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    • 93. 发明授权
    • Single-etalon, multi-point wavelength calibration reference
    • 单标准,多点波长校准参考
    • US06934033B2
    • 2005-08-23
    • US09750204
    • 2000-12-28
    • Donald L. McDanielRong HuangParviz TayebatiReich L. Watterson
    • Donald L. McDanielRong HuangParviz TayebatiReich L. Watterson
    • G02B26/00G01B9/02
    • G02B26/001
    • Wavelength reference apparatus for use in calibrating a tunable Fabry-Perot filter or a tunable VCSEL, whereby the device may be tuned to a precise, known wavelength, the wavelength reference apparatus comprising an LED, where the LED is chosen so as to have an emission profile which varies with wavelength; an etalon, where the etalon is chosen so as to have a transmission profile which comprises a comb of transmission peaks, with each transmission peak occurring at a precise, known wavelength; and a detector for detecting the light emitted by the LED and passing through the etalon; whereby when a tunable Fabry-Perot filter or tunable VCSEL is positioned between the etalon and the detector, and the device is swept through its tuning range by varying the tuning voltage applied to the device, the known transmission wavelengths established by the LED and the etalon can be correlated to counterpart tuning voltages of the device, whereby to calibrate the device.
    • 用于校准可调谐法布里 - 珀罗滤波器或可调谐VCSEL的波长参考装置,由此该装置可以被调谐到精确的已知波长,波长参考装置包括LED,其中LED被选择为具有发射 轮廓随波长变化; 标准具,其中选择标准具以具有包括透射峰梳的传输轮廓,其中每个透射峰出现在精确的已知波长处; 以及检测器,用于检测由LED发出的光并通过标准具; 由此当可调谐法布里 - 珀罗滤波器或可调谐VCSEL位于标准具和检测器之间时,并且通过改变施加到器件的调谐电压来将器件扫过其调谐范围,由LED和标准具建立的已知传输波长 可以与器件的对应调谐电压相关,从而校准器件。
    • 94. 发明申请
    • Compress and position apparatus
    • 压缩和定位装置
    • US20050051023A1
    • 2005-03-10
    • US10764586
    • 2004-01-27
    • Chen-Chung DuPang-Ming ChiangJen-Rong HuangMuh-Wang LiangYi-Chao Weng
    • Chen-Chung DuPang-Ming ChiangJen-Rong HuangMuh-Wang LiangYi-Chao Weng
    • F01B15/00F16K17/00H01L21/68
    • B30B1/38B30B15/068
    • The present invention relates to a compress and position apparatus with positioning, orientating functions and providing more uniform pressing force compliantly. The compress and position apparatus comprises a guiding column, a base, a housing, a seat, a annular portion and a pressing plate. The base has a cylinder, a plurality of locating pins and a convex portion. The annular portion has a through hole and a plurality of locating holes. The guiding column and the cylinder are disposed in the housing provided with an opening for the guiding column passing therethrough. The housing is mounted on the base and passed through a through hole of the annular portion and disposed in a cavity of the seat. A plane on the housing abuts a plane on the cavity to prevent the rotation of the housing. The guiding column is combined with the seat. The locating pin is inserted into the locating hole. The pressing plate engages the annular portion. Thus the guiding column is moved up and down by the gas supply device. The convex portion biases the pressing plate to exert force on the substrate.
    • 本发明涉及具有定位,定向功能并且提供更均匀的按压力的压缩和定位装置。 压缩和定位装置包括导向柱,基座,​​壳体,座椅,环形部分和压板。 基座具有圆柱体,多个定位销和凸起部分。 环形部分具有通孔和多个定位孔。 引导柱和圆柱体设置在壳体中,该壳体设置有用于引导柱通过的开口。 壳体安装在基座上并穿过环形部分的通孔并设置在座椅的空腔中。 壳体上的平面与空腔上的平面抵接以防止壳体旋转。 引导柱与座椅结合。 定位销插入定位孔。 压板与环形部分接合。 因此,引导塔由气体供给装置上下移动。 凸起部分偏压压板以在基底上施加力。
    • 95. 发明授权
    • Door for wafer container having rotatable cammed member and movable links
    • 具有旋转凸轮部件和活动连接件的晶片容器的门
    • US06622883B1
    • 2003-09-23
    • US09644653
    • 2000-08-24
    • Tzong-Ming WuJen-Rong HuangMuh-Wang Liang
    • Tzong-Ming WuJen-Rong HuangMuh-Wang Liang
    • B65D4528
    • H01L21/67373Y10T292/0837Y10T292/0839
    • A Modified door for wafer container, includes a rotatable cammed member, two first links coupled to the rotatable cammed member and vertically aligned and moved in and out of respective first latch holes on the wafer transport module upon rotary motion of the rotatable cammed member, and two second links respectively coupled to the first links and horizontally moved in and out of respective second latch holes on the wafer transport module upon movement of the first links. The links each have a slope adapted to be moved with the respective link over a respective bearing means of the door body to force the door body inwards against the wafer transport module, keeping the wafer transport module well sealed.
    • 一种用于晶片容器的修改门,包括可旋转的凸轮构件,两个第一连杆,其联接到可旋转的凸轮构件,并且在可旋转的凸轮构件的旋转运动时垂直对准并移入和移出晶片传送模块上的相应的第一闩锁孔;以及 两个第二链节分别耦合到第一链节并且在第一链节移动时水平地移入和移出晶片传送模块上的相应的第二闩锁孔。 连接件各自具有适于与相应的连杆一起移动到相应的门体的相应轴承装置上的斜面,以将门体向内抵靠晶片传送模块,从而保持晶片传送模块的良好密封。