专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

91. 发明专利

JP2013019732A Differential pressure/pressure transmitter and method of manufacturing the same 审中-公开
标题翻译：差压/压力变送器及其制造方法
公开(公告)号：JP2013019732A
公开(公告)日：2013-01-31
申请号：JP2011152416
申请日：2011-07-11
申请人： Hitachi High-Tech Control Systems Corp , 株式会社日立ハイテクコントロールシステムズ
发明人： SUGIMOTO HIROYUKI
IPC分类号： G01L13/00
摘要： PROBLEM TO BE SOLVED: To optionally set a set value of excessive pressure that a diaphragm of a differential pressure/pressure transmitter reacts to.SOLUTION: A differential pressure/pressure transmitter including a main body 1 having a high pressure-side pressure reception part and a low pressure-side pressure reception part, a pressure sensor 2 installed in the main body 1, a high pressure-side center diaphragm 19 provided to the high pressure-side pressure reception part, high pressure-side fixing metal fittings 7 which have a convex surface, a low pressure-side center diaphragm 20 provided to the low pressure-side pressure reception part, and low pressure-side fixing metal fittings 8 which have a convex surface is configured such that while the convex surface of the high pressure-side fixing metal fittings 7 is pressed against the high pressure-side center diaphragm 19 and the pressing quantity can be varied by a threadable engagement mechanism, the convex surface of the low pressure-side fixing metal fittings 8 is pressed against the low pressure-side center diaphragm 20 and the pressing quantity can be varied by the threadable engagement mechanism.
摘要翻译：要解决的问题：可选地设置差压/压力变送器的隔膜对过压的设定值。解决方案：一种差压/压力变送器，包括具有高压侧受压部和低压侧受压部的主体1，安装在主体1中的压力传感器2，设置在高压侧受压部的侧面中心隔膜19，具有凸面的高压侧固定金属配件7，设置在低压侧受压部的低压侧中心隔膜20，低具有凸面的加压侧固定用金属配件8构成为，在高压侧固定金属配件7的凸面压靠高压侧中心隔膜19的同时，按压量可以通过螺纹接合机构，低压侧固定用金属接头8的凸面压靠在低压侧中心隔膜20上，按压量可以通过螺纹能够参与的机制。版权所有（C）2013，JPO＆INPIT

92. 发明专利

JP2013004578A Apparatus and method for inspecting wafer connection strength 有权
标题翻译：检测波形连接强度的装置和方法
公开(公告)号：JP2013004578A
公开(公告)日：2013-01-07
申请号：JP2011131355
申请日：2011-06-13
申请人： Hitachi High-Tech Control Systems Corp , 株式会社日立ハイテクコントロールシステムズ
发明人： SADA TARO , KOGURE MAKOTO , KOMATSU KENICHI , TAUCHI KAZUHIRO
IPC分类号： H01L21/66 , H01L21/02 , H01L27/12
摘要： PROBLEM TO BE SOLVED: To provide an inspection apparatus that can inspect connection strength of a local connection part without breaking a connecting wafer even in the absence of a clearance in a connection interface.SOLUTION: A wafer connection strength inspection apparatus 100 includes: a sample stage 160 to hold a connecting wafer 200; a terahertz wave generator 151 to generate a terahertz wave; a terahertz wave detector 157 to detect a terahertz wave that transmits through or is reflected from the connecting wafer 200; and an operation part to calculate THz wave characteristics of the connecting wafer 200 from the terahertz wave detected by the terahertz wave detector 157. The operation part calculates connection strength corresponding to the THz wave characteristics of the connecting wafer as an inspection target from a relationship between previously found THz wave characteristics and connection strength of a reference sample.
摘要翻译：要解决的问题：提供一种即使在连接界面中没有间隙的情况下也可以检测局部连接部分的连接强度而不破坏连接晶片的检查装置。解决方案：晶片连接强度检查装置100包括：用于保持连接晶片200的样品台160; 用于产生太赫兹波的太赫兹波发生器151; 太赫兹波检测器157，用于检测通过连接晶片200透射或被反射的太赫兹波; 以及从由太赫兹波检测器157检测的太赫兹波计算连接晶片200的THz波特性的操作部分。操作部分从由连接晶片作为检查对象的THz波特性对应的连接强度由以前发现参考样品的THz波特性和连接强度。版权所有（C）2013，JPO＆INPIT

