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111. 发明申请

US20130191807A1 METHOD OF EVALUATING SYSTEMATIC DEFECT, AND APPARATUS THEREFOR 有权
标题翻译：评估系统缺陷的方法及其设备
公开(公告)号：US20130191807A1
公开(公告)日：2013-07-25
申请号：US13877922
申请日：2011-09-30
申请人： Yuji Takagi , Yuichi Hamamura
发明人： Yuji Takagi , Yuichi Hamamura
IPC分类号： G06F17/50
CPC分类号： G06F17/5081 , H01L22/12 , H01L22/20 , H01L2924/0002 , H01L2924/00
摘要： In order to enable an evaluation of systematic defects, a method of evaluating systematic defects was configured so as to sample a circuit pattern of a specific layer of a semiconductor device, evaluate the state of superimposition between the sampled circuit pattern and circuit patterns of layers other than the specific layer, using design data, classify the state of superimposition, calculate the ratio thereof as a reference ratio, evaluate the state of superimposition between a pattern in design data corresponding to a defect of the specific layer detected by another inspection apparatus and patterns at positions corresponding to the defects in layers other than the specific layer, classify the evaluated state of superimposition, calculate the ratio of the classification as inspection-result ratio, compare the calculated reference ratio and the calculated inspection-result ratio, and evaluate systematic defects by the comparison between the calculated reference ratio and the calculated inspection-result ratio.
摘要翻译：为了能够对系统缺陷进行评估，构造了评价系统缺陷的方法，以对半导体器件的特定层的电路图案进行采样，评估采样电路图案与其他层的电路图案之间的叠加状态比特定层使用设计数据，将叠加状态进行分类，将其比例作为参考比计算，评价与由另一检查装置检测到的特定层的缺陷相对应的设计数据中的图案之间的叠加状态在与特定层以外的层的缺陷相对应的位置，对评价的叠加状态进行分类，计算分类比作为检查结果比，比较计算出的参考比和计算出的检查结果比，并评价系统缺陷通过比较计算的参考比和计算检验结果比例。

112. 发明授权

US08250415B2 Optical disk reproduction apparatus, optical disk reproduction method, reproduction processing device and reproduction processing method 失效
标题翻译：光盘再现装置，光盘再现方法，再现处理装置和再现处理方法
公开(公告)号：US08250415B2
公开(公告)日：2012-08-21
申请号：US13055843
申请日：2010-05-18
申请人： Masaru Yamaoka , Yuji Takagi , Makoto Usui
发明人： Masaru Yamaoka , Yuji Takagi , Makoto Usui
IPC分类号： G11C29/00
CPC分类号： G11B20/18 , G11B20/00376 , G11B20/00398 , G11B20/00405 , G11B20/10342 , G11B20/10453 , G11B20/10462 , G11B20/10472 , G11B20/14 , G11B20/1833 , G11B2220/2562
摘要： Provided is an optical disk reproduction apparatus capable of preventing information that is different from the original sub information from being subjected to error correction erroneously, and of stably reproducing the sub information. The optical disk reproduction apparatus (1) has an optical head (301) for reading a reproduction signal including main information and sub information based on a recording mark formed on an optical disk (300), a main information extraction unit (4) for extracting the main information from the reproduction signal, and a sub information extraction unit (2) for extracting the sub information from the reproduction signal. The sub information extraction unit (2) determines a reproduction accuracy of the sub information, and includes an error correction control unit (308) for deciding a timing of performing error correction of the sub information according to the determined reproduction accuracy, and an error correction unit (309) for performing the error correction of the sub information according to the timing decided with the error correction control unit (308).
摘要翻译：提供了能够防止与原始子信息不同的信息被错误地进行错误纠正并且稳定地再现子信息的光盘再现装置。光盘再现装置（1）具有用于读取包含基于形成在光盘（300）上的记录标记的主信息和子信息的再现信号的光头（301），用于提取的主信息提取单元来自再现信号的主要信息，以及用于从再现信号中提取子信息的子信息提取单元（2）。子信息提取单元（2）确定子信息的再现精度，并且包括用于根据确定的再现精度来确定执行子信息的纠错的定时的纠错控制单元（308）单元（309），用于根据由纠错控制单元（308）确定的定时执行子信息的纠错。

