专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明授权

US09160240B2 DC power supply device, and control method for DC power supply device 有权
标题翻译：直流电源装置及直流电源装置的控制方法
公开(公告)号：US09160240B2
公开(公告)日：2015-10-13
申请号：US14416474
申请日：2012-09-05
申请人： Itsuo Yuzurihara , Toshiyuki Adachi , Shinichi Kodama
发明人： Itsuo Yuzurihara , Toshiyuki Adachi , Shinichi Kodama
IPC分类号： H05B31/26 , H02M3/335 , H05H1/46 , H02J1/00 , H01T1/02 , H01T15/00 , H05H1/48
CPC分类号： H02M3/33507 , H01J37/32027 , H01J37/32045 , H01T1/02 , H01T15/00 , H02J1/00 , H02M1/36 , H02M3/156 , H02M7/5387 , H02M2001/007 , H02M2001/325 , H05H1/46 , H05H1/48 , H05H2001/4682
摘要： A phase of the pulse control signal upon restarting is synchronized with the phase of the pulse control signal upon suspending, thereby suppressing fluctuations of output voltage in each phase of the inverter upon restarting and further suppressing fluctuations of voltage supplied to the load. Upon supplying DC power to a plasma generator, when arc discharge occurs in the plasma generator, supplying of the DC power is suspended to reduce damage on the electrodes and substrate, and further upon extinguishing of the arc discharge, supplying of the DC power is restarted. In suspending and resuming the DC output, the current flowing in the chopper upon suspending is held in the form of circulating current, and upon restarting the inverter, this circulating current is supplied to the load. Accordingly, it is possible to reduce a delay in supplying the DC power to the load, upon resuming the DC output.
摘要翻译：再起动时的脉冲控制信号的相位在暂停时与脉冲控制信号的相位同步，从而抑制重启时逆变器的各相的输出电压的波动，进一步抑制向负载提供的电压的波动。在向等离子体发生器供给直流电力时，当等离子体发生器发生电弧放电时，暂停直流电源的供给，以减少对电极和基板的损坏，并且在熄灭电弧放电后，重新开始直流电力的供给。在暂停和恢复直流输出时，暂停时在斩波器中流动的电流以循环电流的形式保持，重新启动逆变器时，该循环电流被提供给负载。因此，恢复直流输出时，可以减少向负载供给直流电力的延迟。

2. 发明授权

US09137885B2 DC power supply device, and control method for DC power supply device 有权
标题翻译：直流电源装置及直流电源装置的控制方法
公开(公告)号：US09137885B2
公开(公告)日：2015-09-15
申请号：US14414816
申请日：2012-09-07
申请人： Itsuo Yuzurihara , Toshiyuki Adachi , Shinichi Kodama
发明人： Itsuo Yuzurihara , Toshiyuki Adachi , Shinichi Kodama
IPC分类号： H05B31/26 , H05H1/46 , H02M3/335 , H05H7/00
CPC分类号： H05H1/46 , H01J37/32027 , H01J37/32045 , H02M3/33507 , H02M3/337 , H02M2001/007 , H05H7/001 , H05H2001/4682
摘要： Intermittent short-circuit control is performed in the ignition mode, thereby allowing short-circuit current to flow in the current source step-down type chopper. Energy of the short-circuit current is temporarily accumulated in the inductor provided in the current source step-down type chopper. The accumulated energy boosts the output voltage from the direct current power supply device during the period until the next short circuiting, via the current, the multiphase inverter, and the rectifier. The voltage boosting operation where accumulation of the current energy by short circuiting and boosting of the output voltage by conduction are repeated, controls an increase of the output voltage which is applied to the plasma generator.
摘要翻译：在点火模式下执行间歇性短路控制，从而允许短路电流流过电流源降压型斩波器。短路电流的能量临时累积在设置在电流源降压型斩波器中的电感器中。累积的能量通过电流，多相逆变器和整流器在直到下一次短路的时段内提高直流电源装置的输出电压。通过重复通过短路使输出电压的短路和升压来积聚电流能量的升压操作，控制施加到等离子体发生器的输出电压的增加。

