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1. 发明授权

US08715776B2 Method for providing AFM exchange pinning fields in multiple directions on same substrate 有权
标题翻译：在同一基板上提供多个方向的AFM交换钉扎场的方法
公开(公告)号：US08715776B2
公开(公告)日：2014-05-06
申请号：US11904668
申请日：2007-09-28
申请人： Yimin Guo , Grace Gorman
发明人： Yimin Guo , Grace Gorman
IPC分类号： B05D5/12
CPC分类号： H01F41/304 , B82Y25/00 , B82Y40/00 , G01R33/093 , G01R33/098 , H01F10/3254 , H01F10/3268 , H01L27/22
摘要： Simultaneous setting of exchange pinning field magnetization in more than one direction for several thin film structures on a single substrate has been achieved by first orienting the structures as needed. A layer of hard magnetic material is then deposited, suitably patterned to control the direction of its flux, and then magnetized through a single exposure to a strong magnetic field. The assemblage is then thermally annealed (in the absence of any applied field) at a temperature higher than the AFM material blocking temperature, following which the thin film structures are magnetically pinned in the intended directions.
摘要翻译：通过根据需要首先定向结构，已经实现了在单个衬底上的多个薄膜结构的多于一个方向上的交换钉扎磁场的同时设置。然后沉积一层硬磁材料，适当地构图以控制其通量的方向，然后通过单次暴露于强磁场而被磁化。然后在高于AFM材料阻挡温度的温度下，将该组合物热退火（在不存在任何施加场的情况下），随后薄膜结构被磁性固定在预定方向上。

2. 发明申请

US20110111133A1 Multi-directional pin anneal of MR sensors with plasmon heating 有权
标题翻译： MR等离子体加热的多向引脚退火
公开(公告)号：US20110111133A1
公开(公告)日：2011-05-12
申请号：US12590364
申请日：2009-11-06
申请人： Yuchen Zhou , Xuhui Jin , Grace Gorman
发明人： Yuchen Zhou , Xuhui Jin , Grace Gorman
IPC分类号： B05D3/06 , B05D3/00
CPC分类号： G01R33/093 , B82Y25/00 , B82Y40/00 , G11B5/3163 , G11B5/3903 , H01F10/3254 , H01F10/3268 , H01F41/304
摘要： A method by which portions of a wafer level fabrication can be selectively heated by means of the formation of a plasmon generating layers of specific size, shape, orientation and material on the fabrication and then illuminating the formation with electromagnetic radiation of such wavelength and polarization as will optimally be absorbed by the plasmon generating layers so as to generate plasmons therein. The generated plasmons thereupon produce thermal energy which is transferred to portions of the fabrication with which the plasmon generation layer has thermal contact. This method is particularly advantageous for producing multiple anneals and different magnetic pinning directions for the anti-ferromagnetic pinning layer in each of an array of GMR or TMR devices. In that process, the anti-ferromagnetic layer must be raised above its Curie temperature at which point it loses its anti-ferromagnetic properties and can have a magnetization imposed by application of an external magnetic field. The method can equally well be applied to any wafer level fabrication or deposited film fabrication in which it is desired to heat specific regions to obtain some specified result that is temperature dependent.
摘要翻译：可以通过在制造上形成特定尺寸，形状，取向和材料的等离子体激元产生层来选择性地加热晶片级制造的部分的方法，然后用如下波长和极化的电磁辐射照射地层：将最佳地被等离子体发生层吸收，以便在其中产生等离子体激元。所产生的等离子体激元产生热能，其转移到等离子体发生层具有热接触的制造部分。该方法对于在GMR或TMR器件阵列中的每个中的反铁磁钉扎层产生多个退火和不同的磁性钉扎方向特别有利。在该过程中，反铁磁层必须升高到高于其居里温度，此时其失去其抗铁磁特性，并且可以通过施加外部磁场而施加磁化强度。该方法同样可以应用于任何晶片级制造或沉积膜制造，其中期望加热特定区域以获得温度依赖性的一些指定结果。

3. 发明申请

US20110037458A1 Open loop magneto-resistive magnetic field sensor 有权
标题翻译：开环磁阻磁场传感器
公开(公告)号：US20110037458A1
公开(公告)日：2011-02-17
申请号：US12583253
申请日：2009-08-17
申请人： Yuchen Zhou , Grace Gorman
发明人： Yuchen Zhou , Grace Gorman
IPC分类号： G01R33/09 , G01R35/00
CPC分类号： G01R33/098
摘要： An apparatus and a general method to measure a magnetic field using magneto-resistive sensors in an open-loop configuration are disclosed. A key feature is the regular in-situ normalization of the sensors to compensate for the effects of sensor aging.
摘要翻译：公开了使用开环结构中的磁阻传感器来测量磁场的装置和一般方法。一个关键的特征是传感器的常规原位归一化，以补偿传感器老化的影响。

