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11. 发明申请

US20080152234A1 SIMULATION OF AERIAL IMAGES 有权
标题翻译：模拟图像
公开(公告)号：US20080152234A1
公开(公告)日：2008-06-26
申请号：US11967511
申请日：2007-12-31
申请人： Haim Feldman
发明人： Haim Feldman
IPC分类号： G06K9/74
CPC分类号： G03F1/84 , G03F1/36 , G03F7/705 , G03F7/706
摘要： A method for generating a simulated aerial image of a mask projected by an optical system includes determining a coherence characteristic of the optical system. A coherent decomposition of the optical system is computed based on the coherence characteristic. The decomposition includes a series of expansion functions having angular and radial components that are expressed as explicit functions. The expansion functions are convolved with a transmission function of the mask in order to generate the simulated aerial image.
摘要翻译：用于产生由光学系统投影的掩模的模拟空间图像的方法包括确定光学系统的相干特性。基于相干特性计算光学系统的相干分解。分解包括一系列扩展函数，其具有表示为显式函数的角度和径向分量。扩展功能与掩模的传输功能一起卷积，以便产生模拟的航空图像。

12. 发明申请

US20080116362A1 ONE-DIMENSIONAL PHASE CONTRAST MICROSCOPY 有权
标题翻译：一维相对显微镜
公开(公告)号：US20080116362A1
公开(公告)日：2008-05-22
申请号：US11853329
申请日：2007-09-11
申请人： Haim Feldman , Doron Meshulach , Eyal Angel
发明人： Haim Feldman , Doron Meshulach , Eyal Angel
IPC分类号： G01D5/34
CPC分类号： G01D5/38
摘要： A method for imaging a surface includes generating a traveling lens in an acousto-optic material and incorporating a traveling mask into a portion of the traveling lens so as to produce a composite traveling lens. The method further includes irradiating the composite traveling lens so as to produce a composite focused beam having a spatial variation across the composite focused beam. The composite focused beam is directed onto a region of the surface so as to generate radiation characteristic of the region from the region. The radiation is imaged onto a detector so as to generate a signal characteristic of the region, responsively to the spatial variation.
摘要翻译：一种用于对表面进行成像的方法包括在声光材料中生成行进透镜并将行进掩模结合到移动透镜的一部分中以产生复合行进透镜。该方法还包括照射复合移动透镜，以便产生具有横跨复合聚焦光束的空间变化的复合聚焦光束。复合聚焦光束被引导到表面的一个区域上，以便从该区域产生该区域的辐射特性。辐射被成像到检测器上，以响应于空间变化产生该区域的信号特征。

13. 发明申请

US20070109546A1 Scanning Microscopy 有权
标题翻译：扫描显微镜
公开(公告)号：US20070109546A1
公开(公告)日：2007-05-17
申请号：US11559741
申请日：2006-11-14
申请人： Doron Meshulach , Haim Feldman
发明人： Doron Meshulach , Haim Feldman
IPC分类号： G01N21/55
CPC分类号： G01N21/47 , G01N21/21 , G01N21/95623 , G01N2021/4709 , G01N2021/4792
摘要： Apparatus for imaging a surface, including scanning optics, which are configured to scan and focus one or more traveling beams onto the surface so as to form one or more traveling spots thereon. The apparatus also includes collection optics, which are arranged to collect radiation scattered from the one or more traveling spots and to focus the radiation to form one or more image spots traveling along a line. The apparatus also has a detecting assembly, which consists of a detector which is configured to generate a signal in response to the one or more traveling image spots, and a detector entry port interposed between the collection optics and the detector, which is coincident with the line. The apparatus also includes phase and/or polarization altering elements for the traveling beams.
摘要翻译：用于对包括扫描光学元件在内的表面进行成像的装置，其被配置为将一个或多个行进光束扫描并聚焦到所述表面上，以便在其上形成一个或多个行进光点。该装置还包括收集光学器件，其被布置成收集从一个或多个行进点散射的辐射并且聚焦辐射以形成沿着一行行进的一个或多个图像斑点。该装置还具有检测组件，该检测组件由检测器构成，该检测器被配置为响应于一个或多个行进图像点产生信号，以及插入在收集光学器件和检测器之间的检测器入口，其与线。该装置还包括用于行进梁的相位和/或极化改变元件。

