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131. 发明授权

US06661826B2 Laser chamber insulator with sealed electrode feedthrough 有权
公开(公告)号：US06661826B2
公开(公告)日：2003-12-09
申请号：US10164885
申请日：2002-06-07
申请人： Richard C. Ujazdowski , Timothy S. Dyer , William N. Partlo , Michael Altheim , Brian Strate , Thomas Hofmann
发明人： Richard C. Ujazdowski , Timothy S. Dyer , William N. Partlo , Michael Altheim , Brian Strate , Thomas Hofmann
IPC分类号： H01S3223
CPC分类号： G03F7/70025 , G03F7/70041 , G03F7/70483 , H01S3/036 , H01S3/038 , H01S3/225
摘要： A feedthrough structure of a gas discharge laser chamber conducts electric power through the wall of a sealed gas enclosure to a single piece elongated electrode inside the enclosure. The feedthrough structure includes a single piece integrated main insulator larger than the electrode. The main insulator is compressed between the electrode and the wall of the enclosure. The surfaces forming interfaces between the electrode and the single piece insulator are the insulator and the wall are all very smooth to permit the parts to expand and contract as the chamber temperature varies. The feedthrough structure also provides mechanical support and alignment for the electrode and includes seals to prevent gas leakage around the feedthrough structure.

132. 发明授权

US06541786B1 Plasma pinch high energy with debris collector 失效
标题翻译：等离子体夹杂高能量与碎片收集器
公开(公告)号：US06541786B1
公开(公告)日：2003-04-01
申请号：US09324526
申请日：1999-06-02
申请人： William N. Partlo , Igor V. Fomenkov , Daniel L. Birx
发明人： William N. Partlo , Igor V. Fomenkov , Daniel L. Birx
IPC分类号： G21G400
CPC分类号： H05G2/003 , B82Y10/00 , G03F7/70033 , G03F7/70166 , G03F7/70916 , H05G2/005 , H05H1/06
摘要： A high energy photon source. A pair of plasma pinch electrodes are located in a vacuum chamber. A working gas which includes a noble buffer gas and an active gas chosen to provide a desired spectral line. A pulse power source provides electrical pulses at voltages high enough to create electrical discharge between the electrodes to produce very high temperature, high density plasma pinch in the working gas providing radiation at the spectral line of the active gas. An external reflection radiation collector-director collects radiation produced in the plasma pinches and directs the radiation in a desired direction. In a preferred embodiment the active gas is lithium and the buffer gas is helium and the radiation collector-director is coated with the material used for the electrodes. A good choice for the material is tungsten. In a second preferred embodiment the buffer gas is argon and lithium gas is produced by vaporization of solid or liquid lithium located in a hole along the axis of the central electrode of a coaxial electrode configuration. Other preferred embodiments utilize a conical nested debris collector upstream of the radiation collector-director.
摘要翻译：高能光子源。一对等离子体夹紧电极位于真空室中。一种工作气体，其包括贵金属缓冲气体和选择用于提供所需光谱线的活性气体。脉冲电源提供电压足够高的电脉冲以在电极之间产生电放电，以在工作气体中产生非常高温，高密度的等离子体夹紧，从而在活性气体的谱线处提供辐射。外部反射辐射收集器 - 导向器收集在等离子体夹中产生的辐射，并将辐射引导到期望的方向。在一个优选的实施方式中，活性气体是锂，缓冲气体是氦气，并且辐射收集器导向器涂覆有用于电极的材料。材料的一个不错的选择是钨。在第二优选实施例中，缓冲气体是氩气，并且通过沿着同轴电极配置的中心电极的轴的孔中的固体或液体锂的汽化来产生锂气体。其他优选实施例利用在辐射收集器 - 导向器上游的锥形嵌套碎片收集器。

