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101. 发明授权

US5366929A Method for making reliable selective via fills 失效
标题翻译：制造可靠选择性通孔填充的方法
公开(公告)号：US5366929A
公开(公告)日：1994-11-22
申请号：US68900
申请日：1993-05-28
申请人： James M. Cleeves , Changhae Park , Rosemary Gettle
发明人： James M. Cleeves , Changhae Park , Rosemary Gettle
IPC分类号： H01L21/768 , H01L21/44
CPC分类号： H01L21/76876 , H01L21/76805 , H01L21/76844 , H01L21/7685 , H01L21/76862 , H01L21/76865 , H01L21/76879 , Y10S148/158 , Y10S438/906
摘要： A process for filling vias formed in a dielectric layer is disclosed. First, a via is formed in a dielectric layer, exposing an underlying metallization layer having a seed layer thereon. A sputter etch is performed which removes a portion of the seed layer, including an oxidized surface layer. The material thus etched from the seed layer first seals the sidewall of via, preventing outgassing from occurring. The continued redeposition of the seed layer on the sidewall provides a nucleation site for selective deposition of a via fill material. Following the sputter etch, selective deposition of the via fill is performed. Since the deposition occurs from the sidewalls as well as on the bottom of the via, all vias become substantially filled at the same time.
摘要翻译：公开了一种在电介质层中形成的用于填充过孔的工艺。首先，在电介质层中形成通孔，在其上露出具有种子层的下面的金属化层。执行溅射蚀刻，其去除包括氧化表面层的种子层的一部分。从种子层这样蚀刻的材料首先密封通孔的侧壁，防止发生脱气。种子层在侧壁上的继续再沉积提供了用于选择性沉积通孔填充材料的成核位置。在溅射蚀刻之后，进行通孔填充的选择性沉积。由于沉积从侧壁以及通孔的底部发生，因此所有通孔同时变得基本上被填充。

102. 发明授权

US5045150A Plasma etching using a bilayer mask 失效
标题翻译：使用双层掩模的等离子体蚀刻
公开(公告)号：US5045150A
公开(公告)日：1991-09-03
申请号：US210211
申请日：1988-06-17
申请人： James M. Cleeves , James G. Heard , Zoilo C. H. Tan
发明人： James M. Cleeves , James G. Heard , Zoilo C. H. Tan
IPC分类号： H01L21/027 , H01L21/311 , H01L21/3213
CPC分类号： H01L21/31144 , H01L21/0277 , H01L21/31116 , H01L21/32134 , H01L21/32136
摘要： A bilayer mask is utilized for etching a primary layer, which may be either an aluminum metallization layer or a dielectric layer. The bilayer mask includes both a thin resist layer and a metal imaging layer. The thin resist layer provides for high resolution patterning of the metal imaging layer. The metal imaging layer, in turn, provides for durability to withstand subsequent plasma etching of the underlying primary layer.
摘要翻译：使用双层掩模来蚀刻初级层，其可以是铝金属化层或电介质层。双层掩模包括薄的抗蚀剂层和金属成像层。薄的抗蚀剂层提供金属成像层的高分辨率图案化。金属成像层又提供耐久性以承受下一层等离子体蚀刻。

103. 发明授权

US4489482A Impregnation of aluminum interconnects with copper 失效
标题翻译：铝互连铜浸渍
公开(公告)号：US4489482A
公开(公告)日：1984-12-25
申请号：US501348
申请日：1983-06-06
申请人： Thomas Keyser , Michael E. Thomas , John M. Pierce , James M. Cleeves
发明人： Thomas Keyser , Michael E. Thomas , John M. Pierce , James M. Cleeves
IPC分类号： H01L23/52 , C23F1/00 , C23F1/18 , C23F1/20 , C23F4/00 , H01L21/3205 , H01L21/3213 , H01L21/768 , H01L21/92 , H01L21/285
CPC分类号： C23F1/18 , C23F1/20 , C23F4/00 , H01L21/32051 , H01L21/32134 , H01L21/32136 , H01L21/76886
摘要： A method for impregnating copper into aluminum interconnect lines on a semiconductor device is disclosed. In a first embodiment, an interconnect pattern is formed on an aluminum layer by etching while the aluminum is substantially free from copper, and the copper is thereafter introduced to the formed interconnect lines. In a second embodiment, copper is introduced to the aluminum layer prior to formation of the desired interconnect pattern. The copper-rich layer is removed from the areas to be etched prior to etching. The method facilitates chlorine plasma etching of the aluminum which is inhibited by the presence of copper. The method is also useful with various wet etching processes where the formation of a copper-rich layer is found to stabilize the aluminum layer during subsequent processing .
摘要翻译：公开了一种将铜浸入半导体器件中的铝互连线中的方法。在第一实施例中，通过蚀刻在铝层上形成互连图案，同时铝基本上不含铜，然后将铜引入所形成的互连线。在第二实施例中，在形成期望的互连图案之前将铜引入铝层。在蚀刻之前，从要蚀刻的区域去除富铜层。该方法促进了由于铜的存在而抑制的铝的氯等离子体蚀刻。该方法对于各种湿法蚀刻工艺也是有用的，其中发现富铜层的形成在后续处理期间使铝层稳定。

