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1. 发明授权

US08286318B2 Stage apparatus assembling method 有权
标题翻译：舞台装置组装方法
公开(公告)号：US08286318B2
公开(公告)日：2012-10-16
申请号：US12710759
申请日：2010-02-23
申请人： Yasuzo Tanaka , Junpei Yuyama , Mitsuru Yahagi , Hirofumi Minami , Makoto Takahashi , Shinya Ito
发明人： Yasuzo Tanaka , Junpei Yuyama , Mitsuru Yahagi , Hirofumi Minami , Makoto Takahashi , Shinya Ito
IPC分类号： B23Q17/00 , B23P19/00 , A47B11/00
CPC分类号： B41J2/14 , B41J2002/14362 , Y10T29/49778 , Y10T29/4978 , Y10T29/49817 , Y10T29/49895 , Y10T29/49899
摘要： An assembling method that is high in assembly accuracy and easily performed at the actual installation site is provided. In this method, the sub base plates on the sub mounting tables are aligned with respect to a main base plate on a main mounting table at a temporary installation site, and the state thereof is maintained. Then, the main mounting table and the sub mounting tables are separated from each other to be transferred to the actual installation site, and the positioning state is restored at the actual installation site. Since a positional alignment can be performed at the temporary installation site, the work required at the actual installation site can be reduced. Furthermore, since a fine adjustment can be performed at the actual installation site, the accuracy in the positional alignment can be improved.
摘要翻译：提供了一种装配精度高且在实际安装地点容易执行的组装方法。在该方法中，副安装台上的副底板在临时安装位置的主安装台上相对于主基板对准，并且保持其状态。然后，主安装台和副安装台彼此分离，传送到实际安装地点，并在实际安装地点恢复定位状态。由于可以在临时安装地点进行位置对准，因此可以减少实际安装地点所需的工作。此外，由于可以在实际安装地点进行微调，可以提高位置对准的精度。

2. 发明申请

US20100146762A1 STAGE APPARATUS ASSEMBLING METHOD 有权
标题翻译：阶段装置组装方法
公开(公告)号：US20100146762A1
公开(公告)日：2010-06-17
申请号：US12710759
申请日：2010-02-23
申请人： Yasuzo TANAKA , Junpei Yuyama , Mitsuru Yahagi , Hirofumi Minami , Makoto Takahashi , Shinya Ito
发明人： Yasuzo TANAKA , Junpei Yuyama , Mitsuru Yahagi , Hirofumi Minami , Makoto Takahashi , Shinya Ito
IPC分类号： B23P19/00
CPC分类号： B41J2/14 , B41J2002/14362 , Y10T29/49778 , Y10T29/4978 , Y10T29/49817 , Y10T29/49895 , Y10T29/49899
摘要： An assembling method that is high in assembly accuracy and easily performed at the actual installation site is provided. In this method, the sub base plates on the sub mounting tables are aligned with respect to a main base plate on a main mounting table at a temporary installation site, and the state thereof is maintained. Then, the main mounting table and the sub mounting tables are separated from each other to be transferred to the actual installation site, and the positioning state is restored at the actual installation site. Since a positional alignment can be performed at the temporary installation site, the work required at the actual installation site can be reduced. Furthermore, since a fine adjustment can be performed at the actual installation site, the accuracy in the positional alignment can be improved.
摘要翻译：提供了一种装配精度高且在实际安装地点容易执行的组装方法。在该方法中，副安装台上的副底板在临时安装位置的主安装台上相对于主基板对准，并且保持其状态。然后，主安装台和副安装台彼此分离，传送到实际安装地点，并在实际安装地点恢复定位状态。由于可以在临时安装地点进行位置对准，因此可以减少实际安装地点所需的工作。此外，由于可以在实际安装地点进行微调，可以提高位置对准的精度。

