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91. 发明申请

US20090174872A1 Cleanup method for optics in immersion lithography 有权
标题翻译：浸没光刻中光学的清理方法
公开(公告)号：US20090174872A1
公开(公告)日：2009-07-09
申请号：US12382078
申请日：2009-03-09
申请人： Andrew J. Hazelton , Hidemi Kawai , Douglas C. Watson , W. Thomas Novak
发明人： Andrew J. Hazelton , Hidemi Kawai , Douglas C. Watson , W. Thomas Novak
IPC分类号： G03B27/52
CPC分类号： G03F7/70341 , B08B3/04 , B08B3/12 , G03F7/70891 , G03F7/70916 , G03F7/70925
摘要： An immersion lithography apparatus and cleanup method used for the immersion lithography apparatus in which an immersion liquid is supplied to a gap between an optical element of a projection optics and a workpiece during an immersion lithography process. A surface of an object, which is different from the workpiece, is provided below the optical element, a supply port and a recovery port. During a cleanup process, a cleaning liquid is supplied onto the object such that the cleaning liquid covers only a portion of the surface of the object.
摘要翻译：浸渍光刻设备和浸没式光刻设备中的清理方法，其中在浸没式光刻工艺期间将浸没液体供应到投影光学元件的光学元件和工件之间的间隙。与工件不同的物体的表面设置在光学元件的下方，供给口和回收口。在净化过程中，清洁液体被供应到物体上，使得清洁液仅覆盖物体表面的一部分。

92. 发明申请

US20080285003A1 Linear motor driven automatic reticle blind 审中-公开
标题翻译：线性电机驱动自动掩模版盲
公开(公告)号：US20080285003A1
公开(公告)日：2008-11-20
申请号：US11803595
申请日：2007-05-15
申请人： Michael B. Binnard , Douglas C. Watson , Yoichi Arai
发明人： Michael B. Binnard , Douglas C. Watson , Yoichi Arai
IPC分类号： G03B27/42
CPC分类号： G03F7/70066
摘要： A reticle blind which is capable of being opened and closed at a relatively high speed and which does not cause mechanical disturbances or reaction forces. The reticle blind includes two reticle blind assemblies designed to cooperate with one another to control the passing of a laser beam of an exposure system onto a work piece, such as a semiconductor wafer or flat panel display. Each reticle blind assembly includes a linear motor having a mover and a blind configured to be positioned between a first position and a second position by the mover. Each reticle blind assembly also includes a counter mass assembly including a portion of a guide mechanism having at least one guide bar and a stator of the linear motor. The stator of the linear motor and the guide bar are integrated to form the counter mass which is configured to absorb reaction forces that are created when the blind is moved. In various embodiments, the blinds can be configured to operate in the vertical or horizontal orientation.
摘要翻译：能够以相对较高的速度打开和关闭且不引起机械干扰或反作用力的掩模版盲板。掩模版盲包括两个掩模版盲组件，其设计成彼此配合以控制曝光系统的激光束通过诸如半导体晶片或平板显示器的工件。每个掩模版盲组件包括具有移动器的线性电动机和被构造成由移动器定位在第一位置和第二位置之间的盲板。每个掩模版盲组件还包括反质量组件，其包括具有至少一个引导杆和线性电动机的定子的引导机构的一部分。线性电动机和引导杆的定子被整合以形成相对质量块，其被构造成吸收当盲人移动时产生的反作用力。在各种实施例中，百叶窗可被配置成在垂直或水平取向上操作。

93. 发明申请

US20080105069A1 Fine Stage Z Support Apparatus 审中-公开
标题翻译：精细级Z支持装置
公开(公告)号：US20080105069A1
公开(公告)日：2008-05-08
申请号：US11666858
申请日：2005-11-04
申请人： Michael B. Binnard , Andrew J. Hazelton , Douglas C. Watson , Yoichi Arai
发明人： Michael B. Binnard , Andrew J. Hazelton , Douglas C. Watson , Yoichi Arai
IPC分类号： A47J43/08 , B65H1/00 , F16M11/00 , H01L21/00
CPC分类号： G03F7/70816 , G03F7/70716 , H01L21/682
摘要： An apparatus for supporting an object is disclosed. The apparatus includes an air bearing coupled to an air bellows. When used in a vacuum environment, the apparatus preferably includes an air bearing housing with vacuum to remove the pressurized fluid used in the air bearing.
摘要翻译：公开了一种用于支撑物体的装置。该装置包括联接到空气波纹管的空气轴承。当在真空环境中使用时，装置优选地包括具有真空的空气轴承壳体，以去除在空气轴承中使用的加压流体。