113. 发明授权

US08217351B2 Pattern inspection method and pattern inspection system 有权
标题翻译：图案检验方法和图案检验制度
公开(公告)号：US08217351B2
公开(公告)日：2012-07-10
申请号：US12858209
申请日：2010-08-17
申请人： Yasutaka Toyoda , Yasunari Souda , Yuji Takagi , Koji Arai
发明人： Yasutaka Toyoda , Yasunari Souda , Yuji Takagi , Koji Arai
IPC分类号： G06K9/46 , G01N23/00
CPC分类号： H01L22/12 , H01L2924/0002 , H01L2924/00
摘要： A pattern data examination method and system capable of accurately and speedily examining a circuit pattern without failing to extract pattern contour data are provided. While pattern comparison is ordinarily made by using a secondary electron image, a contour of a pattern element is extracted by using a backscattered electron image said to be suitable for observation and examination of a three dimensional configuration of a pattern element, and pattern inspection is executed by using the extracted contour of the pattern element. More specifically, pattern inspection is executed by comparing a contour of a pattern element with design data such as CAD data to measure a difference between the contour and the data, and by computing, for example, the size of the circuit pattern element from the contour of a pattern. From two or more backscattered electron images formed by detecting backscattered electrons at two or more different spatial positions, pattern contour data contained in the backscattered electron images may be obtained.
摘要翻译：提供了能够准确且快速地检查电路图案而不会提取图案轮廓数据的图形数据检查方法和系统。虽然通常使用二次电子图像进行图案比较，但是通过使用所述适合于观察和检查图案元素的三维构造的背散射电子图像来提取图案元素的轮廓，并且执行图案检查通过使用所提取的图案元素的轮廓。更具体地，通过将图案元素的轮廓与诸如CAD数据的设计数据进行比较来测量轮廓和数据之间的差异，并且例如通过计算来自轮廓的电路图案元素的尺寸来执行图案检查的模式。通过在两个或更多个不同的空间位置检测反向散射电子形成的两个或更多个背散射电子图像，可以获得包含在背散射电子图像中的图案轮廓数据。

114. 发明申请

US20120093392A1 REVIEWED DEFECT SELECTION PROCESSING METHOD, DEFECT REVIEW METHOD, REVIEWED DEFECT SELECTION PROCESSING TOOL, AND DEFECT REVIEW TOOL 有权
标题翻译：回顾缺陷选择处理方法，缺陷审查方法，回顾缺陷选择处理工具和缺陷审查工具
公开(公告)号：US20120093392A1
公开(公告)日：2012-04-19
申请号：US13266800
申请日：2010-03-25
申请人： Yuji Takagi , Minoru Harada , Yuichi Hamamura
发明人： Yuji Takagi , Minoru Harada , Yuichi Hamamura
IPC分类号： G06K9/62
CPC分类号： G01N21/9501 , G01N21/956 , G01N2021/8867 , H01L22/12 , H01L22/20
摘要： The present invention relates to semiconductor inspection and provides a technology capable of efficiently detecting a systematic defect. In the present system, with regard to the process (S7, S8) of matching hot spot (HS) points that can be simulated in advance and defect points obtained as a result of a visual inspection each other and the unmatched defect points, a process (S6, S9) of classifying the defect points into groups based on similarity of pattern layout at the defect points to determine the defects belonging to a pattern layout where defects frequently occur, thereby reliably detecting the systematic defect. Also, with a process (S11) of acquiring an uneven distribution in a defect occurrence distribution on a wafer, the systematic defect occurring due to topography of the wafer can also be detected.
摘要翻译：本发明涉及半导体检查，并且提供能够有效地检测系统缺陷的技术。在本系统中，关于可以预先模拟的热点（HS）点和作为目视检查的结果获得的缺陷点与不匹配的缺陷点的处理（S7，S8），处理（S6，S9），根据缺陷点的图案布局的相似度将缺陷点分类成组，以确定属于频繁发生缺陷的图案布局的缺陷，从而可靠地检测系统缺陷。此外，通过获取晶片上的缺陷发生分布中的不均匀分布的处理（S11），也可以检测由于晶片的形貌而发生的系统缺陷。

