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111. 发明授权

US06660597B2 Method for manufacturing semiconductor integrated circuit device 有权
标题翻译：半导体集成电路器件的制造方法
公开(公告)号：US06660597B2
公开(公告)日：2003-12-09
申请号：US10288539
申请日：2002-11-06
申请人： Ryoichi Furukawa , Satoshi Sakai , Satoshi Yamamoto
发明人： Ryoichi Furukawa , Satoshi Sakai , Satoshi Yamamoto
IPC分类号： H01L21336
CPC分类号： H01L21/28194 , H01L21/28079 , H01L21/28202 , H01L21/823462 , H01L21/823842 , H01L21/823857 , H01L29/517 , H01L29/665 , H01L29/66545 , H01L29/7833
摘要： In a process of forming MISFETs that have gate insulating films that are mutually different in thickness on the same substrate, the formation of an undesirable natural oxide film at the interface between the semiconductor substrate and the gate insulating film is suppressed. A gate insulating film of MISFETs constituting an internal circuit is comprised of a silicon oxynitride film. Another gate insulating film of MISFETs constituting an I/O circuit is comprised of a laminated silicon oxynitride film and a high dielectric film. A process of forming the two types of gate insulating films on the substrate is continuously carried out in a treatment apparatus of a multi-chamber system. Accordingly, the substrate will not be exposed to air. Therefore, it is possible to suppress the inclusion of undesirable foreign matter and the formation of a natural oxide film at the interface between the substrate and the gate insulating films.
摘要翻译：在形成具有相同基板上的厚度相互不同的栅极绝缘膜的MISFET的过程中，抑制了在半导体基板和栅极绝缘膜之间的界面处形成不期望的自然氧化膜。构成内部电路的MISFET的栅极绝缘膜由氮氧化硅膜构成。构成I / O电路的MISFET的另一个栅极绝缘膜由层叠的氮氧化硅膜和高介电膜构成。在多室系统的处理装置中连续地进行在基板上形成两种栅极绝缘膜的工序。因此，基板不会暴露在空气中。因此，可以抑制在基板和栅极绝缘膜之间的界面处包含不需要的异物和形成自然氧化膜。

112. 发明授权

US06632721B1 Method of manufacturing semiconductor devices having capacitors with electrode including hemispherical grains 失效
标题翻译：制造具有包括半球形晶粒的电极的电容器的半导体器件的方法
公开(公告)号：US06632721B1
公开(公告)日：2003-10-14
申请号：US09602887
申请日：2000-06-23
申请人： Shinpei Iijima , Satoshi Yamamoto , Jun Kuroda , Hiroshi Miki , Yoshihisa Fujisaki , Tadanori Yoshida , Kenichi Yamaguchi
发明人： Shinpei Iijima , Satoshi Yamamoto , Jun Kuroda , Hiroshi Miki , Yoshihisa Fujisaki , Tadanori Yoshida , Kenichi Yamaguchi
IPC分类号： H01L2120
CPC分类号： H01L28/84 , H01L27/10814 , H01L27/10894
摘要： In a method of manufacturing a semiconductor integrated circuit device in which a lower electrode of a capacitor is composed of a polycrystalline silicon film having a surface area increased by surface roughening, an impurity is introduced into the polycrystalline silicon film by vapor phase diffusion in order to reduce the resistance of the lower electrode.
摘要翻译：在制造半导体集成电路器件的方法中，其中电容器的下电极由具有由表面粗糙度增加的表面积的多晶硅膜构成，通过气相扩散将杂质引入到多晶硅膜中，以便降低下电极的电阻