14. 发明申请

US20060197931A1 Printer and a method for recording a multi-level image 有权
标题翻译：打印机和记录多级图像的方法
公开(公告)号：US20060197931A1
公开(公告)日：2006-09-07
申请号：US11361418
申请日：2006-02-24
申请人： Gilad Almogy , Haim Feldman , Meir Aloni
发明人： Gilad Almogy , Haim Feldman , Meir Aloni
IPC分类号： G03B27/54
CPC分类号： G03F7/70208 , G03F7/70275 , G03F7/70291 , G03F7/70358
摘要： A printer and method for recording a predefined multiple intensity level image on a substrate, the method includes the steps of: converting the predetermined image to multiple intensity level associated images; converting a light beam to multiple light beam arrays; modulating each light beam array to provide modulated light beam arrays, in response to a corresponding intensity level associated image to be recorded on the substrate; directing each modulated light beam array to impinge on the substrate; and repeating the steps of converting, modulating and directing while moving the substrate until the predefined image is imaged on the substrate. The printer includes a programmable optical radiation source for providing multiple modulated light beam arrays and for directing the modulated light beam arrays to impinge on the substrate, each modulated light beam array being modulated in response to an input signal corresponding to a corresponding intensity level associated image to be recorded on the substrate; whereas a superposition of the intensity level associated images forms the predefined image on the substrate, and a movable stage for moving the substrate until the predefined image is imaged on the substrate.
摘要翻译：一种用于在基板上记录预定多重强度级图像的打印机和方法，所述方法包括以下步骤：将预定图像转换成多个强度级相关图像; 将光束转换成多个光束阵列; 调制每个光束阵列以响应于要记录在所述衬底上的对应的强度级相关图像来提供调制的光束阵列; 引导每个调制的光束阵列撞击在基底上; 并且重复在移动衬底的同时转换，调制和引导步骤，直到预定图像被成像在衬底上。打印机包括可编程光辐射源，用于提供多个调制光束阵列并用于引导调制的光束阵列撞击衬底，每个被调制的光束阵列响应于对应于对应的亮度级相关图像的输入信号被调制被记录在基板上; 而强度级相关图像的叠加在衬底上形成预定义的图像，以及用于移动衬底的可移动台，直到预定图像在衬底上成像为止。

15. 发明授权

US07053985B2 Printer and a method for recording a multi-level image 有权
公开(公告)号：US07053985B2
公开(公告)日：2006-05-30
申请号：US10615008
申请日：2003-07-07
申请人： Gilad Almogy , Haim Feldman , Meir Aloni
发明人： Gilad Almogy , Haim Feldman , Meir Aloni
IPC分类号： G03B27/54 , G03B27/42
CPC分类号： G03F7/70208 , G03F7/70275 , G03F7/70291 , G03F7/70358
摘要： A printer and method for recording a predefined multiple intensity level image on a substrate, the method includes the steps of: converting the predetermined image to multiple intensity level associated images; converting a light beam to multiple light beam arrays; modulating each light beam array to provide modulated light beam arrays, in response to a corresponding intensity level associated image to be recorded on the substrate; directing each modulated light beam array to impinge on the substrate; and repeating the steps of converting, modulating and directing while moving the substrate until the predefined image is imaged on the substrate. The printer includes a programmable optical radiation source for providing multiple modulated light beam arrays and for directing the modulated light beam arrays to impinge on the substrate, each modulated light beam array being modulated in response to an input signal corresponding to a corresponding intensity level associated image to be recorded on the substrate; whereas a superposition of the intensity level associated images forms the predefined image on the substrate, and a movable stage for moving the substrate until the predefined image is imaged on the substrate.