3. 发明授权

US08408503B2 Stage apparatus 有权
标题翻译：舞台装置
公开(公告)号：US08408503B2
公开(公告)日：2013-04-02
申请号：US12712566
申请日：2010-02-25
申请人： Yasuzo Tanaka , Junpei Yuyama , Mitsuru Yahagi , Hirofumi Minami , Makoto Takahashi , Shinya Ito
发明人： Yasuzo Tanaka , Junpei Yuyama , Mitsuru Yahagi , Hirofumi Minami , Makoto Takahashi , Shinya Ito
IPC分类号： A47K1/04
CPC分类号： B65G7/04
摘要： A stage apparatus enables easy position alignment at a real installation site. Mounts 25 having sub base plates 21 arranged thereon are provided on carriages 25 and thereby constitute sub mounting tables 20a to 20d; and the mounts 25 are fixed to a main mounting table 10 having a main base plate 11. The positions of main base plate 11 and sub base plates 21 are aligned with each other by adjustment mechanisms 30 provided on the sub mounting tables 20a to 20d. As main positioning members 16 and sub positioning members 241, 242 are arranged on the main mounting table 10 and sub mounting tables 20a to 20d, separation can be performed so that a state of position alignment is restorable. Accordingly, position alignment is easy when assembling after transportation.
摘要翻译：舞台装置可以在真正的安装地点轻松进行位置对准。安装在其上的副基板21的安装件25设置在滑架25上，从而构成副安装台20a至20d; 并且安装件25固定到具有主底板11的主安装台10.主底板11和副底板21的位置通过设置在副安装台20a至20d上的调节机构30彼此对准。由于主定位构件16和副定位构件241,242布置在主安装台10和副安装台20a至20d上，因此可以进行分离，使得可以恢复位置对准的状态。因此，运输后组装时的位置对准容易。

4. 发明授权

US08100524B2 Stage apparatus 有权
标题翻译：舞台装置
公开(公告)号：US08100524B2
公开(公告)日：2012-01-24
申请号：US12712579
申请日：2010-02-25
申请人： Yasuzo Tanaka , Junpei Yuyama , Mitsuru Yahagi , Hirofumi Minami , Makoto Takahashi , Shinya Ito
发明人： Yasuzo Tanaka , Junpei Yuyama , Mitsuru Yahagi , Hirofumi Minami , Makoto Takahashi , Shinya Ito
IPC分类号： B41J2/01
CPC分类号： B65H1/00 , B41J11/06 , B65H2405/312 , B65H2701/11312 , B65H2801/15
摘要： A stage apparatus that achieves a high accuracy in assembling and enables easy work at a real installation site. In a stage apparatus of the present invention, sub rails are arranged on respective sub base plates, which are connected respectively with the first and second main rails on a main base plate to extend the first and second main rails. Accordingly, when the sub base plates are fixed to the main base plate 11 with positional alignment performed therebetween, the accuracy in positional alignment of the sub base plates which has already been fixed to the main base plate is not affected.
摘要翻译：一种在组装中实现高精度并能够在真实安装现场方便工作的平台装置。在本发明的舞台装置中，副导轨布置在相应的副底板上，它们分别与主底板上的第一和第二主导轨连接以延伸第一和第二主导轨。因此，当子基板在其间进行位置对准而固定到主基板11上时，已经固定到主底板的副基板的位置对准精度不受影响。

