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    • 123. 发明申请
    • PRODUCTION OF A SEMICONDUCTOR DEVICE HAVING AT LEAST ONE COLUMN-SHAPED OR WALL-SHAPED SEMICONDUCTOR ELEMENT
    • 具有至少一个柱形或半透明半导体元件的半导体器件的生产
    • US20140312301A1
    • 2014-10-23
    • US14357583
    • 2012-11-09
    • Forschungsverbund Berlin e.V.
    • Oliver BrandtLutz GeelhaarVladimir KaganerMartin Woelz
    • H01L29/12H01L31/0352H01L29/16H01L33/06H01L29/04H01L29/20
    • H01L29/122H01L29/04H01L29/16H01L29/20H01L29/2003H01L31/035209H01L33/06H01L33/18H01L2924/0002H01L2924/00
    • Described is a method for producing a semiconductor device (100), in which at least one column-shaped or wall-shaped semiconductor device (10, 20) extending in a main direction (z) is formed on a substrate (30), wherein at least two sections (11, 13, 21, 23) of a first crystal type and one section (12, 22) of a second crystal type therebetween are formed in an active region (40), each section with a respective predetermined height (h1, h2), wherein the first and second crystal types have different lattice constants and each of the sections of the first crystal type has a lattice strain which depends on the lattice constants in the section of the second crystal type. According to the invention, at least a height (h2) of the section (12, 22) of the second crystal type and a lateral thickness (D) of the active region (40) is formed perpendicular to the main direction, in such a manner that the lattice strain in one of the sections (11) of the first crystal type also depends on the lattice constants in the other section (13) of the first crystal type. A semiconductor device (100) is also described, having at least one column-shaped or wall-shaped semiconductor element (10, 20) on a substrate (30), which can be produced in particular by means of the stated method.
    • 描述了一种半导体器件(100)的制造方法,其中在基板(30)上形成有沿主方向(z)延伸的至少一个柱状或壁状半导体器件(10,20),其中 在有源区域(40)中形成有第一晶体类型的至少两个部分(11,13,21,23)和第二晶体类型的一个部分(12,22),每个部分具有相应的预定高度 h1,h2),其中第一和第二晶体类型具有不同的晶格常数,并且第一晶体类型的每个部分具有取决于第二晶体类型的截面中的晶格常数的晶格应变。 根据本发明,垂直于主方向形成第二晶体类型的部分(12,22)和有源区(40)的横向厚度(D)的至少高度(h2) 第一晶体类型的部分(11)之一的晶格应变也取决于第一晶体类型的另一部分(13)中的晶格常数。 还描述了一种半导体器件(100),其在衬底(30)上具有至少一个柱状或壁状半导体元件(10,20),其特别可以通过所述方法制造。
    • 124. 发明授权
    • Diode laser
    • 二极管激光器
    • US08867586B2
    • 2014-10-21
    • US13431530
    • 2012-03-27
    • Bernd Eppich
    • Bernd Eppich
    • H01S3/08H01S5/14H01S5/00
    • H01S5/141H01S5/005
    • A diode laser is provided with wavelength stabilization and vertical collimation of the emitted radiation, which allows a small distance of the volume Bragg grating from the emitting surface, a small vertical diameter of the collimated beam and also compensation for manufacturing tolerances affecting the shape of the grating and the lens. The diode laser comprises an external frequency-selective element for wavelength stabilization of the laser radiation, wherein the external frequency-selective element comprises an entry surface facing the exit facet and an exit surface facing away from the exit facet and is designed as a volume Bragg grating; and wherein the external frequency-selective element is designed in such a manner that the divergence of the radiation emitting from the exit facet is reduced during passage through the external frequency-selective element.
    • 二极管激光器具有发射辐射的波长稳定和垂直准直,这允许体积布拉格光栅距离发射表面的小距离,准直光束的小垂直直径,并且还补偿影响其形状的制造公差 光栅和镜头。 二极管激光器包括用于激光辐射的波长稳定的外部频率选择元件,其中外部频率选择元件包括面向出口小面的入口表面和背离出口小面的出口表面,并被设计为体积布拉格 光栅 并且其中所述外部频率选择元件被设计成使得在通过所述外部频率选择元件的过程中从所述出射小面发射的辐射的发散被减小。
    • 125. 发明授权
    • Two-cavity surface-emitting laser
    • 双腔表面发射激光器
    • US08824518B2
    • 2014-09-02
    • US12968727
    • 2010-12-15
    • Günther TränkleJoachim PiprekHans WenzelGötz ErbertMarkus WeyersAndrea Knigge
    • Günther TränkleJoachim PiprekHans WenzelGötz ErbertMarkus WeyersAndrea Knigge
    • H01S5/183H01S5/14H01S5/04H01S5/026H01S5/40
    • H01S5/183H01S5/026H01S5/041H01S5/14H01S5/4025H01S5/4087
    • A the vertical-cavity surface-emitting laser includes a stripe-shaped active medium (10) having an emission maximum at a first wavelength (λ1), wherein a first reflector (18) is arranged below the stripe-shaped active medium (10) and a second reflector (20) is arranged above the stripe-shaped active medium (10), with the first reflector (18) facing the second reflector (20), wherein the first reflector (18) and a second reflector (20) have a reflectivity maximum in the region of the first wavelength (λ1), wherein a third reflector (12) and a fourth reflector (13) are each arranged on a side above or next to the stripe-shaped active medium (10), wherein the third reflector (12) faces the fourth reflector (13), and wherein the third reflector (12) and the fourth reflector (13) have a reflectivity maximum in the region of a second wavelength (λ2), wherein the first wavelength (λ1) is greater than the second wavelength (λ2).
