and a second handling cutoff control, each having a different cutoff time. The first handling cutoff allows ions to remain in the plasma reaction chamber, and exercises the cutoff control over the high-frequency power source within a time duration which allows an arcing element to disappear. On the other hand, the second handling cutoff control exercises cutoff control over the high-frequency power source within a time range which allows abnormal arc ions to disappear. Accordingly, it is possible to supply power to plasma stably.
摘要翻译：本发明涉及一种用于抑制从高频电源向等离子体反应室供电的真空设备的异常放电的装置，并且执行成膜处理，该装置设置有用于控制高频电源的高频基于功率指令值和功率反馈值之间的偏差的电源，以及基于检测到高频电源对等离子体反应室的电源的切断控制器，等离子体反应室。截止控制器执行第一处理截止控制和第二处理截止控制，每个具有不同的截止时间。第一处理截止允许离子保留在等离子体反应室中，并且在允许电弧元件消失的持续时间内对高频电源进行切断控制。另一方面，第二处理截止控制在允许异常电弧离子消失的时间范围内对高频电源进行切断控制。因此，可以稳定地向等离子体供给电力。

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