5. 发明授权

US07671962B2 Spacer forming method and spacer forming apparatus 有权
标题翻译：间隔成型方法和间隔物形成装置
公开(公告)号：US07671962B2
公开(公告)日：2010-03-02
申请号：US10586064
申请日：2005-10-18
申请人： Yasuzo Tanaka , Masao Murata , Junpei Yuyama , Hiroshi Koshina , Hiroto Uchida , Koji Hane , Takanori Tsuji , Mitsuru Yahagi
发明人： Yasuzo Tanaka , Masao Murata , Junpei Yuyama , Hiroshi Koshina , Hiroto Uchida , Koji Hane , Takanori Tsuji , Mitsuru Yahagi
IPC分类号： G02F1/1339 , B41J29/38
CPC分类号： G02F1/1303 , G02F1/13394 , G02F2203/69
摘要： Providing a spacer forming method by which spacers can be securely formed in a predetermined region on a substrate. Ink containing granular spacers is jetted onto a crossing portion of a black matrix 5 in the shape of a lattice. Red pixel R, green pixel G and blue pixel B are formed in the openings of the lattice. The spacer containing ink is jetted onto the spacer forming positions from the nozzle by the ink jetting method. Plural drops of ink 7 are jetted onto each of the spacer forming positions on one of the opposite substrates E. The gap between the opposite substrates E can be securely maintained at a constant for filling with liquid crystal.
摘要翻译：提供一种间隔物形成方法，通过该间隔物形成方法可以在衬底上的预定区域中可靠地形成间隔物。将含有颗粒状间隔物的墨水喷射到格子形状的黑色矩阵5的交叉部分上。红色像素R，绿色像素G和蓝色像素B形成在格子的开口中。通过喷墨法将含有墨的间隔物从喷嘴喷射到间隔物形成位置上。将多个墨滴7喷射到相对的基板E之一上的每个间隔件形成位置上。相对的基板E之间的间隙可以可靠地保持在用于填充液晶的恒定。

6. 发明申请

US20070285609A1 Spacer Forming Method and Spacer Forming Apparatus 有权
标题翻译：间隔成型方法和间隔成型装置
公开(公告)号：US20070285609A1
公开(公告)日：2007-12-13
申请号：US10586064
申请日：2005-10-18
申请人： Yasuzo Tanaka , Masao Murata , Junpei Yuyama , Hiroshi Koshina , Hiroto Uchida , Koji Hane , Takanori Tsuji , Mitsuru Yahagi
发明人： Yasuzo Tanaka , Masao Murata , Junpei Yuyama , Hiroshi Koshina , Hiroto Uchida , Koji Hane , Takanori Tsuji , Mitsuru Yahagi
IPC分类号： G02F1/1339 , B41J29/38
CPC分类号： G02F1/1303 , G02F1/13394 , G02F2203/69
摘要： To provide a spacer forming method by which spacers can be securely formed in a predetermined region on a substrate. Ink containing granular spacers is jetted onto a crossing portion of a black matrix 5 in the shape of lattice. Red pixel R, green pixel G and blue pixel B are formed in the openings of the lattice. The spacer containing ink is jetted onto the spacer forming positions from the nozzle by the ink jetting method. Plural drops of ink 7 are jetted onto each of the spacer forming positions on one of the opposite substrate E. The gap between the opposite substrates can be securely maintained at constant for filling liquid crystal.
摘要翻译：为了提供一种间隔物形成方法，通过该间隔物可以在衬底上的预定区域中可靠地形成间隔物。将含有颗粒状间隔物的油墨喷射到格子形状的黑色矩阵5的交叉部分上。红色像素R，绿色像素G和蓝色像素B形成在格子的开口中。通过喷墨法将含有墨的间隔物从喷嘴喷射到间隔物形成位置上。将多个墨滴7喷射到相对基板E中的一个上的间隔物形成位置的每个上。可以将相对的基板之间的间隙牢固地保持恒定以填充液晶。

