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    • 93. 发明授权
    • MRAM with storage layer and super-paramagnetic sensing layer
    • MRAM与存储层和超顺磁感应层
    • US08039885B2
    • 2011-10-18
    • US12661345
    • 2010-03-16
    • Po-Kang WangYimin GuoCheng HorngTai MinRu-Ying Tong
    • Po-Kang WangYimin GuoCheng HorngTai MinRu-Ying Tong
    • H01L29/94
    • H01L43/08
    • An MRAM is disclosed that has a MTJ comprised of a ferromagnetic layer with a magnetization direction along a first axis, a super-paramagnetic (SP) free layer, and an insulating layer formed therebetween. The SP free layer has a remnant magnetization that is substantially zero in the absence of an external field, and in which magnetization is roughly proportional to an external field until reaching a saturation value. In one embodiment, a separate storage layer is formed above, below, or adjacent to the MTJ and has uniaxial anisotropy with a magnetization direction along its easy axis which parallels the first axis. In a second embodiment, the storage layer is formed on a non-magnetic conducting spacer layer within the MTJ and is patterned simultaneously with the MTJ. The SP free layer may be multiple layers or laminated layers of CoFeB. The storage layer may have a SyAP configuration and a laminated structure.
    • 公开了一种MRAM,其具有由沿第一轴的磁化方向的铁磁层,超顺磁性(SP)自由层和在它们之间形成的绝缘层构成的MTJ。 SP自由层具有在没有外部场的情况下基本为零的残余磁化,并且其中磁化大致与外部场成正比,直到达到饱和值。 在一个实施例中,单独的存储层形成在MTJ的上方,下方或附近,并且具有沿其易于轴线平行于第一轴线的磁化方向的单轴各向异性。 在第二实施例中,存储层形成在MTJ内的非磁性导电间隔层上,并与MTJ同时构图。 SP自由层可以是CoFeB的多层或层压层。 存储层可以具有SyAP配置和层压结构。