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1. 发明授权

US07636993B2 Method for producing a piezoelectric film actuator 失效
标题翻译：压电薄膜致动器的制造方法
公开(公告)号：US07636993B2
公开(公告)日：2009-12-29
申请号：US11218515
申请日：2005-09-06
申请人： Takehito Okabe , Nobuhiko Sato , Makoto Kurotobi , Kenichi Takeda , Toshihiro Ifuku
发明人： Takehito Okabe , Nobuhiko Sato , Makoto Kurotobi , Kenichi Takeda , Toshihiro Ifuku
IPC分类号： H01L41/22 , H01L41/00
CPC分类号： B41J2/161 , B41J2/1623 , B41J2/1628 , B41J2/1629 , B41J2/1632 , B41J2/1642 , B41J2/1643 , B41J2/1646 , H01L41/1876 , H01L41/332 , Y10T29/42 , Y10T29/435 , Y10T29/49126 , Y10T29/49128 , Y10T29/4913 , Y10T29/49155
摘要： A method for producing a piezoelectric film actuator is provided. This method includes the steps of preparing an intermediate transfer member having a porous layer formed thereon, with a vibrating plate and a piezoelectric layer being provided on the porous layer; bonding the vibrating plate to a nozzle substrate to form a composite structure; and separating the intermediate transfer member from the composite structure at the porous layer to transfer the vibrating plate and the piezoelectric layer to the nozzle substrate.
摘要翻译：提供了一种制造压电膜致动器的方法。该方法包括以下步骤：制备其上形成有多孔层的中间转印部件，其中振动板和压电层设置在多孔层上; 将振动板接合到喷嘴基板以形成复合结构; 并在所述多孔层处从所述复合结构分离所述中间转印部件，以将所述振动板和所述压电层转印到所述喷嘴基板。

2. 发明申请

US20060049723A1 Method for producing piezoelectric film actuator, and composite structure having piezoelectric layer 失效
标题翻译：用于制造压电薄膜致动器的方法和具有压电层的复合结构
公开(公告)号：US20060049723A1
公开(公告)日：2006-03-09
申请号：US11218515
申请日：2005-09-06
申请人： Takehito Okabe , Nobuhiko Sato , Makoto Kurotobi , Kenichi Takeda , Toshihiro Ifuku
发明人： Takehito Okabe , Nobuhiko Sato , Makoto Kurotobi , Kenichi Takeda , Toshihiro Ifuku
IPC分类号： H01L41/08
CPC分类号： B41J2/161 , B41J2/1623 , B41J2/1628 , B41J2/1629 , B41J2/1632 , B41J2/1642 , B41J2/1643 , B41J2/1646 , H01L41/1876 , H01L41/332 , Y10T29/42 , Y10T29/435 , Y10T29/49126 , Y10T29/49128 , Y10T29/4913 , Y10T29/49155
摘要： A method for producing a piezoelectric film actuator is provided. This method includes the steps of preparing an intermediate transfer member having a porous layer formed thereon, with a vibrating plate and a piezoelectric layer being provided on the porous layer; bonding the vibrating plate to a nozzle substrate to form a composite structure; and separating the intermediate transfer member from the composite structure at the porous layer to transfer the vibrating plate and the piezoelectric layer to the nozzle substrate.
摘要翻译：提供了一种制造压电膜致动器的方法。该方法包括以下步骤：制备其上形成有多孔层的中间转印部件，其中振动板和压电层设置在多孔层上; 将振动板接合到喷嘴基板以形成复合结构; 并在所述多孔层处从所述复合结构分离所述中间转印部件，以将所述振动板和所述压电层转印到所述喷嘴基板。