    • 垂直腔表面发射激光器包括具有第一波长(λ1)的发射最大值的条形有源介质(10),其中第一反射器(18)布置在条形活性介质(10)的下方, 并且第二反射器(20)布置在条形有源介质(10)的上方,第一反射器(18)面向第二反射器(20),其中第一反射器(18)和第二反射器(20)具有 在第一波长区域(λ1)的反射率最大值,其中第三反射器(12)和第四反射器(13)分别布置在条状活性介质(10)上方或旁边的一侧,其中, 第三反射器(12)面向第四反射器(13),并且其中第三反射器(12)和第四反射器(13)在第二波长(λ2)的区域中具有反射率最大值,其中第一波长(λ1) 大于第二波长(λ2)。
    • 127. 发明申请
    • MICROWAVE ICP RESONATOR
    • 微波ICP谐振器
    • US20130328483A1
    • 2013-12-12
    • US13884973
    • 2011-11-15
    • Roland GescheHoria-Eugen PorteanuSilvio Kühn
    • Roland GescheHoria-Eugen PorteanuSilvio Kühn
    • H05H1/46
    • H05H1/46H01J37/32192H01J37/32247
    • A microwave resonator for inductively generating a plasma (5) is introduced. The microwave resonator comprises a first tube (4) and a conductive, preferably metal, plate (1). The tube (4) is designed for connection to a supply device for a process gas and for conveying the process gas and comprises a dielectric material. The conductive plate (1) has a first, preferably cylindrical, hole (2), which extends from a first opening on a first side of the conductive plate (1) to a second opening on a second side, opposite the first side, of the conductive plate (1). The first tube (4) is arranged in the first hole (2). The conductive plate (1) also has a first slit (3), which is open towards the first and the second side of the conductive plate (1) and towards the first hole (2).The invention also introduces a plasma generator with such a microwave resonator.
    • 引入用于感应地产生等离子体(5)的微波谐振器。 微波谐振器包括第一管(4)和导电的,优选为金属的板(1)。 管(4)被设计用于连接到用于处理气体的供应装置并且用于输送处理气体并且包括电介质材料。 导电板(1)具有第一优选为圆柱形的孔(2),其从导电板(1)的第一侧上的第一开口延伸到与第一侧相对的第二侧上的第二开口 导电板(1)。 第一管(4)布置在第一孔(2)中。 导电板(1)还具有朝向导电板(1)的第一侧和第二侧开口并朝向第一孔(2)的第一狭缝(3)。 本发明还引入了具有这种微波谐振器的等离子体发生器。
    • 130. 发明申请
    • LASER DIODE WITH HIGH EFFICIENCY
    • 激光二极管效率高
    • US20130208748A1
    • 2013-08-15
    • US13823277
    • 2011-09-12
    • Paul CrumpGoetz ErbertHans Wenzel
    • Paul CrumpGoetz ErbertHans Wenzel
    • H01S5/20
    • H01S5/20A61B18/203A61B2018/00476A61B2090/049H01S5/2031H01S5/22H01S5/3213H01S2301/185
    • It is the object of the present invention to specify a light source with high efficiency and high eye safety at the same time.For this purpose, the active layer (10), the first cladding layer (14), the first waveguide layer (12), the second waveguide layer (16), and the second cladding layer (18) should be designed such that 0.01 μm≦dWL≦1.0 μm and Δn≧0.04, where dWL is the sum total of the layer thickness of the first waveguide layer (12), the layer thickness of the active layer (10), and the layer thickness of the second waveguide layer (16) and Δn is a maximum of the refractive index difference between the first cladding layer (14) and the first waveguide layer (12) and the refractive index difference between the second waveguide layer (16) and the second cladding layer (18).
    • 本发明的目的是同时具有高效率和高眼睛安全性的光源。 为此,应设计有源层(10),第一覆层(14),第一波导层(12),第二波导层(16)和第二覆层(18),使得0.01μm @ dWL @ 1.0mum和Deltan> = 0.04,其中dWL是第一波导层(12)的层厚度的总和,有源层(10)的层厚度和第二波导层的层厚度 (16)和Deltan是第一包层(14)和第一波导层(12)之间的折射率差和第二波导层(16)与第二包层(18)之间的折射率差的最大值, 。