133. 发明授权

US06359922B1 Single chamber gas discharge laser with line narrowed seed beam 有权
标题翻译：单室气体放电激光器具有线窄的种子束
公开(公告)号：US06359922B1
公开(公告)日：2002-03-19
申请号：US09421701
申请日：1999-10-20
申请人： William N. Partlo , Xiaojiang Pan , Eckehard D. Onkels
发明人： William N. Partlo , Xiaojiang Pan , Eckehard D. Onkels
IPC分类号： H01S322
CPC分类号： H01S3/2366 , G03F7/70025 , G03F7/70041 , G03F7/70575 , H01S3/036 , H01S3/073 , H01S3/225 , H01S3/2333
摘要： A single chamber gas discharge laser system having a pulse power source for producing electrical discharges at the rate of at least 1000 pulses per second. The discharge along with laser optics create two short lived gain media, one for producing a seed beam and the other for amplifying the seed beam. Laser gas circulation around a chamber circulation path is provided and the electrodes and discharges are arranged so that debris from one of the gain media is not circulated to the other gain media during discharges until the debris has made a loop around at least 90% of the chamber circulation path.
摘要翻译：具有用于以每秒至少1000个脉冲的速率产生放电的脉冲电源的单室气体放电激光器系统。放射与激光光学器件一起产生两个短寿命增益介质，一个用于产生种子束，另一个用于放大种子束。提供了围绕室循环路径的激光气体循环，并且电极和排出物被布置成使得来自增益介质之一的碎屑在排放期间不循环到另一增益介质，直到碎片已经围绕至少90％的循环室循环路径。

134. 发明授权

US06026103A Gas discharge laser with roller bearings and stable magnetic axial positioning 有权
标题翻译：气体放电激光与滚子轴承和稳定的磁轴定位
公开(公告)号：US06026103A
公开(公告)日：2000-02-15
申请号：US290852
申请日：1999-04-13
申请人： I. Roger Oliver , Igor V. Fomenkov , William N. Partlo
发明人： I. Roger Oliver , Igor V. Fomenkov , William N. Partlo
IPC分类号： H01S3/036 , H01S3/00
CPC分类号： H01S3/036
摘要： An electric discharge gas laser having a laser cavity in which is contained a laser gas and a fan for circulating the laser gas. The fan is supported in position radially by a roller bearing system and axially at least in part by magnetic forces. In a preferred embodiment the magnetic forces are supplied by a brushless DC motor in which the rotor of the motor is sealed within the gas environment of the laser cavity and the motor stator is located outside the gas environment. The magnetic center of the rotor is offset from the center of the stator to produce a magnetic reluctance generated force on the shaft that acts axially on the shaft toward the non-drive end and is reacted by a ball and plate bearing assembly mounted along the axis of rotation at the opposite end of the shaft.
摘要翻译：一种具有激光腔的放电气体激光器，其中包含激光气体和用于使激光气体循环的风扇。风扇通过滚子轴承系统径向支撑在位置，并至少部分地由磁力轴向地支撑。在优选实施例中，磁力由无刷直流电动机提供，其中电机的转子在激光腔的气体环境内被密封，并且电动机定子位于气体环境的外部。转子的磁心偏离定子的中心，以产生轴上的磁阻产生力，该轴在轴上朝向非驱动端轴向作用，并且通过沿着轴线安装的球和轴承组件反作用在轴的相对端旋转。

135. 发明授权

US5233460A Method and means for reducing speckle in coherent laser pulses 失效
标题翻译：减少相干激光脉冲斑点的方法和方法
公开(公告)号：US5233460A
公开(公告)日：1993-08-03
申请号：US827941
申请日：1992-01-31
申请人： William N. Partlo , William G. Oldham
发明人： William N. Partlo , William G. Oldham
IPC分类号： G02B27/28 , G02B27/48 , G03F7/20
CPC分类号： G03F7/70566 , G02B27/283 , G02B27/48
摘要： A train of coherent laser output pulses with reduced speckle is generated by providing laser pulses having a first polarization and a coherence length, splitting each pulse in the input laser pulses to provide a first pulse train including a first series of output pulses of the first polarization in output pulses and a second pulse train, and rotating polarization and delaying the second pulse train. The second pulse train is then split to provide a second series of output pulses having a different polarization than the first series of output pulses and a third series of output pulses having a delay length greater than the laser coherence length thereby providing a train of coherent laser output pulses including the first series of output pulses interleaved with the second series of output pulses and the third series of output pulses. The train of coherent laser output pulses can again be split and delayed with polarization rotation to generate a second train of coherent laser output pulses. To further reduce speckle in the generated train of coherent laser output pulses, the optics for delaying and rotating the polarization can be so arranged that each pulse in the train exits the system in a slightly different position and at a slight different angle whereby the speckle pattern produced by the interaction of the beam with scatterers is uncorrelated.
摘要翻译：通过提供具有第一偏振和相干长度的激光脉冲来产生具有减少散斑的相干激光输出脉冲序列，分离输入激光脉冲中的每个脉冲以提供第一脉冲串，其包括第一极化的第一系列输出脉冲在输出脉冲和第二脉冲串中，旋转极化并延迟第二脉冲串。然后第二脉冲串被分割以提供具有与第一系列输出脉冲不同的偏振的第二系列输出脉冲，以及具有大于激光相干长度的延迟长度的第三系列输出脉冲，从而提供一系列相干激光包括与第二系列输出脉冲交错的第一系列输出脉冲和第三系列输出脉冲的输出脉冲。相干激光输出脉冲串可以再次被偏振旋转分离和延迟，以产生第二列相干激光输出脉冲。为了进一步减少产生的相干激光输出脉冲序列中的斑点，用于延迟和旋转极化的光学器件可以被布置成使得列车中的每个脉冲在稍微不同的位置和稍微不同的角度离开系统，由此斑点图案由光束与散射体的相互作用产生的是不相关的。

