专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

91. 发明申请

US20080026494A1 Method of fabricating a terbium-doped electroluminescence device via metal organic deposition processes 审中-公开
标题翻译：通过金属有机沉积工艺制造掺铒电致发光器件的方法
公开(公告)号：US20080026494A1
公开(公告)日：2008-01-31
申请号：US11494181
申请日：2006-07-26
申请人： Wei-Wei Zhuang , Yoshi Ono , Wei Gao , Tingkai Li
发明人： Wei-Wei Zhuang , Yoshi Ono , Wei Gao , Tingkai Li
IPC分类号： H01L21/00
CPC分类号： H05B33/10
摘要： A method of fabricating an electroluminescent device includes preparing a wafer and a doped-silicon oxide precursor solution. The doped-silicon oxide precursor solution is spin coated onto the wafer to form a doped-silicon oxide thin film on the wafer, which is baked at progressively increasing temperatures. The wafer is then rapidly thermally annealed, further annealed in a wet oxygen ambient atmosphere. A transparent top electrode is deposited on the doped-silicon oxide thin film, which is patterned, etched, and annealed. The doped-silicon oxide thin film and the wafer undergo a final annealing step to enhance electroluminescent properties.
摘要翻译：制造电致发光器件的方法包括制备晶片和掺杂的氧化硅前体溶液。将掺杂的氧化硅前体溶液旋涂在晶片上以在晶片上形成掺杂的氧化硅薄膜，其在逐渐升高的温度下烘烤。然后将晶片快速热退火，在湿氧环境气氛中进一步退火。透明的顶部电极沉积在掺杂的氧化硅薄膜上，其被图案化，蚀刻和退火。掺杂氧化硅薄膜和晶片进行最终退火步骤以增强电致发光性能。

92. 发明申请

US20070015329A1 Metal/ZnOx/metal current limiter 有权
标题翻译：金属/ ZnOx /金属限流器
公开(公告)号：US20070015329A1
公开(公告)日：2007-01-18
申请号：US11216398
申请日：2005-08-31
申请人： Tingkai Li , Sheng Hsu , Wei-Wei Zhuang , David Evans
发明人： Tingkai Li , Sheng Hsu , Wei-Wei Zhuang , David Evans
IPC分类号： H01L21/8242
CPC分类号： H01L27/101 , G11C13/0007 , G11C2213/31 , H01L27/2409 , H01L27/2463 , H01L29/66143 , H01L29/872 , H01L45/04 , H01L45/1233 , H01L45/147
摘要： A method is provided for forming a metal/semiconductor/metal (MSM) current limiter and resistance memory cell with an MSM current limiter. The method comprises: providing a substrate; forming an MSM bottom electrode overlying the substrate; forming a ZnOx semiconductor layer overlying the MSM bottom electrode, where x is in the range between about 1 and about 2, inclusive; and, forming an MSM top electrode overlying the semiconductor layer. The ZnOx semiconductor can be formed through a number of different processes such as spin-coating, direct current (DC) sputtering, radio frequency (RF) sputtering, metalorganic chemical vapor deposition (MOCVD), or atomic layer deposition (ALD).
摘要翻译：提供了一种用于形成具有MSM限流器的金属/半导体/金属（MSM）限流器和电阻存储器单元的方法。该方法包括：提供衬底; 形成覆盖所述衬底的MSM底部电极; 形成覆盖MSM底部电极的ZnO x半导体层，其中x在约1和约2之间的范围内; 并且形成覆盖半导体层的MSM顶部电极。可以通过旋涂，直流（DC）溅射，射频（RF）溅射，金属有机化学气相沉积（MOCVD）或原子层沉积（ALD）等多种不同的工艺形成ZnO x半导体。