3. 发明申请

US20100225712A1 INKJET HEAD AND METHOD FOR MANUFACTURING THE SAME 审中-公开
标题翻译：喷嘴头及其制造方法
公开(公告)号：US20100225712A1
公开(公告)日：2010-09-09
申请号：US12781218
申请日：2010-05-17
申请人： Takehito Okabe , Nobuhiko Sato , Makoto Kurotobi , Kenichi Takeda , Toshihiro Ifuku
发明人： Takehito Okabe , Nobuhiko Sato , Makoto Kurotobi , Kenichi Takeda , Toshihiro Ifuku
IPC分类号： B41J2/045
CPC分类号： B41J2/161 , B41J2/1623 , B41J2/1626 , Y10T29/42 , Y10T29/49126 , Y10T29/49128 , Y10T29/4913 , Y10T29/49401
摘要： A method for manufacturing an inkjet head includes providing a piezoelectric substrate having a porous structure, a diaphragm on the porous structure, and a piezoelectric substance layer on the diaphragm, and forming a cavity by etching out the porous structure from the piezoelectric substrate.
摘要翻译：一种制造喷墨头的方法包括：提供具有多孔结构的压电基片，多孔结构上的光阑以及隔膜上的压电物质层，通过从压电基片上蚀刻出多孔结构而形成空腔。

4. 发明申请

US20060049135A1 Inkjet head and method for manufacturing the same 有权
标题翻译：喷墨头及其制造方法
公开(公告)号：US20060049135A1
公开(公告)日：2006-03-09
申请号：US11215974
申请日：2005-09-01
申请人： Takehito Okabe , Nobuhiko Sato , Makoto Kurotobi , Kenichi Takeda , Toshihiro Ifuku
发明人： Takehito Okabe , Nobuhiko Sato , Makoto Kurotobi , Kenichi Takeda , Toshihiro Ifuku
IPC分类号： G01D15/00 , G11B5/127
CPC分类号： B41J2/161 , B41J2/1623 , B41J2/1626 , Y10T29/42 , Y10T29/49126 , Y10T29/49128 , Y10T29/4913 , Y10T29/49401
摘要： A method for manufacturing an inkjet head includes providing a piezoelectric substrate having a porous structure, a diaphragm on the porous structure, and a piezoelectric substance layer on the diaphragm, and forming a cavity by etching out the porous structure from the piezoelectric substrate.
摘要翻译：一种制造喷墨头的方法包括：提供具有多孔结构的压电基片，多孔结构上的光阑以及隔膜上的压电物质层，通过从压电基片上蚀刻出多孔结构而形成空腔。

5. 发明授权

US07743503B2 Method for manufacturing inkjet head 有权
标题翻译：喷墨头制造方法
公开(公告)号：US07743503B2
公开(公告)日：2010-06-29
申请号：US11215974
申请日：2005-09-01
申请人： Takehito Okabe , Nobuhiko Sato , Makoto Kurotobi , Kenichi Takeda , Toshihiro Ifuku
发明人： Takehito Okabe , Nobuhiko Sato , Makoto Kurotobi , Kenichi Takeda , Toshihiro Ifuku
IPC分类号： B23P17/00 , G01D15/00
CPC分类号： B41J2/161 , B41J2/1623 , B41J2/1626 , Y10T29/42 , Y10T29/49126 , Y10T29/49128 , Y10T29/4913 , Y10T29/49401
摘要： A method for manufacturing an inkjet head includes providing a piezoelectric substrate having a porous structure, a diaphragm on the porous structure, and a piezoelectric substance layer on the diaphragm, and forming a cavity by etching out the porous structure from the piezoelectric substrate.
摘要翻译：一种喷墨头的制造方法，其特征在于，提供具有多孔结构的压电基板，多孔结构上的膜片，隔膜上的压电体层，通过从压电基板上蚀刻出多孔结构而形成空腔。

