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91. 发明授权

US4843438A Thin film transistor 失效
标题翻译：薄膜晶体管
公开(公告)号：US4843438A
公开(公告)日：1989-06-27
申请号：US235728
申请日：1988-08-19
申请人： Mitsuhiro Koden , Hirohisa Tanaka , Kohzo Yano
发明人： Mitsuhiro Koden , Hirohisa Tanaka , Kohzo Yano
IPC分类号： H01L29/417 , H01L29/45 , H01L29/49
CPC分类号： H01L29/41733 , H01L29/458 , H01L29/4908
摘要： A thin film transistor which includes an insulative substrate, and a gate electrode, a gate isulating film, a semi-conductor film, a source electrode, and a drain electrode, which are all laminated in that order onto the insulating substrate in the form of an array. The gate electrode is made of tantalum, and the gate insulating film is formed into a double-layered construction of an anodized tantalum film and a silicon nitride film, while the semi-conductor film is provided at each intersection between the gate electrode and the source electrode.This application is a continuation of application Ser. No. 057,743 filed on June 3, 1987, abandoned, which is a continuation of application Ser. No. 797,660 filed on Nov. 13, 1985, now abandoned.
摘要翻译：一种薄膜晶体管，其包括绝缘基板，以及栅极电极，栅极隔离膜，半导体膜，源电极和漏电极，它们均按顺序层叠在绝缘基板上，形式为数组。栅电极由钽制成，并且栅极绝缘膜形成为阳极氧化钽膜和氮化硅膜的双层结构，而半导体膜设置在栅电极和源极之间的每个交叉处电极。这个应用程序是应用程序的延续。 1987年6月3日提交的第057,743号被遗弃，这是继续申请。 1985年11月13日提交的第797,660号，现已放弃。

92. 发明授权

US09601784B1 Supported Ni—M materials for electrooxidation of hydrazine 有权
公开(公告)号：US09601784B1
公开(公告)日：2017-03-21
申请号：US14525928
申请日：2014-10-28
申请人： Alexey Serov , Plamen B Atanassov , Tomokazu Skamoto , Hirohisa Tanaka , Koichiro Asazawa
发明人： Alexey Serov , Plamen B Atanassov , Tomokazu Skamoto , Hirohisa Tanaka , Koichiro Asazawa
IPC分类号： H01M8/22 , H01M4/90
CPC分类号： H01M4/9041 , H01M8/222
摘要： A supported bi-metallic non-platinum catalyst that is capable of oxidizing hydrazine to produce, as by-products of energy production, nitrogen, water, and zero or near-zero levels of ammonia is described. The catalyst is suitable for use in fuel cells, particularly those that utilizes an anion-exchange membrane and a liquid fuel such as hydrazine.

93. 发明授权

US09599905B2 Illumination optical system, exposure apparatus, device production method, and light polarization unit 有权
公开(公告)号：US09599905B2
公开(公告)日：2017-03-21
申请号：US14124034
申请日：2011-11-25
申请人： Osamu Tanitsu , Hirohisa Tanaka , Kinya Kato , Takashi Mori
发明人： Osamu Tanitsu , Hirohisa Tanaka , Kinya Kato , Takashi Mori
IPC分类号： G03B27/72 , G03F7/20 , G02B26/08 , G02B27/28 , G03F7/00
CPC分类号： G03F7/70191 , G02B26/0816 , G02B26/0833 , G02B27/286 , G03F7/0007 , G03F7/70116 , G03F7/70566
摘要： An illumination optical system which illuminates an illumination objective surface with a light from a light source. The illumination optical system includes a spatial light modulator which includes a plurality of optical elements arranged within a predetermined plane and controlled individually, and which forms a light intensity distribution in an illumination pupil of the illumination optical system; and a polarization unit which is arranged in a position optically conjugate with the predetermined plane, and which polarizes an incident light beam having a first and second partial light beams, coming into the polarization unit such that the first and second partial light beams have polarization states different from each other, and emits the polarized incident light beam as an outgoing light beam, wherein the polarization unit changes, in a cross section of the outgoing light beam, a ratio between a cross sectional areas of the first and second partial light beams.

94. 发明授权

US09130222B2 Hydrazine fixing detection system 有权
标题翻译：肼定影检测系统
公开(公告)号：US09130222B2
公开(公告)日：2015-09-08
申请号：US12733446
申请日：2008-09-04
申请人： Koichiro Asazawa , Koji Yamada , Hirohisa Tanaka
发明人： Koichiro Asazawa , Koji Yamada , Hirohisa Tanaka
IPC分类号： H01M8/22 , H01M8/04
CPC分类号： H01M8/222 , H01M8/04194 , H01M8/04201 , H01M8/04208 , H01M8/0444 , H01M8/04798 , H01M2250/20 , Y02E60/50 , Y02T90/32
摘要： A fuel cell system of the present invention includes a fixing unit that fixes or releases hydrazine, a fuel cell to which hydrazine released in the fixing unit is supplied as fuel, a supply line for supplying an aqueous hydrazine solution from a hydrazine supply source to the fixing unit, a drain line for draining drained water from the fixing unit, a first sensing unit for detecting a hydrazine concentration in an aqueous hydrazine solution flowing in the supply line, a second sensing unit for detecting a hydrazine concentration in drained water flowing in the drain line, and a detection unit that detects the amount of hydrazine fixed in the fixing unit based on the concentration values detected by the first sensing unit and the second sensing unit.
摘要翻译：本发明的燃料电池系统包括固定或释放肼的固定单元，将作为燃料供给到定影单元中的肼释放的燃料电池，用于从肼供给源供应肼水溶液的供给管线，定影单元，用于从定影单元排出排出的水的排水管，用于检测在供应管线中流动的肼水溶液中的肼浓度的第一感测单元，用于检测在该供液管中流动的排水中的肼浓度的第二感测单元以及检测单元，其基于由第一感测单元和第二感测单元检测的浓度值来检测固定在定影单元中的肼的量。