113. 发明授权

US6088272A Data output system 有权
标题翻译：数据输出系统
公开(公告)号：US6088272A
公开(公告)日：2000-07-11
申请号：US177078
申请日：1998-10-23
申请人： Ichiro Urata , Satoru Yoshii , Osamu Ishikawa , Toshikazu Ito , Kazuya Yamamoto , Satoshi Yamamoto , Yoshikazu Endo
发明人： Ichiro Urata , Satoru Yoshii , Osamu Ishikawa , Toshikazu Ito , Kazuya Yamamoto , Satoshi Yamamoto , Yoshikazu Endo
IPC分类号： G11C7/00
CPC分类号： G11C7/00
摘要： A memory system includes a plurality of output buffers each of which outputs one of a plurality of one-bit signals forming data. The output buffers are put into a plurality of buffer groups. The memory system further includes a controller for feeding timing signals to the corresponding buffer groups via delay circuits having mutually different time constants, respectively. The timing signals include certain timing which causes the output buffers to output the corresponding one-bit signals. Since the foregoing certain timing is delayed depending on the time constants of the delay circuits, although the output buffers in the same buffer group output the corresponding one-bit signals simultaneously, the output buffers in the different buffer groups output the corresponding one-bit signals with mutually different timing.
摘要翻译：存储器系统包括多个输出缓冲器，每个输出缓冲器输出形成数据的多个一位信号中的一个。将输出缓冲器放入多个缓冲器组中。存储器系统还包括控制器，用于分别经由具有相互不同的时间常数的延迟电路向定时信号馈送定时信号。定时信号包括使输出缓冲器输出相应的一位信号的某些定时。由于上述某些定时根据延迟电路的时间常数而延迟，尽管同一缓冲器组中的输出缓冲器同时输出相应的一位信号，但是不同缓冲器组中的输出缓冲器输出相应的一位信号具有相互不同的时机。

114. 发明授权

US6060697A Substrate processing apparatus having regulated power consumption and method therefor 失效
标题翻译：具有稳定功耗的基板处理装置及其方法
公开(公告)号：US6060697A
公开(公告)日：2000-05-09
申请号：US39141
申请日：1998-03-13
申请人： Akihiko Morita , Masami Ohtani , Yasuo Imanishi , Masao Tsuji , Masaki Iwami , Joichi Nishimura , Kazuhiro Nishimura , Tetsuya Hamada , Satoshi Yamamoto , Kenji Kamei
发明人： Akihiko Morita , Masami Ohtani , Yasuo Imanishi , Masao Tsuji , Masaki Iwami , Joichi Nishimura , Kazuhiro Nishimura , Tetsuya Hamada , Satoshi Yamamoto , Kenji Kamei
IPC分类号： H01L21/02 , G05D23/19 , H02J3/00 , H02J13/00 , H05B1/02
CPC分类号： G05D23/1951
摘要： A substrate processing apparatus reduces an instantaneous maximum power consumption at turn-on. Power receiving parts of a plurality of processing units are connected to one end of a turn-on switch respectively through switches. The other end of the turn-on switch is connected to an external power source through a breaker. Timer values are set in advance in the timers, respectively. When the turn-on switch is turned on, the timers turn on the associated switches respectively after times which are defined by the timer values, whereby the processing units are provided with electric power, each with a delay of a constant time.
摘要翻译：基板处理装置降低开启时的瞬时最大功耗。多个处理单元的受电部分分别通过开关连接到导通开关的一端。导通开关的另一端通过断路器连接到外部电源。定时器值分别在定时器中设置。当接通开关接通时，定时器分别在由定时器值定义的时间之后分别关闭相应的开关，由此处理单元被提供电力，每个具有恒定时间的延迟。