94. 发明授权

US07345742B2 Environmental system including a transport region for an immersion lithography apparatus 有权
标题翻译：环境系统包括浸没式光刻设备的传送区域
公开(公告)号：US07345742B2
公开(公告)日：2008-03-18
申请号：US11705001
申请日：2007-02-12
申请人： W. Thomas Novak , Andrew J. Hazelton , Douglas C. Watson
发明人： W. Thomas Novak , Andrew J. Hazelton , Douglas C. Watson
IPC分类号： G03B27/58 , G03B27/32
CPC分类号： G03F7/70866 , G03F7/70341 , G03F7/7095
摘要： A lithographic projection apparatus that is arranged to project a pattern from a patterning device onto a substrate using a projection system has a liquid supply system arranged to supply a liquid to a space between the projection system and the substrate. The apparatus also includes a liquid removal system having a conduit having an open end adjacent a volume in which liquid will be present, a porous member between the end of the conduit and the volume, and a suction device arranged to create a pressure differential across the porous member.
摘要翻译：布置成使用投影系统从图案形成装置将图案投影到基板上的光刻投影装置具有布置成将液体供应到投影系统和基板之间的空间的液体供应系统。该设备还包括一个液体去除系统，该系统具有一个导管，该导管具有一个与其中存在液体的容积相邻的开口端，一个位于导管端部和该体积之间的多孔构件，以及一个抽吸装置，多孔构件。

95. 发明授权

US07251017B2 Environmental system including a transport region for an immersion lithography apparatus 有权
标题翻译：环境系统包括浸没式光刻设备的传送区域
公开(公告)号：US07251017B2
公开(公告)日：2007-07-31
申请号：US11236713
申请日：2005-09-28
申请人： W. Thomas Novak , Andrew J. Hazelton , Douglas C. Watson
发明人： W. Thomas Novak , Andrew J. Hazelton , Douglas C. Watson
IPC分类号： G03B27/42 , G03B27/58
CPC分类号： G03F7/70866 , G03F7/70341 , G03F7/7095
摘要： An environmental system controls an environment in a gap between an optical assembly and a device and includes a fluid barrier, an immersion fluid system, and a transport region. The fluid barrier is positioned near the device and maintains the transport region near the gap. The immersion fluid system delivers an immersion fluid that fills the gap. The transport region transports at least a portion of the immersion fluid that is near the fluid barrier and the device away from the device. The immersion fluid system can include a fluid removal system that is in fluid communication with the transport region. The transport region can be made of a porous material.
摘要翻译：环境系统控制光学组件和装置之间的间隙中的环境，并且包括流体屏障，浸没流体系统和输送区域。流体屏障定位在设备附近并保持输送区域靠近间隙。浸液系统提供填充间隙的浸液。输送区域将至少一部分浸入液体输送到靠近流体屏障并且该装置远离装置。浸没流体系统可以包括与输送区域流体连通的流体去除系统。输送区域可以由多孔材料制成。