3. 发明申请

US20150180346A1 DC POWER SUPPLY DEVICE, AND CONTROL METHOD FOR DC POWER SUPPLY DEVICE 有权
标题翻译：直流电源装置及直流电源装置的控制方法
公开(公告)号：US20150180346A1
公开(公告)日：2015-06-25
申请号：US14416474
申请日：2012-09-05
申请人： Itsuo Yuzurihara , Toshiyuki Adachi , Shinichi Kodama
发明人： Itsuo Yuzurihara , Toshiyuki Adachi , Shinichi Kodama
IPC分类号： H02M3/335 , H01T1/02 , H05H1/48 , H01T15/00
CPC分类号： H02M3/33507 , H01J37/32027 , H01J37/32045 , H01T1/02 , H01T15/00 , H02J1/00 , H02M1/36 , H02M3/156 , H02M7/5387 , H02M2001/007 , H02M2001/325 , H05H1/46 , H05H1/48 , H05H2001/4682
摘要： A phase of the pulse control signal upon restarting is synchronized with the phase of the pulse control signal upon suspending, thereby suppressing fluctuations of output voltage in each phase of the inverter upon restarting and further suppressing fluctuations of voltage supplied to the load. Upon supplying DC power to a plasma generator, when arc discharge occurs in the plasma generator, supplying of the DC power is suspended to reduce damage on the electrodes and substrate, and further upon extinguishing of the arc discharge, supplying of the DC power is restarted. In suspending and resuming the DC output, the current flowing in the chopper upon suspending is held in the form of circulating current, and upon restarting the inverter, this circulating current is supplied to the load. Accordingly, it is possible to reduce a delay in supplying the DC power to the load, upon resuming the DC output.
摘要翻译：再起动时的脉冲控制信号的相位在暂停时与脉冲控制信号的相位同步，从而抑制重启时逆变器的各相的输出电压的波动，进一步抑制向负载提供的电压的波动。在向等离子体发生器供给直流电力时，当等离子体发生器发生电弧放电时，暂停直流电源的供给，以减少对电极和基板的损坏，并且在熄灭电弧放电后，重新开始直流电力的供给。在暂停和恢复直流输出时，暂停时在斩波器中流动的电流以循环电流的形式保持，重新启动逆变器时，该循环电流被提供给负载。因此，恢复直流输出时，可以减少向负载供给直流电力的延迟。

4. 发明授权

US08730700B2 Current source inverter and method for controlling current source inverter 有权
标题翻译：电流源逆变器及控制电流源逆变器的方法
公开(公告)号：US08730700B2
公开(公告)日：2014-05-20
申请号：US14000077
申请日：2012-02-23
申请人： Itsuo Yuzurihara , Toshiyuki Adachi , Shinichi Kodama
发明人： Itsuo Yuzurihara , Toshiyuki Adachi , Shinichi Kodama
IPC分类号： H02M7/217 , H02M7/5387 , H02H7/122 , H02M3/335
CPC分类号： H02M3/33569 , H02M7/48 , H02M2007/4815 , Y02B70/1441
摘要： In controlling switching elements of a current source inverter, a switching loss in the switching element is prevented according to a normal switching operation for a commutation operation, without requiring any particular control.In the commutation operation of the current source inverter, a timing for driving the switching elements is controlled in such a manner that an overlap period is generated, during when both a switching element at the commutation source and a switching element at the commutation target are set to be the ON state, a resonant circuit is controlled based on the control of the switching elements having this overlap period, and resonant current of the resonant circuit reduces the switching loss upon commutation operation of the switching elements. By controlling the generation of the resonant current of the resonant circuit by using the control of the switching elements having the overlap period, the resonant current generated by this control renders current and voltage of the switching element at the commutation source to zero when commutation is performed, thereby reducing the switching loss in the commutation operation.
摘要翻译：在控制电流源逆变器的开关元件中，根据用于换向操作的正常切换操作来防止开关元件中的开关损耗，而不需要任何特定的控制。在电流源逆变器的换向操作中，驱动开关元件的定时以这样的方式被控制，即当在换向源处的开关元件和换向目标的开关元件都被设置时，产生重叠周期作为导通状态，基于具有该重叠周期的开关元件的控制来控制谐振电路，并且谐振电路的谐振电流降低了开关元件的换向操作时的开关损耗。通过使用具有重叠周期的开关元件的控制来控制谐振电路的谐振电流的产生，由该控制产生的谐振电流使得换向时的开关元件的电流和电压在进行换向时为零，从而减小换向操作中的开关损耗。

