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    • 2. 发明申请
    • Inductively-coupled toroidal plasma source
    • 电感耦合环形等离子体源
    • US20070145018A1
    • 2007-06-28
    • US11636891
    • 2006-12-11
    • Donald SmithXing ChenWilliam HolberEric Georgelis
    • Donald SmithXing ChenWilliam HolberEric Georgelis
    • B23K9/00
    • H05H1/46H05H2001/4667H05H2001/4682
    • Apparatus for dissociating gases includes a plasma chamber comprising a gas. A first transformer having a first magnetic core surrounds a first portion of the plasma chamber and has a first primary winding. A second transformer having a second magnetic core surrounds a second portion of the plasma chamber and has a second primary winding. A first solid state AC switching power supply including one or more switching semiconductor devices is coupled to a first voltage supply and has a first output that is coupled to the first primary winding. A second solid state AC switching power supply including one or more switching semiconductor devices is coupled to a second voltage supply and has a second output that is coupled to the second primary winding. The first solid state AC switching power supply drives a first AC current in the first primary winding. The second solid state AC switching power supply drives a second AC current in the second primary winding. The first AC current and the second AC current induce a combined AC potential inside the plasma chamber that directly forms a toroidal plasma that completes a secondary circuit of the transformer and that dissociates the gas.
    • 用于解离气体的装置包括包含气体的等离子体室。 具有第一磁芯的第一变压器包围等离子体室的第一部分并且具有第一初级绕组。 具有第二磁芯的第二变压器包围等离子体室的第二部分并且具有第二初级绕组。 包括一个或多个切换半导体器件的第一固态AC开关电源耦合到第一电压源并且具有耦合到第一初级绕组的第一输出。 包括一个或多个开关半导体器件的第二固态AC开关电源耦合到第二电压源,并且具有耦合到第二初级绕组的第二输出。 第一固态交流开关电源驱动第一初级绕组中的第一交流电流。 第二固态交流开关电源驱动第二初级绕组中的第二交流电流。 第一AC电流和第二AC电流引起等离子体室内的组合AC电位,其直接形成环形等离子体,其完成变压器的次级电路并且解离气体。