115. 发明申请

US20120082018A1 OPTICAL DISC RECORDING DEVICE AND RECORDING SIGNAL GENERATING DEVICE 有权
标题翻译：光盘记录装置和记录信号发生装置
公开(公告)号：US20120082018A1
公开(公告)日：2012-04-05
申请号：US13322666
申请日：2011-03-24
申请人： Toyoji Gushima , Makoto Usui , Yuji Takagi
发明人： Toyoji Gushima , Makoto Usui , Yuji Takagi
IPC分类号： G11B7/09
CPC分类号： G11B20/1217 , G11B7/0037 , G11B7/0045 , G11B7/006 , G11B7/00736 , G11B20/1024 , G11B2020/1277 , G11B2020/1288 , G11B2220/218 , G11B2220/2537
摘要： Provided are an optical disc recording device and a recording signal generating device which enable to correct displacement between a reproducing position of a reproduction signal from a concave-convex mark preformed in an optical disc, and a recording position of second information to be recorded in synchronism with the reproduction signal, and stably and speedily record the second information. A digital signal processor (202) specifies a reproducing position in the concave-convex mark, using a reproduction signal and a channel clock. A recording signal generator (211) generates a recording signal alternately including a plurality of additionally recordable data, each of which includes second information and has a predetermined length, and a plurality of dummy data. A recording position controller (110) detects a recording position displacement amount representing a displacement amount between the reproducing position and a recording position of the additionally recordable data, using the reproducing position and the reading signal. A recording length adjustor (208) increases or decreases the recording length of dummy data in accordance with the recording position displacement amount.
摘要翻译：提供了一种光盘记录装置和记录信号产生装置，其能够校正来自在光盘中预先形成的凹凸标记的再现信号的再现位置与待同步记录的第二信息的记录位置之间的位移具有再现信号，并稳定且快速地记录第二信息。数字信号处理器（202）使用再现信号和通道时钟指定凹凸标记中的再现位置。记录信号发生器（211）交替地产生包括多个附加可记录数据的记录信号，每个可附加记录数据包括第二信息并具有预定长度，以及多个伪数据。记录位置控制器（110）使用再现位置和读取信号来检测表示可附加记录的数据的再现位置和记录位置之间的位移量的记录位置位移量。记录长度调节器（208）根据记录位置位移量增加或减少虚拟数据的记录长度。

116. 发明授权

US08107717B2 Defect inspection method and apparatus 有权
标题翻译：缺陷检查方法和装置
公开(公告)号：US08107717B2
公开(公告)日：2012-01-31
申请号：US13072102
申请日：2011-03-25
申请人： Shunji Maeda , Kenji Oka , Yukihiro Shibata , Minoru Yoshida , Chie Shishido , Yuji Takagi , Atsushi Yoshida , Kazuo Yamaguchi
发明人： Shunji Maeda , Kenji Oka , Yukihiro Shibata , Minoru Yoshida , Chie Shishido , Yuji Takagi , Atsushi Yoshida , Kazuo Yamaguchi
IPC分类号： G06K9/00
CPC分类号： G06T7/001 , G01N21/9501 , G01N21/95607 , G06T7/0004 , G06T2207/30148
摘要： Arrangements for inspecting a specimen on which plural patterns are formed; capturing a first image of a first area; capturing a second image of a second area in which patterns which are essentially the same with the patterns formed in the first area; creating data relating to corresponding pixels of the first and second images, for each pixel; determining a threshold for each pixel for detecting defects directly in accordance with the first and second images; and detecting defects on the specimen by processing the first and second images by using the threshold for each pixel and information of a scattered diagram of brightness of the first and second images, wherein the threshold is determined by using information of brightness of a local region of at least one of the first and second images, with the local region including an aimed pixel and peripheral pixels of the aimed pixel.
摘要翻译：用于检查形成多个图案的样本的布置; 捕获第一区域的第一图像; 捕获与形成在第一区域中的图案基本上相同的图案的第二区域的第二图像; 为每个像素创建与第一和第二图像的相应像素有关的数据; 根据第一和第二图像确定用于检测缺陷的每个像素的阈值; 以及通过使用每个像素的阈值和第一和第二图像的亮度的散射图的信息来处理第一和第二图像来检测样本上的缺陷，其中，通过使用第一和第二图像的局部区域的亮度的信息来确定阈值第一和第二图像中的至少一个，其中局部区域包括目标像素和目标像素的外围像素。

