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    • 103. 发明授权
    • Semiconductor device and manufacturing method of the same
    • 半导体器件及其制造方法相同
    • US08212649B2
    • 2012-07-03
    • US13238056
    • 2011-09-21
    • Tsuyoshi FujiwaraToshinori ImaiKenichi TakedaHiromi Shimamoto
    • Tsuyoshi FujiwaraToshinori ImaiKenichi TakedaHiromi Shimamoto
    • H01C1/12
    • H01L23/5228H01L27/0688H01L28/24H01L2924/0002H01L2924/00
    • A semiconductor device according to the present invention includes: a lower-surface oxidation preventing insulating film formed on a lower surface of a metal resistor element; an upper-surface oxidation preventing insulating film formed on an upper surface of the metal resistor element; and a side-surface oxidation preventing insulating film formed only near a side surface of the metal resistor element by performing anisotropic etching after being deposited on a whole surface of a wafer in a process separated from the lower-surface oxidation preventing insulating film and the upper-surface oxidation preventing insulating film. According to the present invention, it is possible to prevent the increase of the resistance value due to the oxidation of the metal resistor element and also to prevent the increase of the parasitic capacitance between metal wiring layers without complicating the fabrication process.
    • 根据本发明的半导体器件包括:形成在金属电阻器元件的下表面上的下表面的氧化防止绝缘膜; 形成在所述金属电阻元件的上表面上的上表面氧化防止绝缘膜; 以及侧面氧化防止绝缘膜,其仅在金属电阻元件的侧面附近形成,在与下表面的氧化防止绝缘膜分离的工序中沉积在晶片的整个表面上,进行各向异性蚀刻 表面氧化防止绝缘膜。 根据本发明,可以防止由于金属电阻元件的氧化引起的电阻值的增加,并且还可以防止金属布线层之间的寄生电容的增加,而不会使制造工艺复杂化。
    • 104. 发明授权
    • Semiconductor device and manufacturing method of the same
    • 半导体器件及其制造方法相同
    • US08040214B2
    • 2011-10-18
    • US12481384
    • 2009-06-09
    • Tsuyoshi FujiwaraToshinori ImaiKenichi TakedaHiromi Shimamoto
    • Tsuyoshi FujiwaraToshinori ImaiKenichi TakedaHiromi Shimamoto
    • H01C1/12
    • H01L23/5228H01L27/0688H01L28/24H01L2924/0002H01L2924/00
    • A semiconductor device according to the present invention includes: a lower-surface oxidation preventing insulating film formed on a lower surface of a metal resistor element; an upper-surface oxidation preventing insulating film formed on an upper surface of the metal resistor element; and a side-surface oxidation preventing insulating film formed only near a side surface of the metal resistor element by performing anisotropic etching after being deposited on a whole surface of a wafer in a process separated from the lower-surface oxidation preventing insulating film and the upper-surface oxidation preventing insulating film. According to the present invention, it is possible to prevent the increase of the resistance value due to the oxidation of the metal resistor element and also to prevent the increase of the parasitic capacitance between metal wiring layers without complicating the fabrication process.
    • 根据本发明的半导体器件包括:形成在金属电阻器元件的下表面上的下表面的氧化防止绝缘膜; 形成在所述金属电阻元件的上表面上的上表面氧化防止绝缘膜; 以及侧面氧化防止绝缘膜,其仅在金属电阻元件的侧面附近形成,在与下表面的氧化防止绝缘膜分离的工序中沉积在晶片的整个表面上,进行各向异性蚀刻 表面氧化防止绝缘膜。 根据本发明,可以防止由于金属电阻元件的氧化引起的电阻值的增加,并且还可以防止金属布线层之间的寄生电容的增加,而不会使制造工艺复杂化。
    • 105. 发明授权
    • Television with a disk playback feature and disk playback apparatus
    • 具有磁盘回放功能的电视机和磁盘播放装置
    • US07495712B2
    • 2009-02-24
    • US11173513
    • 2005-07-02
    • Kenichi Takeda
    • Kenichi Takeda
    • H04N5/64G11B33/02
    • H04N5/64H04N9/3141
    • Disclosed is a television with a disk playback feature, in which the convenience of the slot-in mechanism is preserved and a disk can be unloaded without being damaged by the lid body. A critical point is established on the path of turning of the second point of application of spring force. By the urging force of the torsion spring, the pivoting door can be forced to either open or close the slot, subject to whether or not the second point is beyond the critical point. The slot can be closed positively by the door plate before the second point reaches the critical point. Once the second point goes beyond the critical point, the pivoting door can be swung open without being thrust by the disk. Therefore, resistance during disk unloading is reduced and it can be prevented that a disk is damaged by touching with the door plate.