93. 发明申请

US20070010037A1 SUPERLATTICE NANOCRYSTAL SI-SIO2 ELECTROLUMINESCENCE DEVICE 有权
标题翻译：超级纳米晶体Si-SIO2电致发光器件
公开(公告)号：US20070010037A1
公开(公告)日：2007-01-11
申请号：US11175797
申请日：2005-07-05
申请人： Tingkai Li , Sheng Hsu , Wei-Wei Zhuang
发明人： Tingkai Li , Sheng Hsu , Wei-Wei Zhuang
IPC分类号： H01L21/00
CPC分类号： H01L33/34 , B82Y20/00 , H01L33/0012
摘要： A superlattice nanocrystal Si—SiO2 electroluminescence (EL) device and fabrication method have been provided. The method comprises: providing a Si substrate; forming an initial SiO2 layer overlying the Si substrate; forming an initial polysilicon layer overlying the initial SiO2 layer; forming SiO2 layer overlying the initial polysilicon layer; repeating the polysilicon and SiO2 layer formation, forming a superlattice; doping the superlattice with a rare earth element; depositing an electrode overlying the doped superlattice; and, forming an EL device. In one aspect, the polysilicon layers are formed by using a chemical vapor deposition (CVD) process to deposit an amorphous silicon layer, and annealing. Alternately, a DC-sputtering process deposits each amorphous silicon layer, and following the forming of the superlattice, polysilicon is formed by annealing the amorphous silicon layers. Silicon dioxide can be formed by either thermal annealing or by deposition using a DC-sputtering process.
摘要翻译：已经提供了超晶格纳米晶Si-SiO 2电致发光（EL）器件及其制造方法。该方法包括：提供Si衬底; 形成覆盖Si衬底的初始SiO 2层; 形成覆盖初始SiO 2层的初始多晶硅层; 形成覆盖在初始多晶硅层上的SiO 2层; 重复多晶硅和SiO 2层形成，形成超晶格; 用稀土元素掺杂超晶格; 沉积覆盖掺杂超晶格的电极; 并且形成EL器件。在一个方面，通过使用化学气相沉积（CVD）工艺沉积非晶硅层和退火来形成多晶硅层。或者，DC溅射工艺沉积每个非晶硅层，并且在形成超晶格之后，通过退火非晶硅层形成多晶硅。可以通过热退火或通过使用DC溅射工艺的沉积来形成二氧化硅。

94. 发明申请

US20080090317A1 Nanotip diode electroluminescence device 审中-公开
标题翻译：纳米二极管电致发光器件
公开(公告)号：US20080090317A1
公开(公告)日：2008-04-17
申请号：US11998341
申请日：2007-11-29
申请人： Sheng Hsu , Tingkai Li , Wei-Wei Zhuang
发明人： Sheng Hsu , Tingkai Li , Wei-Wei Zhuang
IPC分类号： H01L33/00
CPC分类号： H01L33/08 , B82Y20/00 , H01L33/18 , H01L33/24 , H01L33/34 , H01L33/502 , Y10S977/834
摘要： A nanotip electroluminescence (EL) diode and a method are provided for fabricating said device. The method comprises: forming a plurality of Si nanotip diodes; forming a phosphor layer overlying the nanotip diode; and, forming a top electrode overlying the phosphor layer. The nanotip diodes are formed by: forming a Si substrate with a top surface; forming a Si p-well; forming an n+ layer of Si, having a thickness in the range of 30 to 300 nanometers (nm) overlying the Si p-well; forming a reactive ion etching (RIE)-induced polymer grass overlying the substrate top surface; using the RIE-induced polymer grass as a mask, etching areas of the substrate not covered by the mask; and, forming the nanotip diodes in areas of the substrate covered by the mask.
摘要翻译：提供了一种纳米末端电致发光（EL）二极管和一种用于制造所述器件的方法。该方法包括：形成多个Si纳米二极管; 形成覆盖所述纳米二极管的磷光体层; 并且形成覆盖磷光体层的顶部电极。纳米二极管通过以下方式形成：形成具有顶表面的Si衬底; 形成Si对孔; 形成层叠Si层的厚度为30〜300纳米（nm）的Si的n +层; 形成覆盖在衬底顶表面上的反应离子蚀刻（RIE）诱导的聚合物草; 使用RIE诱导的聚合物草作为掩模，蚀刻未被掩模覆盖的基底的区域; 以及在由掩模覆盖的衬底的区域中形成纳米二极管二极管。