5. 发明申请

US20140009969A1 CURRENT SOURCE INVERTER AND METHOD FOR CONTROLLING CURRENT SOURCE INVERTER 有权
标题翻译：电流源逆变器和控制电流源逆变器的方法
公开(公告)号：US20140009969A1
公开(公告)日：2014-01-09
申请号：US14000077
申请日：2012-02-23
申请人： Itsuo Yuzurihara , Toshiyuki Adachi , Shinichi Kodama
发明人： Itsuo Yuzurihara , Toshiyuki Adachi , Shinichi Kodama
IPC分类号： H02M3/335
CPC分类号： H02M3/33569 , H02M7/48 , H02M2007/4815 , Y02B70/1441
摘要： In controlling switching elements of a current source inverter, a switching loss in the switching element is prevented according to a normal switching operation for a commutation operation, without requiring any particular control.In the commutation operation of the current source inverter, a timing for driving the switching elements is controlled in such a manner that an overlap period is generated, during when both a switching element at the commutation source and a switching element at the commutation target are set to be the ON state, a resonant circuit is controlled based on the control of the switching elements having this overlap period, and resonant current of the resonant circuit reduces the switching loss upon commutation operation of the switching elements. By controlling the generation of the resonant current of the resonant circuit by using the control of the switching elements having the overlap period, the resonant current generated by this control renders current and voltage of the switching element at the commutation source to zero when commutation is performed, thereby reducing the switching loss in the commutation operation.
摘要翻译：在控制电流源逆变器的开关元件中，根据用于换向操作的正常切换操作来防止开关元件中的开关损耗，而不需要任何特定的控制。在电流源逆变器的换向操作中，驱动开关元件的定时以这样的方式被控制，即当在换向源处的开关元件和换向目标的开关元件都被设置时，产生重叠周期作为导通状态，基于具有该重叠周期的开关元件的控制来控制谐振电路，并且谐振电路的谐振电流降低了开关元件的换向操作时的开关损耗。通过使用具有重叠周期的开关元件的控制来控制谐振电路的谐振电流的产生，由该控制产生的谐振电流使得换向时的开关元件的电流和电压在进行换向时为零，从而减小换向操作中的开关损耗。

6. 发明申请

US20110134669A1 UNBALANCED VOLTAGE COMPENSATION METHOD, UNBALANCED VOLTAGE COMPENSATOR, THREE-PHASE CONVERTER CONTROL METHOD, AND CONTROLLER OF THREE-PHASE CONVERTER 有权
标题翻译：不平衡电压补偿方法，不平衡电压补偿器，三相转换器控制方法和三相转换器的控制器
公开(公告)号：US20110134669A1
公开(公告)日：2011-06-09
申请号：US12958523
申请日：2010-12-02
申请人： Itsuo Yuzurihara , Atsushi Takayanagi , Yoshihisa Hata
发明人： Itsuo Yuzurihara , Atsushi Takayanagi , Yoshihisa Hata
IPC分类号： H02M7/04
CPC分类号： H02M7/219 , H02M2001/0022
摘要： In compensating for unbalanced voltages of three-phase AC, instantaneous values of wye-phase voltages 120° out of phase with each other are obtained from line voltages using a centroid vector operation, symmetrical component voltages of three-phase balanced system are obtained from the instantaneous values of wye-phase voltages, a compensation signal to compensate unbalanced voltages of three-phase AC is generated from zero-phase-sequence voltage of symmetrical component voltages is generated, wye-phase voltages 120° out of phase, the unbalanced voltages of which are compensated, are obtained from the compensation signal and the symmetrical component voltages, a control signal of a PWM conversion is generated based on the compensated wye-phase voltage compensated, and the unbalanced voltages of three-phase AC are compensated. The amount of time to compensate the three-phase unbalanced voltages required for detecting an unbalance of voltages and generating a control signal can be shortened.
摘要翻译：在补偿三相交流的不平衡电压时，使用质心向量运算从线电压获得相位相差120°的相位电压的瞬时值，三相平衡系统的对称分量电压从产生相位电压的瞬时值，补偿信号补偿三相交流电压的不平衡电压，产生零相电压的对称分量电压，相位相位电压为120°相位，不平衡电压由补偿信号和对称分量电压获得补偿后的PWM转换的控制信号，并根据经补偿的相位补偿的相位电压产生PWM转换的控制信号，并补偿三相AC的不平衡电压。可以缩短补偿检测电压不平衡和产生控制信号所需的三相不平衡电压的时间量。