117. 发明申请

US20110299371A1 OPTICAL DISK DEVICE, OPTICAL DISK CONTROL METHOD, AND INTEGRATED CIRCUIT 有权
标题翻译：光盘设备，光盘控制方法和集成电路
公开(公告)号：US20110299371A1
公开(公告)日：2011-12-08
申请号：US13202434
申请日：2010-12-17
申请人： Tsuyoshi Nakasendo , Masaru Yamaoka , Yuji Takagi , Makoto Usui
发明人： Tsuyoshi Nakasendo , Masaru Yamaoka , Yuji Takagi , Makoto Usui
IPC分类号： G11B20/16 , G11B7/09 , G11B19/28
CPC分类号： G11B20/10009 , G11B7/0045 , G11B7/00736 , G11B19/26 , G11B20/00086 , G11B20/00115 , G11B20/00594 , G11B20/10027 , G11B20/1024 , G11B2220/2541 , G11B2220/2562
摘要： To provide an optical disk device, an optical disk control method and an integrated circuit, which are capable of writing a recordable mark by changing the reflectance ratio of a reflective film formed on concave-convex pits without using an industrial special device or a high-power laser light source. A data reproduction controller (103) sets a first rotation speed in a disk rotation speed switching unit (108) and a first laser power in a laser power switching unit (107) when reproducing the concave-convex pits. When writing the recordable mark, a mark recording controller (104) sets in the disk rotation speed switching unit (108) a second rotation speed that is slower than the first rotation speed and the lowest rotation speed at which the concave-convex pits can be reproduced, and sets a second laser power greater than the first laser power in the laser power switching unit (107) in accordance with the emission timing.
摘要翻译：为了提供一种光盘装置，光盘控制方法和集成电路，其能够通过改变形成在凹凸坑上的反射膜的反射率而写入可记录标记，而不使用工业专用装置或高速数据，功率激光光源。数据再现控制器（103）在再现凹凸坑时，在盘旋转速度切换单元（108）中设置第一旋转速度和激光功率切换单元（107）中的第一激光功率。当写入可记录标记时，标记记录控制器（104）在盘转速切换单元（108）中设置比第一转速慢的凹部凹坑的最低转速和第二转速根据发射定时，在激光功率切换单元（107）中再现并设定大于第一激光功率的第二激光功率。

118. 发明申请

US20100195896A1 METHOD AND APPARATUS FOR DETECTING PATTERN DEFECTS 有权
标题翻译：检测图案缺陷的方法和装置
公开(公告)号：US20100195896A1
公开(公告)日：2010-08-05
申请号：US12755453
申请日：2010-04-07
申请人： Hisae SHIBUYA , Akira Hamamatsu , Yuji Takagi
发明人： Hisae SHIBUYA , Akira Hamamatsu , Yuji Takagi
IPC分类号： G06T7/00 , G06K9/00
CPC分类号： G06K9/6221 , G01N21/9501 , G01N21/95607 , G01N2021/8854 , G01N2021/95676
摘要： With the objective of achieving defect kind training in a short period of time to teach classification conditions of defects detected as a result of inspecting a thin film device, according to one aspect of the present invention, there is provided a visual inspection method, and an apparatus therefor, comprising the steps of: detecting defects based on inspection images acquired by optical or electronic defect detection means, and at the same time calculating features of the defects; and classifying the defects according to classification conditions set beforehand, wherein said classification condition setting step further includes the steps of: collecting defect features over a large number of defects acquired beforehand from the defect detection step; sampling defects based on the distribution of the collected defect features over the large number of defects; and setting defect classification conditions based on the result of reviewing the sampled defects.
摘要翻译：为了在短时间内实现缺陷种类训练，目的在于教导检查薄膜装置的检测缺陷的分类条件，根据本发明的一个方面，提供一种目视检查方法，其装置包括以下步骤：基于由光学或电子缺陷检测装置获取的检查图像检测缺陷，同时计算缺陷的特征; 并根据预先设定的分类条件对缺陷进行分类，其中所述分类条件设置步骤还包括以下步骤：从缺陷检测步骤预先获取的大量缺陷中收集缺陷特征; 基于收集的缺陷特征分布在大量缺陷上的采样缺陷; 并根据检查采样缺陷的结果设置缺陷分类条件。