115. 发明授权

US5983289A Data transfer methods and controller for transferring data in blocks without crossing certain address boundaries 失效
标题翻译：用于在不跨越某些地址边界的情况下传输数据块的数据传输方法和控制器
公开(公告)号：US5983289A
公开(公告)日：1999-11-09
申请号：US923130
申请日：1997-09-04
申请人： Osamu Ishikawa , Toshikazu Ito , Satoshi Yamamoto , Yoshikazu Endo
发明人： Osamu Ishikawa , Toshikazu Ito , Satoshi Yamamoto , Yoshikazu Endo
IPC分类号： G06F13/12 , G06F13/28 , G06F13/14 , G06F13/20
CPC分类号： G06F13/28
摘要： A data transfer controller transfers data in blocks having a restricted set of permitted sizes. Before transferring each block, the data transfer controller performs a segmented comparison on the current data address, at which the block starts, and a stopping address, at which the entire data transfer will end, and determines the block size from the result of the segmented comparison. In the segmented comparison, the data transfer controller compares a first part of the data address with a first part of the stopping address, then compares a second part of the data address with a second part of the stopping address. The comparison of second parts is made in different ways, depending on the result of the comparison of first parts.
摘要翻译：数据传输控制器以具有限制的允许大小集合的块传送数据。在转移每个块之前，数据传输控制器对块开始的当前数据地址和整个数据传输将结束的停止地址执行分段比较，并根据分段结果确定块大小比较。在分段比较中，数据传输控制器将数据地址的第一部分与停止地址的第一部分进行比较，然后将数据地址的第二部分与停止地址的第二部分进行比较。第二部分的比较取决于第一部分的比较结果，以不同的方式进行比较。

116. 发明授权

US5982474A Periphery exposing apparatus and method 失效
标题翻译：周边曝光装置及方法
公开(公告)号：US5982474A
公开(公告)日：1999-11-09
申请号：US868382
申请日：1997-06-03
申请人： Kazuya Akiyama , Kenji Kamei , Satoshi Yamamoto
发明人： Kazuya Akiyama , Kenji Kamei , Satoshi Yamamoto
IPC分类号： G03F7/20 , G03B27/42 , G03B27/48
CPC分类号： G03F7/2026
摘要： A method and apparatus for exposing a substrate to light perform the steps of inputting position data of a peripheral region along an outline of a chip region on a substrate, which has been placed on a spin chuck, detecting a reference position at an outer edge of the substrate inputting axial directions of the position data and aligning axial directions of an orthogonal shifting mechanism. Based on the position data inputted, light of an irradiator is shifted along the peripheral region to expose the peripheral region in a staggered way along the outline of the chip region. The method and apparatus may also perform the steps of inputting a shape of the chip region on the substrate as image information, deriving position data of the peripheral region along the outline of the chip region from the image information, and exposing the peripheral region to light based on the position data derived. The method and apparatus may also perform the steps of inputting shape information of the substrate, the chip region, and an area around a crossing point of scribe lines in the chip region on the substrate as image information, computing the positions of the peripheral region from the image information and the shape information of the substrate and the chip region; and exposing the peripheral region to light based on the positions of the computed peripheral region.
摘要翻译：用于将基板曝光的方法和装置执行以下步骤：沿着已经放置在旋转卡盘上的基板上沿着芯片区域的轮廓输入周边区域的位置数据，检测在外部边缘处的基准位置基板输入位置数据的轴向和正交变换机构的对准轴向。基于输入的位置数据，照射器的光沿着周边区域移动，沿着芯片区域的轮廓以交错的方式露出周边区域。该方法和装置还可以执行以下步骤：在基板上输入芯片区域的形状作为图像信息，从图像信息导出沿着芯片区域轮廓的外围区域的位置数据，并将外围区域曝光基于导出的位置数据。该方法和装置还可以执行以下步骤：输入衬底的形状信息，芯片区域和衬底上的芯片区域中的划线的交叉点周围的区域作为图像信息，计算外围区域的位置基板和芯片区域的图像信息和形状信息; 并且基于所计算的周边区域的位置将外围区域曝光。

