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91. 发明专利

JP2006118601A Float type steam trap 有权
标题翻译：浮标式蒸汽夹
公开(公告)号：JP2006118601A
公开(公告)日：2006-05-11
申请号：JP2004306952
申请日：2004-10-21
申请人： Motoyama Eng Works Ltd , 株式会社本山製作所
发明人： AOKI TAKEHIKO , WATANABE MASAKI
IPC分类号： F16T1/24 , F16K31/24
摘要： PROBLEM TO BE SOLVED: To provide a float type steam trap effective for preventing the occurrence of water hammer while reducing the size of a device and improving draining capability and valve closing performance.
SOLUTION: A body 1 has a float chamber 1d and a flow-in port 12a and a discharge port 13a communicated with the float chamber 1d. A holder 3 having a flow path 3a inside communicated with the discharge port 13a is provided in the float chamber 1d of the body 1. A float 41 is provided in the float chamber 1d in an up-and-down movable manner. A lever 42 has one end fixed to the float 41 and the other end rotatable on the holder 3. A valve seat (not illustrated) is provided in the holder 3 in communication with the flow path 3a. A ball valve element (not illustrated) is provided between the valve seat and the lever 42 for opening/closing the valve seat with the deviating movement relative to the valve seat in linkage with the up-and-down movement of the float 41.
COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：提供一种有效地防止水锤发生同时减小装置尺寸并提高排水能力和闭阀性能的浮子式疏水阀。解决方案：主体1具有浮子室1d和流入口12a以及与浮子室1d连通的排出口13a。具有与排出口13a连通的流路3a的保持器3设置在主体1的浮子室1d中。浮子41以上下移动的方式设置在浮动室1d中。杠杆42的一端固定在浮子41上，另一端固定在支架3上。另外一个阀座（未示出）设置在支架3中，与流路3a连通。在阀座和杠杆42之间设置有球阀元件（未示出），用于与浮子41的上下运动相关地相对于阀座偏移地打开/关闭阀座。 P>版权所有（C）2006，JPO＆NCIPI

92. 发明专利

JP2004062897A Control method of gas system and its device 有权
公开(公告)号：JP2004062897A
公开(公告)日：2004-02-26
申请号：JP2003196469
申请日：2003-07-14
申请人： Motoyama Eng Works Ltd , Tokyo Electron Ltd , 東京エレクトロン株式会社 , 株式会社本山製作所
发明人： KOMINO MITSUAKI , UCHISAWA OSAMU , CHIBA YASUHIRO
IPC分类号： H01L21/3065 , G05D16/20 , H01L21/205
摘要： PROBLEM TO BE SOLVED: To control pressure, etc. of gas according to each state of flow rate load, etc. due to presence/absence of gas flow to be used.
SOLUTION: A gas control device is provided with mass flow controllers 78a to 78c which are disposed in supply ducts 72a to 72c which supply the gas to a processing chamber 71 and detects the flow rate load of the gas, a control valve 80 disposed in an exhaust duct 73 connected with the processing chamber for adjusting pressure in the processing chamber, a monochrometer 83 which detects presence/absence of plasma generated in the processing chamber by a plasma generation means and a CPU 40A which preliminarily stores a control coefficient according to presence/absence of gas flow and presence/absence of plasma generation. The flow rate load of gas is detected by the mass flow controllers, presence/absence of the plasma generated in the processing chamber is detected by the monochrometer, these detection signals are transmitted to the CPU and a control valve is controlled so that pressure of the processing chamber is at a specified level based on a control signal from the CPU.
COPYRIGHT: (C)2004,JPO

93. 发明专利

JP2002195492A FLOAT TYPE STEAM TRAP 失效
公开(公告)号：JP2002195492A
公开(公告)日：2002-07-10
申请号：JP2000401454
申请日：2000-12-28
申请人： MOTOYAMA ENG WORKS LTD
发明人： AOKI TAKEHIKO , SANAI JIRO
IPC分类号： F16K31/24 , F16T1/20
摘要： PROBLEM TO BE SOLVED: To provide an economical float type steam trap capable of miniaturizing a device, improving a drain performance and valve closing performance, and preventing the generation of water hammer. SOLUTION: The main body 1 of the steam trap has a float room 1, and an intake 1d and an outlet 1e communicating with the float room 1c. A holder 3 with a channel 3a communicating with the outlet 1e is fixed to the main body 1 inside the float room 1c. A valve seat 5 is mounted in the holder 3 to communicate with the outlet 1e. A float 4 comprising a float 4a and a lever 4b is mounted inside the float room 1c movably upward/downward. A valve element 6 is mounted in the lever 4b. One end of the lever 4b is fixed to the float 4a and the other end is rotatably attached to the holder 3. The valve element 6, interlocking with the upward/downward movement of the float 4a, slides relative to the valve seat 5 to open/close the valve seat 5.

