专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明授权

US5849232A Process for producing highly oriented undrawn polyester fibers 失效
标题翻译：生产高取向未拉伸聚酯纤维的方法
公开(公告)号：US5849232A
公开(公告)日：1998-12-15
申请号：US843009
申请日：1997-04-11
申请人： Takashi Ochi , Akira Kishiro , Mototada Fukuhara , Atsushi Taniguchi , Takeshi Kikutani
发明人： Takashi Ochi , Akira Kishiro , Mototada Fukuhara , Atsushi Taniguchi , Takeshi Kikutani
IPC分类号： D01F8/14 , D01D5/34 , D01F8/04
CPC分类号： D01F8/14 , Y10T428/2929 , Y10T428/2931
摘要： A process for preparing highly oriented undrawn core-sheath type conjugated polyester fibers including the step of spinning a polyester as the sheath polymer and a polymer having a larger gradient of elongational viscosity with the temperature than that of the sheath polymer as a core polymer at a spinning speed of about 4000 to 12000 m/min.
摘要翻译：制备高定向未拉伸芯鞘型共轭聚酯纤维的方法，包括将聚酯作为鞘聚合物进行纺丝的步骤和具有比鞘壳聚合物作为芯聚合物的温度高的伸长粘度梯度的聚合物作为芯聚合物纺丝速度约4000〜12000m / min。

2. 发明授权

US5660804A Highly oriented undrawn polyester fibers and process for producing the same 失效
标题翻译：高取向未拉伸聚酯纤维及其制造方法
公开(公告)号：US5660804A
公开(公告)日：1997-08-26
申请号：US608468
申请日：1996-02-28
申请人： Takashi Ochi , Akira Kishiro , Mototada Fukuhara , Atsushi Taniguchi , Takeshi Kikutani
发明人： Takashi Ochi , Akira Kishiro , Mototada Fukuhara , Atsushi Taniguchi , Takeshi Kikutani
IPC分类号： D01F8/14 , D02G3/00
CPC分类号： D01F8/14 , Y10T428/2929 , Y10T428/2931
摘要： A highly oriented undrawn polyester fiber which is crystalline such that the fiber is capable of exhibiting a diffraction peak observable in a wide angle X-ray diffraction image of the fiber and has a birefringence of 0.015 to 0.05.A process for preparing highly oriented undrawn core-sheath type conjugated polyester fibers including the step of spinning a polyester as the sheath polymer and a polymer having the larger gradient of elongational viscosity with the temperature than that of the sheath polymer at a spinning speed of about 4000 to 12000 m/min.A textured yarn made of said highly oriented undrawn polyester fibers and a process for preparing the textured yarn.
摘要翻译：高度取向的未拉伸聚酯纤维是结晶的，使得纤维能够在纤维的广角X射线衍射图像中观察到衍射峰，并且双折射为0.015至0.05。制备高定向未拉伸芯鞘型共轭聚酯纤维的方法，包括以聚酯作为鞘聚合物纺丝的步骤和具有比鞘壳聚合物的温度高的伸长粘度梯度的聚合物以大约的纺丝速度 4000〜12000m / min。由所述高取向未拉伸聚酯纤维制成的变形纱线和用于制备变形纱线的方法。