96. 发明授权

US06888620B2 System and method for holding a device with minimal deformation 失效
标题翻译：用于保持最小变形的装置的系统和方法
公开(公告)号：US06888620B2
公开(公告)日：2005-05-03
申请号：US09997553
申请日：2001-11-29
申请人： Martin E. Lee , Mike Binnard , Douglas C. Watson
发明人： Martin E. Lee , Mike Binnard , Douglas C. Watson
IPC分类号： G03F7/20 , G03B27/60 , G03B27/58 , G03B27/62 , G03B27/42
CPC分类号： G03F7/707 , G03F7/70708 , G03F7/70716
摘要： A stage assembly (10) for moving and positioning a device (26) includes a device table (20), a device holder (24) that retains the device (26), and a stage mover assembly (14). The stage assembly (10) includes one or more features that can isolate the device holder 24 and the device (26) from deformation. In some embodiments, the stage assembly (10) allows precise rotation of the device (26) between a first position (42) and a second position (44) without influencing the flatness of the device (26) and without deflecting and distorting the device (26). For example, the stage assembly (10) can include a carrier (60) and a holder connector assembly (62). The carrier (60) is supported above the device table (20) and rotates relative to the device table (20). The holder connector assembly (62) connects the device holder (24) to the carrier (60). Further, the stage assembly (10) can include a holder mover (120) that rotates the device holder (24) relative to the device table (20). Additionally, the stage assembly (10) can include a fluid connector (94) that connects the device holder (24) in fluid communication with the device table (20).
摘要翻译：用于移动和定位装置（26）的平台组件（10）包括装置台（20），保持装置（26）的装置保持器（24）和平台移动器组件（14）。台架组件（10）包括可以隔离设备保持器24和设备（26）不变形的一个或多个特征。在一些实施例中，台架组件（10）允许装置（26）在第一位置（42）和第二位置（44）之间精确地旋转，而不影响装置（26）的平坦度，并且不会使装置偏转和变形（26）。例如，台架组件（10）可以包括托架（60）和托架连接器组件（62）。载体（60）被支撑在装置台（20）上方并相对于装置台（20）旋转。支架连接器组件（62）将装置支架（24）连接到支架（60）上。此外，台架组件（10）可以包括相对于设备台（20）旋转设备保持器（24）的保持器移动器（120）。另外，台架组件（10）可以包括流体连接器（94），其连接与装置台（20）流体连通的装置保持器（24）。

97. 发明授权

US06842277B2 Deformable mirror with high-bandwidth servo for rigid body control 失效
标题翻译：具有高带宽伺服的变形镜，用于刚体控制
公开(公告)号：US06842277B2
公开(公告)日：2005-01-11
申请号：US10448613
申请日：2003-05-29
申请人： Douglas C. Watson
发明人： Douglas C. Watson
IPC分类号： G02B5/10 , G02B7/182 , G02B7/198 , G02B17/00 , G02B26/08 , G03F7/20 , H01L21/027 , G02B26/00 , G02B5/08
CPC分类号： G03F7/70266 , G02B7/182 , G02B26/0825
摘要： A deformable mirror arrangement has a plurality of constraint mechanisms contacting a deformable mirror at specified contact positions. At least three of these constraint mechanisms are rigid body servo control mechanisms such as high-bandwidth servo control mechanisms, each including a force actuator contacting the mirror at a corresponding one of the contact positions, a position sensor assisting to measure position of the mirror and a servo control unit for controlling the force actuator.
摘要翻译：可变形反射镜装置具有多个约束机构，其在指定的接触位置处接触可变形反射镜。这些约束机构中的至少三个是诸如高带宽伺服控制机构的刚体伺服控制机构，每个包括在相应的一个接触位置处接触反射镜的力致动器，辅助测量反射镜位置的位置传感器和用于控制力致动器的伺服控制单元。

98. 发明授权

US06842226B2 Flexure supported wafer table 失效
标题翻译：弯曲支撑晶圆台
公开(公告)号：US06842226B2
公开(公告)日：2005-01-11
申请号：US09960584
申请日：2001-09-21
申请人： Douglas C. Watson , Michael Binnard
发明人： Douglas C. Watson , Michael Binnard
IPC分类号： G03F7/20 , G03B27/58 , G03B27/62 , G03B27/42
CPC分类号： G03F7/707 , G03F7/70716 , G03F7/70758 , G03F7/70816
摘要： An apparatus and method for supporting and precisely positioning a table or stage with respect to a frame. The table is supported by at least one flexible member which is flexible in a plurality of degrees of freedom. The flexible member is mounted on a base which is movable in an additional degree of freedom. In the context of lithographic semiconductor processing, a wafer stage can thereby be precisely positioned with respect to a frame or reticle in six degrees of freedom.
摘要翻译：一种用于相对于框架支撑和精确地定位桌子或台阶的装置和方法。桌子由至少一个灵活的多个自由度的柔性构件支撑。柔性构件安装在可以在另外的自由度上移动的基座上。在光刻半导体处理的上下文中，因此可以以六个自由度相对于框架或掩模版精确地定位晶片台。

