会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 92. 发明授权
    • Photovoltaic device
    • 光伏装置
    • US06180870B2
    • 2001-01-30
    • US08917888
    • 1997-08-27
    • Masafumi SanoTetsuro Nakamura
    • Masafumi SanoTetsuro Nakamura
    • H01L310264
    • H01L31/076H01L31/056H01L31/202H01L31/204H01L31/206Y02E10/52Y02E10/548Y02P70/521
    • In a photovoltaic device having a plurality of pin structures, the pin structures comprise a first pin structure, a second pin structure and a third pin structure in the order from the light-incident side, each having an i-type semiconductor layer, and the i-type semiconductor layer of the first pin structure comprises amorphous silicon, the i-type semiconductor layer of the second pin structure comprises microcrystalline silicon and the i-type semiconductor layer of the third pin structure comprises amorphous silicon germanium or microcrystalline silicon germanium. The photovoltaic device according to the present invention provides a superior photoelectric conversion efficiency and less causing photo-deterioration.
    • 在具有多个引脚结构的光电器件中,引脚结构包括从光入射侧开始的顺序的第一引脚结构,第二引脚结构和第三引脚结构,每个具有i型半导体层,并且 第一引脚结构的i型半导体层包括非晶硅,第二引脚结构的i型半导体层包括微晶硅,第三引脚结构的i型半导体层包括非晶硅锗或微晶硅锗。 根据本发明的光电器件提供优异的光电转换效率并且导致光劣化较少。
    • 93. 发明授权
    • Method of producing a semiconductor device
    • 半导体装置的制造方法
    • US5635408A
    • 1997-06-03
    • US429721
    • 1995-04-27
    • Masafumi SanoKeishi Saitoh
    • Masafumi SanoKeishi Saitoh
    • H01L31/052H01L31/075H01L31/20H01L31/18
    • H01L31/076H01L31/056H01L31/075H01L31/202H01L31/206Y02E10/52Y02E10/548Y02P70/521Y10S438/905Y10S438/909
    • A method of producing a semiconductor device including a substrate and a semiconductor region, the semiconductor region including at least one pin structure in the form of a multi-layer structure consisting of a non-single crystal n-type (or p-type) layer containing silicon, a non-single crystal i-type layer containing silicon, and a non-single crystal p-type (or n-type) layer containing silicon, the method being characterized in that it includes a step of performing plasma treatment on the surface of the substrate or the surface of one semiconductor layer, wherein the plasma treatment is performed in an atmosphere including a hydrogen gas and another gas containing silicon atoms without or with very thin deposition of a film onto the surface.In this method, the hydrogen gas ambient is excited into a stable plasma state, and impurities adsorbed on the surface of the chamber wall or contained in the chamber wall are prevented from being incorporated into the semiconductor layers thereby achieving a high performance photovoltaic semiconductor device.
    • 一种制造包括衬底和半导体区域的半导体器件的方法,所述半导体区域包括由非单晶n型(或p型)层构成的多层结构形式的至少一个引脚结构 含硅的非单晶i型层和含有硅的非单晶p型(或n型)层,该方法的特征在于包括对其进行等离子体处理的步骤 衬底的表面或一个半导体层的表面,其中等离子体处理在包括氢气和含有硅原子的另一种气体的气氛中进行,没有或非常薄的膜沉积到表面上。 在该方法中,氢气环境被激发成稳定的等离子体状态,并且防止吸附在室壁表面或容纳在室壁中的杂质被并入半导体层中,从而实现高性能的光电半导体器件。
    • 97. 发明授权
    • Process for forming deposited film
    • 沉积膜形成工艺
    • US4942058A
    • 1990-07-17
    • US363309
    • 1989-06-08
    • Masafumi Sano
    • Masafumi Sano
    • C23C16/02C23C16/24C23C16/44C23C16/452C23C16/455C30B25/02C30B28/14C30B29/06H01L21/205
    • C23C16/24C23C16/0236C23C16/452H01L21/02422H01L21/0243H01L21/02532H01L21/02576H01L21/02579H01L21/0262Y10S117/904Y10S117/905Y10S438/913
    • A process for forming a crystalline deposited film on a substrate in a film forming space comprising (a) preparing the surface of the substrate by selectively irradiating the surface with an energy beam of an electromagnetic wave or an electron beam through an atmosphere of a gas to provide regions on which crystal nuclei are selectively formed, (b) forming the crystalline deposited film on the substrate surface by separately introducing an activated species (A) formed by decomposition of a compound (SX) containing silicon and a halogen and an activated species (B) formed from a chemical substance (B) for film formation, the activated species (B) being chemically mutually reactive with the activated species (A), the two activated species forming a mixture to effect a chemical reaction therebetween and thereby effecting the formation of the crystalline deposited film, and (c) exposing the crystalline deposited film surface to a gaseous substance (E) capable of effecting an etching action thereon and thereby effecting crystal growth in a specific face direction.
    • 一种在成膜空间中在基板上形成结晶沉积膜的方法,包括:(a)通过选择性地用气体的气氛的电磁波或电子束的能量束来选择性地照射该表面, 提供选择性地形成晶核的区域,(b)通过分别引入由含有硅和卤素的化合物(SX)分解形成的活化物质(A)和活化物质(A),从而在基板表面上形成结晶沉积膜 B)由用于成膜的化学物质(B)形成,所述活化物质(B)与活化物质(A)化学相互反应,所述两种活化物质形成混合物以在其间进行化学反应,从而进行形成 的结晶沉积膜,和(c)将结晶沉积膜表面暴露于能够实现蚀刻活性的气态物质(E) 从而在特定的面方向上实现晶体生长。