3. 发明授权

US09239283B2 Defect inspection method and device therefor 有权
标题翻译：缺陷检查方法及其设备
公开(公告)号：US09239283B2
公开(公告)日：2016-01-19
申请号：US13993888
申请日：2011-11-08
申请人： Toshifumi Honda , Yukihiro Shibata , Atsushi Taniguchi
发明人： Toshifumi Honda , Yukihiro Shibata , Atsushi Taniguchi
IPC分类号： G01N21/00 , G01N21/956 , G01N21/95 , G01N21/88
CPC分类号： G01N21/00 , G01N21/8851 , G01N21/9501 , G01N21/956 , G01N2021/8896
摘要： To process a signal from a plurality of detectors without being affected by a variation in the height of a substrate, and to detect more minute defects on the substrate, a defect inspection device is provided with a photoelectric converter having a plurality of rows of optical sensor arrays in each of first and second light-collecting/detecting unit and a processing unit for processing a detection signal from the first and the second light-collecting/detecting unit to determine the extent to which the positions of the focal points of the first and the second light-collecting/detecting unit are misaligned with respect to the surface of a test specimen, and processing the detection signal to correct a misalignment between the first and the second light-collecting/detecting unit, and the corrected detection signal outputted from the first and the second light-collecting/detecting unit are combined together to detect the defects on the test specimen.
摘要翻译：为了处理来自多个检测器的信号而不受基板高度的变化的影响，并且在基板上检测更多的微小缺陷，缺陷检查装置设置有具有多行光学传感器的光电转换器在第一和第二集光/检测单元中的每一个中的阵列，以及处理单元，用于处理来自第一和第二聚光/检测单元的检测信号，以确定第一和第二聚光/ 第二聚光/检测单元相对于试样的表面不对准，并且处理检测信号以校正第一和第二聚光/检测单元之间的未对准，并且校正的检测信号从第一和第二聚光/检测单元组合在一起以检测试样上的缺陷。

4. 发明授权

US08970836B2 Defect inspecting apparatus and defect inspecting method 有权
标题翻译：缺陷检查装置和缺陷检查方法
公开(公告)号：US08970836B2
公开(公告)日：2015-03-03
申请号：US14235916
申请日：2012-05-14
申请人： Atsushi Taniguchi , Taketo Ueno , Shunichi Matsumoto , Yukihiro Shibata , Toshifumi Honda
发明人： Atsushi Taniguchi , Taketo Ueno , Shunichi Matsumoto , Yukihiro Shibata , Toshifumi Honda
IPC分类号： G01N21/00 , G01N21/95 , G01N21/956 , G01N21/21 , G01N21/88 , G01B11/06
CPC分类号： G01N21/95 , G01B11/0641 , G01N21/211 , G01N21/9501 , G01N21/95607 , G01N21/95623 , G01N2021/8822 , G01N2021/9513 , G02F1/1303 , G02F1/136259
摘要： An invention being applied is a defect detecting apparatus that has: an illuminating optical system with a laser light source for irradiating a sample on whose surface a pattern is formed with light; a detecting optical system with a sensor for detecting light generated from the sample illuminated by the illuminating optical system; and a signal processing unit that extracts a defect from an image based on the light detected by the detecting optical system, in which an amplification rate of the sensor is dynamically changed during a time when the light is detected by the detecting optical system.
摘要翻译：一种应用的发明是一种缺陷检测装置，其具有：具有激光光源的照明光学系统，用于对其表面形成有图案的样品进行照射; 检测光学系统，其具有用于检测由照明光学系统照射的样本产生的光的传感器; 以及信号处理单元，其基于由检测光学系统检测到的光的时间期间传感器的放大率动态地改变的检测光学系统检测到的光，从图像中提取缺陷。

5. 发明申请

US20140268122A1 DEFECT INSPECTION METHOD AND DEFECT INSPECTION DEVICE 有权
标题翻译：缺陷检查方法和缺陷检查装置
公开(公告)号：US20140268122A1
公开(公告)日：2014-09-18
申请号：US14232929
申请日：2012-06-28
申请人： Shunichi Matsumoto , Atsushi Taniguchi , Toshifumi Honda , Yukihiro Shibata , Yuta Urano
发明人： Shunichi Matsumoto , Atsushi Taniguchi , Toshifumi Honda , Yukihiro Shibata , Yuta Urano
IPC分类号： G01N21/95
CPC分类号： G01N21/9501 , G01N21/956 , G01N2201/126 , G01N2201/127 , H01L22/12 , H01L2924/0002 , H01L2924/00
摘要： A defect inspection method and device for irradiating a linear region on a surface-patterned sample mounted on a planarly movable table, with illumination light from an inclined direction relative to a direction of a line normal to the sample, next detecting in each of a plurality of directions an image of the light scattered from the sample irradiated with the illumination light, then processing signals obtained by the detection of the images of the scattered light, and thereby detecting a defect present on the sample; wherein the step of detecting the scattered light image in the plural directions is performed through elliptical lenses in which elevation angles of the optical axes thereof are different from each other, within one plane perpendicular to a plane formed by the normal to the surface of the table on which to mount the sample and the longitudinal direction of the linear region irradiated with the irradiation light, the elliptical lenses being formed of circular lenses having left and right portions thereof cut.
摘要翻译：一种用于照射安装在平面可移动台上的表面图案样品上的线性区域的缺陷检查方法和装置，其具有相对于垂直于样品的线的方向的倾斜方向的照明光，接下来在多个指示从照射光照射的样品散射的光的图像，然后处理通过检测散射光的图像而获得的信号，从而检测样品上存在的缺陷; 其特征在于，所述检测多个方向的散射光图像的步骤是通过椭圆形透镜进行的，所述椭圆透镜在光学轴的仰角彼此不同的垂直于与所述表的表面法线形成的平面的一个平面内在其上安装样品和用照射光照射的线性区域的纵向方向，椭圆形透镜由其左侧和右侧部分切割的圆形透镜形成。