16. 发明授权

US06937343B2 Laser scanner with amplitude and phase detection 有权
标题翻译：具有振幅和相位检测的激光扫描仪
公开(公告)号：US06937343B2
公开(公告)日：2005-08-30
申请号：US10232093
申请日：2002-08-29
申请人： Haim Feldman
发明人： Haim Feldman
IPC分类号： G01B9/02 , G01N21/95 , G01N21/956
CPC分类号： G01B9/02081 , G01B9/02003 , G01B2290/45 , G01B2290/70 , G01N21/8851 , G01N21/9501 , G01N21/95607
摘要： A method for optical evaluation of a sample includes scanning a beam of coherent radiation over the sample, whereby the radiation is scattered from the sample, while directing a portion of the scanning beam toward a diffraction grating so that the portion of the beam is scanned over the grating, whereby a frequency-shifted reference beam is diffracted from the grating. The scattered radiation and the frequency-shifted reference beam are combined at a detector to generate an optical heterodyne signal.
摘要翻译：用于光学评估样品的方法包括扫描样品上的相干辐射束，由此辐射从样品中散射，同时将扫描光束的一部分朝向衍射光栅引导，使得光束的该部分被扫描光栅，由此频移参考光束从光栅衍射。散射辐射和频移参考光束在检测器处组合以产生光学外差信号。

17. 发明授权

US06853475B2 Wafer defect detection system with traveling lens multi-beam scanner 有权
标题翻译：带移动透镜多光束扫描仪的晶圆缺陷检测系统
公开(公告)号：US06853475B2
公开(公告)日：2005-02-08
申请号：US10617449
申请日：2003-07-11
申请人： Haim Feldman , Emanuel Elyasaf , Nissim Elmaliach , Ron Naftali , Boris Golberg , Silviu Reinhorn
发明人： Haim Feldman , Emanuel Elyasaf , Nissim Elmaliach , Ron Naftali , Boris Golberg , Silviu Reinhorn
IPC分类号： G01B11/30 , G01N21/89 , G01N21/95 , G01N21/956 , H01L21/66 , G02F1/11
CPC分类号： G01N21/9501 , G01N21/8806 , G01N2021/8825 , G02B21/002 , G02B21/125
摘要： A system for inspecting a specimen, such as a semiconductor wafer that uses a laser light source for providing a beam of light. The beam is applied to a traveling lens acousto-optic device having an active region and responsive to an RF input signal to selectively generate plural traveling lenses in the active region. The traveling lens acousto-optic device is operative to receive the light beam and generate plural flying spot beams, at the respective focus of each of the generated traveling lenses. A light detector unit, having a plurality of detector sections, each detector section having a plurality of light detectors and at least one multi-stage storage device operative to receive in parallel an input from the plurality of light detectors, is used to generate useable scan data. Information stored in each of the storage devices is serially read out concurrently from the multiple stages.
摘要翻译：用于检查样本的系统，例如使用激光源提供光束的半导体晶片。光束被施加到具有有源区域并且响应于RF输入信号的移动透镜声光器件，以在有源区域中选择性地生成多个行进透镜。移动透镜声光装置可操作以在每个所生成的行进透镜的各个焦点处接收光束并产生多个飞点光束。一种具有多个检测器部分的光检测器单元，每个检测器部分具有多个光检测器和用于并行接收来自多个光检测器的输入的至少一个多级存储装置，用于产生可用的扫描数据。存储在每个存储设备中的信息从多个阶段同时连续地读出。