7. 发明授权

US07751211B2 Instantaneous voltage-drop compensation circuit, power conversion apparatus, instantaneous voltage-drop compensation method and computer readable medium storing instantaneous voltage-drop compensation program 有权
标题翻译：瞬时压降补偿电路，功率转换装置，瞬时压降补偿方法和存储瞬时电压降补偿程序的计算机可读介质
公开(公告)号：US07751211B2
公开(公告)日：2010-07-06
申请号：US11717137
申请日：2007-03-13
申请人： Itsuo Yuzurihara , Atsushi Takayanagi , Ryuichi Takamura
发明人： Itsuo Yuzurihara , Atsushi Takayanagi , Ryuichi Takamura
IPC分类号： H02M7/217
CPC分类号： H02M7/125
摘要： An instantaneous voltage-drop compensation circuit including: a first voltage detector detecting three-phase voltages to be input to a power converter converting three-phase AC to DC based on control pulse signals, and outputting three-phase voltage signals; a first three-phase to two-phase converter converting the detected signals to two-phase voltage signals; a first current detector detecting three-phase currents to be input to the power converter and outputting three-phase current signals; a second three-phase to two-phase converter converting the detected current signals to two-phase current signals; a first subtracter generating a first deviation signal from input current command signals and the two-phase current signals; an input current controller generating input current control signals based on the first deviation signal; and a first adder adding the two-phase voltage signals to the input current control signals, to generate control pulse signals for the power converter.
摘要翻译：一种瞬时电压补偿电路，包括：第一电压检测器，检测要输入到基于控制脉冲信号将三相AC转换为DC的功率转换器的三相电压，并输出三相电压信号; 将检测到的信号转换成两相电压信号的第一三相到两相转换器; 检测要输入到功率转换器并输出三相电流信号的三相电流的第一电流检测器; 将检测到的电流信号转换成二相电流信号的第二三相到两相转换器; 从输入电流指令信号和两相电流信号产生第一偏差信号的第一减法器; 输入电流控制器，基于所述第一偏差信号产生输入电流控制信号; 以及将两相电压信号与输入电流控制信号相加的第一加法器，以产生功率转换器的控制脉冲信号。

8. 发明授权

US06211749B1 Impedance matching device 有权
标题翻译：阻抗匹配装置
公开(公告)号：US06211749B1
公开(公告)日：2001-04-03
申请号：US09310119
申请日：1999-05-12
申请人： Itsuo Yuzurihara , Satoru Matsukawa
发明人： Itsuo Yuzurihara , Satoru Matsukawa
IPC分类号： H03H740
CPC分类号： H03H7/38 , H04B3/56
摘要： An impedance matching device provided between a high-frequency generator and a load device matches an impedance of the high-frequency generator with an impedance of the load device and includes at least a coupled circuit which comprises a core, and a main winding and a control winding which are wound around the core. The coupled circuit changes an impedance of the impedance matching device by changing an inductance value of the main winding which depends on a magnitude of direct current flowing in the control winding.
摘要翻译：设置在高频发生器和负载装置之间的阻抗匹配装置将高频发生器的阻抗与负载装置的阻抗相匹配，并且至少包括耦合电路，其包括芯，以及主绕组和控制缠绕在芯上的绕组。耦合电路通过改变主绕组的电感值来改变阻抗匹配装置的阻抗，该电感值取决于在控制绕组中流动的直流电流的大小。