94. 发明专利

JP2001027334A REGULATING VALVE 失效
公开(公告)号：JP2001027334A
公开(公告)日：2001-01-30
申请号：JP23306599
申请日：1999-07-15
申请人： MOTOYAMA ENG WORKS LTD
发明人： KOJIMA JUNICHI , TAKAHASHI SEIJI , UJIIE TAKASHI , WATANABE YOSHIYUKI
IPC分类号： F16K1/08 , F15D1/10
摘要： PROBLEM TO BE SOLVED: To easily change the design of a valve plug edge end section, to suppress the pressure fluctuations of a controlled fluid without causing the increases of the manufacturing cost and weight, and to prevent the occurrence of noise by providing annular lug on the circumference of the valve plug edge end section. SOLUTION: The edge end section 31 of a valve plug 27 is divided in the width direction by an annular lug 35 protruded on the peripheral face of the edge end section 31 constituting a valve plug 27 together with a guide post 6 and a characteristic section 7, and the edge end section 31 is shortened in width. A sticking stream 32a flowing in from the gap between a seat ring 11 and valve plug 27 and having an unstable sticking state when moving to the edge end section 31 from the curved face of the characteristic section 7 through a seat section 19 can be instantaneously abutted on the annular lug 35 and peeled when it reaches the edge end section 31. The re-sticking of the sticking stream 32a can be prevented, and violent pressure fluctuations causing the occurrence of noise can be prevented.

95. 发明专利

JPH1163398A GAS FEEDER 失效
公开(公告)号：JPH1163398A
公开(公告)日：1999-03-05
申请号：JP22584297
申请日：1997-08-07
申请人： TOKYO ELECTRON LTD , MOTOYAMA ENG WORKS
发明人： KOMINO MITSUAKI , UCHISAWA OSAMU , CHIBA YASUHIRO
IPC分类号： F17C13/02
摘要： PROBLEM TO BE SOLVED: To prevent the overshoot of exhaust flow of exhaust gas in a gas feeding system and shorten exhaust time. SOLUTION: A gas feeder is provided with a gas feed pipeline 4 communicating a gas feed port 3 with a cylinder 1 charged with specified material gas, an exhaust pipeline 5 branching off from the gas feed pipeline 4, and a vacuum generator 10 interposed at the exhaust pipeline 5 and producing a vacuum in the exhaust pipeline 5 by the supply of purge gas so as to exhaust exhaust gas through the exhaust pipeline 5. In this case, a diaphragm valve 20 opened/ closed following the operating pressure of operating gas is disposed on a primary side of the vacuum generator 10 in the exhaust pipeline 5, and a pressure sensor 30 is disposed on a secondary side of the diaphragm valve 20. A detection signal from the pressure sensor 30 is fed back to a CPU 50, and the diaphragm valve 20 is delay-controlled on the basis of a control signal from the CPU 50.

96. 发明专利

JPH109419A CYLINDER CABINET CHECK VALVE 失效
公开(公告)号：JPH109419A
公开(公告)日：1998-01-13
申请号：JP16211796
申请日：1996-06-21
申请人： MOTOYAMA ENG WORKS
发明人： UCHISAWA OSAMU , YAMAZAKI SHIGEKAZU
IPC分类号： F16K15/08 , F16K15/14
摘要： PROBLEM TO BE SOLVED: To prevent generation of the dust at the time of valve operation and opening, prevent sinking-in of a lip part, and dissolve the problem such as breakage of a lip by communicating a valve seat and a primary flow passage with each other through a plurality of narrow hole, and forming the diameter of the narrow hole smaller than the wall thickness of the lip part. SOLUTION: A narrow hole 4 is formed on a body 1 positioning to the terminal of a primary flow passage 5, and a V-ring 7 is arranged in the vicinity of the outlet of the secondary flow passage 6 side of the narrow hole 4. The secondary flow passage 6 is formed between the body 1 and a bonnet 2 and on the bonnet 2. The V-ring 7 is provided with a lip part 9 which is elastically deformable and opposed in freely separatable contact with the valve seat 8 formed in the vicinity of the narrow hole 4. Opening/closing operation of the lip part 9 is carried out by only being in separatable contact with the valve seat 8 and the narrow hole 4 in relation to the pressure difference between the primary flow passage 5 and the secondary flow passage 6. At this time, a plurality of narrow holes 4 are formed smaller than the thickness of the lip on a circumference. Local excessive tension stress applied on the lip part 9 is dispersed, and thereby, durability is improved.

