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    • 16. 发明专利
    • Manufacturing method of near-field light generating element, and manufacturing method of thermally assisted magnetic recording head
    • 近场光产生元件的制造方法及热辅助磁记录头的制造方法
    • JP2011181163A
    • 2011-09-15
    • JP2010233757
    • 2010-10-18
    • Headway Technologies Incヘッドウェイテクノロジーズ インコーポレイテッド
    • SASAKI YOSHITAKAITO HIROYUKITANEMURA SHIGEKIARAKI HIRONORI
    • G11B5/31
    • G11B5/314B24B37/048G11B5/3163G11B2005/0021
    • PROBLEM TO BE SOLVED: To manufacture a near-field light generating element having a front end face whose upper end has a sharp shape.
      SOLUTION: An outer face of the near-field light generating element 16 includes slopes 16b and 16c, and an edge 16d that connects the slopes 16b and 16c. In a manufacturing method for the near-field light generating element 16, first, a polishing stop layer is formed on a metal layer, and the polishing stop layer and the metal layer are etched so that the slope 16b is formed on the metal layer. Then, a covered layer 18A which is formed of an inorganic material other than metal and has a lower etching speed than that of the metal layer in a subsequently performed second etching process is formed so as to cover the metal layer and the polishing stop layer. Then, the covered layer 18A is polished until the polishing stop layer is exposed. Then, by the second etching process, the polishing stop layer and the metal layer are etched using the covered layer 18A as an etching mask. By this, the slope 16c and the edge 16d are formed in the metal layer, and the near-field light generating element 16 is manufactured.
      COPYRIGHT: (C)2011,JPO&INPIT
    • 要解决的问题:制造具有上端具有尖锐形状的前端面的近场光产生元件。 解决方案:近场光产生元件16的外表面包括斜面16b和16c以及连接斜面16b和16c的边缘16d。 在近场光发生元件16的制造方法中,首先,在金属层上形成研磨停止层,并且在金属层上形成研磨停止层和金属层,使斜面16b形成。 然后,形成覆盖金属层和抛光停止层的覆盖层18A,其由金属以外的无机材料形成,蚀刻速度低于金属层的蚀刻速度。 然后,对被覆层18A进行研磨,直到研磨停止层露出为止。 然后,通过第二蚀刻工艺,使用覆盖层18A作为蚀刻掩模蚀刻抛光停止层和金属层。 由此,在金属层中形成斜面16c和边缘16d,制造近场光产生元件16。 版权所有(C)2011,JPO&INPIT
    • 17. 发明专利
    • Method of manufacturing layered chip package
    • 制造分层芯片包装的方法
    • JP2011166109A
    • 2011-08-25
    • JP2010215273
    • 2010-09-27
    • Headway Technologies IncSae Magnetics (Hk) Ltdヘッドウェイテクノロジーズ インコーポレイテッド新科實業有限公司SAE Magnetics(H.K.)Ltd.
    • SASAKI YOSHITAKAITO HIROYUKIIIJIMA ATSUSHI
    • H01L25/065H01L25/07H01L25/18
    • H01L21/78H01L2224/16
    • PROBLEM TO BE SOLVED: To mass-produce layered chip packages at low cost in a short time. SOLUTION: The layered chip package includes: a main body including a plurality of layer portions stacked; and wiring disposed on at least one side surface of the main body. In a method of manufacturing the layered chip package, first, a plurality of substructures each of which including an array of a plurality of preliminary layer portions are used to fabricate a layered substructure that includes a plurality of pre-separation main bodies 2P arranged in rows. Next, the layered substructure is cut into a plurality of blocks 116 each of which includes a row of a plurality of pre-separation main bodies 2P, and the wiring is collectively formed on the plurality of pre-separation main bodies 2P included in each block 116. The plurality of pre-separation main bodies 2P are then separated from each other. Each of the plurality of blocks 116 includes a row of three, four, or five pre-separation main bodies 2P. COPYRIGHT: (C)2011,JPO&INPIT
    • 要解决的问题:在短时间内以低成本批量生产分层芯片封装。 解决方案:层状芯片封装包括:主体,其包括堆叠的多个层部分; 以及布置在主体的至少一个侧表面上的布线。 在制造层状芯片封装的方法中,首先,使用包括多个预备层部分的阵列的多个子结构来制造层叠子结构,其包括排列成行的多个预分离主体2P 。 接下来,将分层子结构切割成多个块116,每个块116包括一排多个预分离主体2P,并且布线集中地形成在包括在每个块中的多个预分离主体2P上 然后,将多个预分离主体2P彼此分离。 多个块116中的每一个包括一行三个,四个或五个预分离主体2P。 版权所有(C)2011,JPO&INPIT