7. 发明申请

US20090173278A1 Stage apparatus 审中-公开
标题翻译：舞台装置
公开(公告)号：US20090173278A1
公开(公告)日：2009-07-09
申请号：US11989670
申请日：2007-02-23
申请人： Yasuzou Tanaka , Junpei Yuyama , Mitsuru Yahagi , Hirofumi Minami
发明人： Yasuzou Tanaka , Junpei Yuyama , Mitsuru Yahagi , Hirofumi Minami
IPC分类号： B05C13/00
CPC分类号： H01L21/682 , G03F7/70716 , G03F7/70791 , G03F7/70975
摘要： To obtain a stage apparatus that can be divided for land transportation and can properly treat a substrate to be treated, the present invention provides a stage apparatus including a substrate holding plane which holds a substrate to be treated W, a pair of guide frames (13X) oppositely disposed with the substrate holding plane sandwiched therebetween, a gantry (13Y) which extends over the pair of guide frames (13X) and which is movably held by the pair of guide frames (13X), and a substrate treatment unit (14) which is disposed on the gantry (13Y). The guide frames (13X) each are composed of a connected structure of a main frame portion (15A) which forms a moving path (work region R1) of the gantry (13Y) necessary for the substrate treatment unit (14) to perform a substrate treatment, and a sub frame portion (15B) which is connected to one end portion or both end portions in a longitudinal direction of the main frame portion (15A) and which forms a moving path to a non-work position (non-work region R2) of the gantry (13Y).
摘要翻译：为了获得可以分割用于陆路运输并且可以适当地处理待处理的基板的台架装置，本发明提供了一种台架装置，其包括保持要处理的基板W的基板保持平面，一对引导框架（13X ），所述台架（13Y）在所述一对引导框架（13X）上延伸并且被所述一对引导框架（13X）可移动地保持;以及基板处理单元，其设置在台架（13Y）上。引导框架（13X）各自由形成基板处理单元（14）所需的台架（13Y）的移动路径（工作区域R1）的主框架部分（15A）的连接结构构成，以执行基板处理，以及子框架部分（15B），其连接到主框架部分（15A）的纵向方向上的一个端部或两个端部，并且形成到非工作位置的移动路径（非工作区域 R2）（13Y）。

8. 发明申请

US20090092467A1 Stage apparatus 审中-公开
标题翻译：舞台装置
公开(公告)号：US20090092467A1
公开(公告)日：2009-04-09
申请号：US11989646
申请日：2007-02-23
申请人： Yasuzou Tanaka , Junpei Yuyama , Mitsuru Yahagi , Hirofumi Minami
发明人： Yasuzou Tanaka , Junpei Yuyama , Mitsuru Yahagi , Hirofumi Minami
IPC分类号： H01L21/677
CPC分类号： H01L21/682 , G03F7/70716 , G03F7/70975
摘要： To enable division for transportation and secure proper treatment on a substrate to be treated, the present invention provides a stage apparatus (11) including a substrate holding plane which holds a substrate to be treated, a pair of guide frames (13X1), (13X2) oppositely disposed with the substrate holding plane sandwiched therebetween, and a gantry (13Y) which is movably held on upper surfaces of the pair of guide frames (13X1), (13X2). The stage apparatus (11) is composed of a first structure V1 which includes one guide frame (13X1), a second structure V2 which includes the other guide frame (13X2), and a third structure V3 which includes the gantry (13Y). Thus, even if the stage apparatus is large, since it can be divided into the structures V1 to V3, the stage apparatus can be transported by land. In addition, since there are no joints on a moving path of the gantry (13Y), the stage apparatus can properly treat the substrate without causing deterioration of moving accuracy.
摘要翻译：为了能够进行运输分割并确保正确处理的基板，本发明提供了一种台架装置（11），其包括保持要处理的基板的基板保持平面，一对引导框架（13X1），（13X2））和夹持在基板保持平面之间的相对设置的台架（13Y），可移动地保持在一对引导框架（13X1），（13X2）的上表面上的台架（13Y）。舞台装置（11）由包括一个引导框架（13X1）的第一结构V1，包括另一引导框架（13X2）的第二结构V2和包括台架（13Y）的第三结构V3组成。因此，即使舞台装置大，由于可以分为结构V1〜V3，所以舞台装置能够陆陆运送。此外，由于在台架（13Y）的移动路径上没有接头，所以台架装置可以适当地处理基板而不会导致移动精度的劣化。