95. 发明申请

US20080026590A1 Metal organic deposition precursor solution synthesis and terbium-doped SiO2 thin film deposition 失效
标题翻译：金属有机沉积前驱体溶液合成和铽掺杂SiO2薄膜沉积
公开(公告)号：US20080026590A1
公开(公告)日：2008-01-31
申请号：US11494141
申请日：2006-07-26
申请人： Wei-Wei Zhuang , Yoshi Ono , Tingkai Li
发明人： Wei-Wei Zhuang , Yoshi Ono , Tingkai Li
IPC分类号： H01L21/31
CPC分类号： C23C18/1295 , C23C18/1208 , C23C18/1279 , C23C18/1283
摘要： A method of making a doped silicon oxide thin film using a doped silicon oxide precursor solution includes mixing a silicon source in an organic acid and adding 2-methoxyethyl ether to the silicon source and organic acid to from a preliminary precursor solution. The resultant solution is heated, stirred and filtered. A doping impurity is dissolved in 2-methoxyethanol to from a doped source solution, and the resultant solution mixed with the previously described resultant solution to from a doped silicon oxide precursor solution. A doped silicon oxide thin film if formed on a wafer by spin coating. The thin film and the wafer are baked at progressively increasing temperatures and the thin film and the wafer are annealed.
摘要翻译：使用掺杂的氧化硅前体溶液制造掺杂的氧化硅薄膜的方法包括将有机酸中的硅源混合并向硅源和有机酸中加入2-甲氧基乙醚至初始前体溶液。将所得溶液加热，搅拌并过滤。将掺杂杂质从掺杂的源溶液中溶解在2-甲氧基乙醇中，并将所得溶液与先前所述的溶液混合从掺杂的氧化硅前体溶液中。如果通过旋涂在晶片上形成掺杂的氧化硅薄膜。在逐渐升高的温度下烘烤薄膜和晶片，并对薄膜和晶片进行退火。

96. 发明申请

US20070238203A1 Method of monitoring PCMO precursor synthesis 有权
标题翻译：监测PCMO前体合成的方法
公开(公告)号：US20070238203A1
公开(公告)日：2007-10-11
申请号：US11403022
申请日：2006-04-11
申请人： Wei-Wei Zhuang , David Evans , Tingkai Li , Sheng Hsu
发明人： Wei-Wei Zhuang , David Evans , Tingkai Li , Sheng Hsu
IPC分类号： H01L21/66
CPC分类号： H01L22/20 , H01L21/31691 , H01L22/14
摘要： A method of monitoring synthesis of PCMO precursor solutions includes preparing a PCMO precursor solution and withdrawing samples of the precursor solution at intervals during a reaction phase of the PCMO precursor solution synthesis. The samples of the PCMO precursor solution are analyzed by UV spectroscopy to determine UV transmissivity of the samples of the PCMO precursor solution and the samples used to form PCMO thin films. Electrical characteristics of the PCMO thin films formed from the samples are determined to identify PCMO thin films having optimal electrical characteristics. The UV spectral characteristics of the PCMO precursor solutions are correlated with the PCMO thin films having optimal electrical characteristics. The UV spectral characteristics are used to monitor synthesis of future batches of the PCMO precursor solutions, which will result in PCMO thin films having optimal electrical characteristics.
摘要翻译：监测PCMO前体溶液合成的方法包括制备PCMO前体溶液，并在PCMO前体溶液合成反应期间间隔取出前体溶液样品。通过紫外光谱分析PCMO前体溶液的样品，以确定PCMO前体溶液和用于形成PCMO薄膜的样品的UV透射率。确定由样品形成的PCMO薄膜的电特性以鉴定具有最佳电特性的PCMO薄膜。 PCMO前体溶液的UV光谱特性与具有最佳电学特性的PCMO薄膜相关。 UV光谱特性用于监测未来批次的PCMO前体溶液的合成，这将导致具有最佳电特性的PCMO薄膜。