6. 发明申请

US20080307622A1 Method for producing piezoelectric film actuator, and composite structure having piezoelectric layer 审中-公开
标题翻译：用于制造压电薄膜致动器的方法和具有压电层的复合结构
公开(公告)号：US20080307622A1
公开(公告)日：2008-12-18
申请号：US12081626
申请日：2008-04-18
申请人： Takehito Okabe , Nobuhiko Sato , Makoto Kurotobi , Kenichi Takeda , Toshihiro Ifuku
发明人： Takehito Okabe , Nobuhiko Sato , Makoto Kurotobi , Kenichi Takeda , Toshihiro Ifuku
IPC分类号： H01L41/22
CPC分类号： B41J2/161 , B41J2/1623 , B41J2/1628 , B41J2/1629 , B41J2/1632 , B41J2/1642 , B41J2/1643 , B41J2/1646 , H01L41/1876 , H01L41/332 , Y10T29/42 , Y10T29/435 , Y10T29/49126 , Y10T29/49128 , Y10T29/4913 , Y10T29/49155
摘要： A method for producing a piezoelectric film actuator is provided. This method includes the steps of preparing an intermediate transfer member having a porous layer formed thereon, with a vibrating plate and a piezoelectric layer being provided on the porous layer; bonding the vibrating plate to a nozzle substrate to form a composite structure; and separating the intermediate transfer member from the composite structure at the porous layer to transfer the vibrating plate and the piezoelectric layer to the nozzle substrate.
摘要翻译：提供了一种用于制造压电膜致动器的方法。该方法包括以下步骤：制备其上形成有多孔层的中间转印部件，其中振动板和压电层设置在多孔层上; 将振动板接合到喷嘴基板以形成复合结构; 并在所述多孔层处从所述复合结构分离所述中间转印部件，以将所述振动板和所述压电层转印到所述喷嘴基板。

7. 发明申请

US20080076197A1 METHOD OF MANUFACTURING A LIQUID EJECTION HEAD AND LIQUID EJECTION HEAD 有权
标题翻译：液体喷射头和液体喷射头的制造方法
公开(公告)号：US20080076197A1
公开(公告)日：2008-03-27
申请号：US11849683
申请日：2007-09-04
申请人： Hirokazu Komuro , Makoto Kurotobi , Tadashi Atoji , Takehito Okabe
发明人： Hirokazu Komuro , Makoto Kurotobi , Tadashi Atoji , Takehito Okabe
IPC分类号： H01L21/00 , B41J2/04
CPC分类号： B41J2/1642 , B41J2/1603 , B41J2/1628 , B41J2/1629 , B41J2/1631 , Y10T29/49128 , Y10T29/4913 , Y10T29/49401
摘要： A method of manufacturing a liquid ejection head and a liquid ejection head capable of preventing corrosion of electrodes are provided. A method of manufacturing a liquid ejection head includes: a steps of forming porous silicon areas in portions of a silicon substrate where the liquid paths are to be formed; a steps of forming in layers in the porous silicon areas a protective layer, a heating resistor layer, an electrode layer and a heat accumulation layer; a steps of forming ink ejection openings in the silicon substrate; and a steps of removing the porous silicon areas.
摘要翻译：提供一种能够防止电极腐蚀的液体喷射头和液体喷射头的制造方法。制造液体喷射头的方法包括：在要形成液体路径的硅衬底的部分中形成多孔硅区域的步骤; 在多孔硅区域中形成保护层，加热电阻层，电极层和蓄热层的步骤; 在硅衬底中形成喷墨口的步骤; 以及去除多孔硅区域的步骤。

8. 发明申请

US20070243330A1 MANUFACTURING METHOD OF LIQUID DISCHARGE HEAD 审中-公开
标题翻译：液体放电头的制造方法
公开(公告)号：US20070243330A1
公开(公告)日：2007-10-18
申请号：US11693122
申请日：2007-03-29
申请人： Hirokazu Komuro , Makoto Kurotobi , Tadashi Atoji , Takehito Okabe
发明人： Hirokazu Komuro , Makoto Kurotobi , Tadashi Atoji , Takehito Okabe
IPC分类号： B05D3/00 , B05D3/12
CPC分类号： B41J2/1639 , B41J2/1601 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1642 , B41J2/1646 , B41J2002/1437
摘要： Disclosed is a manufacturing method of a liquid discharge head having a discharge port which discharges a liquid, a flow path which communicates with the discharge port, a heating portion which is disposed correspondingly to the flow path and which generates heat energy for use in discharging the liquid from the discharge port and a protective layer which prevents the heating portion from being brought into contact with the liquid, the method comprising: forming porous silicon from a surface to an inner portion of a silicon substrate; sealing pores present in the surface of the porous silicon to smoothen the surface of the porous silicon; forming the protective layer on the smoothened surface of the porous silicon; forming the heating portion on the protective layer; forming the discharge port; and removing the porous silicon to form the flow path.
摘要翻译：本发明公开了一种排液头的制造方法，其具有排出液体的排出口，与排出口连通的流路，与流路对应设置的加热部，其产生用于排出的热量来自排出口的液体和防止加热部与液体接触的保护层，所述方法包括：从硅衬底的表面到内部形成多孔硅; 密封存在于多孔硅表面的孔，以平滑多孔硅的表面; 在多孔硅的平滑表面上形成保护层; 在保护层上形成加热部分; 形成排出口; 并除去多孔硅以形成流路。

