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    • 155. 发明授权
    • DRAM cell system and method for producing same
    • DRAM单元系统及其制造方法
    • US06566187B1
    • 2003-05-20
    • US09806614
    • 2001-05-11
    • Josef WillerFranz HoffmannTill Schlösser
    • Josef WillerFranz HoffmannTill Schlösser
    • H01L218242
    • H01L27/10864H01L27/10841
    • DRAM cell arrangement and method for fabricating it Word lines and bit lines are arranged above a main area of a substrate, with the result that they have a planar construction and can be produced together with gate electrodes of transistors of a periphery of the cell arrangement. A depression of the substrate is provided per memory cell, a storage node of a storage capacitor being arranged in the lower region of said depression and a gate electrode of a vertical transistor being arranged in the upper region of said depression. The depressions of the memory cells are arranged between trenches filled with isolating structures. Upper source/drain regions of the transistors are arranged between two mutually adjacent isolating structures and between two mutually adjacent depressions. Lower source/drain regions are arranged in the substrate and adjoin the storage nodes. For process steps, alignment tolerances are so large that the space requirement for the memory cell can amount to 4F2.
    • DRAM单元布置及其制造方法字线和位线布置在基板的主区域上方,结果是它们具有平面结构,并且可以与单元布置的外围的晶体管的栅电极一起生成。 每个存储单元提供基板的凹陷,存储电容器的存储节点布置在所述凹陷的下部区域中,并且垂直晶体管的栅电极布置在所述凹陷的上部区域中。 存储单元的凹陷布置在填充有隔离结构的沟槽之间。 晶体管的上部源极/漏极区域布置在两个相互相邻的隔离结构之间以及两个彼此相邻的凹陷之间。 下部源极/漏极区域布置在衬底中并与存储节点相邻。 对于工艺步骤,对准公差如此大,使得存储器单元的空间需求可以达到4F2。
    • 157. 发明授权
    • DRAM cell arrangement
    • DRAM单元布置
    • US06492221B1
    • 2002-12-10
    • US09806427
    • 2001-07-03
    • Franz HofmannJosef WillerTill Schloesser
    • Franz HofmannJosef WillerTill Schloesser
    • H01L218244
    • H01L27/10864H01L27/10841H01L27/10876
    • A dynamic random access memory includes memory cells arranged in rows and columns on the substrate and a plurality of connecting pillars, each associated with a memory cell. A bit line extends above the main area of the substrate and connects to each memory cell of a column. A first word line connects a first set of alternate memory cells of a row by a first subset of the plurality of connecting pillars. The first word line includes first parts arranged offset relative to the first subset of connecting pillars. A strip-shaped second part extends above the main area and adjoins the first parts of the first word line. A second word line connects to a second set of alternate memory cells of the row by a second subset of the connecting pillars. The second word line includes first parts arranged between mutually adjacent first word lines and offset from the second subset of the connecting pillars. Both the first and second word lines thus overlap but do not cover the connecting pillars. A strip-shaped second part extends above the main area in the first direction and adjoins the first parts of the second word line. The second part is above the first word line and the bit line.
    • 动态随机存取存储器包括以衬底上的行和列布置的存储器单元和多个连接柱,每个连接柱与存储单元相关联。 位线延伸到基板的主区域上方,并连接到列的每个存储单元。 第一字线将一行的第一组备用存储单元与多个连接柱的第一子集连接。 第一字线包括相对于连接柱的第一子集排列的第一部分。 带状第二部分在主区域的上方延伸并与第一字线的第一部分邻接。 第二字线通过连接柱的第二子集连接到该行的第二组替代存储器单元。 第二字线包括布置在彼此相邻的第一字线之间的第一部分和与连接柱的第二子集的偏移。 因此,第一和第二字线都重叠,但不覆盖连接柱。 带状第二部分沿着第一方向延伸到主区域上方并与第二字线的第一部分相邻。 第二部分在第一个字线和位线之上。
    • 160. 发明授权
    • Method for fabricating a stacked capacitor in a semiconductor configuration, and stacked capacitor fabricated by this method
    • 用于制造半导体结构中的叠层电容器的方法和通过该方法制造的层叠电容器
    • US06403440B1
    • 2002-06-11
    • US09285897
    • 1999-04-08
    • Emmerich BertagnolliJosef Willer
    • Emmerich BertagnolliJosef Willer
    • H01L2120
    • H01L28/87H01L27/10852H01L28/88
    • A method for fabricating a stacked capacitor in a semiconductor configuration, in which one electrode of the stacked capacitor is connected via a terminal region of a first conductivity type to a source or drain of a transistor. The semiconductor configuration having one electrode of a stacked capacitor produced by utilizing different etching rates of semiconductor layers of a second conductivity type which are doped to different extents. After the etching of the one electrode of the stacked capacitor, doping reversal of the semiconductor layers remaining after the etching operation to the first conductivity type is performed, with the result that the electrode has the same conductivity type as the terminal region and no pn junction occurs between the electrode and terminal region.
    • 一种用于制造半导体构造的层叠电容器的方法,其中层叠电容器的一个电极经由第一导电类型的端子区域连接到晶体管的源极或漏极。 半导体结构具有通过利用掺杂到不同程度的第二导电类型的半导体层的不同蚀刻速率而产生的堆叠电容器的一个电极。 在层叠电容器的一个电极的蚀刻之后,执行在蚀刻操作之后保留的半导体层的掺杂反转到第一导电类型,结果是电极具有与端子区域相同的导电类型,并且没有pn结 发生在电极和端子区域之间。