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    • 2. 发明授权
    • Oxide film forming method
    • 氧化膜成型方法
    • US07064084B2
    • 2006-06-20
    • US10468914
    • 2002-02-28
    • Shingo HishiyaKoji AkiyamaYoshikazu FurusawaKimiya Aoki
    • Shingo HishiyaKoji AkiyamaYoshikazu FurusawaKimiya Aoki
    • H01L21/324
    • H01L21/02238H01L21/02255H01L21/02299H01L21/31658H01L21/31662Y10S438/909
    • To provide a method for the formation of oxide films to form with advantage a high-quality oxide film having excellent uniformity in film thickness and film quality over the entire wafer. The method for the formation of oxide films comprises: the pretreatment process of forming a protective oxide film on the surface of a wafer positioned in a reaction vessel by performing oxidation treatment with radical oxidative species or an atmosphere containing radical oxidative species under depressurized conditions; and the oxide-film-formation process of forming an oxide film on the wafer by performing oxidation treatment at a predetermined temperature under depressurized conditions. The oxide-film-formation process is preferably performed following the pretreatment process in a continuous manner in the reaction vessel in which the pretreatment process is performed. The pretreatment process is preferably performed at a temperature lower than the temperature for the oxide-film-formation process and also preferably performed under depressurized conditions, the level of the depressurization being higher than the level for the oxide-film-formation process. A high-quality gate-insulating film for a transistor chip can be formed according to this method for the formation of oxide films.
    • 为了提供形成氧化物膜的方法,优选形成在整个晶片上具有优异的膜厚度和膜质量均匀性的高质量氧化物膜。 形成氧化膜的方法包括:通过在减压条件下用自由基氧化物质或含有自由基氧化物质的气氛进行氧化处理,在位于反应容器中的晶片表面上形成保护性氧化膜的预处理工艺; 以及通过在减压条件下在规定温度下进行氧化处理,在晶片上形成氧化膜的氧化膜形成工序。 氧化膜形成方法优选在进行预处理工序的反应容器中以连续的方式进行预处理。 预处理过程优选在低于氧化膜形成工艺的温度的温度下进行,并且还优选在减压条件下进行,减压水平高于氧化膜形成工艺的水平。 根据用于形成氧化膜的方法,可以形成用于晶体管芯片的高质量栅极绝缘膜。
    • 5. 发明授权
    • Tandem seal device
    • 串联密封装置
    • US08585060B2
    • 2013-11-19
    • US12743602
    • 2008-11-18
    • Yoji OshiiKoji AkiyamaJoji WatanabeAtsushi Kaneko
    • Yoji OshiiKoji AkiyamaJoji WatanabeAtsushi Kaneko
    • F16J15/34
    • F16J15/342F16J15/004F16J15/3484F16J15/40
    • A mechanical seal device for obtaining appropriate sliding properties under any conditions, such as a pressure of seal is low or high. Both first grooves 463 and second grooves 464 are formed on a sliding face 46 of a stationary ring 46. The first grooves which are not in communication externally and act for reducing contact resistance of a sliding face by a dynamic pressure action when a rotary shaft rotates, the second grooves act for reducing the contact resistance of the sliding face constantly by introducing a pressure from external. Thus, a mechanical seal device which is available to seal sealed fluid under an appropriate dry contact status wherein a sliding face load is reduced in any condition can be provided.
    • 用于在诸如密封压力的任何条件下获得适当的滑动性能的机械密封装置低或高。 第一凹槽463和第二凹槽464都形成在静止环46的滑动面46上。当旋转轴旋转时,不与外部连通的第一凹槽用于通过动压力降低滑动面的接触电阻 ,第二槽用于通过从外部引入压力来不断地减小滑动面的接触电阻。 因此,可以提供在适当的干接触状态下可用于密封密封流体的机械密封装置,其中在任何情况下滑动面负载减小。
    • 6. 发明申请
    • SHAFT SEALING DEVICE
    • 轴封密封装置
    • US20100327533A1
    • 2010-12-30
    • US12667214
    • 2009-01-28
    • Koji Akiyama
    • Koji Akiyama
    • F16J15/34F16J15/16F16J15/40
    • F16J15/3484F16J15/006F16J15/3412F16J15/40
    • A shaft sealing device in which a load acting on a sliding section of the device is reduced to extend the life of the device and which permits no leakage of fluid in a machine to an atmospheric air to eliminate the need of recovery of the fluid. The shaft sealing device has seals arranged in three stages in the axial direction between a seal case and a rotating shaft passed through the inner periphery of the seal case. Of the seals of the three stages, a first-stage seal on the machine's inner side and a third-stage seal on the machine's outer side have a contact type mechanical seal structure in which a rotational sealing element and a stationary sealing element are in close sliding contact with each other. Further, of the seals of the three stages, the intermediate second-stage seal has a contactless mechanical seal structure in which a rotational sealing element and a stationary sealing element are kept by dynamic pressure so as not to be in contact with each other. A high-pressure sealing liquid is supplied by the pressure of fluid in the machine to an annular space surrounded by that portion of the seal case which extends from the first-stage seal to the second-stage seal.