93. 发明专利

JP2012137912A Instrumentation console 审中-公开
标题翻译：仪表控制台
公开(公告)号：JP2012137912A
公开(公告)日：2012-07-19
申请号：JP2010289348
申请日：2010-12-27
申请人： Hitachi High-Tech Control Systems Corp , 株式会社日立ハイテクコントロールシステムズ
发明人： YOSHII TAKAHIRO , SASAKI MARE
IPC分类号： G05B23/02
摘要： PROBLEM TO BE SOLVED: To provide an instrumentation console capable of displaying a desired trend graph without complicated operation and preventing process data at the occurrence of abnormality from being impossible to be saved by being overwritten.SOLUTION: An instrumentation console 1 is used for a process monitor control system monitoring and controlling process manufacturing devices, and collects and stores process data on the process manufacturing devices. The instrumentation console has feedback control information 13A that is information on the process manufacturing devices and sequence control information 13B that is information on process steps. The instrumentation console receives an alarm from any of the process manufacturing devices, obtains process data 13C on the process manufacturing device generating the alarm and process data 13C on a process manufacturing device relating to the process manufacturing device generating the alarm on the basis of the feedback control information 13A and the sequence control information 13B, and displays the obtained process data 13C as a trend graph 11B.
摘要翻译：要解决的问题：提供一种能够在没有复杂操作的情况下显示期望趋势图的仪表控制台，并且防止异常发生时的处理数据不能被覆盖而被保存。
解决方案：仪表控制台1用于过程监控控制系统监控和控制过程制造设备，并将过程数据收集并存储在过程制造设备上。仪表控制台具有作为关于处理步骤的信息的处理制造装置和顺序控制信息13B的信息的反馈控制信息13A。仪表控制台从任何一个过程制造设备接收报警，在与生成报警的过程制造设备有关的过程制造设备的基础上，获取过程数据13C，生成报警处理制造设备和处理数据13C 控制信息13A和顺序控制信息13B，并将获得的处理数据13C显示为趋势图11B。版权所有（C）2012，JPO＆INPIT

94. 发明专利

JP2011258730A Conveyance apparatus positioning mechanism 审中-公开
标题翻译：输送装置定位机构
公开(公告)号：JP2011258730A
公开(公告)日：2011-12-22
申请号：JP2010131557
申请日：2010-06-09
申请人： Hitachi High-Tech Control Systems Corp , 株式会社日立ハイテクコントロールシステムズ
发明人： MIURA HIROMASA , TAKADA KAZUHIKO , OGUCHI YOSHIAKI
IPC分类号： H01L21/677
摘要： PROBLEM TO BE SOLVED: To facilitate the transportation of a conveyance apparatus during maintenance and also realize positional repeatability at the time of re-installation, while eliminating the need of teaching process for a conveyance robot, thereby reducing the down time of an exposure apparatus and a coater/developer.SOLUTION: A conveyance apparatus positioning mechanism includes: an apparatus fixing base 210; positioning protrusions 8a, 8b and 8c fixed to a lower surface of the apparatus fixing base 210; positioning protrusion receiving parts 7a, 7b and 7c corresponding to the positioning protrusion 8a, 8b and 8c, respectively; a lifting mechanism for moving the apparatus fixing base 210 in the vertical direction; a horizontally moving mechanism for horizontally moving the apparatus fixing base 210; and an operating part for operating the lifting mechanism.
摘要翻译：要解决的问题：为了便于维护期间运输装置的运输，并且在再安装时也实现位置重复性，同时省去了对运输机器人的教学过程的需要，从而减少了运输机器人的停机时间曝光装置和涂布机/显影剂。解决方案：输送装置定位机构包括：装置固定基座210; 定位突起8a，8b和8c固定在装置固定基座210的下表面上; 分别对应于定位突起8a，8b和8c的定位突起接收部分7a，7b和7c; 用于使装置固定基座210沿垂直方向移动的提升机构; 用于水平移动装置固定基座210的水平移动机构; 以及用于操作提升机构的操作部件。版权所有（C）2012，JPO＆INPIT