6. 发明申请

US20120092484A1 DEFECT INSPECTION METHOD AND APPARATUS THEREFOR 有权
标题翻译：缺陷检查方法及其设备
公开(公告)号：US20120092484A1
公开(公告)日：2012-04-19
申请号：US13375239
申请日：2010-07-01
申请人： Atsushi Taniguchi , Yukihiro Shibata , Taketo Ueno , Toshihiko Nakata
发明人： Atsushi Taniguchi , Yukihiro Shibata , Taketo Ueno , Toshihiko Nakata
IPC分类号： H04N7/18
CPC分类号： G01N21/956 , G01N21/9501
摘要： To effectively utilize the polarization property of an inspection subject for obtaining higher inspection sensitivity, for the polarization of lighting, it is necessary to observe differences in the reflection, diffraction, and scattered light from the inspection subject because of polarization by applying light having the same elevation angle and wavelength in the same direction but different polarization. According to conventional techniques, a plurality of measurements by changing polarizations is required to cause a prolonged inspection time period that is an important specification of inspection apparatuses. In this invention, a plurality of polarization states are modulated in micro areas in the lighting beam cross section, images under a plurality of polarized lighting conditions are collectively acquired by separately and simultaneously forming the scattered light from the individual micro areas in the individual pixels of a sensor, whereby inspection sensitivity and sorting and sizing accuracy are improved without reducing throughput.
摘要翻译：为了有效地利用检查对象的偏振特性以获得更高的检测灵敏度，对于照明的偏振，需要观察来自检查对象的反射，衍射和散射光的差异，因为通过施加具有相同的光的偏振仰角和波长相同但偏振不同。根据常规技术，需要通过改变极化的多个测量来引起作为检查设备的重要规格的延长的检查时间段。在本发明中，在照明光束横截面的微小区域中调制多个偏振状态，通过分别并且同时形成来自各个像素中的各个微区域的散射光，共同地获得多个偏振光照条件下的图像传感器，从而在不降低生产能力的情况下提高检测灵敏度和分选和尺寸精度。

7. 发明授权

US07796257B2 Measuring apparatus, measuring method, and characteristic measurement unit 有权
标题翻译：测量装置，测量方法和特征测量单元
公开(公告)号：US07796257B2
公开(公告)日：2010-09-14
申请号：US12087663
申请日：2006-12-27
申请人： Yukitoshi Otani , Kazuhiko Oka , Toshitaka Wakayama , Atsushi Taniguchi
发明人： Yukitoshi Otani , Kazuhiko Oka , Toshitaka Wakayama , Atsushi Taniguchi
IPC分类号： G01J4/00
CPC分类号： G01N21/21 , G01J4/04
摘要： A measuring apparatus includes a light intensity information acquisition section 40 that acquires light intensity information relating to a measurement light containing a given band component, the measurement light having been modulated by optical elements included in an optical system 10 and a measurement target (or a sample 100), and a calculation section 50 that calculates at least one matrix element of a Mueller matrix that indicates the optical characteristics of the measurement target based on the light intensity information relating to the measurement light and a theoretical expression for the light intensity of the measurement light. The light intensity information acquisition section 40 acquires the light intensity information relating to a plurality of the measurement lights obtained from the optical system 10 by changing setting of a principal axis direction of at least one of the optical elements. The calculation section 50 performs a carrier amplitude coefficient calculation process, and a matrix element calculation process that calculates the at least one matrix element based on a carrier amplitude coefficient and the theoretical expression for the carrier amplitude coefficient including the at least one matrix element.
摘要翻译：测量装置包括光强度信息获取部分40，其获取与包含给定频带分量的测量光有关的光强度信息，测量光已被包括在光学系统10中的光学元件和测量对象（或样品 100），以及计算部50，其基于与测量光有关的光强度信息和测量光强度的理论表达式，计算指示测量对象的光学特性的Mueller矩阵的至少一个矩阵元素光。光强度信息获取部40通过改变至少一个光学元件的主轴方向的设定来获取与从光学系统10获得的多个测量光有关的光强度信息。计算部分50执行载波幅度系数计算处理和基于载波幅度系数和包括至少一个矩阵元素的载波幅度系数的理论表达式来计算至少一个矩阵元素的矩阵元素计算处理。