95. 发明申请

US20140233008A1 ILLUMINATION OPTICAL SYSTEM, EXPOSURE APPARATUS, DEVICE PRODUCTION METHOD, AND LIGHT POLARIZATION UNIT 有权
标题翻译：照明光学系统，曝光装置，装置生产方法和光偏振装置
公开(公告)号：US20140233008A1
公开(公告)日：2014-08-21
申请号：US14124034
申请日：2011-11-25
申请人： Osamu Tanitsu , Hirohisa Tanaka , Kinya Kato , Takashi Mori
发明人： Osamu Tanitsu , Hirohisa Tanaka , Kinya Kato , Takashi Mori
IPC分类号： G03F7/20 , G02B26/08 , G02B27/28
CPC分类号： G03F7/70191 , G02B26/0816 , G02B26/0833 , G02B27/286 , G03F7/0007 , G03F7/70116 , G03F7/70566
摘要： An illumination optical system which illuminates an illumination objective surface with a light from a light source. The illumination optical system includes a spatial light modulator which includes a plurality of optical elements arranged within a predetermined plane and controlled individually, and which forms a light intensity distribution in an illumination pupil of the illumination optical system; and a polarization unit which is arranged in a position optically conjugate with the predetermined plane, and which polarizes an incident light beam having a first and second partial light beams, coming into the polarization unit such that the first and second partial light beams have polarization states different from each other, and emits the polarized incident light beam as an outgoing light beam, wherein the polarization unit changes, in a cross section of the outgoing light beam, a ratio between a cross sectional areas of the first and second partial light beams.
摘要翻译：照明光学系统，其利用来自光源的光照射照明物镜表面。照明光学系统包括：空间光调制器，其包括布置在预定平面内的多个光学元件，并分别控制，并且在照明光学系统的照明光瞳中形成光强度分布; 以及偏振单元，其布置在与所述预定平面光学共轭的位置，并且使具有第一和第二部分光束的入射光束偏振到所述偏振单元中，使得所述第一和第二部分光束具有偏振状态彼此不同，并且发射偏振入射光束作为输出光束，其中偏振单元在出射光束的横截面中改变第一和第二部分光束的横截面积之间的比率。

96. 发明申请

US20140225474A1 POWER-GENERATING SYSTEM 有权
标题翻译：发电系统
公开(公告)号：US20140225474A1
公开(公告)日：2014-08-14
申请号：US14347115
申请日：2012-08-28
申请人： Yoonho Kim , Juyoung Kim , Satoru Yamanaka , Takeshi Serizawa , Hirohisa Tanaka , Tadachika Nakayama , Masatoshi Takeda , Noboru Yamada , Koichi Niihara
发明人： Yoonho Kim , Juyoung Kim , Satoru Yamanaka , Takeshi Serizawa , Hirohisa Tanaka , Tadachika Nakayama , Masatoshi Takeda , Noboru Yamada , Koichi Niihara
IPC分类号： H02N11/00
CPC分类号： H02N11/002 , F01N5/025 , H01L37/02 , H01L41/113 , Y02T10/16
摘要： A power-generating system includes a heat source which is able to produce temporal temperature variation, a first device in which polarization occurs based on the temperature change of the heat source, and a second device for taking out a net generating power from the first device, wherein 80% or higher of the total surface area of the first device is heated and/or cooled with the heat source.
摘要翻译：发电系统包括能够产生时间温度变化的热源，基于热源的温度变化发生偏振的第一装置，以及用于从第一装置取出净发电功率的第二装置，其中第一装置的总表面积的80％或更高是用热源加热和/或冷却的。