95. 发明专利

JP2011238423A Signal switching circuit and control method of signal switching 审中-公开
标题翻译：信号切换电路及信号切换控制方法
公开(公告)号：JP2011238423A
公开(公告)日：2011-11-24
申请号：JP2010107927
申请日：2010-05-10
申请人： Hitachi High-Tech Control Systems Corp , 株式会社日立ハイテクコントロールシステムズ
发明人： OKI YOSUKE , ONO KOJI , ITO TAKANORI
IPC分类号： H01H9/54 , H01H47/00
摘要： PROBLEM TO BE SOLVED: To provide a signal switching circuit and a control method of signal switching capable of surely removing non-conducting membrane on a relay contact in the signal switching circuit kept in an immobile state for a long time.SOLUTION: In the signal switching circuit kept in the immobile state for a long time, the method of removing non-conducting membrane on the relay contact is provided by the circuit configured so that current is allowed to flow on the relay contact by switching the relay contact without changing the signal path.
摘要翻译：要解决的问题：提供信号切换电路和信号切换控制方法，其能够可靠地去除长时间保持在不动状态的信号切换电路中的继电器触点上的非导电膜。解决方案：在长时间保持不动状态的信号切换电路中，由继电器触点上除去非导电膜的方法由电路构成，使得允许电流在继电器触点上流动切换继电器触点而不改变信号路径。版权所有（C）2012，JPO＆INPIT

96. 发明专利

JP2011117885A Foreign substance detection method and foreign substance detection device 审中-公开
标题翻译：外部物质检测方法和外部物质检测装置
公开(公告)号：JP2011117885A
公开(公告)日：2011-06-16
申请号：JP2009277213
申请日：2009-12-07
申请人： Hitachi High-Tech Control Systems Corp , 株式会社日立ハイテクコントロールシステムズ
发明人： KOBAYASHI TERUKAZU , OKABE ATSUSHI
IPC分类号： G01N27/62
摘要： PROBLEM TO BE SOLVED: To provide a foreign substance detection method and a foreign substance detection device which can shorten an analytical inspection time while maintaining a high inspection accuracy.
SOLUTION: The foreign substance detection method for detecting foreign substances in an inspection sample based on a sample mass spectrum obtained from the inspection sample and a standard mass spectrum includes: sorting out the sample mass spectrum and the standard mass spectrum by aligning sorting positions and charge ratio sorting widths in a mass-to-charge ratio axis direction over an entire spectrum range from a beginning to an end of a mass-to-charge ratio axis; and comparing a sorted sample mass-to-charge ratio sorting width spectrum and a standard mass-to-charge ratio sorting width spectrum at each corresponding sorting position.
COPYRIGHT: (C)2011,JPO&INPIT
摘要翻译：要解决的问题：提供能够在保持高检查精度的同时缩短分析检查时间的异物检测方法和异物检测装置。解决方案：基于从检查样品获得的样品质谱和标准质谱检测检查样品中的异物的异物检测方法包括：通过排列分选出样品质谱和标准质谱在从质荷比轴的开始到结束的整个光谱范围内，质荷比轴方向的位置和电荷比分选宽度; 并且在每个相应的分选位置比较分选的样品质荷比分选宽度谱和标准质荷比分选宽度谱。版权所有（C）2011，JPO＆INPIT