    • 公开了具有盘回放特征的电视机,其中保留了插入机构的便利性,并且可以在不被盖体损坏的情况下卸载盘。 在第二个弹簧力应用的转弯路径上确定了一个关键点。 通过扭转弹簧的推动力,旋转门可以被强制打开或关闭狭槽,受制于第二点是否超过临界点。 在第二点到达临界点之前,可以通过门板正确关闭槽。 一旦第二点超过了临界点,则可以摆动转动门而不被盘推动。 因此,减少盘卸载期间的阻力,并且可以防止通过与门板接触而损坏盘。
    • 107. 发明申请
    • Data processing apparatus for controlling access to a memory
    • 用于控制对存储器的访问的数据处理装置
    • US20080040530A1
    • 2008-02-14
    • US11882855
    • 2007-08-06
    • Kenichi Takeda
    • Kenichi Takeda
    • G06F13/36
    • G06F13/28
    • A data processing apparatus contains a first bus connected to a first memory, a first central processing unit (CPU) being accessible to the first memory via the first bus, a first Direct Memory Access (DMA) controller being accessible to the first memory via the first bus, and a monitor circuit connected to the first bus and monitoring addresses transferred on the first bus. The addresses transferred on the first bus are transmitted from the first DMA controller to the first memory via the first bus. The monitor circuit compares the address transferred on the first bus with a preset monitor target address. The CPU acquires the comparison results by the monitor circuit. If the comparison results show an address match, then the CPU accesses the first memory. The CPU can in this way access the first memory at a correct timing.
    • 数据处理装置包括连接到第一存储器的第一总线,经由第一总线可访问第一存储器的第一中央处理单元(CPU),经由第一存储器可访问的第一直接存储器存取(DMA)控制器, 第一总线,以及连接到第一总线的监视电路和监视在第一总线上传送的地址。 在第一总线上传送的地址通过第一总线从第一DMA控制器发送到第一存储器。 监视器电路将第一总线上传送的地址与预设的监视目标地址进行比较。 CPU通过监视电路获取比较结果。 如果比较结果显示地址匹配,则CPU访问第一个内存。 CPU可以以这种方式在正确的时机访问第一个内存。
    • 109. 发明申请
    • Flow sensor
    • 流量传感器
    • US20070056366A1
    • 2007-03-15
    • US11330969
    • 2006-01-13
    • Noriyuki SakumaNaoki YamamotoKenichi TakedaHiroshi Fukuda
    • Noriyuki SakumaNaoki YamamotoKenichi TakedaHiroshi Fukuda
    • G01F1/68
    • G01F1/6845G01F1/699G01P5/10
    • The present invention provides a technology capable of achieving a highly-sensitive flow sensor, by forming a metal film having a relatively high TCR on a semiconductor substrate via an insulating film. A measurement device which is a thermal fluid flow sensor includes a heat element, resistance temperature detectors (upstream-side resistance temperature detector and downstream-side resistance temperature detector), and a resistance temperature detector for air which are all formed of a first metal film. The first metal film is formed of an α-Ta film having a resistivity lower than three times the resistivity of a Ta ingot and obtained by deposition through sputtering on an amorphous film containing metal.
    • 本发明提供一种能够通过在绝缘膜上在半导体衬底上形成具有较高TCR的金属膜来实现高灵敏度的流量传感器的技术。 作为热流体流量传感器的测量装置包括热元件,电阻温度检测器(上游侧电阻温度检测器和下游侧电阻温度检测器)以及空气的电阻温度检测器,全部由第一金属膜 。 第一金属膜由具有低于Ta锭的电阻率的三倍的α-Ta膜形成,并且通过溅射沉积在含有金属的非晶膜上而获得。