会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 94. 发明授权
    • Inspection data analysis program, inspection tools, review apparatus and yield analysis apparatus
    • 检验数据分析程序,检验工具,检查仪器和产量分析仪器
    • US07421357B2
    • 2008-09-02
    • US10887827
    • 2004-07-12
    • Makoto OnoYohei Asakawa
    • Makoto OnoYohei Asakawa
    • G06F19/00G01R31/26
    • H01L22/20G06T7/0004G06T2207/30148Y02P90/86
    • An operation unit executes a process for calling to a main memory first data representative of a result of equipment QC applied to a production unit. A process for reading out to the main memory an amount of change in failure in accordance with particle numbers calculated for individual defect sizes from second inspection data representative of a result of equipment QC is applied to the production unit. Electrical test data of a product processed by the production unit during a period inclusive of the time that the second inspection is carried outis also read to the main memory. A process is also executed for using the amount of change in failure in accordance with the calculated particle numbers and the particle numbers for individual sizes determined from the first inspection data to determine an impact on the product by particles generated in the production equipment when the first inspection data is detected.
    • 操作单元执行用于向主存储器调用代表应用于生产单元的设备QC的结果的第一数据的处理。 对于生产单元,将向根据第二检查数据计算出的各个缺陷尺寸的粒子数量的故障量的变化量写入主存储器的处理被应用于生产单元。 在包括执行第二次检查的时间段期间由生产单元处理的产品的电气测试数据也被读取到主存储器。 还执行一个处理,以根据从第一检查数据确定的计算的粒子数和个体大小的粒子数量来使用故障变化量,以确定在生产设备中产生的颗粒对产品的影响时,当第一 检测数据。
    • 96. 发明申请
    • COMPRESSOR
    • 压缩机
    • US20080159878A1
    • 2008-07-03
    • US11951686
    • 2007-12-06
    • Makoto OnoWataru Sakuma
    • Makoto OnoWataru Sakuma
    • F04B49/00
    • F04B27/1036F04B27/10F04B27/1054F04B27/1081F04B49/06F04B49/103F04B2201/1206
    • This compressor includes housing members that form a body; a drive shaft linked to a drive power source via an electromagnetic clutch; movable members moving in cooperation with the drive shaft and carrying out the compression of a fluid; a detected body moving in cooperation with the drive shaft; a drain bolt screwed into a drain bolt hole provided in a housing member in proximity to the detected body; and a detecting device detecting the rotation state of the drive shaft by the detected body. The drain bolt is provided with a permanent magnet, the detecting device is structured by a magnetic sensor that includes a magnetic impedance element, and the magnetic sensor is provided at the head portion of the drain bolt. Thereby, it is possible to provide a rotation detecting mechanism by using an existing drain bolt, without requiring the machining of a hole in the compressor body.
    • 该压缩机包括形成主体的壳体部件; 通过电磁离合器连接到驱动电源的驱动轴; 可移动构件与驱动轴协作移动并执行流体的压缩; 与驱动轴协作移动的检测体; 一个排放螺栓,螺纹连接到靠近被检测体的壳体构件中的排水螺栓孔; 以及检测装置,通过检测到的身体检测驱动轴的旋转状态。 排水螺栓设置有永磁体,检测装置由包括磁阻抗元件的磁传感器构成,磁传感器设置在排水螺栓的头部。 因此,可以通过使用现有的排水螺栓来提供旋转​​检测机构,而不需要在压缩机主体中加工孔。
    • 99. 发明授权
    • Method and system for inspecting electronic circuit pattern
    • 检查电路图的方法和系统
    • US07231079B2
    • 2007-06-12
    • US10050519
    • 2002-01-18
    • Hirohito OkudaYuji TakagiMasahiro WatanabeShunji MaedaMinori NoguchiYoshimasa OoshimaMakoto Ono
    • Hirohito OkudaYuji TakagiMasahiro WatanabeShunji MaedaMinori NoguchiYoshimasa OoshimaMakoto Ono
    • G06K9/00
    • G01N21/956G01N21/9501G01N2021/8854G01N2021/8861
    • For the purpose of reducing a false report and shortening inspection time, an area to be inspected is locally inspected under optimum inspection conditions. In order to avoid the number of detected defects from increasing explosively, and thereby to facilitate control of a critical defect, general-purpose layout data, which is used for producing a mask of a semiconductor wafer, is accumulated in a design information server 2. With reference to the layout data, an area to be inspected, which is inspected by a pattern inspecting apparatus 1, is divided into partial inspection areas including a cell portion and a non-cell portion. Inspection parameters are set for each of the partial inspection areas. In addition, the defect reviewing apparatus 8 obtains an inspection result of the pattern inspecting apparatus 1. When obtaining a defect image, the defect reviewing apparatus 8 identifies a position, where the defect occurred, from among a cell portion, a non-cell portion, a pattern dense portion, and the like according to layout data. Moreover, the defect reviewing apparatus 8 sets inspection parameters, such as pickup magnification of this defect, in response to a result of the identification to set a control criterion of criticality.
    • 为了减少虚假报告和缩短检查时间,在最佳检查条件下对被检查区域进行局部检查。 为了避免检测到的缺陷数量爆炸性增加,从而有利于控制关键缺陷,用于制造半导体晶片的掩模的通用布局数据被累积在设计信息服务器2中。 参照布局数据,由图案检查装置1检查的被检查区域被划分为包括单元部分和非单元部分的局部检查区域。 为每个部分检查区域设置检查参数。 另外,缺陷检查装置8获得图案检查装置1的检查结果。 当获得缺陷图像时,缺陷检查装置8根据布局数据从单元部分,非单元部分,图案密集部分等中识别发生缺陷的位置。 此外,缺陷检查装置8响应于识别的结果设置检查参数,例如该缺陷的拾取倍率,以设置关键性的控制标准。