97. 发明专利

JPH09273480A EVACUATING DEVICE 失效
公开(公告)号：JPH09273480A
公开(公告)日：1997-10-21
申请号：JP8421996
申请日：1996-04-05
申请人： MOTOYAMA ENG WORKS
发明人： UCHISAWA OSAMU , KIYONO FUMIYUKI , ONODERA TAKASHI , SUGANO YOICHI
IPC分类号： F16K7/17 , F04B37/16 , F16K24/04 , F16K31/524 , F16K31/54
摘要： PROBLEM TO BE SOLVED: To quickly and securely perform the evacuation by limiting rise of a piston, which is provided inside of an actuator cover, with a shaft, and previously adjusting rise of the shaft in response to the intake flow of a vacuum generator with a stopper in a closing degree limiter. SOLUTION: A piston 33, which forms a driving mechanism, is provided over a cam pinion 21 inside of an actuator cover 15, and a top surface of the piston 23 as a pressure receiver surface is faced to an opening 25 formed in the upper part of the actuator cover 15. A closing degree limiter 27 is inserted into this opening 25 so as to be integrally formed with each other, and this closing degree limiter 27 performs limitation of rise of the piston 23 with a shaft 29, and rise of the shaft 29 is previously adjusted by a stopper in response to the intake flow of a vacuum generator. With this structure, since a valve can be full opened on the way of the operation, evacuation can be quickly and securely performed.

98. 发明专利

JPH0960763A CAGE FOR REGULATING VALVE, REGULATING VALVE, AND DIFFUSER 失效
公开(公告)号：JPH0960763A
公开(公告)日：1997-03-04
申请号：JP24086295
申请日：1995-08-25
申请人： MOTOYAMA ENG WORKS
发明人： SANAI JIRO , MEGURO TOSHIKATSU , CHIBA YASUHIRO
IPC分类号： F16K47/02 , F16K47/08
摘要： PROBLEM TO BE SOLVED: To reduce the cost, make a regulating valve compact, and further reduce noises. SOLUTION: A cage 17 is arranged in the valve chamber of the casing 11 of a regulating valve 10, and a valve plug 13 is movably provided in the cage 17. The cage 17 has multiple cylinders 31-34 different in diameter, and the cylinders 31-34 are concentrically arranged at intervals. Pressure recovery chambers 35 are formed between the cylinders 31-34. The cylinders 31-34 are provided with many passage holes on walls and many bent members on the outer walls. The bent members bend the flows of a fluid leaked from the passage holes along curved faces. The cylinders 31-34 are made of a punching metal.

99. 发明专利

JPH08315769A TINIEST TRACE OF IMPURITY MEASURING METHOD 失效
公开(公告)号：JPH08315769A
公开(公告)日：1996-11-29
申请号：JP12023995
申请日：1995-05-18
申请人： MOTOYAMA ENG WORKS
发明人： SUGANO YOICHI , UCHISAWA OSAMU , KIYONO FUMIYUKI
IPC分类号： G01N27/62 , H01J49/42
摘要： PURPOSE: To attain a high speed response characteristic by which a trace of impurity can be measured in a short time by measuring a transiently changing trace of gas concentration. CONSTITUTION: A substitutive characteristic when CH4 gas remaining in T-shaped piping 17 of a dead space part is substituted with H2 gas by various purge methods is evaluated. First of all, valves 7, 9 and 11 are opened, and after CH4 gas of 1kgf/cm is introduced to the piping 17, the valves are closed, a next, valves 2, 5, 6, 4 and 13 are opened, and N gas is introduced to an atmospheric pressure mass spectrometer 15. An N2 gas flow rate at this time is set in 1L/min by a mass flow controller 16. Similarly, CH4 is introduced to the piping 17, and after a batch purge, N2 gas is flowed, and is introduced to the mass spectrometer 15, and the CH4 gas concentration is measured. A batch purge of one time is performed in such a way that the valves 7, 9 and 12 are opened, and after pressure of the piping 17 is reduced for five seconds, the valve 9 is closed, and the valves 2, 8 and 10 are opened, and N2 is filled, and the valves are closed. Therefore, concentration change can be detected in a short time.

100. 发明专利

JPH0864490A FLOW RATE CONTROLLER FOR GAS SYSTEM 失效
公开(公告)号：JPH0864490A
公开(公告)日：1996-03-08
申请号：JP32647094
申请日：1994-12-27
申请人： MOTOYAMA ENG WORKS
发明人： UCHISAWA OSAMU , MURAKAMI KOICHI , YAMASHIMA ATSUSHI
IPC分类号： H01L21/02 , G05D7/06
摘要： PURPOSE: To reduce required space for a feed gas system or exhaust gas system by opening a first electromagnetic valve so as to open according to the increase of the flow rate of an operating gas whereby a gas pressure-acting valve is opened at an opening degree corresponding to, a working gas having a high pressure. CONSTITUTION: A gas pressure-acting valve 3 is composed of a drive part 3a and valve body 3b. The upstream side of the body 3b is connected to a P996 gas feed source 4 for an operating gas and the downstream side thereof is connected to a load chamber 1. The drive part 3a is connected to an outlet 6a of a switching valve 6, outlet 7a of other switching vain 7 is connected to an inlet 6b of the valve 6, and electromagnetic valve 12 and pressure regulator 13 are connected to an inlet 6c. An electromagnetic valve 8 is connected to an inlet 7b of the valve 7, and electromagnetic valve 10 and pressure regulator 11 are connected to an inlet 7c. A working gas from the source 14 is distributed to branch flow passages A-C and the passages A-C are provided with electromagnetic valves 8, 10 and 12 and pressure regulators 11 and 13.

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