4. 发明申请

US20100315928A1 Elimination of errors due to aging in magneto-resistive devices 有权
标题翻译：消除由于磁阻器件老化引起的误差
公开(公告)号：US20100315928A1
公开(公告)日：2010-12-16
申请号：US12456306
申请日：2009-06-15
申请人： Yuchen Zhou , Grace Gorman
发明人： Yuchen Zhou , Grace Gorman
IPC分类号： G11B20/18
CPC分类号： G11B5/3906 , G01R33/098 , G11B27/36 , G11B2005/0016 , G11B2220/2516
摘要： The problem of magneto-resistive sensor drift with age has been solved by normalizing the sensor's output relative to its output when it is in a selected reproducible state. Details for the method to accomplish this normalization are disclosed together with several examples of how the method can be utilized.
摘要翻译：传感器的输出相对于其输出在选定的可再现状态下通过归一化来解决磁阻传感器随着年龄而变化的问题。公开了实现该归一化的方法的细节以及如何利用该方法的若干示例。

5. 发明授权

US07394248B1 Method and structure to reset multi-element MTJ 有权
标题翻译：复位多元MTJ的方法和结构
公开(公告)号：US07394248B1
公开(公告)日：2008-07-01
申请号：US11888854
申请日：2007-08-02
申请人： Yimin Guo , Grace Gorman
发明人： Yimin Guo , Grace Gorman
IPC分类号： G01R33/02
CPC分类号： G01R33/093 , B82Y25/00 , G01R15/20 , G01R33/098
摘要： The process margin for the manufacture of devices formed from multi-element MTJ or GMR devices has been widened by providing a method and structure to reset the magnetization directions of all pinned layers simultaneously so that their directions of magnetization become evenly distributed. This has the effect of minimizing non-linearity and hysteresis in these devices during their subsequent operation.
摘要翻译：通过提供一种同时复位所有被钉扎层的磁化方向以使其磁化方向均匀分布的方法和结构，扩大了由多元件MTJ或GMR器件形成的器件的制造工艺余量。这具有在其随后的操作期间最小化这些装置中的非线性和滞后的效果。

6. 发明授权

US09372241B2 Multi-directional pin anneal of MR sensors with plasmon heating 有权
标题翻译： MR等离子体加热的多向引脚退火
公开(公告)号：US09372241B2
公开(公告)日：2016-06-21
申请号：US12590364
申请日：2009-11-06
申请人： Yuchen Zhou , Xuhui Jin , Grace Gorman
发明人： Yuchen Zhou , Xuhui Jin , Grace Gorman
IPC分类号： B05D3/06 , G01R33/09 , B82Y25/00 , B82Y40/00 , H01F41/30 , G11B5/31 , G11B5/39 , H01F10/32
CPC分类号： G01R33/093 , B82Y25/00 , B82Y40/00 , G11B5/3163 , G11B5/3903 , H01F10/3254 , H01F10/3268 , H01F41/304
摘要： A method by which portions of a wafer level fabrication can be selectively heated by forming plasmon generating layers of specific size, shape, orientation and material on the fabrication and then illuminating the formation with electromagnetic radiation of such wavelength and polarization as will optimally be absorbed by the plasmon generating layers so as to generate plasmons therein. The generated plasmons thereupon produce thermal energy which is transferred to portions of the fabrication with which the plasmon generation layer has thermal contact. This method is particularly advantageous for producing multiple anneals and different magnetic pinning directions for the anti-ferromagnetic pinning layer in each of an array of GMR or TMR devices. In that process, the anti-ferromagnetic layer must be raised above its Curie temperature at which point it loses its anti-ferromagnetic properties and can have a magnetization imposed by application of an external magnetic field. The method can equally well be applied to any wafer level fabrication or deposited film fabrication in which it is desired to heat specific regions to obtain some specified result that is temperature dependent.
摘要翻译：可以通过在制造上形成特定尺寸，形状，取向和材料的等离子体激元产生层来选择性地加热晶片级制造的部分的方法，然后用最佳被最佳吸收的波长和极化的电磁辐射照射地层等离子体发生层，以便在其中产生等离子体激元。所产生的等离子体激元产生热能，其转移到等离子体发生层具有热接触的制造部分。该方法对于在GMR或TMR器件阵列中的每个中的反铁磁钉扎层产生多个退火和不同的磁性钉扎方向特别有利。在该过程中，反铁磁层必须升高到高于其居里温度，此时其失去其抗铁磁特性，并且可以通过施加外部磁场而施加磁化强度。该方法同样可以应用于任何晶片级制造或沉积膜制造，其中期望加热特定区域以获得温度依赖性的一些指定结果。