8. 发明授权

US5206469A Crash sensor 失效
标题翻译：碰撞传感器
公开(公告)号：US5206469A
公开(公告)日：1993-04-27
申请号：US730680
申请日：1991-07-16
申请人： Masaru Takeda , Akihiko Kuroiwa , Etsujiro Imanishi , Koji Minekubo , Tatsuo Munakata , Atsushi Taniguchi , Kazuyuki Kita , Masaharu Kakiya
发明人： Masaru Takeda , Akihiko Kuroiwa , Etsujiro Imanishi , Koji Minekubo , Tatsuo Munakata , Atsushi Taniguchi , Kazuyuki Kita , Masaharu Kakiya
IPC分类号： B60R21/01 , G01P15/135 , H01H35/14
CPC分类号： G01P15/135 , B60R21/0132 , H01H35/14 , H01H35/145
摘要： The crash sensor of the present invention comprises a magnet, a sensing mass made of a ferromagnetic material and attractable by the magnet, a sleeve made of a paramagnetic material and restricting the movement of the sensing mass in one direction, a pair of strips that make a closed circuit by contact with the sensing mass having moved in one direction and a body fitted with the magnet and housing the sensing mass, the sleeve and the contacts; the crash sensor further comprising a magnetic shield made of a ferromagnetic material and covering the magnet and the body. The magnetic shield forms a closed-type magnetic field by covering the magnet and the body and forms an appropriate magnetic loop in the vicinity of the sensing mass, so that the crash sensor also acts as a magnetic shield to protect itself from being influenced by outside ferromagnetic bodies and makes effective use of the magnetic force of the magnet. The above pair of strips are fitted in the same direction vertically on the inner wall of the body, whereby they do not project out in the axial direction so that the crash sensor can be of a reduced whole length, as well as of smaller outside diameter than conventional crash sensor with its contacts positioned facing each other.
摘要翻译：本发明的碰撞传感器包括磁体，由铁磁材料制成并且被磁体吸引的传感质量块，由顺磁性材料制成的套筒并限制感测体在一个方向上的移动，一对条带通过与感测质量块沿一个方向移动而接触的闭合电路和装配有磁体的主体并容纳感测块，套筒和触点; 碰撞传感器还包括由铁磁材料制成并覆盖磁体和主体的磁屏蔽。磁屏蔽通过覆盖磁体和主体而形成闭合磁场，并在感测质量块附近形成适当的磁环，使得碰撞传感器也充当磁屏蔽，以保护自身免受外界的影响铁磁体，有效利用磁铁的磁力。上述一对条带在主体的内壁上垂直相同的方向嵌合，从而它们不会在轴向方向上突出，使得碰撞传感器可以具有缩短的整个长度以及更小的外径比传统的碰撞传感器，其触点定位为彼此面对。