104. 发明授权

US4443295A Method of etching refractory metal film on semiconductor structures utilizing triethylamine and H.sub.2 O.sub.2 失效
$Method of etching refractory metal film on semiconductor structures utilizing triethylamine and H.sub.2 O.sub.2$
标题翻译：使用三乙胺和H 2 O 2在半导体结构上蚀刻难熔金属膜的方法
公开(公告)号：US4443295A
公开(公告)日：1984-04-17
申请号：US503976
申请日：1983-06-13
申请人： Kenneth J. Radigan , James M. Cleeves
发明人： Kenneth J. Radigan , James M. Cleeves
IPC分类号： C23F1/10 , C23F1/20 , C23F1/38 , H01L21/027 , H01L21/28 , H01L21/308 , H01L21/3213
CPC分类号： C23F1/38 , C23F1/10 , C23F1/20 , H01L21/32134
摘要： A method is disclosed of etching a refractory metal layer on a semiconductor structure comprising subjecting it to a mixture of a Lewis base and an oxidizing agent. In the preferred embodiment a method is described for etching a tungsten-titanium layer on a semiconductor structure by immersing it in a mixture of triethylamine and hydrogen peroxide.
摘要翻译：公开了一种在半导体结构上蚀刻难熔金属层的方法，包括使其与路易斯碱和氧化剂的混合物接触。在优选的实施方案中，描述了一种通过将其浸入三乙胺和过氧化氢的混合物来蚀刻半导体结构上的钨 - 钛层的方法。

105. 发明授权

US08910606B2 Positive control (desmodromic) valve systems for internal combustion engines 有权
标题翻译：用于内燃机的积极控制（去污）阀门系统
公开(公告)号：US08910606B2
公开(公告)日：2014-12-16
申请号：US13269539
申请日：2011-10-07
申请人： James M. Cleeves , Michael Hawkes , William H. Anderson
发明人： James M. Cleeves , Michael Hawkes , William H. Anderson
IPC分类号： F01L1/30 , F01L1/22 , F02B75/28 , F01L7/04 , F01L5/06 , F01L1/18 , F01L1/24 , F01L1/08
CPC分类号： F01L1/30 , F01L1/08 , F01L1/181 , F01L1/22 , F01L1/2405 , F01L5/06 , F01L7/04 , F01L2001/186 , F02B75/282
摘要： Various types of valve systems are disclosed herein. In one embodiment, a positive control reciprocating sleeve valve system for use with an internal combustion engine includes opening and closing rockers controlled by corresponding opening and closing cam lobes. In one aspect of this embodiment, interference can be designed into the valve control system to provide additional “hold-closed” force to hold the valve against its seat during a portion of the engine cycle. In another aspect of this embodiment, positive control valve systems can include compliant components and systems, hydraulic systems, pneumatic systems, and/or mechanical spring systems to control valve lash, facilitate sealing, etc.
摘要翻译：本文公开了各种类型的阀系统。在一个实施例中，与内燃机一起使用的正控制往复式套筒阀系统包括由对应的打开和关闭凸轮凸角控制的打开和关闭摇杆。在该实施例的一个方面，可以将干扰设计到阀控制系统中以在发动机循环的一部分期间提供额外的“保持关闭”力以将阀保持在其阀座上。在该实施例的另一方面，积极的控制阀系统可以包括顺应部件和系统，液压系统，气动系统和/或机械弹簧系统，以控制阀间隙，便于密封等。