9. 发明授权

US08029685B2 Liquid ejection head and its method of manufacture 有权
标题翻译：液体喷头及其制造方法
公开(公告)号：US08029685B2
公开(公告)日：2011-10-04
申请号：US11849683
申请日：2007-09-04
申请人： Hirokazu Komuro , Makoto Kurotobi , Tadashi Atoji , Takehito Okabe
发明人： Hirokazu Komuro , Makoto Kurotobi , Tadashi Atoji , Takehito Okabe
IPC分类号： G01D15/00
CPC分类号： B41J2/1642 , B41J2/1603 , B41J2/1628 , B41J2/1629 , B41J2/1631 , Y10T29/49128 , Y10T29/4913 , Y10T29/49401
摘要： A method of manufacturing a liquid ejection head and a liquid ejection head capable of preventing corrosion of electrodes are provided. The method of manufacturing a liquid ejection head includes: a step of forming porous silicon areas in portions of a silicon substrate where the liquid paths are to be formed; a step of forming in layers in the porous silicon areas a protective layer, a heating resistor layer, an electrode layer and a heat accumulation layer; a step of forming ink ejection openings in the silicon substrate; and a step of removing the porous silicon areas.
摘要翻译：提供一种能够防止电极腐蚀的液体喷射头和液体喷射头的制造方法。制造液体喷射头的方法包括：在要形成液体路径的硅衬底的部分中形成多孔硅区域的步骤; 在多孔硅区域中形成保护层，加热电阻层，电极层和蓄热层的步骤; 在硅衬底中形成喷墨口的步骤; 以及去除多孔硅区域的步骤。

10. 发明授权

US08293559B2 Method of manufacturing photoelectric conversion device 有权
标题翻译：制造光电转换装置的方法
公开(公告)号：US08293559B2
公开(公告)日：2012-10-23
申请号：US13161959
申请日：2011-06-16
申请人： Takehito Okabe , Hiroaki Naruse , Ryuichi Mishima , Kouhei Hashimoto
发明人： Takehito Okabe , Hiroaki Naruse , Ryuichi Mishima , Kouhei Hashimoto
IPC分类号： H01L21/00
CPC分类号： H01L27/14687 , H01L21/28518 , H01L27/14632
摘要： In a method of manufacturing a photoelectric conversion device having a pixel region and a peripheral circuit region, a semiconductor compound layer is formed by causing a surface of a diffusion layer or gate electrode of a MOS transistor in the peripheral circuit region to react with a high melting point metal, then an insulating layer is formed in the pixel region and the peripheral circuit region after the step of forming a semiconductor compound layer. A contact hole is formed in the insulating layer to expose a diffusion layer in the pixel region, and a contact hole is formed in the insulating layer to expose the semiconductor compound layer formed in the peripheral circuit region. These holes are formed at different timings. Prior to forming the hole which is formed later, a contact plug is formed in the contact hole which is formed earlier.
摘要翻译：在制造具有像素区域和外围电路区域的光电转换装置的方法中，通过使外围电路区域中的MOS晶体管的扩散层或栅电极的表面与高电位反应来形成半导体化合物层熔点金属，则在形成半导体化合物层的步骤之后，在像素区域和外围电路区域中形成绝缘层。在绝缘层中形成接触孔，以露出像素区域中的扩散层，并且在绝缘层中形成接触孔以暴露形成在外围电路区域中的半导体化合物层。这些孔在不同的时刻形成。在形成稍后形成的孔之前，在较早形成的接触孔中形成接触塞。

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