9. 发明授权

US4605865A Input drive apparatus for power transistor 失效
标题翻译：功率晶体管输入驱动装置
公开(公告)号：US4605865A
公开(公告)日：1986-08-12
申请号：US624633
申请日：1984-06-26
申请人： Itsuo Yuzurihara
发明人： Itsuo Yuzurihara
IPC分类号： H03K17/04 , H02M3/335 , H03K17/0412 , H03K17/60 , H03K17/61 , H03K3/26
CPC分类号： H03K17/601 , H03K17/04126
摘要： An input drive apparatus of a power transistor is constituted by a transformer having a core with an air gap, a primary winding energized from an input source in accordance with a forward input bias instruction, and a secondary winding, a first transistor electrically insulated from the input source and turned ON by the voltage of the secondary winding for supplying a forward input bias to the power transistor, and a second transistor electrically insulated from the input source and turned ON in accordance with a reverse input bias instruction for supplying electromagnetic energy stored in the transformer to the input electrode of the power transistor to act as a reverse bias current in accordance with a reverse bias instruction. These is also provided diode means for returning to the input source the electromagnetic energy stored after charge carriers accumulated in the power transistor have been extinguished, and the electromagnetic energy stored in the transformer when a forward bias instruction is applied.
摘要翻译：功率晶体管的输入驱动装置由具有气隙的磁芯的变压器，根据正向输入偏置指令从输入源通电的初级绕组和次级绕组构成，第一晶体管与输入源并通过用于向功率晶体管提供正向输入偏置的次级绕组的电压接通，以及与输入源电绝缘的第二晶体管，并根据用于提供存储在电源中的电磁能的反向输入偏置指令而导通变压器到功率晶体管的输入电极根据反向偏置指令充当反向偏置电流。这些还提供二极管装置，用于在积累在功率晶体管中的电荷载流子已经熄灭之后返回到输入源，存储的电磁能量以及当施加正向偏压指令时存储在变压器中的电磁能量。

10. 发明申请

US20100187998A1 ABNORMAL DISCHARGE SUPPRESSING DEVICE FOR VACUUM APPARATUS 有权
标题翻译：用于真空装置的异常放电抑制装置
公开(公告)号：US20100187998A1
公开(公告)日：2010-07-29
申请号：US12670265
申请日：2008-07-14
申请人： Itsuo Yuzurihara , Atsushi Takayanagi
发明人： Itsuo Yuzurihara , Atsushi Takayanagi
IPC分类号： H05B31/02
CPC分类号： H05H1/46 , H01J37/32009 , H01J37/32935 , H01J37/3299 , H01J2237/0206
摘要： The present invention is directed to an apparatus for suppressing abnormal electrical discharge used for vacuum equipment which supplies power from a high-frequency power source to a plasma reaction chamber and executes a film formation process, provided with a power controller for controlling the high-frequency power source based on a deviation between a power command value and a power feedback value, and a cutoff controller for cutting off the power supply from the high-frequency power source to the plasma reaction chamber, based on a detection of the abnormal electrical discharge within the plasma reaction chamber. The cutoff controller exercises a first handling cutoff control and a second handling cutoff control, each having a different cutoff time. The first handling cutoff allows ions to remain in the plasma reaction chamber, and exercises the cutoff control over the high-frequency power source within a time duration which allows an arcing element to disappear. On the other hand, the second handling cutoff control exercises cutoff control over the high-frequency power source within a time range which allows abnormal arc ions to disappear. Accordingly, it is possible to supply power to plasma stably.
摘要翻译：本发明涉及一种用于抑制从高频电源向等离子体反应室供电的真空设备的异常放电的装置，并且执行成膜处理，该装置设置有用于控制高频电源的高频基于功率指令值和功率反馈值之间的偏差的电源，以及基于检测到高频电源对等离子体反应室的电源的切断控制器，等离子体反应室。截止控制器执行第一处理截止控制和第二处理截止控制，每个具有不同的截止时间。第一处理截止允许离子保留在等离子体反应室中，并且在允许电弧元件消失的持续时间内对高频电源进行切断控制。另一方面，第二处理截止控制在允许异常电弧离子消失的时间范围内对高频电源进行切断控制。因此，可以稳定地向等离子体供给电力。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式