    • 一种轴密封装置,其中作用在装置的滑动部分上的负载减小以延长装置的寿命,并且其不允许机器中的流体泄漏到大气中以消除对流体的回收的需要。 轴封装置具有在密封壳体和通过密封壳体的内周的旋转轴之间沿轴向三级排列的密封件。 在三级的密封件中,机器内侧的第一级密封件和机器外侧的第三级密封件具有接触型机械密封结构,其中旋转密封元件和固定密封元件处于闭合状态 彼此滑动接触。 此外,在三级的密封件中,中间的第二级密封件具有非接触的机械密封结构,其中通过动态压力保持旋转密封元件和固定密封元件以不彼此接触。 高压密封液体通过机器中的流体的压力供应到由从第一级密封件延伸到第二级密封件的密封件的该部分包围的环形空间中。
    • 9. 发明申请
    • Mechanical Seal Device
    • 机械密封装置
    • US20070296156A1
    • 2007-12-27
    • US11667166
    • 2005-10-28
    • Takashi YanagisawaKoji AkiyamaMasanobu ItoMami Uchiyama
    • Takashi YanagisawaKoji AkiyamaMasanobu ItoMami Uchiyama
    • F16J15/34
    • F16J15/3412F16J15/342
    • A mechanical seal device, wherein a rotational seal ring (10) and a stationary seal ring are arranged to face to each other between a rotational shaft and a housing fit together, comprising a rotational seal ring (10) connected to said rotational shaft, having a rotational seal surface (11), and having a plurality of arc-shaped grooves (12) arranged on said rotational seal surface to be in a circular shape around an axis center of said rotational shaft, the grooves being sectionalized by partition walls (13); a stationary seal ring having a stationary seal surface facing to the rotational seal surface (11) of said rotational seal ring (10); a spring for pressing said stationary seal ring against said rotational seal ring; and outlet portions formed on said stationary seal surface of said stationary seal ring and capable of connecting with a fluid supply path for supplying a pressure fluid. In said mechanical seal device, a circumferential direction length (W3) of each of said outlet portions is made to be ½ of a circumferential direction length (W1) of each of said partition walls or longer (W3≧W1/2); and a circumferential direction length (W3) of said outlet portions is made to be shorter than a circumferential direction length (W2) of said arc-shaped grooves (12) (W3
    • 一种机械密封装置,其中旋转密封环(10)和固定密封环被布置成在旋转轴和装配在一起的壳体之间彼此面对,包括连接到所述旋转轴的旋转密封环(10),具有 旋转密封面(11),并且具有设置在所述旋转密封面上的多个弧形槽(12),以围绕所述旋转轴的轴心为圆形,所述凹槽由分隔壁(13 ); 固定密封环,其具有面向所述旋转密封环(10)的旋转密封表面(11)的固定密封表面; 用于将所述固定密封环压靠所述旋转密封环的弹簧; 以及形成在所述固定密封环的所述固定密封表面上并且能够与用于供应压力流体的流体供应路径连接的出口部分。 在所述机械密封装置中,每个所述出口部分的圆周方向长度(W 3/3)被制成每个所述出口部分的圆周方向长度(W 1/2) 的所述分隔壁或更长的长度(W 3 3 = W 1/2); 并且使所述出口部分的圆周方向长度(W 3/3)比所述弧形槽(12)的圆周方向长度(W 2 2 N)短, (W 3< W 2> 2>)。
    • 10. 发明申请
    • Plasma display panel aging method
    • 等离子显示屏老化方法
    • US20060284795A1
    • 2006-12-21
    • US10566156
    • 2005-05-24
    • Koji AkiyamaMasaaki YamauchiTakashi AokiKoji Aoto
    • Koji AkiyamaMasaaki YamauchiTakashi AokiKoji Aoto
    • G09G3/28
    • H01J9/445
    • Disclosed here is a method of aging a plasma display panel. The aging method of the present invention contains a first aging period and a second aging period. In the first aging period, applying voltage Vd1 to at least any one of the scan electrodes, the sustain electrodes, and the address electrodes suppress self-erase discharge that occurs in the wake of aging voltage generated by application of voltage in which the scan electrodes take a voltage level higher than the sustain electrodes. In the second aging period, applying voltage Vd2 to at least any one of the scan electrodes, the sustain electrodes, and the address electrodes suppress self-erase discharge that occurs in the wake of aging voltage generated by application of voltage in which the sustain electrodes take a voltage level higher than the scan electrodes. The above aging method offers a power-efficient aging process with the aging time accelerated.
    • 这里公开了使等离子体显示面板老化的方法。 本发明的老化方法包含第一老化期和第二老化期。 在第一老化期间,对扫描电极,维持电极和寻址电极中的至少一个施加电压Vd1,抑制在通过施加电压而产生的老化电压的后期发生的自擦除放电 电极取高于维持电极的电压电平。 在第二老化期间,对扫描电极,维持电极和寻址电极中的至少任一个施加电压Vd 2,抑制在通过施加电压而产生的老化电压的后期发生的自擦除放电, 电极的电压高于扫描电极。 上述老化方法提供了老化时间加快的功率老化过程。