136. 发明授权

US09620920B2 High pulse repetition rate gas discharge laser 有权
公开(公告)号：US09620920B2
公开(公告)日：2017-04-11
申请号：US12590307
申请日：2009-11-05
申请人： Walter D. Gillespie , Thomas D. Steiger , Richard C. Ujazdowski , William N. Partlo
发明人： Walter D. Gillespie , Thomas D. Steiger , Richard C. Ujazdowski , William N. Partlo
IPC分类号： H01S3/22 , H01S3/036 , H01S3/038
CPC分类号： H01S3/036 , H01S3/0384
摘要： A pulsed gas discharge laser operating at an output laser pulse repetition rate of greater than 4 kHz and a method of operating same is disclosed which may comprise a high voltage electrode having a longitudinal extent; a main insulator electrically insulating the high voltage electrode from a grounded gas discharge chamber; a preionizer longitudinally extending along at least a portion of the longitudinal extent of the high voltage electrode; a preionization shim integral with the electrode extending toward the preionizer. The preionizer may be formed integrally with the main insulator. The preionization shim may substantially cover the gap between the electrode and the preionizer. The apparatus and method may comprise an aerodynamic fairing attached to the high voltage electrode to present an aerodynamically smooth surface to the gas flow.

137. 发明授权

US09066412B2 Systems and methods for cooling an optic 有权
标题翻译：用于冷却光学元件的系统和方法
公开(公告)号：US09066412B2
公开(公告)日：2015-06-23
申请号：US12900762
申请日：2010-10-08
申请人： Alexander I. Ershov , Robert L. Morse , William N. Partlo , Christopher P. Pate
发明人： Alexander I. Ershov , Robert L. Morse , William N. Partlo , Christopher P. Pate
IPC分类号： G02B7/02 , G02B3/12 , G02B1/06 , H05G2/00 , G02B7/00 , G03F7/20
CPC分类号： H05G2/008 , G02B7/008 , G03F7/70033 , G03F7/70891 , Y10T137/0318 , Y10T137/8593
摘要： Devices are described herein which may comprise an optic having a non-planar surface, the non-planar surface having an optically active portion; and a flow guide directing gas upon the non-planar surface to produce turbulent flow on at least a portion of the optically active portion of the non-planar surface to cool the optic.
摘要翻译：本文描述的装置可以包括具有非平面表面的光学元件，非平面表面具有光学活性部分; 以及引导气体在非平面表面上的流动引导件，以在非平面表面的光学活性部分的至少一部分上产生湍流，以冷却光学元件。

138. 发明授权

US08908735B2 Laser system 有权
标题翻译：激光系统
公开(公告)号：US08908735B2
公开(公告)日：2014-12-09
申请号：US13231882
申请日：2011-09-13
申请人： Alexander I. Ershov , William N. Partlo , Daniel J. W. Brown , Igor V. Fomenkov
发明人： Alexander I. Ershov , William N. Partlo , Daniel J. W. Brown , Igor V. Fomenkov
IPC分类号： H01S3/22 , H01S3/225 , H01S3/08 , H01S3/00 , H01S3/23 , H01S3/083 , H01S3/10
CPC分类号： H01S3/225 , H01S3/005 , H01S3/0057 , H01S3/08004 , H01S3/08009 , H01S3/083 , H01S3/10092 , H01S3/2251 , H01S3/2258 , H01S3/2333 , H01S3/2383 , H01S2301/02
摘要： A method and apparatus may comprise a line narrowed pulsed excimer or molecular fluorine gas discharge laser system which may comprise a seed laser oscillator producing an output comprising a laser output light beam of pulses which may comprise a first gas discharge excimer or molecular fluorine laser chamber; a line narrowing module within a first oscillator cavity; a laser amplification stage containing an amplifying gain medium in a second gas discharge excimer or molecular fluorine laser chamber receiving the output of the seed laser oscillator and amplifying the output of the seed laser oscillator to form a laser system output comprising a laser output light beam of pulses, which may comprise a ring power amplification stage.
摘要翻译：一种方法和装置可以包括线变窄的脉冲准分子或分子氟气放电激光系统，其可以包括种子激光振荡器，其产生包括可以包括第一气体放电准分子或分子氟激光室的脉冲的激光输出光束的输出; 第一振荡器腔内的线窄模块; 在第二气体放电准分子或分子氟激光室中包含放大增益介质的激光放大级，其接收种子激光振荡器的输出并放大种子激光振荡器的输出，以形成激光系统输出，其包括激光输出光束脉冲，其可以包括环形功率放大级。