9. 发明申请

US20110062641A1 STAGE EQUIPPED WITH ALIGNMENT FUNCTION, PROCESSING APPARATUS HAVING THE STAGE EQUIPPED WITH ALIGNMENT FUNCTION, AND METHOD OF ALIGNING SUBSTRATE 审中-公开
标题翻译：具有对准功能的装置，具有对准功能的装置的处理装置，以及对准基板的方法
公开(公告)号：US20110062641A1
公开(公告)日：2011-03-17
申请号：US12991993
申请日：2009-06-03
申请人： Seiichi Sato , Mitsuru Yahagi , Hirofumi Minami , Kazuhiro Musha , Makoto Takahashi
发明人： Seiichi Sato , Mitsuru Yahagi , Hirofumi Minami , Kazuhiro Musha , Makoto Takahashi
IPC分类号： B25B11/00
CPC分类号： H01L21/68785 , B65G49/061 , B65G49/065 , B65G49/067 , B65G2249/045 , H01L21/68 , H01L21/6838
摘要： There is provided an inexpensive stage which is equipped with an alignment function and is capable of easily performing high-accuracy alignment especially in a θ direction even in case an object to be processed is large in weight. The stage equipped with an alignment function has a stage main body for holding a substrate while leaving a processing surface thereof open to access. The stage is provided with: a suction means capable of sucking that surface of the substrate which lies opposite to the processing surface; a gas supply means for supplying a gas to such a region of the substrate as is other than a portion sucked by the suction means; and a drive means to give a rotating force to the suction means so that the substrate can be rotated on the same plane by causing the suction means to serve as the center of rotation.
摘要翻译：提供了具有对准功能的廉价的台阶，并且能够容易地执行高精度对准，特别是在＆thetas中; 即使在待处理物体重的情况下也是如此。具有对准功能的平台具有用于保持基板的台主体，同时保持其打开以进入的处理表面。该台设置有能够吸附与处理面相对的基板的表面的吸引装置; 气体供给装置，用于将除了由所述抽吸装置吸附的部分以外的气体供给到所述基板的所述区域; 以及驱动装置，用于向抽吸装置施加旋转力，使得通过使抽吸装置作为旋转中心，基板能够在同一平面上旋转。

10. 发明申请

US20110020963A1 METHOD AND APPARATUS FOR MANUFACTURING SOLAR CELL 审中-公开
标题翻译：制造太阳能电池的方法和装置
公开(公告)号：US20110020963A1
公开(公告)日：2011-01-27
申请号：US12865675
申请日：2009-03-27
申请人： Kazuhiro Yamamuro , Seiichi Sato , Mitsuru Yahagi , Junpei Yuyama , Kyuzo Nakamura
发明人： Kazuhiro Yamamuro , Seiichi Sato , Mitsuru Yahagi , Junpei Yuyama , Kyuzo Nakamura
IPC分类号： H01L21/66 , G01R27/08
CPC分类号： H01L31/208 , H01L31/046 , H02S50/10 , Y02E10/50 , Y02P70/521
摘要： A method for manufacturing a solar cell, includes: forming a photoelectric converter which includes a plurality of compartment elements, and in which the compartment elements adjacent to each other are electrically connected; specifying a compartment element having a structural defect in the photoelectric converter; restricting a portion in which the structural defect exists in the compartment element by specifying a defect portion based on a resistance distribution that is obtained by measuring resistances of portions between the compartment elements adjacent to each other; and removing the structural defect by supplying a bias voltage to the portion in which the structural defect exists.
摘要翻译：一种制造太阳能电池的方法，包括：形成包括多个隔室元件的光电转换器，并且其中彼此相邻的隔间元件电连接; 指定在光电转换器中具有结构缺陷的隔室元件; 通过基于通过测量彼此相邻的隔间元件之间的部分的电阻获得的电阻分布来指定缺陷部分来限制其中结构缺陷存在于隔室元件中的部分; 以及通过向存在结构缺陷的部分提供偏压来去除结构缺陷。

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