106. 发明授权

US08776739B2 Internal combustion engine valve actuation and adjustable lift and timing 失效
标题翻译：内燃机气门启动和可调电梯及时机
公开(公告)号：US08776739B2
公开(公告)日：2014-07-15
申请号：US13270173
申请日：2011-10-10
申请人： James M. Cleeves , Michael Hawkes
发明人： James M. Cleeves , Michael Hawkes
IPC分类号： F01L1/34
CPC分类号： F01L1/047 , F01L1/18 , F01L1/34416 , F01L13/0036 , F01L13/0042
摘要： A cam can rotate on a camshaft of an internal combustion engine. A rocker arm that actuates a valve of the internal combustion engine can include a rocker pivot connection point located on a distal side of a valve component from a proximate end of the rocker arm that is deflected by action of the cam. The rocker arm can include a contact point located between the rocker pivot point and the proximate end. The contact point can act on the valve component to actuate the valve. The rocker pivot connection point can be translated such that it is closer to or further from the cam. This translation can be used to vary valve lift and/or valve timing. The cam can have a three-dimensional profile to provide different actuation distance of the rocker arm. Systems, methods, and articles of manufacture consistent with one or more of these features are described.
摘要翻译：凸轮可以在内燃机的凸轮轴上旋转。致动内燃机的阀的摇臂可以包括摇臂枢转连接点，该摇臂枢转连接点位于通过凸轮的作用而偏转的摇臂的近端处的阀部件的远侧上。摇臂可以包括位于摇臂枢转点和近端之间的接触点。接触点可以作用在阀部件上以致动阀。摇杆枢转连接点可以平移，使得其更靠近或远离凸轮。该翻译可用于改变气门升程和/或气门正时。凸轮可以具有三维轮廓以提供摇臂的不同的致动距离。描述与一个或多个这些特征一致的系统，方法和制品。

107. 发明申请

US20140102418A1 OPPOSED PISTON ENGINE WITH NON-COLLINEAR AXES OF TRANSLATION 审中-公开
标题翻译：具有非整体旋转轴的对准活塞发动机
公开(公告)号：US20140102418A1
公开(公告)日：2014-04-17
申请号：US14111989
申请日：2012-04-13
申请人： Yalamuru Ramachandra Babu , Simon David Jackson , Michael Anthony Willcox , James M. Cleeves , Chithambaram Subramoniam , J. Vimaladas Viji Babu , Harne Vinay Chandrakant
发明人： Yalamuru Ramachandra Babu , Simon David Jackson , Michael Anthony Willcox , James M. Cleeves , Chithambaram Subramoniam , J. Vimaladas Viji Babu , Harne Vinay Chandrakant
IPC分类号： F02B75/28 , F01B7/02
CPC分类号： F02B75/28 , F01B7/02 , F01B7/14 , F01L5/06 , F02B75/225 , F02B75/282
摘要： An opposed piston internal combustion engine can include two opposed pistons (104, 110) moving reciprocally along respective axes of translation (202, 204) that are not collinear. First and second cylinder bores (502, 504) can be inclined to each other at an included angle (a). A combustion volume or chamber (114) can optionally be defined at least in part by crowns (102, 106) of the first and second pistons (104, 110) reciprocating in the first and second cylinder bores (502, 504), respectively. Related methods, systems, and articles of manufacture are described.
摘要翻译：相对的活塞内燃机可以包括两个相对的活塞（104,110）沿着不共线的相应的平移轴线（202,204）往复运动。第一和第二气缸孔（502,504）可以以夹角（a）彼此倾斜。燃烧体积或室（114）可任选地至少部分地由在第一和第二气缸孔（502,504）中往复运动的第一和第二活塞（104,110）的冠部（102,106）限定。描述了相关方法，系统和制品。

108. 发明授权

US08544445B2 Over-compressed engine 失效
标题翻译：过压缩发动机
公开(公告)号：US08544445B2
公开(公告)日：2013-10-01
申请号：US12720457
申请日：2010-03-09
申请人： James M. Cleeves , Nicholas Manov , Michael A. Willcox , Simon David Jackson
发明人： James M. Cleeves , Nicholas Manov , Michael A. Willcox , Simon David Jackson
IPC分类号： F02B17/00 , F02P5/15 , F02M35/10
CPC分类号： F02P5/1502 , F01L1/182 , F01L3/18 , F01L2001/054 , F02B25/08 , F02B31/02 , F02B75/282 , F02D15/00 , F02D35/027 , F02D41/3011 , F02D41/3017 , F02D2041/0015 , Y02T10/12 , Y02T10/146 , Y02T10/46 , Y10T29/49231
摘要： A system and method are disclosed for fabricating and running an engine in two modes. The first mode is an efficiency mode having a high compression ratio and efficiency for low to medium loads. The second mode is a power mode having high power density for higher loads. The system may use a lean mixture in the efficiency mode, which mixture is made richer for more power in the power mode. The system may also use ignition timing to allow the efficiency mode and the high power mode to be at the same mixture.
摘要翻译：公开了用于以两种模式制造和运行发动机的系统和方法。第一模式是对于中低负载具有高压缩比和效率的效率模式。第二种模式是对较高负载具有高功率密度的功率模式。该系统可以在效率模式下使用贫混合物，该混合物在功率模式下更加丰富，以获得更多功率。系统还可以使用点火正时以使效率模式和高功率模式处于相同的混合状态。

