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    • 123. 发明授权
    • Method for fabricating a magnetic head for perpendicular recording using a CMP lift-off and resistant layer
    • 使用CMP剥离层和耐电层制造用于垂直记录的磁头的方法
    • US07429493B2
    • 2008-09-30
    • US11184364
    • 2005-07-18
    • Ming JiangSue Siyang ZhangYi Zheng
    • Ming JiangSue Siyang ZhangYi Zheng
    • H01L21/00
    • G11B5/3163G11B5/1278
    • A method using a CMP resistant hardmask in a process of fabricating a pole piece for a magnetic head is described. A set of layers used as the mask for milling the pole piece preferably includes a CMP resistant hardmask of silicon dioxide, a resist hardmask, an upper hardmask and a photoresist mask respectively. A multi-step reactive-ion etching (RIE) process is preferably used to sequentially remove the excess materials in the layer stack to ultimately define the multilayer mask for the pole piece. The excess pole piece material is then milled away. The wafer is then refilled with a nonmagnetic material such as alumina. A CMP liftoff is used to remove the resist hardmask. The material for the CMP resistant hardmask is selected to have a high resistance to the CMP liftoff process in comparison to the refill material. The CMP resistant hardmask is preferably then removed by a RIE process.
    • 描述了在制造用于磁头的极片的工艺中使用CMP耐磨硬掩模的方法。 作为用于研磨极片的掩模的一组层优选分别包括二氧化硅的CMP耐磨硬掩模,抗蚀剂硬掩模,上硬掩模和光致抗蚀剂掩模。 优选使用多步反应离子蚀刻(RIE)工艺来顺序地去除层叠中的多余材料以最终限定极片的多层掩模。 然后将多余的极片材料磨掉。 然后用非磁性材料如氧化铝再填充晶片。 CMP剥离用于去除抗蚀剂硬掩模。 选择用于CMP耐磨硬掩模的材料以与补充材料相比具有对CMP剥离工艺的高抗性。 然后优选通过RIE工艺去除CMP耐磨硬掩模。
    • 129. 发明授权
    • Methods for providing run to run process control using a dynamic tuner
    • 使用动态调谐器提供运行过程控制的方法
    • US09213322B1
    • 2015-12-15
    • US13587754
    • 2012-08-16
    • Jian-Huei FengMing JiangClayton R. NewmanYeak-Chong Wong
    • Jian-Huei FengMing JiangClayton R. NewmanYeak-Chong Wong
    • G05B13/02G05B13/04
    • G05B13/024G05B13/042G05B13/048
    • Methods for providing run to run process control using a dynamic tuner are provided. Once such method includes receiving a data point for a process output parameter, determining whether the data point is within a desired range for the process output parameter, setting, when the data point is within the desired range, a dynamic lambda value equal to a preselected base lambda value, setting, when the data point is not within the desired range, the dynamic lambda value equal to a value based on the preselected base lambda value, a degree of difference between the data point and a target for the process output parameter, and a scale factor, calculating an exponentially weighted moving average using the dynamic lambda value, and adjusting the process control parameter in accordance with the exponentially weighted moving average.
    • 提供了使用动态调谐器提供运行过程控制运行的方法。 一旦这样的方法包括接收过程输出参数的数据点,确定数据点是否在处理输出参数的期望范围内,当数据点在期望范围内时,设置等于预选的动态λ值 基本λ值,当数据点不在期望范围内时,设置,动态λ值等于基于预选的基本λ值的值,数据点与过程输出参数的目标之间的差异程度, 和比例因子,使用动态λ值计算指数加权移动平均值,以及根据指数加权移动平均值来调整过程控制参数。
    • 130. 发明授权
    • Generation and use of LDCs in wireless communication systems
    • 无线通信系统中最不发达国家的生成和使用
    • US08948288B2
    • 2015-02-03
    • US12540770
    • 2009-08-13
    • Ming Jiang
    • Ming Jiang
    • H04B7/02H04L1/06
    • H04L1/0643
    • A method for generating a Linear Dispersion Code (LDC) for use in a Multiple-Input Multiple-Output (MIMO) communication system in which M transmit antennas are used to transmit a codeword over T time slots, each codeword encoding Q constellation symbols, is provided. The method includes determining M, T and Q, wherein M, T and Q are real numbers, generating a first matrix having 2Q columns and a predefined number m of rows, each column including a plurality of elements, each element being a real number within a respective predefined range for the respective row, deriving a second matrix having 2Q columns and m rows from the first matrix such that the elements of one row of the second matrix are dependent upon the corresponding elements of a corresponding row of the first matrix, and upon M and T, and deriving a set of 2Q LDC dispersion matrices, each including dimensions T×M, from the second matrix.
    • 一种用于在多输入多输出(MIMO)通信系统中使用的线性色散码(LDC)的方法,其中M个发射天线用于在T个时隙上发送码字,每个编码Q个星座符号的码字是 提供。 该方法包括确定M,T和Q,其中M,T和Q是实数,产生具有2Q列和预定数量m行的第一矩阵,每列包括多个元素,每个元素是在 针对相应行的相应预定义范围,从第一矩阵导出具有2Q列和m行的第二矩阵,使得第二矩阵的一行的元素取决于第一矩阵的相应行的对应元素,以及 在M和T上,并且从第二矩阵导出一组包含尺寸T×M的2Q LDC色散矩阵。