97. 发明授权

US08623125B2 Electrode for plasma generation 有权
标题翻译：用于等离子体生成的电极
公开(公告)号：US08623125B2
公开(公告)日：2014-01-07
申请号：US12671732
申请日：2008-07-28
申请人： Yoonho Kim , Kazuya Naito , Takashi Ogawa , Isao Tan , Hirohisa Tanaka , Hirotoshi Fujikawa , Kazuhiko Madokoro
发明人： Yoonho Kim , Kazuya Naito , Takashi Ogawa , Isao Tan , Hirohisa Tanaka , Hirotoshi Fujikawa , Kazuhiko Madokoro
IPC分类号： B03C3/45
CPC分类号： H01J37/32541 , B01D2259/818 , F01N2240/28 , H01J37/32844 , H05H1/2406 , H05H2001/2412 , H05H2245/1215 , Y02C20/30
摘要： An electrode for plasma generation according to the present invention includes a plurality of collecting portions having a plurality of through holes, the plurality of collecting portions facing a gas flow in a direction where gas to be treated flows and provided spaced apart from each other. The electrode is applied to a plasma reactor of a treatment device to be provided for a device which discharges the smoke including PM, for example, an exhaust gas purifying device for automobile, or a smoke treatment device used in a facility where the smoke is discharged such as a plant.
摘要翻译：根据本发明的等离子体产生用电极包括具有多个通孔的多个收集部，所述多个收集部朝向被处理气体的方向的气流面向彼此间隔开设置。该电极被施加到处理装置的等离子体反应器，以提供用于排出包括PM的烟雾的装置，例如用于汽车的废气净化装置，或者在排出烟雾的设施中使用的烟雾处理装置如植物。

98. 发明授权

US08520291B2 Illumination optical system, exposure apparatus, and device manufacturing method 有权
标题翻译：照明光学系统，曝光装置和装置制造方法
公开(公告)号：US08520291B2
公开(公告)日：2013-08-27
申请号：US12252274
申请日：2008-10-15
申请人： Hirohisa Tanaka
发明人： Hirohisa Tanaka
IPC分类号： G02B26/00 , G02F1/29
CPC分类号： G03F7/7085 , G03F7/70075 , G03F7/70108 , G03F7/70116
摘要： An illumination optical system which illuminates an irradiated plane with illumination light provided from a light source includes a spatial light modulator which is arranged in an optical path of the illumination optical system and cooperates with part of the illumination optical system to form a desired light intensity distribution at a pupil position of the illumination optical system or a position optically conjugated with the pupil position. A detection unit detects the light intensity distribution of the illumination light at a position in an optical path extending from the light source to the spatial light modulator. The detection unit includes a light receiving surface which receives some of the illumination light. A control unit controls the spatial light modulator based on the light intensity distribution detected by the detection unit.
摘要翻译：利用从光源提供的照明光照射被照射平面的照明光学系统包括布置在照明光学系统的光路中的空间光调制器，并与照明光学系统的一部分配合以形成期望的光强度分布在照明光学系统的光瞳位置处或与光瞳位置光学共轭的位置。检测单元检测在从光源延伸到空间光调制器的光路中的位置处的照明光的光强度分布。检测单元包括接收一些照明光的光接收表面。控制单元基于由检测单元检测到的光强度分布来控制空间光调制器。

99. 发明授权

US08462317B2 Illumination optical system, exposure apparatus, and device manufacturing method 有权
公开(公告)号：US08462317B2
公开(公告)日：2013-06-11
申请号：US12252283
申请日：2008-10-15
申请人： Hirohisa Tanaka
发明人： Hirohisa Tanaka
IPC分类号： G02B5/02 , G03B27/32 , G03B27/42 , G03B27/54 , G03B27/72
CPC分类号： G03F7/70116 , G03F7/70075 , G03F7/70108
摘要： An illumination optical system for illuminating an irradiated plane M with illumination light provided from a light source includes a spatial light modulator, which is arranged in an optical path of the illumination optical system and forms a desired light intensity distribution at a pupil position of the illumination optical system or a position optically conjugated with the pupil position, and a diffuser, which is arranged at an incidence side of the spatial light modulator through which the illumination light enters.

100. 发明授权

US08456624B2 Inspection device and inspecting method for spatial light modulator, illumination optical system, method for adjusting the illumination optical system, exposure apparatus, and device manufacturing method 有权
标题翻译：空间光调制器，照明光学系统，调整照明光学系统的方法，曝光装置和装置制造方法的检查装置和检查方法
公开(公告)号：US08456624B2
公开(公告)日：2013-06-04
申请号：US12952197
申请日：2010-11-22
申请人： Osamu Tanitsu , Hirohisa Tanaka
发明人： Osamu Tanitsu , Hirohisa Tanaka
IPC分类号： G01N21/00
CPC分类号： G01M11/005 , G03F7/70116 , G03F7/70591
摘要： There is disclosed an inspection device for inspecting a spatial light modulator having a plurality of optical elements arrayed two-dimensionally and controlled individually, said inspection device comprising, a conjugate optical system which is arranged optically downstream the spatial light modulator and which forms a conjugate plane optically conjugate with an array plane where the plurality of optical elements are arrayed, a photodetector having a detection surface arranged on or near the conjugate plane, and an inspection unit which inspects optical characteristics of the plurality of optical elements, based on a result of detection by the photodetector.
摘要翻译：公开了一种检查装置，用于检查具有二维排列并被单独控制的多个光学元件的空间光调制器，所述检查装置包括：共轭光学系统，其在空间光调制器的光学下游配置并形成共轭平面与排列多个光学元件的阵列平面光学共轭，具有布置在共轭平面上或附近的检测表面的光电检测器，以及基于检测结果检查多个光学元件的光学特性的检查单元通过光电检测器。

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