99. 发明授权

US06794660B2 Long stroke mover for a stage assembly 失效
标题翻译：用于舞台组合的长行程动臂
公开(公告)号：US06794660B2
公开(公告)日：2004-09-21
申请号：US09929247
申请日：2001-08-13
申请人： Douglas C. Watson
发明人： Douglas C. Watson
IPC分类号： H01J3720
CPC分类号： G03F7/70716 , G02B21/26 , G03F7/70725 , G03F7/70758
摘要： A stage assembly (10) for moving and positioning a device (26) includes a guide base (12), a stage (14), a stage bearing assembly (18), a control system (22), and a Y mover (68). The stage (14) retains the device (26). The stage bearing assembly (18) supports the stage (14) spaced apart from the guide base (12). More specifically, the stage bearing assembly (18) generates an electrostatic force that urges the stage (14) towards the guide base (12). The housing mover (68) moves the stage (14) relative to the guide base (12). The Y mover (68) includes a plurality of magnets and a conductor. The magnets have a magnet length (86) and the conductors have a conductor length (88). Preferably, the magnet length (86) is at least as long as the conductor length (88) plus an X stroke (87) of the stage assembly (10). This design allows the Y mover (68) to provide a force along the Y axis over the range of the positions of the Y mover (68).
摘要翻译：用于移动和定位装置（26）的平台组件（10）包括导向基座（12），台架（14），平台轴承组件（18），控制系统（22）和Y移动器）。舞台（14）保持装置（26）。平台轴承组件（18）支撑与导向基座（12）间隔开的平台（14）。更具体地，平台轴承组件（18）产生向阶段（14）朝向导向基座（12）推动的静电力。壳体移动器（68）使台（14）相对于导向座（12）移动。 Y移动器（68）包括多个磁体和导体。磁体具有磁体长度（86），并且导体具有导体长度（88）。优选地，磁体长度（86）至少与导体长度（88）加上台架组件（10）的X行程（87）一样长。这种设计允许Y移动器（68）沿着Y轴在Y移动器（68）的位置的范围上提供力。

100. 发明授权

US06735867B2 Method of making a static pressure air bearing 有权
标题翻译：制造静压空气轴承的方法
公开(公告)号：US06735867B2
公开(公告)日：2004-05-18
申请号：US10205200
申请日：2002-07-26
申请人： Takuma Tsuda , Shinji Shinohara , Shinobu Tokushima , Yukiharu Okubo , Toshimasa Shimoda , Douglas C. Watson , W. Thomas Novak
发明人： Takuma Tsuda , Shinji Shinohara , Shinobu Tokushima , Yukiharu Okubo , Toshimasa Shimoda , Douglas C. Watson , W. Thomas Novak
IPC分类号： B21D5310
CPC分类号： F16C32/06 , B23Q1/0027 , B23Q1/38 , B23Q1/621 , F16C29/025 , F16C32/0603 , F16C33/748 , F16C2300/62 , F16C2322/39 , G03F7/70816 , Y10T29/49639 , Y10T29/49641
摘要： In order to provide a static pressure air bearing having two axes usable in a vacuum environment in which the connection of the supporting air exhaust pipe does not adversely affect the motion of the bearing mechanism, air exhaust pipes are connected only with the fixed part(s) of the lower axis. Air exhaust from the upper axis is conducted through inner air exhaust piping (passages) formed within the fixed parts of the upper and lower axes, so that the exhaust pipes need not be connected with the movable parts.
摘要翻译：为了提供一种具有两个轴的静压空气轴承，该真空环在真空环境中可以使支撑排气管的连接不会对轴承机构的运动产生不利影响，排气管仅与固定部分）。从上轴排出的排气通过形成在上下轴的固定部内的内部排气管（通路）进行排气，不需要将排气管与可动部连接。

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