97. 发明专利

JP2011113161A On-site inspection system 审中-公开
标题翻译：现场检查系统
公开(公告)号：JP2011113161A
公开(公告)日：2011-06-09
申请号：JP2009267090
申请日：2009-11-25
申请人： Hitachi High-Tech Control Systems Corp , 株式会社日立ハイテクコントロールシステムズ
发明人： SASAKI MARE , NISHIYAMA HIDEAKI
IPC分类号： G05B23/02
摘要： PROBLEM TO BE SOLVED: To provide an on-site inspection system which allows inspection work even if an inspection operator understands neither an installation place of inspection target facilities in a plant nor an inspection place in the inspection target facilities, and can prevent the omission of inspection and an inspection mistake. SOLUTION: A portable terminal 2 includes: a function to pinpoint and display places of equipment facilities 5-9 which constitute a manufacturing plant and serve as targets for inspection; a function to pinpoint and display inspection places in the equipment facilities 5-9; and a function to input an inspection result of the equipment facilities 5-9. An on-site inspection management device 1 includes: a function to register the places of the equipment facilities 5-9 displayed on the portable terminal 2; a function to register the inspection places of the equipment facilities 5-9; a function to transmit information about the place of the equipment facilities 5-9 and the inspection place to the portable terminal 2; and a function to receive inspection results from the portable terminal 2. The portable terminal 2 pinpoints the places of the equipment facilities 5-9 and the inspection places with marks and displays them, and displays the places of the equipment facilities 5-9 by a two-dimensional image or a three-dimensional image. COPYRIGHT: (C)2011,JPO&INPIT
摘要翻译：要解决的问题：提供现场检查系统，即使检查人员既不了解检查目标设施在检验对象设施中的检查目标设施的安装位置，也不能检查目标设施的检查场所，即可进行检查工作，并且可以防止省略检查和检查错误。解决方案：便携式终端2包括：定位和显示构成制造工厂的设备设备5-9的位置并用作检查目标的功能; 在设备设备5-9中精确定位和显示检验位置的功能; 以及输入设备设备5-9的检查结果的功能。现场检查管理装置1包括：登记在便携式终端2上显示的设备设备5-9的位置的功能; 登记设备设施5-9的检查位置的功能; 向便携式终端2发送关于设备设备5-9和检查位置的位置的信息的功能; 并且具有从便携式终端2接收检查结果的功能。便携式终端2将设备设施5-9的位置和具有标记的检查位置显示出来，并通过一个显示设备设备5-9的位置二维图像或三维图像。版权所有（C）2011，JPO＆INPIT

98. 发明专利

JP2011039813A Process monitor control system 审中-公开
标题翻译：过程监控系统
公开(公告)号：JP2011039813A
公开(公告)日：2011-02-24
申请号：JP2009187057
申请日：2009-08-12
申请人： Hitachi High-Tech Control Systems Corp , 株式会社日立ハイテクコントロールシステムズ
发明人： NAKAMURA AKIHIRO
IPC分类号： G05B19/05 , G05B9/02 , G05B9/03
摘要： PROBLEM TO BE SOLVED: To provide a process monitor control system which can make the redundancy of the number of lines of a communication line, and can hold data simultaneity that data simultaneously are matched with each other among a plurality of operation monitoring consoles.
SOLUTION: The process monitor control system includes: information processing apparatuses each of which includes an operation monitoring console having a display device and a key input device; a process control apparatus including a programmable controller, an exclusive module for managing execution of process control and a process input/output interface; and the communication line for connecting the information processing apparatuses to the process control apparatus. The exclusive module has a plurality of communication channels for making the communication line redundant. The process control apparatus stores a process control program to be executed by the exclusive module and a ladder program to be executed by the programmable controller, and while performing data communication between the exclusive module and the programmable controller, executes the process control program and the ladder program.
COPYRIGHT: (C)2011,JPO&INPIT
摘要翻译：要解决的问题：提供一种能够使通信线路的线路冗余化的过程监视控制系统，并且可以在多个操作监视控制台之间同时保持数据彼此匹配的数据同时性。过程监控控制系统包括：信息处理设备，每个信息处理设备包括具有显示设备和键输入设备的操作监视控制台; 过程控制装置，包括可编程控制器，用于管理过程控制的执行的专用模块和过程输入/输出接口; 以及用于将信息处理装置连接到处理控制装置的通信线路。专用模块具有用于使通信线路冗余的多个通信信道。过程控制装置存储由专用模块执行的处理控制程序和由可编程控制器执行的梯形图程序，并且在执行专用模块和可编程控制器之间的数据通信的同时，执行过程控制程序和梯形图程序。版权所有（C）2011，JPO＆INPIT