18. 发明授权

US06750436B2 Focus error detection apparatus and method having dual focus error detection path 有权
标题翻译：具有双重焦点误差检测路径的聚焦误差检测装置和方法
公开(公告)号：US06750436B2
公开(公告)日：2004-06-15
申请号：US10192220
申请日：2002-07-09
申请人： Haim Feldman , Boris Golberg , Alexander Libinson
发明人： Haim Feldman , Boris Golberg , Alexander Libinson
IPC分类号： G02B704
CPC分类号： G02B7/34
摘要： An apparatus and method for focus error detection operable to receive light reflected from an inspected object and to determine a focus error on a surface of the inspected object, the focus error detection apparatus including optics and at least one detection apparatus, whereas the optics and the at least one detection apparatus define at least a first focus error detection path and a second focus error detection path, the first focus error detection path detects focus errors with a greater sensitivity than the second focus error detection path, while the second focus error detection path detects focus errors over a greater focus error range than the first focus error detection path.
摘要翻译：一种用于聚焦误差检测的装置和方法，其可操作以接收从检查对象反射的光并确定被检查对象的表面上的聚焦误差，所述聚焦误差检测装置包括光学元件和至少一个检测装置，而光学元件和至少一个检测装置限定至少第一聚焦误差检测路径和第二聚焦误差检测路径，第一聚焦误差检测路径以比第二聚焦误差检测路径更大的灵敏度检测聚焦误差，而第二聚焦误差检测路径在比第一个聚焦误差检测路径更大的聚焦误差范围内检测到聚焦误差。

19. 发明申请

US20140299790A1 INSPECTION METHOD AND AN INSPECTION SYSTEM EXHIBITING SPECKLE REDUCTION CHARACTERISTICS 有权
标题翻译：检验方法和检验系统展示品种减少特性
公开(公告)号：US20140299790A1
公开(公告)日：2014-10-09
申请号：US14009869
申请日：2011-04-07
申请人： Amir Shoham , Haim Feldman , Doron Shoham
发明人： Amir Shoham , Haim Feldman , Doron Shoham
IPC分类号： G01N21/88
CPC分类号： G01N21/8806 , G01N21/33 , G01N2021/8822 , G01N2201/0697
摘要： A method and an inspection system that exhibiting speckle reduction characteristics includes a light source arranged to generate input light pulses, and diffuser-free speckle reduction optics that include a beam splitter, for splitting an input light pulse from the light source into multiple light pulses that are oriented at angles in relation to each other when exiting the beam splitter, and at least one optical element for directing the multiple light pulses to impinge on an inspected object at different angles.
摘要翻译：具有斑点减少特性的方法和检查系统包括布置成产生输入光脉冲的光源和包括分束器的无漫射器散斑光学器件，用于将来自光源的输入光脉冲分成多个光脉冲，在离开分束器时相对于彼此的角度定向，并且至少一个光学元件用于引导多个光脉冲以不同的角度撞击在被检查物体上。

20. 发明申请

US20100188658A1 HIGH RESOLUTION WAFER INSPECTION SYSTEM 失效
标题翻译：高分辨率波浪检测系统
公开(公告)号：US20100188658A1
公开(公告)日：2010-07-29
申请号：US12752995
申请日：2010-04-01
申请人： Dan Grossman , Moshe Langer , Roman Kris , Silviu Reinhorn , Ron Naftali , Haim Feldman
发明人： Dan Grossman , Moshe Langer , Roman Kris , Silviu Reinhorn , Ron Naftali , Haim Feldman
IPC分类号： G01N21/88 , G01N21/00
CPC分类号： G01N21/17 , G01N21/1717 , G01N21/9501 , G01N2021/1719
摘要： A method for inspecting a region, including irradiating the region via an optical system with a pump beam at a pump wavelength. A probe beam at a probe wavelength irradiates the region so as to generate returning probe beam radiation from the region. The beams are scanned across the region at a scan rate. A detector receives the returning probe radiation, and forms an image of the region that corresponds to a resolution better than pump and probe Abbe limits of the optical system. Roles of the pump and probe beams may be alternated, and a modulation frequency of the pump beam may be changed, to produce more information. Information extracted from the probe signal can also differentiate between different materials on the region
摘要翻译：一种用于检查区域的方法，包括通过具有泵浦波长的泵浦光束的光学系统照射该区域。在探测波长处的探测光束照射该区域，以产生从该区域返回的探测光束辐射。以扫描速率跨越该区域扫描光束。检测器接收返回的探针辐射，并且形成对应于分辨率的区域的图像优于光学系统的泵浦和探针阿贝限制。泵和探针光束的作用可以交替变化，并且可以改变泵浦光束的调制频率，以产生更多的信息。从探测信号中提取的信息也可以区分该区域上的不同材料

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