7. 发明授权

US08248063B2 Open loop magneto-resistive magnetic field sensor 有权
标题翻译：开环磁阻磁场传感器
公开(公告)号：US08248063B2
公开(公告)日：2012-08-21
申请号：US12583253
申请日：2009-08-17
申请人： Yuchen Zhou , Grace Gorman
发明人： Yuchen Zhou , Grace Gorman
IPC分类号： G01R35/00
CPC分类号： G01R33/098
摘要： An apparatus and a general method to measure a magnetic field using magneto-resistive sensors in an open-loop configuration are disclosed. A key feature is the regular in-situ normalization of the sensors to compensate for the effects of sensor aging.
摘要翻译：公开了使用开环结构中的磁阻传感器来测量磁场的装置和一般方法。一个关键的特征是传感器的常规原位归一化，以补偿传感器老化的影响。

8. 发明授权

US08203337B2 Elimination of errors due to aging in magneto-resistive devices 有权
标题翻译：消除由于磁阻器件老化引起的误差
公开(公告)号：US08203337B2
公开(公告)日：2012-06-19
申请号：US12456306
申请日：2009-06-15
申请人： Yuchen Zhou , Grace Gorman
发明人： Yuchen Zhou , Grace Gorman
IPC分类号： G01R33/06
CPC分类号： G11B5/3906 , G01R33/098 , G11B27/36 , G11B2005/0016 , G11B2220/2516
摘要： The problem of magneto-resistive sensor drift with age has been solved by normalizing the sensor's output relative to its output when it is in a selected reproducible state. Details for the method to accomplish this normalization are disclosed together with several examples of how the method can be utilized.
摘要翻译：传感器的输出相对于其输出在选定的可再现状态下通过归一化来解决磁阻传感器随着年龄而变化的问题。公开了实现该归一化的方法的细节以及如何利用该方法的若干示例。

9. 发明授权

US07619407B2 Gear tooth sensor with single magnetoresistive bridge 有权
标题翻译：带单磁阻桥的齿轮传感器
公开(公告)号：US07619407B2
公开(公告)日：2009-11-17
申请号：US12082257
申请日：2008-04-10
申请人： Yimin Guo , Grace Gorman
发明人： Yimin Guo , Grace Gorman
IPC分类号： G01B7/30 , G01R33/09
CPC分类号： G01B7/30 , G01D5/147 , G01P3/488
摘要： The invention discloses a rotation sensor suitable for gear wheels. MR (magneto-resistive) sensors are placed inside a zero field region generated by at least two permanent magnets. The sensors are divided into two groups that are immersed in different locally generated magnetic environments. A differential signal taken between the two groups then senses the movement of the wheel's teeth. A single wafer method for manufacturing the device is also briefly described.
摘要翻译：本发明公开了一种适用于齿轮的旋转传感器。 MR（磁阻）传感器被放置在由至少两个永磁体产生的零场区域内。传感器被分为浸没在不同的本地产生的磁环境中的两组。在两组之间拍摄的差分信号然后感测到车轮的齿的运动。还简要描述了用于制造该器件的单晶片方法。

10. 发明申请

US20090256552A1 GEAR TOOTH SENSOR WITH SINGLE MAGNETORESISTIVE BRIDGE 有权
标题翻译：具有单磁铁桥的齿轮传感器
公开(公告)号：US20090256552A1
公开(公告)日：2009-10-15
申请号：US12082257
申请日：2008-04-10
申请人： Yimin Guo , Grace Gorman
发明人： Yimin Guo , Grace Gorman
IPC分类号： G01B7/30
CPC分类号： G01B7/30 , G01D5/147 , G01P3/488
摘要： The invention discloses a rotation sensor suitable for gear wheels. MR (magneto-resistive) sensors are placed inside a zero field region generated by at least two permanent magnets. Said sensors are divided into two groups that are immersed in different locally generated magnetic environments. A differential signal taken between the two groups then senses the movement of the wheel's teeth. A single wafer method for manufacturing the device is also briefly described.
摘要翻译：本发明公开了一种适用于齿轮的旋转传感器。 MR（磁阻）传感器被放置在由至少两个永磁体产生的零场区域内。所述传感器被分成浸没在不同的局部产生的磁环境中的两组。在两组之间拍摄的差分信号然后感测到车轮的齿的运动。还简要描述了用于制造该器件的单晶片方法。

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