97. 发明申请

US20060099724A1 Memory cell with buffered layer 有权
标题翻译：带缓冲层的存储单元
公开(公告)号：US20060099724A1
公开(公告)日：2006-05-11
申请号：US11314222
申请日：2005-12-21
申请人： Sheng Hsu , Tingkai Li , Fengyan Zhang , Wei Pan , Wei-Wei Zhuang , David Evans , Masayuki Tajiri
发明人： Sheng Hsu , Tingkai Li , Fengyan Zhang , Wei Pan , Wei-Wei Zhuang , David Evans , Masayuki Tajiri
IPC分类号： H01L21/00 , H01L21/20
CPC分类号： H01L27/101 , G11C13/0007 , G11C13/0069 , G11C2013/0073 , G11C2213/31 , G11C2213/51 , G11C2213/56 , G11C2213/79 , H01L27/2436 , H01L45/04 , H01L45/12 , H01L45/1233 , H01L45/147
摘要： A method is provided for forming a buffered-layer memory cell. The method comprises: forming a bottom electrode; forming a colossal magnetoresistance (CMR) memory film overlying the bottom electrode; forming a memory-stable semiconductor buffer layer, typically a metal oxide, overlying the memory film; and, forming a top electrode overlying the semiconductor buffer layer. In some aspects of the method the semiconductor buffer layer is formed from YBa2Cu3O7-X (YBCO), indium oxide (In2O3), or ruthenium oxide (RuO2), having a thickness in the range of 10 to 200 nanometers (nm). The top and bottom electrodes may be TiN/Ti, Pt/TiN/Ti, In/TiN/Ti, PtRhOx compounds, or PtIrOx compounds. The CMR memory film may be a Pr1-XCaXMnO3 (PCMO) memory film, where x is in the region between 0.1 and 0.6, with a thickness in the range of 10 to 200 nm.
摘要翻译：提供了一种用于形成缓冲层存储单元的方法。该方法包括：形成底部电极; 形成覆盖底部电极的巨大磁阻（CMR）记忆膜; 形成存储器稳定的半导体缓冲层，通常为覆盖存储膜的金属氧化物; 并且形成覆盖半导体缓冲层的顶部电极。在该方法的一些方面，半导体缓冲层由YBa 2 N 3 O 7-X（YBCO），氧化铟（In 2或2 O 3）或氧化钌（RuO 2 N 2），其厚度在10-200纳米（nm）的范围内。顶部和底部电极可以是TiN / Ti，Pt / TiN / Ti，In / TiN / Ti，PtRhOx化合物或PtIrOx化合物。 CMR存储器膜可以是Pr 1-X C x MnO 3（PCMO）存储膜，其中x在0.1之间的区域和0.6，厚度在10至200nm的范围内。

98. 发明申请

US20050275064A1 System and method for forming a bipolar switching PCMO film 有权
标题翻译：用于形成双极开关PCMO膜的系统和方法
公开(公告)号：US20050275064A1
公开(公告)日：2005-12-15
申请号：US10855942
申请日：2004-05-27
申请人： Tingkai Li , Lawrence Charneski , Wei-Wei Zhuang , David Evans , Sheng Hsu
发明人： Tingkai Li , Lawrence Charneski , Wei-Wei Zhuang , David Evans , Sheng Hsu
IPC分类号： H01L27/04 , H01L21/205 , H01L21/822 , H01L27/10 , H01L29/06 , H01L29/739 , H01L45/00
CPC分类号： H01L45/04 , H01L45/1233 , H01L45/147 , H01L45/1616
摘要： A multi-layer PrxCa1-xMnO3 (PCMO) thin film capacitor and associated deposition method are provided for forming a bipolar switching thin film. The method comprises: forming a bottom electrode; depositing a nanocrystalline PCMO layer; depositing a polycrystalline PCMO layer; forming a multi-layer PCMO film with bipolar switching properties; and, forming top electrode overlying the PCMO film. If the polycrystalline layers are deposited overlying the nanocrystalline layers, a high resistance can be written with narrow pulse width, negative voltage pulses. The PCMO film can be reset to a low resistance using a narrow pulse width, positive amplitude pulse. Likewise, if the nanocrystalline layers are deposited overlying the polycrystalline layers, a high resistance can be written with narrow pulse width, positive voltage pulses, and reset to a low resistance using a narrow pulse width, negative amplitude pulse.
摘要翻译：提供了多层Pr 1 x 1 x x MnO 3（PCMO）薄膜电容器和相关的沉积方法，用于形成双极开关薄膜。该方法包括：形成底部电极; 沉积纳米晶体PCMO层; 沉积多晶PCMO层; 形成具有双极开关特性的多层PCMO膜; 并且形成覆盖PCMO膜的顶部电极。如果多晶层沉积在纳米晶层之上，则可以用窄脉冲宽度，负电压脉冲写入高电阻。 PCMO膜可以使用窄脉冲宽度，正幅度脉冲复位为低电阻。同样，如果纳米晶层沉积在多晶层上，则可以用窄脉冲宽度，正电压脉冲写入高电阻，并使用窄脉冲宽度，负幅度脉冲将其复位为低电阻。

