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    • 107. 发明专利
    • MAGNETIC MULTILAYER FILM
    • JPS63138712A
    • 1988-06-10
    • JP28433186
    • 1986-12-01
    • HITACHI LTD
    • KOMURO MATAHIROKOZONO YUZONARUSHIGE SHINJIHANAZONO MASANOBUKURODA TETSUO
    • C23C14/00C23C14/24C23C14/58G11B5/127H01F10/14H01F10/32
    • PURPOSE:To enlarge an interatomic distance of Fe to increase saturation magnetization and magnetic permeability thereof, by alternately stacking layers of Fe and of a metal having a coefficient fo thermal expansion higher than that of Fe at a substrate temperature fo TM/2 or below and then rapidly heating the stacked body at a specific heating rate. CONSTITUTION:Layers of Fe and of a metal having a coefficient of thermal expansion higher than that of Fe are alternately stacked at a substrate temperature of TM/2 or below (TM: melting temperature). The stacked body is then heated rapidly at a heating rate of 200 deg.C/min. Said element having a coefficient of thermal expansion higher than that of Fe may be Ag, Al, Au, Cu, Co, In, Mg, Ni, Pb, Sn or Zn. If the substrate temperature is higher than TM/2, energy for activating mutual diffusion among atoms is decreased and lattice vibration is increased, whereby interfaces of the multi-layer film become unstable. The rapid heating enlarges lattices of the element having a higher coefficient of thermal expansion, and this acts on the ferromagnetic transistion metal as tension stress. Lattices of the ferromagnetic transistion metal are thereby enlarged and the saturation magnetization and magnetic permeability are improved.