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    • 94. 发明申请
    • METHOD FOR MAKING A PEDESTAL FUSE
    • 制作保险丝的方法
    • US20010034084A1
    • 2001-10-25
    • US09844125
    • 2001-04-26
    • International Business Machines Corporation
    • Dennis P. BouldinTimothy H. DaubenspeckWilliam T. Motsiff
    • H01L021/82
    • H01L23/5258H01L2924/0002H01L2924/00
    • A structure and method of fabricating a metallization fuse line is disclosed. The structure can be formed on a semiconductor substrate, including an insulator structure formed on the substrate, the insulator structure having an upper layer and a lower layer, the upper being thinner than the lower, the insulator structure having a plurality of openings of varying depth, and a metal structure inlaid in the insulator structure, the metal structure having first and second portions and a third portion there between that is substantially more resistive than the first and second portions, the third portion having a thickness substantially- similar to the thickness of the upper layer of the insulator structure. The upper layer includes a nitride, the lower layer includes an oxide and the metal structure includes copper. The fuse structure allows formation of nulleasy to laser deletenull thin metal fuses within segments of thick metal lines. This applies to wiring layers formed from nullhighnull melting temperature metals and those defined using a damascene process. For example, copper back end of line (Cu BEOL) damascene wiring, as used with CMOS can use the invention. The technique achieves high yield fusing for technologies that use thick wiring layers. The structure separates the thickness of the fuse segment from the remainder of the wiring line. The structure can be used with very thick, e.g., >1.2null wiring and very thin, e.g.,
    • 公开了一种制造金属化熔丝线的结构和方法。 该结构可以形成在半导体衬底上,包括形成在衬底上的绝缘体结构,绝缘体结构具有上层和下层,上部比下部薄,绝缘结构具有多个不同深度的开口 以及镶嵌在绝缘体结构中的金属结构,具有第一和第二部分的金属结构和在其之间的第三部分基本上比第一和第二部分更具有阻力,第三部分的厚度基本上类似于 绝缘体结构的上层。 上层包括氮化物,下层包括氧化物,金属结构包括铜。 熔丝结构允许在厚金属线段内形成“易于激光删除”的薄金属保险丝。 这适用于由“高”熔融金属形成的布线层和使用镶嵌工艺定义的布线层。 例如,与CMOS一起使用的铜后端(Cu BEOL)镶嵌布线可以使用本发明。 该技术实现了使用厚布线层的技术的高产率熔合。 该结构将熔丝段的厚度与布线的其余部分分开。 该结构可以使用非常厚的例如>1.2μm的布线和非常薄的例如<0.5mu的熔丝。
    • 96. 发明申请
    • Contact structure of wiring and a method for manufacturing the same
    • 布线的接触结构及其制造方法
    • US20010019129A1
    • 2001-09-06
    • US09755193
    • 2001-01-08
    • Chun-Gi You
    • H01L021/44H01L021/82H01L029/04H01L029/40H01L031/20
    • G02F1/13458G02F1/1345H01L27/124H01L29/458H01L29/66765
    • First, a conductive material made of aluminum-based material is deposited and patterned to form a gate wire including a gate line, a gate pad, and a gate electrode. A gate insulating layer is formed, and a semiconductor layer and an ohmic contact layer are sequentially formed. Next, a conductor layer including a lower layer of Cr and an upper layer of aluminum-based material is deposited and patterned to form a data wire include a data line intersecting the gate line, a source electrode, a drain electrode and a data pad. Then, a passivation layer is deposited and a thermal treatment process using annealing step is executed. At this time, all or part of aluminum oxide (AlOx) layer having a high resistivity, which is formed on the gate wire and/or the data wire during manufacturing process, may be removed. Then, the passivation layer is patterned to form contact holes exposing the drain electrode, the gate pad and the data pad, respectively. Next, IZO is deposited and patterned to form a pixel electrode, a redundant gate pad and a redundant data pad respectively connected to the drain electrode, the gate pad and the data pad, respectively. By removing aluminum oxide (AlOx) layer having a high resistivity, through annealing step, the contact resistance between the metal of aluminum-based material, and IZO may be minimized, because they directly contact each other.
    • 首先,将由铝基材料制成的导电材料沉积并图案化以形成包括栅极线,栅极焊盘和栅电极的栅极线。 形成栅绝缘层,依次形成半导体层和欧姆接触层。 接下来,沉积包括下层Cr的导体层和铝基材料的上层,并构图以形成包括与栅极线相交的数据线,源电极,漏电极和数据焊盘的数据线。 然后,沉积钝化层,并执行使用退火步骤的热处理工艺。 此时,可以除去在制造过程中在栅极线和/或数据线上形成的具有高电阻率的全部或部分氧化铝(AlOx)层。 然后,对钝化层进行构图以形成分别暴露漏电极,栅极焊盘和数据焊盘的接触孔。 接下来,IZO被沉积和图案化以分别形成分别连接到漏电极,栅极焊盘和数据焊盘的像素电极,冗余栅极焊盘和冗余数据焊盘。 通过去除具有高电阻率的氧化铝(AlOx)层,通过退火步骤,铝基材料的金属与IZO之间的接触电阻可以最小化,因为它们彼此直接接触。