99. 发明申请

US20050239262A1 PCMO thin film with memory resistance properties 有权
标题翻译：具有记忆电阻特性的PCMO薄膜
公开(公告)号：US20050239262A1
公开(公告)日：2005-10-27
申请号：US10831677
申请日：2004-04-23
申请人： Wei-Wei Zhuang , Tingkai Li , Sheng Hsu , Fengyan Zhang
发明人： Wei-Wei Zhuang , Tingkai Li , Sheng Hsu , Fengyan Zhang
IPC分类号： H01L27/105 , H01L21/00 , H01L21/20 , H01L27/10 , H01L45/00 , H01L49/02
CPC分类号： H01L45/04 , G11C13/0004 , G11C13/0007 , G11C13/0069 , G11C2013/0073 , G11C2213/31 , H01L45/1233 , H01L45/147 , H01L45/1608
摘要： A method is provided for forming a Pr0.3Ca0.7MnO3 (PCMO) thin film with crystalline structure-related memory resistance properties. The method comprises: forming a PCMO thin film with a first crystalline structure; and, changing the resistance state of the PCMO film using pulse polarities responsive to the first crystalline structure. In one aspect the first crystalline structure is either amorphous or a weak-crystalline. Then, the resistance state of the PCMO film is changed in response to unipolar pulses. In another aspect, the PCMO thin film has either a polycrystalline structure. Then, the resistance state of the PCMO film changes in response to bipolar pulses.
摘要翻译：提供了一种用于形成具有结晶结构相关的记忆电阻性质的Pr 0.3M 3 Ca 0.7 MnO 3（PCMO）薄膜的方法。该方法包括：形成具有第一晶体结构的PCMO薄膜; 并且使用响应于第一晶体结构的脉冲极性来改变PCMO膜的电阻状态。在一个方面，第一晶体结构是无定形或弱结晶。然后，响应于单极脉冲改变PCMO膜的电阻状态。另一方面，PCMO薄膜具有多晶结构。然后，PCMO膜的电阻状态响应于双极性脉冲而改变。

100. 发明申请

US20050054119A1 Buffered-layer memory cell 失效
标题翻译：缓冲层存储单元
公开(公告)号：US20050054119A1
公开(公告)日：2005-03-10
申请号：US10755654
申请日：2004-01-12
申请人： Sheng Hsu , Tingkai Li , Fengyan Zhang , Wei Pan , Wei-Wei Zhuang , David Evans , Masayuki Tajiri
发明人： Sheng Hsu , Tingkai Li , Fengyan Zhang , Wei Pan , Wei-Wei Zhuang , David Evans , Masayuki Tajiri
IPC分类号： H01L27/10 , G11C13/00 , H01L27/24 , H01L45/00 , H01L21/00 , G11C11/00 , H01L21/336 , H01L21/8234
CPC分类号： H01L27/101 , G11C13/0007 , G11C13/0069 , G11C2013/0073 , G11C2213/31 , G11C2213/51 , G11C2213/56 , G11C2213/79 , H01L27/2436 , H01L45/04 , H01L45/12 , H01L45/1233 , H01L45/147
摘要： A method is provided for forming a buffered-layer memory cell. The method comprises: forming a bottom electrode; forming a colossal magnetoresistance (CMR) memory film overlying the bottom electrode; forming a memory-stable semiconductor buffer layer, typically a metal oxide, overlying the memory film; and, forming a top electrode overlying the semiconductor buffer layer. In some aspects of the method the semiconductor buffer layer is formed from YBa2Cu3O7−X (YBCO), indium oxide (In2O3), or ruthenium oxide (RuO2), having a thickness in the range of 10 to 200 nanometers (nm). The top and bottom electrodes may be TiN/Ti, Pt/TiN/Ti, In/TiN/Ti, PtRhOx compounds, or PtIrOx compounds. The CMR memory film may be a Pr1−XCaXMnO3 (PCMO) memory film, where x is in the region between 0.1 and 0.6, with a thickness in the range of 10 to 200 nm.
摘要翻译：提供了一种用于形成缓冲层存储单元的方法。该方法包括：形成底部电极; 形成覆盖底部电极的巨大磁阻（CMR）记忆膜; 形成存储器稳定的半导体缓冲层，通常为覆盖存储膜的金属氧化物; 并且形成覆盖半导体缓冲层的顶部电极。在该方法的某些方面，半导体缓冲层由厚度在10至200纳米（nm）范围内的YBa2Cu3O7-X（YBCO），氧化铟（In2O3）或氧化钌（RuO2）形成。顶部和底部电极可以是TiN / Ti，Pt / TiN / Ti，In / TiN / Ti，PtRhOx化合物或PtIrOx化合物。 CMR存储器膜可以是Pr1-XCaXMnO3（PCMO）记忆膜，其中x在0.1和0.6之间的区域中，厚度在10至200nm的范围内。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式