9. 发明授权

US09182592B2 Optical filtering device, defect inspection method and apparatus therefor 有权
标题翻译：光学滤波装置，缺陷检查方法及其装置
公开(公告)号：US09182592B2
公开(公告)日：2015-11-10
申请号：US13983310
申请日：2012-02-03
申请人： Taketo Ueno , Toshihiko Nakata , Yukihiro Shibata , Shun'ichi Matsumoto , Atsushi Taniguchi , Hiroshi Toshiyoshi , Takuya Takahashi , Kentaro Motohara
发明人： Taketo Ueno , Toshihiko Nakata , Yukihiro Shibata , Shun'ichi Matsumoto , Atsushi Taniguchi , Hiroshi Toshiyoshi , Takuya Takahashi , Kentaro Motohara
IPC分类号： G01N21/00 , G02B26/02 , G01N21/956 , G01N21/95
CPC分类号： G02B26/02 , G01N21/9501 , G01N21/956
摘要： An optical filtering device and an optical inspection apparatus for detecting a defect in a high sensitivity using an optical filtering device which includes a shutter array formed in a two-dimensionally on an optically opaque thin film produced on a SOI wafer and the SOI wafer is removed at portions thereof on the lower side of the shutter patterns to form perforation portions while working electrodes are formed at the remaining portion of the SOI wafer, a glass substrate having electrode patterns formed on the surface thereof and having the shutter array mounted thereon, and a power supply section for supplying electric power to the electrode patterns formed on the glass substrate and the working electrodes of the SOI wafer. And the working electrodes is controlled to cause the shutter patterns to carry out opening and closing movements with respect to the perforation portions to carry out optical filtering.
摘要翻译：使用光学滤波装置来检测高灵敏度的缺陷的光学滤波装置和光学检查装置，该光学滤波装置包括在SOI晶片和SOI晶片上制造的光学不透明薄膜上二维地形成的快门阵列在闸板图案的下侧的部分处形成穿孔部分，同时在SOI晶片的剩余部分处形成工作电极，在其表面上形成有安装有快门阵列的电极图案的玻璃基板，以及电源部分，用于向形成在玻璃基板上的电极图案和SOI晶片的工作电极提供电力。并且控制工作电极以使快门图案相对于穿孔部分进行打开和关闭运动以进行光学过滤。

10. 发明授权

US08885037B2 Defect inspection method and apparatus therefor 有权
标题翻译：缺陷检查方法及其设备
公开(公告)号：US08885037B2
公开(公告)日：2014-11-11
申请号：US13375239
申请日：2010-07-01
申请人： Atsushi Taniguchi , Yukihiro Shibata , Taketo Ueno , Toshihiko Nakata
发明人： Atsushi Taniguchi , Yukihiro Shibata , Taketo Ueno , Toshihiko Nakata
IPC分类号： H04N9/47 , G01J4/00 , G01N21/00 , G06K9/00 , G01N37/00 , G01N21/95 , G01N21/956
CPC分类号： G01N21/956 , G01N21/9501
摘要： To effectively utilize the polarization property of an inspection subject for obtaining higher inspection sensitivity, for the polarization of lighting, it is necessary to observe differences in the reflection, diffraction, and scattered light from the inspection subject because of polarization by applying light having the same elevation angle and wavelength in the same direction but different polarization. According to conventional techniques, a plurality of measurements by changing polarizations is required to cause a prolonged inspection time period that is an important specification of inspection apparatuses. In this invention, a plurality of polarization states are modulated in micro areas in the lighting beam cross section, images under a plurality of polarized lighting conditions are collectively acquired by separately and simultaneously forming the scattered light from the individual micro areas in the individual pixels of a sensor, whereby inspection sensitivity and sorting and sizing accuracy are improved without reducing throughput.
摘要翻译：为了有效地利用检查对象的偏振特性以获得更高的检测灵敏度，对于照明的偏振，需要观察来自检查对象的反射，衍射和散射光的差异，因为通过施加具有相同的光的偏振仰角和波长相同但偏振不同。根据常规技术，需要通过改变极化的多个测量来引起作为检查设备的重要规格的延长的检查时间段。在本发明中，在照明光束横截面的微小区域中调制多个偏振状态，通过分别并且同时形成来自各个像素中的各个微区域的散射光，共同地获得多个偏振光照条件下的图像传感器，从而在不降低生产能力的情况下提高检测灵敏度和分选和尺寸精度。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式