109. 发明申请

US20120330534A1 ENHANCED EFFICIENCY AND POLLUTANT CONTROL BY MULTI-VARIABLE ENGINE OPERATION CONTROL 审中-公开
标题翻译：通过多变量发动机运行控制提高效率和污染物控制
公开(公告)号：US20120330534A1
公开(公告)日：2012-12-27
申请号：US13535165
申请日：2012-06-27
申请人： James M. Cleeves , Michael A. Willcox
发明人： James M. Cleeves , Michael A. Willcox
IPC分类号： F02D41/30 , F02D19/08 , F02D41/26
CPC分类号： F02D37/02 , F02B75/282 , F02D15/00 , F02D35/027 , F02D41/0002 , F02D41/005 , F02D41/10 , F02D41/1475 , F02D2041/0015 , F02D2041/0017 , F02D2200/0611 , F02P5/152 , F02P15/02 , F02P15/08 , Y02T10/42 , Y02T10/47
摘要： Based on one or more monitored operation parameters of an internal combustion engine, a set of engine operation conditions necessary to provide combustion stability in a combustion volume of the engine, optimized fuel efficiency, and minimized production of pollutants such as nitrogen oxides, carbon monoxide, and unburned hydrocarbons can be determined. The new set of engine operation conditions can be dynamically implemented in response to changing engine loads and changing engine speeds to maintain a combustion mixture and combustion conditions within a combustion chamber of the engine constrained flammability limits, pollutant generation rates, and fuel efficiency considerations. Related articles, systems, and methods are described.
摘要翻译：基于内燃机的一个或多个监控的操作参数，提供在发动机的燃烧体积中提供燃烧稳定性所必需的一组发动机操作条件，优化的燃料效率以及最小化氮氧化物，一氧化碳等污染物的产生，可以确定未燃烧的烃。可以根据变化的发动机负载和改变发动机转速来动态实施新的发动机运行条件，以保持发动机的燃烧室内的燃烧混合物和燃烧条件受到限制的可燃性限制，污染物产生速率和燃料效率考虑。描述相关文章，系统和方法。

110. 发明申请

US20120111293A1 INTERNAL COMBUSTION ENGINE VALVE ACTUATION AND ADJUSTABLE LIFT AND TIMING 失效
标题翻译：内燃发动机阀门执行和可调动提升和时间
公开(公告)号：US20120111293A1
公开(公告)日：2012-05-10
申请号：US13270173
申请日：2011-10-10
申请人： James M. Cleeves , Michael Hawkes
发明人： James M. Cleeves , Michael Hawkes
IPC分类号： F01L1/18
CPC分类号： F01L1/047 , F01L1/18 , F01L1/34416 , F01L13/0036 , F01L13/0042
摘要： A cam can rotate on a camshaft of an internal combustion engine. A rocker arm that actuates a valve of the internal combustion engine can include a rocker pivot connection point located on a distal side of a valve component from a proximate end of the rocker arm that is deflected by action of the cam. The rocker arm can include a contact point located between the rocker pivot point and the proximate end. The contact point can act on the valve component to actuate the valve. The rocker pivot connection point can be translated such that it is closer to or further from the cam. This translation can be used to vary valve lift and/or valve timing. The cam can have a three-dimensional profile to provide different actuation distance of the rocker arm. Systems, methods, and articles of manufacture consistent with one or more of these features are described.
摘要翻译：凸轮可以在内燃机的凸轮轴上旋转。致动内燃机的阀的摇臂可以包括摇臂枢转连接点，该摇臂枢转连接点位于通过凸轮的作用而偏转的摇臂的近端处的阀部件的远侧上。摇臂可以包括位于摇臂枢转点和近端之间的接触点。接触点可以作用在阀部件上以致动阀。摇杆枢转连接点可以平移，使得其更靠近或远离凸轮。该翻译可用于改变气门升程和/或气门正时。凸轮可以具有三维轮廓以提供摇臂的不同的致动距离。描述与一个或多个这些特征一致的系统，方法和制品。

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