139. 发明申请

US20120292527A1 Filter for Material Supply Apparatus 有权
标题翻译：过滤器材料供应设备
公开(公告)号：US20120292527A1
公开(公告)日：2012-11-22
申请号：US13112784
申请日：2011-05-20
申请人： Igor V. Fomenkov , William N. Partlo , Georgiy O. Vaschenko , William Oldham
发明人： Igor V. Fomenkov , William N. Partlo , Georgiy O. Vaschenko , William Oldham
IPC分类号： H05H1/46
CPC分类号： B01D29/56 , B22F3/105 , H05G2/006 , H05G2/008 , H05H1/46
摘要： A filter is used in a target material supply apparatus and includes a sheet having a first flat surface and a second opposing flat surface, and a plurality of through holes. The first flat surface is in fluid communication with a reservoir that holds a target mixture that includes a target material and non-target particles. The through holes extend from the second flat surface and are fluidly coupled at the second flat surface to an orifice of a nozzle. The sheet has a surface area that is exposed to the target mixture, the exposed surface area being at least a factor of one hundred less than an exposed surface area of a sintered filter having an equivalent transverse extent to that of the sheet.
摘要翻译：在目标材料供给装置中使用过滤器，并且包括具有第一平面和第二相对平坦面的片，以及多个通孔。第一平坦表面与储存包含目标材料和非目标颗粒的目标混合物的储存器流体连通。通孔从第二平坦表面延伸并且在第二平坦表面处流体耦合到喷嘴的孔口。片材具有暴露于目标混合物的表面积，暴露的表面积比具有与片材相当的横向程度的烧结过滤器的暴露表面积至少要低一百倍。

140. 发明申请

US20110317256A1 MASTER OSCILLATOR-POWER AMPLIFIER DRIVE LASER WITH PRE-PULSE FOR EUV LIGHT SOURCE 有权
标题翻译：主振荡器功率放大器驱动激光器用于EUV光源的预脉冲
公开(公告)号：US20110317256A1
公开(公告)日：2011-12-29
申请号：US13077236
申请日：2011-03-31
申请人： Kai-Chung Hou , Richard L. Sandstorm , William N. Partlo , Daniel J.W. Brown , Igor V. Fomenkov
发明人： Kai-Chung Hou , Richard L. Sandstorm , William N. Partlo , Daniel J.W. Brown , Igor V. Fomenkov
IPC分类号： H01S3/05 , H01S3/00 , H01S3/13
CPC分类号： H01S3/0078 , G03F7/70033 , G03F7/70175 , G03F7/70908 , G03F7/70933 , H01S3/076 , H01S3/1055 , H01S3/117 , H01S3/2232 , H05G2/008
摘要： A device is described herein which may comprise an optical amplifier having a gain band including wavelengths λ1 and λ2, with λ1≠λ2; a pre-pulse seed laser having a tuning module for tuning a pre-pulse output to wavelength λ1; a main pulse seed laser generating a laser output having wavelength, λ2; and a beam combiner for directing the pre-pulse output and the main pulse output on a common path through the optical amplifier.
摘要翻译：本文描述了一种可以包括具有包括λ1≠λ2的波长λ1和λ2的增益带的光放大器的装置; 具有用于将预脉冲输出调谐到波长λ1的调谐模块的预脉冲种子激光器; 产生具有波长λ2的激光输出的主脉冲种子激光器; 以及用于将预脉冲输出和主脉冲输出引导到通过光放大器的公共路径上的光束组合器。

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