117. 发明授权

US5912704A VTR with digitally-interfaced camera unit and viewfinder 失效
标题翻译： VTR与数字接口相机单元和取景器
公开(公告)号：US5912704A
公开(公告)日：1999-06-15
申请号：US37683
申请日：1993-03-25
申请人： Toshio Koyama , Michiko Mochizuki , Kayano Hashimoto , Satoshi Yamamoto
发明人： Toshio Koyama , Michiko Mochizuki , Kayano Hashimoto , Satoshi Yamamoto
IPC分类号： H04N5/225 , H04N5/232 , H04N9/04
CPC分类号： H04N5/23293 , H04N5/2251 , H04N5/232
摘要： A video camera is comprised of a camera unit having a signal processing circuit supplied with an imager signal from its imager device and which converts the imager signal to a digital video signal and a viewfinder having a decoder supplied with the digital video signal from the signal processing circuit of the camera unit through a bus and which decodes the digital video signal to provide a signal which is to be displayed on a display device as an image. Thus, the quality of image displayed on the display device can be improved comparatively and the arrangement of the video camera can be simplified.
摘要翻译：视频摄像机由具有信号处理电路的相机单元组成，该信号处理电路从其成像器装置提供成像器信号，并将成像器信号转换为数字视频信号，以及具有从信号处理器提供数字视频信号的解码器的取景器通过总线摄像机单元的电路，并且对数字视频信号进行解码以提供要作为图像在显示设备上显示的信号。因此，可以相对地提高显示装置上显示的图像的质量，并且可以简化摄像机的布置。

118. 发明授权

US5675600A Laser diode driver system 失效
标题翻译：激光二极管驱动系统
公开(公告)号：US5675600A
公开(公告)日：1997-10-07
申请号：US661829
申请日：1996-06-11
申请人： Satoshi Yamamoto , Tetsuya Fukaya , Shuhei Kawauchi , Masahiko Yamashita
发明人： Satoshi Yamamoto , Tetsuya Fukaya , Shuhei Kawauchi , Masahiko Yamashita
IPC分类号： H01S5/042 , H01S5/06 , H01S5/068 , H01S5/0683 , H01S3/00
CPC分类号： H01S5/0683
摘要： A laser diode driver solves problems of APC (Auto Power Control) group, a LD monitor group, and an optical output waveform, which occur when reducing adjusting resistors constituted in a conventional laser diode drive. The laser diode driver includes a laser diode for emitting a light output corresponding to an input signal, a light-receipt element for receiving a part of the light output emitted from the laser diode and outputting a light-receipt signal current corresponding to the received part of the light output, a driver circuit operatively coupled to the laser diode for supplying a driving current, which drives the laser diode to emit the light output, a duty variable controller for varying duty of a waveform of the driving current, an optical output stabilization loop for detecting a peak value corresponding to the light-receipt current outputted from the light-receipt element, comparing the detected peak value with a first reference value, and controlling the driver circuit to output a size of the driving current according to the difference between the detected peak value and the first reference value, and a duty stabilization loop for detecting an average value corresponding to the light-receipt signal current outputted from the light-receipt element, comparing the detected average with a second reference value, and controlling the duty variable controller to output the duty of the waveform of the driving current according to the difference between the detected average value and the second reference value.
摘要翻译：激光二极管驱动器可以解决APC（自动功率控制）组，LD监视器组以及减少常规激光二极管驱动中构成的调整电阻时出现的光输出波形的问题。激光二极管驱动器包括用于发射对应于输入信号的光输出的激光二极管，用于接收从激光二极管发射的光输出的一部分的光接收元件，并输出与接收部分相对应的光接收信号电流的光输出的驱动电路，可操作地耦合到激光二极管的驱动器电路，用于提供驱动激光二极管发射光输出的驱动电流，用于改变驱动电流波形占空比的占空比变量控制器，光输出稳定用于检测与从光接收元件输出的光接收电流对应的峰值，将检测到的峰值与第一参考值进行比较，并且控制驱动电路根据第一参考值输出驱动电流的大小，检测到的峰值和第一参考值，以及用于检测对应于light-rec的平均值的占空比稳定循环从光接收元件输出的eipt信号电流，将检测到的平均值与第二参考值进行比较，并且根据检测到的平均值和第二参考值之间的差来控制占空比变量控制器输出驱动电流的波形的占空比参考值。