119. 发明申请

US20100188721A1 TWO-DIMENSIONAL ENCODER, HOLOGRAPHIC MEMORY DEVICE AND HOLOGRAPHIC MEMORY MEDIUM 审中-公开
标题翻译：二维编码器，全息记忆装置和全息记忆媒体
公开(公告)号：US20100188721A1
公开(公告)日：2010-07-29
申请号：US12439688
申请日：2007-10-03
申请人： Yuji Takagi , Makoto Usui , Kenichi Kasazumi
发明人： Yuji Takagi , Makoto Usui , Kenichi Kasazumi
IPC分类号： G03H1/04
CPC分类号： G11B7/0065 , G03H1/16 , G11B20/12 , G11C13/045
摘要： A two-dimensional encoder stores data on a holographic memory. The encoder encodes data of k bits (where k is an integer and k≧3) into n pixels arranged two-dimensionally (where n is an integer and n≧6). The encoder includes a first processing section 31 for classifying the n pixels into first and second groups of subblocks 11 and 12 using k1 bits out of the data of k bits (where k1 is an integer and k1≧1). Each of the subblocks 11 in the first group consists of m pixels (where m is an integer and m≧2), and the number of the subblocks 11 forming the first group is s1 (where s1 is an integer and s1≧2). Each of the subblocks 12 in the second group also consists of m pixels, and the number of the subblocks 12 forming the second group is s2 (where s2 is an integer and s2≧1). The encoder further includes a second processing section 32 for turning ON p pixels (where p is an integer and 1≦p≦m/2) out of the m pixels forming each subblock 11 in the first group and turning OFF all of the m pixels forming each subblock 12 in the second group using the other k2 bits of the data of k bits (where k2=k−k1).
摘要翻译：二维编码器将数据存储在全息存储器上。编码器将k位（其中k是整数，k≥3）的数据编码成二维布置的n个像素（其中n是整数，n≥6）。编码器包括第一处理部分31，用于使用k位数据（其中k1是整数，k1≥1）中的k1位将n个像素分类为第一和第二子块11和12组。第一组中的每个子块11由m个像素（其中m是整数，m≥2）组成，并且形成第一组的子块11的数量是s1（其中s1是整数，s1≥2）。第二组中的每个子块12也由m个像素组成，并且形成第二组的子块12的数量是s2（其中s2是整数，s2≥1）。编码器还包括用于在形成第一组中的每个子块11的m个像素中打开p个像素（其中p是整数和1＆nlE; p＆nlE; m / 2）的第二处理部分32，并且关闭所有m个像素使用k位数据的其他k2位（其中k2 = k-k1）来形成第二组中的每个子块12。

120. 发明授权

US07717138B2 Composite hose with corrugated metal tube 失效
标题翻译：带波纹金属管的复合软管
公开(公告)号：US07717138B2
公开(公告)日：2010-05-18
申请号：US11690877
申请日：2007-03-26
申请人： Yuji Takagi
发明人： Yuji Takagi
IPC分类号： F16L11/00
CPC分类号： F16L11/11 , F16L11/085 , F16L33/2076
摘要： A composite hose with a corrugated metal tube has a hose body having a corrugated metal tube and an outer layer. The corrugated metal tube includes a non-corrugated straight-walled portion on an end portion thereof, and a rigid insert pipe is inserted in the straight-walled portion. A socket fitting is fitted on the hose body by being swaged thereon radially inwardly, and an inner circumferential end portion of the collar portion and an outer circumferential surface of the insert pipe compress an extending portion of the straight-walled portion to fix the straight-walled portion onto the insert pipe and provide a seal between the outer circumferential surface of the insert pipe and an inner circumferential surface of the straight-walled portion. A fracture preventing mechanism is provided on a hose end portion for preventing fracture of the straight-walled portion.
摘要翻译：具有波纹金属管的复合软管具有软管体，其具有波纹金属管和外层。波纹金属管在其端部包括非波纹状的直壁部，并且刚性插入管插入直壁部。通过在径向向内锻造而在软管体上安装插座接头，并且套环部分的内周端部和插入管的外圆周表面压缩直壁部分的延伸部分，并且在插入管的外周面与直壁部的内周面之间形成密封。在软管端部设有防止破坏机构，用于防止直壁部分断裂。

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