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    • 92. 发明申请
    • Method of smoothing the outline of a useful layer of material transferred onto a support substrate
    • 平滑转移到支撑衬底上的有用材料层轮廓的方法
    • US20050233544A1
    • 2005-10-20
    • US11153955
    • 2005-06-15
    • Bruno Ghyselen
    • Bruno Ghyselen
    • H01L21/30H01L21/762
    • H01L21/76259H01L21/76254
    • A method of providing a regular outline in a useful layer of material that is transferred from a source substrate onto a support substrate during the fabrication of a composite substrate for subsequent use in electronics, optics, or optoelectronics. The technique includes providing a shoulder on a front face of one of the source or support substrates about its periphery. The shoulder defines an inner projecting zone that has a top face, a sidewall and a regular outline. Next, the method includes molecularly bonding the top face of the projecting zone to a receiving face of the other of the source or support substrates, and removing a portion of the projecting zone from the source substrate to provide the useful layer having the regular outline on the support substrate.
    • 在制造用于电子学,光学或光电子学的复合衬底的制造期间,在有用的材料层中提供从源衬底转移到支撑衬底上的规则轮廓的方法。 该技术包括在其周围的源或支撑基板之一的前表面上提供肩部。 肩部限定具有顶面,侧壁和规则轮廓的内部突出区域。 接下来,该方法包括将突出区域的顶面分别结合到源或支撑衬底中的另一个的接收面,以及从源衬底去除突出区域的一部分,以提供具有规则轮廓的有用层 支撑基板。
    • 94. 发明授权
    • Method and device for making substrates
    • 制造基材的方法和装置
    • US06855619B2
    • 2005-02-15
    • US10239869
    • 2001-04-02
    • Atsushi IwasakiBruno Ghyselen
    • Atsushi IwasakiBruno Ghyselen
    • C30B29/06C30B31/22C30B33/00H01L21/762H01L21/322
    • C30B29/06C30B31/22C30B33/00H01L21/76254
    • The invention concerns a method for making substrates, in particular for optics, electronics or optoelectronics. The method includes an operation which consists in implanting (100) atomic species beneath the surface of a material in the form of a cylindrical ingot (1), at a depth of implantation distributed about a certain value by bombardment of the atomic species on a zone of the ingot (1) cylindrical surface, and an operation which consists in removing (300), at a separation depth located proximate to the depth of implantation, the layer (2) of material located between the surface and the separation depth, to remove the layer (2) from the rest of the cylindrical ingot (1).
    • 本发明涉及一种制造衬底的方法,特别是用于光学,电子学或光电子学的方法。 该方法包括一种操作,其包括在圆柱形铸锭(1)形式的材料的表面下方植入(100)原子物质,通过在区域上轰击原子物质而分布在约一定值上的注入深度 (1)圆柱形表面的操作,以及一种操作,其包括在位于植入深度附近的分离深度处移除(300)位于表面和分离深度之间的材料层(2),以移除 来自圆柱形锭(1)的其余部分的层(2)。