119. 发明授权

US5661382A Motor drive circuit having a soft switching circuit and a push-pull configuration of transistors operated in a linear mode 失效
标题翻译：电动机驱动电路具有软开关电路和以线性模式工作的晶体管的推挽配置
公开(公告)号：US5661382A
公开(公告)日：1997-08-26
申请号：US156496
申请日：1993-11-23
申请人： Ken Enami , Satoshi Yamamoto
发明人： Ken Enami , Satoshi Yamamoto
IPC分类号： H02P6/18 , H02P6/00 , H02P6/08 , H02P7/00
CPC分类号： H02P6/085 , H02M7/53875 , H02P6/28
摘要： A circuit to drive a brushless motor which consumes less power because it uses pulse width modulation. The invention has at least two loops; one loop to control the switching of transistors in a push-pull configuration drives current in the different coils of the motor when those transistors connected to ground are driven in a linear, rather than a saturated, mode. This loop also incorporates a soft switching waveform shaping circuit which slowly switches the phase current so that the electromagnetic noise of the motor does not enter the magnetic head on the disk. The other loop actually controls the speed of the motor based on the linear mode of the transistors.
摘要翻译：驱动无刷电机的电路，因为它使用脉冲宽度调制而消耗较少的功率。本发明具有至少两个环; 用于控制推挽配置中的晶体管的开关的一个环路在连接到地的晶体管以线性而不是饱和模式驱动时驱动电动机的不同线圈中的电流。该回路还包括软开关波形整形电路，其缓慢地切换相电流，使得电机的电磁噪声不会进入磁盘上的磁头。另一个环路实际上基于晶体管的线性模式控制电机的速度。

120. 发明授权

US5608586A Robust servo for disk-shift compensation in rotating storage system 失效
标题翻译：用于旋转存储系统中的磁盘移位补偿的鲁棒伺服
公开(公告)号：US5608586A
公开(公告)日：1997-03-04
申请号：US327168
申请日：1994-10-21
申请人： Muthuthamby Sri-Jayantha , Arun Sharma , Hien Dang , Satoshi Yamamoto
发明人： Muthuthamby Sri-Jayantha , Arun Sharma , Hien Dang , Satoshi Yamamoto
IPC分类号： G11B5/55 , G11B5/596 , G11B5/035
CPC分类号： G11B5/5547 , G11B5/59627
摘要： A method and apparatus, in a direct access storage device including a head positioned for interaction with a data storage medium mounted on a rotating spindle, an actuator for positioning the head, and a servo control loop for positioning the actuator. The improvement comprises: a narrow band gain enhancing filter for connection in the servo control loop. The filter has a response frequency related to the rotational frequency of the spindle. The filter has programmable initial states. Also provided is a switch for switching in the narrow band filter as the head approaches a target position on the data storage medium. Initial states of the filter are determined and supplied to program the filter. At least one additional filter having a peak response frequency at a harmonic of the frequency of rotation of the spindle, may be provided. Initial states of the additional filters are determined and supplied to program the additional filter. The filter may include successive delay circuits for inputs to the filter, which circuits provide delayed outputs; multipliers for multiplying selected delayed outputs by a constant; and a summer for summing the delay outputs after the delayed outputs are multiplied by the multipliers. The initial states may be stored as phase, frequency and amplitude of a sine function.
摘要翻译：一种直接存取存储装置中的方法和装置，包括：定位用于与安装在旋转主轴上的数据存储介质相互作用的头部，用于定位头部的致动器，以及用于定位致动器的伺服控制回路。改进包括：用于在伺服控制回路中连接的窄带增益增强滤波器。滤波器具有与主轴转速相关的响应频率。滤波器具有可编程的初始状态。还提供了当头部接近数据存储介质上的目标位置时用于切换窄带滤波器的开关。滤波器的初始状态被确定并提供给编程滤波器。可以提供至少一个具有在主轴的旋转频率的谐波处的峰值响应频率的附加滤波器。确定并提供附加过滤器的初始状态以编程附加过滤器。滤波器可以包括用于输入到滤波器的连续延迟电路，这些电路提供延迟的输出; 用于将选定的延迟输出乘以常数的乘法器; 以及用于将延迟输出乘以乘法器之后的延迟输出相加的加法器。初始状态可以存储为正弦函数的相位，频率和幅度。

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