99. 发明专利

JP2011003038A Process monitoring and controlling device 审中-公开
标题翻译：过程监控和控制装置
公开(公告)号：JP2011003038A
公开(公告)日：2011-01-06
申请号：JP2009145896
申请日：2009-06-19
申请人： Hitachi High-Tech Control Systems Corp , 株式会社日立ハイテクコントロールシステムズ
发明人： SATO KAZUHIKO , NAGASAKU RYOTARO , AIKAWA RYUICHI , YOSHII TAKAHIRO
IPC分类号： G05B23/02
摘要： PROBLEM TO BE SOLVED: To provide a process monitoring and controlling device having a process data-storing function which is ready for various kinds of analysis without preliminarily selecting or registering all process data inputted to a control device or the like, the function storing the process data for a long period of time.SOLUTION: The process monitoring and controlling device includes: a control device which executes process control and records process data; a buffer memory which transfers the process data to store them; an auxiliary storage device which stores the process data of the buffer memory in an accumulated-data file, and compresses the information of the accumulated-data file to generate a process data compression file; and an external storage device which accumulates the process-data compression files. In addition, the auxiliary storage device partitions the accumulated-data file into short-time data to generate the process-data compression file.
摘要翻译：要解决的问题：为了提供具有处理数据存储功能的过程监视和控制装置，其准备用于各种分析，而不需要预先选择或注册输入到控制装置等的所有过程数据，存储过程的功能数据长时间。解决方案：过程监控设备包括：执行过程控制和记录过程数据的控制设备; 缓冲存储器，其传送处理数据以存储它们; 辅助存储装置，其将缓冲存储器的处理数据存储在累积数据文件中，并且压缩累积数据文件的信息以生成处理数据压缩文件; 以及累积处理数据压缩文件的外部存储装置。此外，辅助存储装置将累积数据文件分割成短时数据，以生成处理数据压缩文件。

100. 发明专利

JP2010282454A Control information management apparatus for instrumentation system 审中-公开
标题翻译：仪表系统控制信息管理装置
公开(公告)号：JP2010282454A
公开(公告)日：2010-12-16
申请号：JP2009135796
申请日：2009-06-05
申请人： Hitachi High-Tech Control Systems Corp , 株式会社日立ハイテクコントロールシステムズ
发明人： MINAKAMI TAKESHI
IPC分类号： G05B19/05
摘要： PROBLEM TO BE SOLVED: To provide an automatic allocation device for a control terminal, which easily constructs a control function of an instrumentation system.
SOLUTION: A control information management apparatus for the instrumentation system is equipped with: a loop control generation device for generating loop control necessary for constructing a loop control function of the instrumentation system; an operation block generation device for constructing an operation block to be used for loop control; an instrument section information generation device for generating signal allocation of input and output sections related to an instrument name from information stored in an instrument section signal allocation range specification information storage device; an operation block definition information storage device for defining a signal section concerned with an operation block; a control signal allocation information storage device for storing allocation information of a control signal generated by the operation block generation device; and an instrument section signal allocation range specification information storage device for storing user-specified instrument section information generated by the instrument section information generation device.
COPYRIGHT: (C)2011,JPO&INPIT
摘要翻译：要解决的问题：提供一种用于控制终端的自动分配装置，其容易地构建仪表系统的控制功能。解决方案：用于仪表系统的控制信息管理装置配备有：环路控制生成装置，用于产生构成仪表系统的回路控制功能所需的回路控制; 用于构造要用于循环控制的操作块的操作块生成装置; 仪器部分信息生成装置，用于从存储在仪器部分信号分配范围指定信息存储装置中的信息生成与仪器名称相关的输入和输出部分的信号分配; 操作块定义信息存储装置，用于定义与操作块相关的信号部分; 控制信号分配信息存储装置，用于存储由所述操作块生成装置生成的控制信号的分配信息; 以及用于存储由仪器部分信息产生装置产生的用户指定的仪器部分信息的仪器部分信号分配范围指定信息存储装置。版权所有（C）2011，JPO＆INPIT

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式